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The top documents tagged [surface micromachined]
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Summary of Introduction MEMS (U.S.) Sometimes Microsystems in Europe. MEMS=MicroElectroMechanical Systems Very broad definition in practice: Mechanical,
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Summary of Introduction
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NTHU PME EDL, Chih-Wei Lin Biomimetic Micro Sensors: Artificial Hair and Flow Sensors Chih-Wei Lin (D937708) NTHU PME Engineering Design Lab
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High Speed Change Redistribution MOS A/D Converter J. McCreary, Prof. Gray - 1974
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Summary of Introduction
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