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A New X-Ray CD-Metrology for Nanostructure BPM Patterns
Asao NakanoVP, X-ray Research Lab.
September 10, 2010Contributors:Dr.Kazuhiko OmoteDr.Yoshiyasu Ito
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HQ, Fab :
Subsidary :
Distrubuter :
USAsales :
BeijingShanghai
RC
SSIRAC
RIT
REHQ Berlin
TokyoYamanashiOsaka
NSIRITE
Rigaku Who?
X-rayDiffractometer
ProtainCrystallography
General PurposeXRF
XRFDisc Analyzer
MetalContamination
µXRR/µXRFInline Monitor
SmartLab XtaLABmini Supermini
3650
Worldwide Largest X-ray Scientific Instrument Company
TXRFV300 MFM65
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Agenda
1.Market Outlook and Background
2.Why X-ray diffraction method for inspection?
3.Grazing Incidence X-ray diffraction
4.Example of Grating measurement
5.Example of DTR measurement
6.Simulation of BPM measurement
7.Summery
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Market Outlook:HDD shipment is projected a healthy increase by the PC & external storage demands
350
300
250
200
150
100
50
2009 2010 2011 2012 201420130
PB s
hipp
ed (K
)
500
400
300
200
100
2009 2010 2011 2012 201420130
PB s
hipp
ed (K
)
Desktop-HDD
PC-SSD
Mobile-HDD
Mobile applicationswill overtake Desktop
Enterprise-HDD
PersonalStorage HDD
ConsumerElectronics HDD
Cloud and External storagein the home will coexist
YearSource: IDC2010,2009
Year
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2008 2009 2010 20122011 2013 20141
10
100
1000
16.384(40nm)
32.768(32nm)
65.536 (27nm)
131.072(22nm)
Den
sity
(Gb)
Source: Forward Insights
Data Flash Density Trend
Year60nm
50nm
40nm
Next NAND Flash Technology
Multi-Chip TSVThickness:20µmDie Stacked:32
(Samsung)
8 layers PrototypeNAND FlashMemory Stack
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10,000
1000
100
10
1
1990 1995 2000 2005 2010 2015
Are
al D
ensi
ty(G
b/in
2 )
Year (Product Available :Mobile)
0.1
MR HeadThin Film Media
PRML Channel etc.
GMR HeadMEPRML Channel
etc.
AFC LMRTMR Head
PMRTFCetc.
CPP GMR
Advanced PMRDTRBPRTAR
60%CGR90%CGR
25%CGR50%CGR
20-40%CGR
Technology and Historical Areal Density Trend
Source:Diskcon-Japan 2010 (HGST)
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New Technology for Higher Density RecordingMagnetic Head Media・Thermally Assisted Recording(TAR)
・Microwave Assisted Magnetic Recording (MAMR)
・Shingled Magnetic Recording(SMR)
・Discrete Track Media (DTM)
・Bit Patterned Media (BPM)
Combination of TAR and BPM is expected to the high density recording of >10Tb/in2
Source: Diskcon-Japan 2010 (Hitachi)
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Low cost patterned media production by duplication
DTM & BPM production
TemplateX10,000? ProductsMaster X10,000?
・Nano structures of the Master and Template should be observed precisely, because finally 100,000,000 of products are duplicated from the Master.
・The duplication process from the template to the products is assumed tochecked at least once by the inspection tool.
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The Metrology for the DTM & BPM inspection
Why X-ray diffraction method for inspection?The possibility to measure < 10nm without standard Non-destructive/non-contact precise inspectionResist pattern measurement is possible without damage
Weak point?
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GI configuration of X-ray Diffraction Measurement
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X-ray Diffraction Intensity Evaluation-1
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X-ray Diffraction Intensity Evaluation-2
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Parameters determinable by X-ray Diffraction Measurement
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Simulation of X-ray Diffraction Intensity Distributions-1
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Simulation of X-ray Diffraction Intensity Distributions-2
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Actual Tool for X-ray Profile Metrology-1
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Actual Tool for X-ray Profile Metrology-2
PerformanceLess than 64nm Half PitchLess than 150nm heightMeasurement area 2-3mm(X) by 1mm(Y)Precision <1nm (3 sigma) Measuring time 100 sec/point
ApplicationLine and Space profile measurement of resist , Si or 6025 Quartz
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Measurement of Standard SiO2 Grating for CD-SEM
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Least Square Fitting of the Grating Profile Parameters-1
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Least Square Fitting of the Grating Profile Parameters-2
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Least Square Fitting of the Grating Profile Parameters-3
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X-ray intensity simulation for metal covered structure
Metal: Ti
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Application for DTM Profile Measurement
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X-ray Diffraction Measurement of DTR Resist PatternSample was provided by Hitachi
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Measured DTM Profiles by X-ray Profilometry
The tool uncertainty(3σ) is simulated as <0.2nm, beyond ITRS2019
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10 11
X-ray Diffraction Measurement of BPM Pattern
Sample rotation are neededaround the reciprocal axis
Average spacing Fluctuation of the spacing
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Simulation of X-ray Diffraction Intensity Distributions from BPM shapes
LB=20nmLT=16nmH =40nm
LB=20nmLT=20nmH =40nm
0 0.2 0.4 0.6 0.8 10
0.1
0.2
0.3
0.4
0.5
0.6
QZ
/ nm
-1
QY / nm-1 0 0.2 0.4 0.6 0.8 1
0
0.1
0.2
0.3
0.4
0.5
0.6
QY / nm-1
QZ
/ nm
-1
LB
LT
H
LB
LT
H
X-ray profilometry can measure the parameters like DTR pattern profiles
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Summary
1. Non-Destructive X-ray profile measurement method is available for BPM.2. The X-ray Profilometry tool exhibit the ability of CDmeasurement with 0.2 nm(3σ) accuracy. This is beyondITRS 2019. 3. X-ray Profilometry dose not needs standard becauseX-ray wave length is determined in the 8 digits.4. Resist pattern is measured without damage comparingto electron beam measurement method (SEM).5. Measurement time is currently 100seconds for 1 point.
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Thank You !