© 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Mitsubishi IGBT Module - CM450DY-24S 1
DISCLAIMER : System Plus Consulting provides cost studies based on its knowledge of the manufacturing and selling prices of electronic components and systems. The given values are realistic
estimates which do not bind System Plus Consulting nor the manufacturers quoted in the report. System Plus Consulting is in no case responsible for the consequences related to the use which is
made of the contents of this report. The quoted trademarks are property of their owners.
January 2013 – Version 3
Written by: Sylvain Hallereau
21 rue La Nouë Bras de Fer - 44200 Nantes - France
Phone : +33 (0) 240 180 916 - email : [email protected] - website : www.systemplus.fr
© 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Mitsubishi IGBT Module - CM450DY-24S 2
Table of Contents Executive Summary 2
Hypothesis 3
Table of Contents 4
1. Technology Analysis of the module 7
Power Module Dimensions
Power Module Disassembly
Transistors and Diodes
Wire bondings
Cross-section
AlN Substrate
2. Technology Analysis – IGBT Die 21
IGBT Die Dimensions
About the cross-sections
Die Thickness & Gate Contact
IGBT Transistor Cross-section
Dopant profiling of IGBT by SCM
IGBT Transistor Structure
IGBT Back Side SRP depth profile
Mitsubishi CSTBT 6Th generation
Synthesis
3. Technology Analysis – Diode Die 45
4. Manufacturing Process flow 54
IGBT Process Flow
Diode Process Flow
AMB Substrate Process Flow
Module Process Flow
5. Cost Analysis 65
Economic Analysis Hypotheses
5.1 IGBT 67
Component Summary
Wafer Fabrication Unit
Back-End
Yield Summary
Unprobed Wafer Cost
Die Cost
5.2 Diode 80
5.3 Module 93
AMB Substrate Cost
Module Cost
Final Test Cost
Component Cost
5. Selling Price Estimation 104
Selling Price Estimation
Manufacturer Ratios
Manufacturer Price
Glossary 108
Contact 109
© 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Mitsubishi IGBT Module - CM450DY-24S 3
Dual Half Bridge
The CM450DY-24S power module is a
dual half-bridge of 1200V 410A.
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Transistors and Diodes
C2E1
Without the silicone gel on the transistors
C1 E2
G2
E2
E1
G1
IGBT 2
Dio
de
1
Diode 2
IGB
T 1
Metal inserts
in the housing
© 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Mitsubishi IGBT Module - CM450DY-24S 5
IGBT Die
• Die dimensions:
XXmm x XXmm=XXmm²
• Thickness = XXµm
• Bondings diameters: 400µm (x16)
• There is no marking on the die.
• The guard ring prevents from leakage
current.
Guard ring
Gate Pad
Emitter power contact is in aluminum
In orange, the SiN
passivation
Gate Supply
line
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Cross-section Gate
Pad Emitter
Tungsten plug
Contact between the
emitter pad and the silicon
N+ doping
P doping
Trench gate
Pitch between two gates = XXµm
6 dummy pads
between each gate
Pitch between two trenches = XXµm
Cross-section - Trench Gate + dummy gates
The Carrier storage doping
is too weak and is not
revealed.
XXµm
© 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Mitsubishi IGBT Module - CM450DY-24S 7
Topography Image SCM Image
n - substrate
p p p p
n+ n+
Tungsten plug
n+ doping (trench gate)
p doping (dummy gate)
p doping (trench gate)
Trench gate
Pitch between two gates = xx µm
6 dummy gates
- n+ doping depth (trench gate) : xxum
- p doping depth (trench gate) : xx um
- p doping depth (dummy gate) : xx um
n doping (Carrier Storage layer)
p p p p n+ n+
p p p p n+ n+
p
n - substrate
Dopant profiling of IGBT by SCM
N doping (carrier storage) have a rounded shape.
The implantation is probably performed through a mask.
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Trench Gate Connexion
Cross-section tilted view
Polysilicon
Gate trench
Contact between the
polysilicon of the trench
and polysilicon layer
Top view optical Polysilicon details.
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CSTBT Transistor Process Flow 1/2
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Breakdown per process step - Front side 1/2
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Module Cost
• The Module assembled cost is estimated between $XX and $XX according to the yield.
• The added value cost $XX
• The scrap cost (XX%) of the module added value, is the total of all the losses during the assembly and the test.
© 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Mitsubishi IGBT Module - CM450DY-24S 12
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