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The top documents tagged [plasma species]
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SEALING OF POROUS LOW-k DIELECTRIC WITH H 2 /He PLASMA CLEANING Juline Shoeb a) and Mark J. Kushner b) a) Department of Electrical and Computer Engineering
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SEALING OF POROUS LOW- k DIELECTRIC WITH H 2 /He PLASMA CLEANING
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* Work supported by Semiconductor Research Corporation
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Ledvina Et Al 2008
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