Zyvex Microassembly CapabilityMicro-interferometer

7 July 2005

Matt EllisSenior ScientistJames WyldeApplications Engineer

jwylde@zyvex.com

Outline

Zyvex Corporate Overview

Micro Interferometer Concept

Current Micro Interferometer Demonstrator

Backup Information:

Micro Assembly Capabilities

Micro Assembled Device Reliability

Advantages to Zyvex Microassembled Approach

Zyvex Corporate Overview

• Privately held company founded in 1997

• Located in Richardson, Texas (near Dallas)

• 10 Products• 5 active government grants• Aggressive IP strategy - 18 issued

patents, 46 in process• Headcount: 52 and increasing

— 15 Ph.D.s, 7 M.S.— 33 Engineers, scientists,

technical management• 44,000 sq. ft. facility• Equipment: SEMs (with nano-

manipulators), TEM, AFM, SPM, UHV STM, MEMS motion analyzer, MEMS probing station

Corporate Overview

• Nanomaterials— CNT functionalization— CNT processing

• Microassembly— Assembly of microcomponents (MEMS-based) for integrated microsystems

• Nanomanipulators (S100, F100, A100, L100)— Characterization and manipulation of nanostructures in SEM, FIB, optical

microscopes

Corporate Overview

Assembly Program Overview

NIST-ATP, Five-year (Oct 2001-Dec2006), $25M research award

Title: Assemblers for Nanotechnology Applications and Manufacturing: Enabling the Nanotechnology Era

Zyvex and partners will develop low-cost, computer controlled, microscale assemblers that operate in parallel to assemble three-dimensional, microscale components.

Team consists of Honeywell as our Joint Venture Partner; University of Texas at Dallas, and University of Virginia as sub-contractors.

Example - Micro-assembled Device

Micro Assembled Interferometer

• Small size (1 cm3) self contained micro assembled interferometer that can be used for sub micron positioning (2.5 nm) displacement sensing over ~ 10 mm travel

Design Concept

• Self-contained Unit— Laser, detector, and optics integrated with optics using Zyvex micro-

assembly techniques— Integrated signal conditioning— Small size (integrated unit ~1cm3) / low weight

• Versatility— Small sizes means device can be mounted unobtrusively— No allowance needed for optical cabling, external laser, large control

box, etc— Device can be mounted on moving elements in vibration environment,

reducing need for vibration consideration or large air tables

• Cost target— $3000/axis in development quantities— $2000/axis for production volumes

– With automated assembly and test

Key Features / Advantages

Target Markets / Applications

Key Feature Aerospace Semi-conductor Manufacturing and Automation

Low Weight Space flight (antenna, etc)

Vibration Environments

Low Cost Wafer Dicing Saws Diamond lathes and turning tools

Small Size Antenna positioning Metrology Tools

Optical alignment / lithography tools

Triangulation Detectors Linear displacement

Roadmap

Milestone Date Range / Resolution

Package Comments

Mar 2005 15 mm / 500 nm Breadboard Homodyne micro-assembled optics technology demonstrator

Apr 2005 15 mm / 5 nm “Big Box” Homodyne, demonstrate integrated packaging and E/O

Jul 2005 15 mm / 2.5 nm Butterfly or DIP style

Demonstrate 2xPD or heterodyne architecture, integrated micro-controller

Sep 2005 15 mm / 2.5 nm Custom “Cube” Alpha Release

Fall 2005 Trials and Demonstrations with advance customers

Feedback on specifications, performance, application

• Micro interferometer configuration— Homodyne detection

– Three photodetectors- One for laser diode intensity- Two for quadrature detection

— Signal conditioning in package

System overview

Optics and Electronics

Ceramic PCB with interconnect and signal conditioning electronics

Micro optical bench with detectors, optics, and light source

Micro optical bench

Photodetectors

Micro optical bench

Beam splitters

Laser diode

Fixed mirror

Interferometer Optics

• Micro-assembly of base plate and optics

Test Platform

Zyvex SiOB

External LD

Machined test bench

Initial system tests

• Initial system tests— Machined test bench with

microassembled Si components— Tested with HeNe laser— Tested with 650 nm laser diode— Sufficient fringe contrast available for

counting fringes over 10 mm of travel

Package

Zyvex Can Provide

SiOB / optics

E/O

Micro controller

Optical I/O

Conditioned Signal

Supply

Need Partnership For:

• Technical advice and feedback

• Market acceptance and penetration / application expertise

• Support infrastructure

• Human interface

Thank You

• Feedback

• Questions

• Comments

• Next Steps