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MEMS TECHNOLOGYMEMS TECHNOLOGY
BYS.APPA RAO
MEMS: micro-electro-mechanical systems
Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology.
INTRODUCTION
Same as the process steps used for making conventional electronic circuits
MEMS PROCESSPowerPoint
FABRICATION PROCESS: FABRICATION PROCESS:
CHEMICAL DEPOSITION Chemical vapour deposition
PHYSICAL DEPOSITION Sputtering
DEPOSITION:
Application of photo resist Optical exposure to print an image of the mask
onto the resist Immersion in an aqueous developer solution to
dissolve the exposed resist
LITHIOGRAPHY:
ETCHING:ETCHING:
•DRY ETCHING
•WET ETCHING
Materials are the basic things required to develop micro sensors
Metals Polymers Ceramic materials Semiconductors Composite materials
MATERIALS FOR MEMS:
Process of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices
MICRO MACHINING TECHNOLOGY:
BULK micromachining:
SURFACE micromachining:
LIGA process:
TYPES OF MICROMACHINING:
MEMS ACCELEROMETRER: MEMS ACCELEROMETRER:
CONVENTIONAL ACCELEROMETER SENSOR
• Made of bulky and heavy metal parts• Require high operating voltage/current• Needs careful maintenance • Highly expensive not throwaway type
PIEZO-RESISTIVE ACCELEROMETER:
LAYOUT OF THE RESISTOR:
MASKS that are used 4 ACCELEROMETER:
FABRICATION PROCESS:
Contd….
INTERFACE ELECTRONIC CKT
MEMS ACCELEROMETER
ADVANTAGES:
Significantly lower manufacturing costs
Small inertial mass
Particularly realized in the area of: – sensors – signal switching
TECHNICAL LIMITATIONS:
Imprecise fabrication methods
Expensive and complex packaging
CAD Design tool inaccuracies
APPLICATIONS:
Accelerometers in consumer electronics devices such as game controllers
Communications
biotechnology
FUTURE:
As with all emerging technologies, the MEMS industry had been predicted to revolutionize technology and our lives.
It has the potential to change our daily life as much as computer
THANK YOU!!!
QUIRIES???
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