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Wireless bio-microsystems platform based on Microfluidic and Microelectronics hybrid Integration Amine Miled and Benoit Gosselin Biomedical Microsystems Lab Electrical and Computer Engineering Department Laval University, Quebec City, Qc Toronto November 25, 2013 CMC Microsystems - MIP User Group Meeting

Wireless bio-microsystems platform based on Microfluidic ......Miled and Gosselin 2013 Biomedical Microsystems Laboratory Page 11 6 7.6 8 9.6 9 0 2 4 6 8 10 12 5 10 15 20 25 ACF volume

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  • Wireless bio-microsystems platform based on Microfluidic and Microelectronics hybrid Integration

    Amine Miled and Benoit Gosselin Biomedical Microsystems Lab

    Electrical and Computer Engineering Department Laval University, Quebec City, Qc

    Toronto November 25, 2013

    CMC Microsystems - MIP User Group Meeting

  • Miled and Gosselin 2013 Page 2 Biomedical Microsystems Laboratory

    Outline

    1.  MIP configuration at Laval University 2.  MIP present applications

    3.  MIP Future Application 4.  Available ressources

  • Miled and Gosselin 2013 Page 3 Biomedical Microsystems Laboratory

    1. MIP Configuration at Laval University

    PXI

    Syringe pump

    Stage

    Computer with labVIEW

    interface

    Camera

    Pressure sensor

    MIP test bench configuration at Laval University

    Microscope

  • Miled and Gosselin 2013 Page 4 Biomedical Microsystems Laboratory

    PXI Cards : •  PXIe-8135 embedded

    controller •  PXI-5114 Digitizer •  PXI-4130 Power SMU •  PXI-7854R R Series •  PXI-4110 Programmable

    DC supply •  ProLight-1101 FPGA

    Module

    Other components :

    •  Harvard Apparatus Pump 11 Pico Plus Elite

    •  Motor Driver

    •  ADSYS Microscopic Imaging Research Station (MIRS)

    •  Objectives x50, x20, x5

    1. MIP Configuration at Laval University

  • Miled and Gosselin 2013 Page 5 Biomedical Microsystems Laboratory

    Syringe Pump

    Flow Meter

    Pressure Sensor

    Controller

    Camera

    Digitizer

    Light Source

    Stage

    Design Under Test

    PXI Embedded Computer

    Source Management

    Unit

    1. MIP Configuration at Laval University

  • Miled and Gosselin 2013 Page 6 Biomedical Microsystems Laboratory

    2. MIP Present Applications

    •  Only the pre-designed example VIs have been tested

    –  GigE Camera Viewer VI –  FPGA Camera Viewer VI

    Lightening problem with MIP: Misalignment

    CMOS Chip Tests

  • Miled and Gosselin 2013 Page 7 Biomedical Microsystems Laboratory

    •  Features of a microelectronic device are clear using GigE camera even with ambient light

    –  However, a wide view of standard chip size was not possible with default objectives

    –  We recommend a smaller objective

    •  Lightening problem due to misalignment even with low objective (x5)

    CMOS Chip Tests (Cont’d)

    2. MIP Present Applications

  • Miled and Gosselin 2013 Page 8 Biomedical Microsystems Laboratory

    •  An ultra-wideband CMOS 180 nm transceiver for low-power bio-monitoring applications

    CMOS Chip Tests (Cont’d)

    2. MIP Present Applications

  • Miled and Gosselin 2013 Page 9 Biomedical Microsystems Laboratory

    Inductive array

    §  Smart research tools to study freely moving animals Multi-Technology Bio-Microsystems Tests

    2. MIP Present Applications

  • Miled and Gosselin 2013 Page 10 Biomedical Microsystems Laboratory

    §  Need for a miniaturized system to address smaller animals §  Envisioned microsystem:

      128 bio-monitoring channels at 20 ksps per ch.

      > 16 optical/electrical stimulation channels

      Embedded microfluidic sensor   Dimensions < 1 cm2, weight < 1g,

    transmission range > 2 meters

    Wideband antenna Secondary coil

    CMOS SOC

    Biocompatible coating •  Matching network

    •  Electrodes •  Fibres

    Multi-Technology Bio-Microsystems Tests (Cont’d)

    2. MIP Present Applications

  • Miled and Gosselin 2013 Page 11 Biomedical Microsystems Laboratory

    6

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    5 10 15 20 25

    Freq

    uenc

    y kH

    z

    ACF volume (ul)

    70.5 63.3

    48.2

    25.36 22.4

    0 10 20 30 40 50 60 70 80 90

    100

    0 2 3 5 9 % o

    f dis

    inte

    grat

    ion

    of E

    lect

    rode

    Time (min)

    Effect of aCSF* within 1.8 ml of DW* with 40 µl of 1 µm microspheres on electrode**

    Limits:

    Starting from 30 µl of aCSF, electrode disintegration becomes more considerable

    * DW: Distilled water , aCSF: Artificial cerebrospinal fluid

    2. MIP Present Applications

    **Miled, M.A; Sawan, M., "Electrode Robustness in Artificial Cerebrospinal Fluid for Dielectrophoresis-Based LoC", IEEE Int. Conf. Engineering in Medicine and Biology, Sep. 2012 (invited)

  • Miled and Gosselin 2013 Page 12 Biomedical Microsystems Laboratory

    1. MIP Configuration at Laval University

    MIP test bench configuration Comparison*

    PXI

    Syringe pump

    Stage

    Computer with labVIEW interface

    Camera

    Pressure sensor

    Microscope

    !

    Microscope

    Camera

    Data acquisition system

    3 channel oscilloscopes

    Syringe and micropump

    2 channel oscilloscopes

    Microfluidic microchannels

    CMOS chip

    Power supplies

    Actel fusion FPGA

    CMOS/uFluidic connections

    *Miled, M.A. ; Sawan, M.; "Dielectrophoresis-Based Integrated Lab-on-Chip for Nano and Micro-Particles Manipulation and Capacitive Detection", IEEE transaction on Biomedical Circuits and Systems, Pages: 120-132, Vo. 6, No. 2, 2012

  • Miled and Gosselin 2013 Page 13 Biomedical Microsystems Laboratory

    1. MIP Configuration at Laval University

    Self Designed MIP test bench configuration* !

    Microscope

    Camera

    Data acquisition system

    3 channel oscilloscopes

    Syringe and micropump

    2 channel oscilloscopes

    Microfluidic microchannels

    CMOS chip

    Power supplies

    Actel fusion FPGA

    CMOS/uFluidic connections

    *Miled, M.A. ; Sawan, M.; "Dielectrophoresis-Based Integrated Lab-on-Chip for Nano and Micro-Particles Manipulation and Capacitive Detection", IEEE transaction on Biomedical Circuits and Systems, Pages: 120-132, Vo. 6, No. 2, 2012

  • Miled and Gosselin 2013 Page 14 Biomedical Microsystems Laboratory

    !!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

    Metal stiffener

    Plexiglass

    Interposer PCB

    284 electrode connections

    Micromanipulator

    Microtube

    Epoxy

    Extendable microfluidic packaging for prototyping purpose*

    14 / 62

    1. MIP Configuration at Laval University

    *Miled, M.A.; Sawan, M.;"High Throughput Microfluidic Rapid Prototyping Packaging Methods for DEP manipulations" , the Journal of Visualized Experiments, In press

  • Miled and Gosselin 2013 Page 15 Biomedical Microsystems Laboratory

    References ……

    Top glass

    PDMS

    Bottom glass

    Tubes

    Syringe

    Epoxy

    PDMS

    Syringe

    System set-up comparaison: (a) Using epoxy, and (b) using PDMS interconnect layer*

    3. MIP Future Applications

    In-channel Liquid Flow Monitoring

    *Miled, M.A.; Sawan, M.;"High Throughput Microfluidic Rapid Prototyping Packaging Methods for DEP manipulations" , the Journal of Visualized Experiments, In press

  • Miled and Gosselin 2013 Page 16 Biomedical Microsystems Laboratory 16

    (a) L-shape electrodes (b) Mixing electrodes*

    (a) (b)

    The detected variation of capacitance is 1.06 pF with PCB board based circuit**

    3. MIP Future Applications

    In-channel Liquid Flow Monitoring (Cont’d)

    * Miled, M.A.; El-Achkar, C.M. ; Sawan, M., "Low-voltage dielectrophoretic platform for Lab-on-chip biosensing applications", IEEE Int. NEWCAS, pp. 389 -392, May. 2010.

    ** Miled, M.A.; Sawan, M., "Reconfigurable dielectrophoretic device for neurotransmitters sensing and manipulation ", IMS3TW 2009, pp. 1 - 4, Jun. 2009

  • Miled and Gosselin 2013 Page 17 Biomedical Microsystems Laboratory

    17

    Flat dropTop glass plate

    Bottom glass plate

    Ef Ef

    Circular dropTop glass plate

    Bottom glass plate

    Ef

    Flat dropTop glass plate

    Bottom glass plate

    Ef Ef

    Circular dropTop glass plate

    Bottom glass plate

    Ef

    GND

    Capacitive sensor

    Epoxy Particle

    Bottom glass plate

    Detection area Manipulation area

    High sensitivity capacitive detector

    Monitoring electrical circuit

    Detection primary results

    Electrical field propagation in the

    LoC

    Manipulation principle

    17

    3. MIP Future Applications

    High Throughput Microfluidic Design Test

  • Miled and Gosselin 2013 Page 18 Biomedical Microsystems Laboratory

    Available ressources

    In addition to CMC ressources:

    https://wiki.gel.ulaval.ca/index.php/EmSYSCAN

  • Miled and Gosselin 2013 Page 19 Biomedical Microsystems Laboratory

    Financial Support

    Oxy'nov Inc.