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The top documents tagged [generation lithography]
Technology
D&euv lithography final
1.631 views
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Toshitaka Fukushima, Ph.D Fujitsu International Technology Roadmap for Semiconductors 2001
221 views
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DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference Modeling and Simulation ITWG Jürgen Lorenz - Fraunhofer-IISB ITWG/TWG Members H. Jaouen,
215 views
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2 December 2003 – ITRS Public Conference Hsin Chu, Taiwan Modeling and Simulation ITWG Jürgen Lorenz - Fraunhofer-IISB ITWG/TWG Members H. Jaouen, STM
215 views
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DRAFT – Work In Progress - NOT FOR PUBLICATION 13 July 2005 Modeling and Simulation ITWG Jürgen Lorenz – Fraunhofer IISB – chairperson M&S ITWG ITWG Members
218 views
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DRAFT – Work In Progress - NOT FOR PUBLICATION 13 July 2005 1 2005 updates to the Lithography chapter of the ITRS Lithography International Technology
215 views
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Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma). 3.Optics (reflection mirrors). 4.Mask (absorber on mirrors)
235 views
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InTech Nano Imprint Lithography
139 views
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Nanoimprint lithography (NIL) 1.Overview. 2.Thermal NIL resists. 3.Residual layer after NIL. 4.NIL for large features (more difficult than small one)
231 views
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H.-S. Philip Wong, Linda He Yi, Maryann C. Tung, Kye Okabe Dept. Electrical Engineering & Stanford SystemX Alliance Stanford University Physical Layout
219 views
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Part 2 Current State-of-the-Art For Commercial ‘Micro’-Electronic Device Production Silicon Technology and Next Generation Lithography
218 views
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1 Scaling at the End of Moore’s Law David Z. Pan Dept. of Electrical and Computer Engineering The University of Texas at Austin
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212 views
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