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The top documents tagged [generation lithography]
Documents
Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma). 3.Optics (reflection mirrors). 4.Mask (absorber on mirrors)
237 views
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DIRECT ELECTRON-BEAM WRITING WITH HIGH ASPECT RATIO FOR FABRICATING ION-BEAM LITHOGRAPHY MASK
70 views
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Nanoimprint lithography (NIL)
70 views
Documents
Vision to be a leader in science and technology education, knowledge creation and innovation, in an India that is marching towards a just, inclusive and
221 views
Documents
Extreme UV (EUV) lithography
147 views
Documents
Extreme UV (EUV) lithography
114 views
Documents
Nanoimprint lithography (NIL)
91 views
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