WHEN THIN FILM MATTERS PVD SYSTEMS

www.polyteknik.com

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WHEN THIN FILM MATTERS

Polyteknik AS is a PVD equipment manufacturer with an innovative and best service approach. With more than twenty years in business, a global reference list, and an excellent platform of technology, Polyteknik AS has turned to be an appreciated partner in the thin film industry.

POLYTEKNIK AS

PVD SYSTEMS

The portfolio of platform systems range from small scale R&D to high volume or large area deposition systems. Polyteknik AS cover several deposition processes including sputtering, evaporation, and varieties of these. At Polyteknik AS you will meet a dedicated team interested in a strong cooperation towards the best solution. We offer both standard systems and joint customer developed systems for specific purposes.

Our reliable PVD systems are featuring:• Modular standard systems • Modular process packages• Modular investment platforms

HISTORY

Director and Owner, Jens William Larsen (M.Sc.) founded Polyteknik AS in 1995. During the years, we have grown from being a local oriented supplier of thin film deposition service, to an internationally working supplier of PVD systems and services. Thin film coating service was the basis on which Polyteknik AS was founded and from 2005 the PVD equipment manufacturing was taken on as well. The main activities from then on has been related to the equipment manufacturing and the efforts to further develop the knowhow and technology platforms.

FLEXIBILITY – RELIABILITY – KNOWHOW – DEDICATION

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RELIABLE SOLUTIONS & SUPPORTFOR

YOUR THIN FILM PRODUCTION

MORE THAN 20 YEARS OF EXCELLENCE

IT'S A PARTNERSHIP

At Polyteknik AS we see our customers and our collaboration with you as our most valuable asset.

Our platforms are developed in a close collaboration with our customers - solving a challenge or a need, which add value to your business.

The knowledge and experience gained through more than 20 years of cooperation in challenging projects within thin film technology is the core of our platform solutions today.Our core values are

WE develop and grow with you!

FACTS• 2000m2 facility located close to Aalborg, in the nothern part of Denmark• In-house workshop with high quality welding and machining• Class 1000 clean room for test and assembly of PVD Systems• Material characterisation lab for thin film analysis• Highly qualified teams of scientists, process and mechanical engineers• A strong team of experienced and skilled craftsmen

RELIABLE SOLUTIONS & SUPPORTFOR

YOUR THIN FILM PRODUCTION

FLEXIBILITY

RELIABILITY

KNOWHOW

DEDICATION

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THE MOST FLEXIBLE 200MM PLATFORM

DRIVEN BY UNIQUE PROCESSES

• High temperature deposition (1000 °C)• Epitaxial Growth• Highly ionised sputtering• Glancing Angle Deposition• Combined evaporation and sputtering• Integrated advanced thin film analysis

BROAD MARKET APPLICATION

• Semiconductor and MEMS• Automotive & Power electronics • Optical sensors and communication• BAW/SAW devices• Advanced packaging • LED, HB-LED, OLED • Photovoltaics R&D

With the aim of designing the most flexible PVD production tool the Flextura PVD platform was born. The Flextura platform of PVD systems from Polyteknik AS is unveiling a new way of modular thinking for PVD systems. From the single chamber with classic PVD processes to the efficient cluster systems with highly advanced PVD processes, the Flextura way of thinking is giving you the possibility to let the investments follow increasing demands of your facility. The Polyteknik Flextura systems are highlighting a unique combination of high quality components, intelligent software, and a straightforward user-friendly operation.

FLEXTURA PVD PLATFORM

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MODULARITY OF THE FLEXTURA PVD PLATFORM

FLEXIBLE PRODUCTIONFLEXIBILITY AND PREPARED FOR THE FUTURE

• Wide range of processes: DC, Pulsed DC, HiPIMS, RF, and MF• Sputtering of metals, dielectrics, oxides, and nitrides• Ideal for reactive sputtering and true co-deposition from multiple targets• Single wafer or batch process• High quality, high uniformity layers• Scalable capacity from medium to high volume production for low Cost of Ownership• Very small footprint and a clean design• Strong reliable 24/7 production tools• Fully automated process control with advanced data logging• SECS/GEM, MES integration optional

The Flextura Sputter module was originally designed with flexibility and medium volume sputtering processes in mind. Meaning multiple smaller targets to limit the capital binding in noble target materials. The typical application could be as a batch process, but the compatibility with the Flextura Cluster platform also opens to upgrade to a fully automated cassette-to-cassette operation following any increased need of capacity.

The Sputter modules of the Flextura PVD platform handles sputtering processes from standard metallisation or electrode layers to reactive sputtering of AlN, TCOs or even ternary alloys.

FLEXTURA SPUTTER

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FLEXIBLE PROCESSES

The Flextura Evaporator covers a range of evaporation processes and combinations here-of including e-beam, resistive evaporation as well as ion beam assisted deposition (IBAD). Though not well known as a process in connection with a cluster tool, the Flextura Evaporator modules can be connected to the Flextura Cluster platform for single substrate processing of advanced processes such as high temperature epitaxial growth (still mainly R&D), or production of GLAD films – directly from cassette.

The Evaporator modules are perfect for very high uniformity depositions in SAW/BAW devices, metallisation processes in semiconductor, LED and MEMS production as well as deposition of metals and dielectrics in optoelectronics. Furthermore, it offers extended throw option for high volume lift-off processes.

FLEXIBILITY AND RELIABILITY IS THE KEY!

• New clean design and smaller footprint • Various processes:

• E-beam – single or dual – multi pocket sources • Thermal evaporation • E-beam + Thermal evaporators • Ion beam assisted deposition (IBAD)

• High quality, high uniformity layers• Extended throw for high volume lift-off• Single wafer, planar or dome fixtures• Scalable capacity from medium to high volume production for low Cost of Ownership • Strong reliable 24/7 production tools • Fully automated process control with advanced data logging • SECS/GEM, MES integration optional

ADVANCED PROCESS CONTROL

• RGA for process control and dynamic in-situ regulation in reactive process • QCM – single or multi crystal thin film monitors • OTM (Optical Thickness Monitor) • Broad band optical monitoring with dynamic in-situ re-optimisation for use in optical coatings

FLEXTURA EVAPORATOR

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PROCESS MODULES

• High temperature deposition chamber up to 1000°C • Increased layer quality• Epitaxial growth

• HiPIMS sputtering (highly ionised) chamber • High aspect ratio metallisation• Layer property tuning

• Direct magnetron sputtering (DC, RF and pDC)• Multi-magnetron chamber (Co-sputtering)• Fully automated glancing angle deposition on 200mm wafers• E-beam evaporation• RF/ICP etch, degass, cooling, alignment station• Single wafer or batch processing directly from cassette-to-

cassette

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FLEXIBLE INVESTMENT

VOLUME PRODUCTION APPLICATIONS

• High yield production by PVD: Metallisation, TCOs, AlN, optical reflectors and absorbers

• Proven reliable wafer handling by Brooks MAG7 robot• Cassette-to-cassette, wafer slot integrity, wafer mapping• Glancing Angle Deposition on wafers in mass production

scale (GLAD)• Advanced high temperature PVD processing of non-standard

semicon solutions• Multi magnetron chambers for true co-deposition• Automatic loading to batch fixture• Bottom-up or top-down processing• SEGS/GEM Interface option

The Flextura Cluster platform is unveiling a new way of modular thinking of PVD systems – Flexible production and prepared for the future. The Flextura PVD platform is truly almost Plug&Play and you may add process modules as your need for capacity or new processes increase. The modules function as stand alone units – see Flextura Sputter or Flextura Evaporator – which may be connected to a Flextura PVD Cluster.

FLEXTURA CLUSTER

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SPECIALISED APPLICATIONS• Process frame for epitaxial growth of thin films at elevated temperatures up to 1000°C • High Pressure RGA for dynamic in-situ regulation in reactive sputtering process• Plasma Emission Monitoring (PEM) for in-situ dynamic regulation of flow or power to achieve

controlled stoichiometry, and deposition rate in especially reactive sputtering processes• HiPIMS sputtering for highly ionised deposition • Electrostic chuck (ESC) with backside gas for substrate cooling or heating, RF/DC bias option • Market leading process software technology for accurate real time control of deposition

UNIQUE PROCESS CONTROL WITH CRYOSOFT

• Generic in-house developed software• Very user-friendly – simple to operate• Multiple user levels• Recipe based processing

• Save, load, edit recipes• Multilayer or multiprocesses• Individual or batch recipe

• Fully automatic or semi-automatic mode • Advanced datalogging of all process parameters• System status – integrated feedback from components• Remote system monitoring or operation• SECS / GEM interface option• Integration with almost any MES system

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MODULAR SOFTWARE PLATFORM

HIGH TEMPERATURE EPITAXIAL GROWTH PLATFORM

GLANCING ANGLE DEPOSITION ON 200MM WAFERS

FROM PROOF OF CONCEPT TO VOLUME PRODUCTION

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A SPUTTERING WORKHORSE

PROCESSES

• Single or dual side sputtering• DC, RF, pDC or HiPIMS• Typical configuration: 2-8 magnetrons• Plasma cleaning• Single or multilayer deposition without breaking vacuum

APPLICATION AND CAPACITY

• Versatile development tool and medium volume production tool

• Fantastic for non-wafer based sputtering applications• Proven volume production of QCM biosensors and

biomedical electrodes• Medium volume EMI-on-package shielding (e.g.

multilayer SS-Cu-SS coating)• Substrate plate or fixture up to Ø500 mm• Smart fixture system designed for dual side sputtering

with built-in custom masking for electrode deposition

A true workhorse for medium volume sputtering. The Discovery platform is a typical batch system with single or dual side sputtering – perfect for deposition of electrodes on temperature sensitive piezoelectric materials, biosensors etc.

The Discovery platform is a box coater type of deposition system with great flexibility with regards to processes, throughput and substrate handling. It has many years of proven 24/7 production within deposition of electrodes and barrier layers. Sputter sources can be mounted from both top and bottom in the chamber and the substrate fixture/plate is mounted in the retractable door (drawer) with rotation around the z-axis. Possibility of dual side sputtering is a rather unique feature which is highly beneficial with respect to e.g. wrap-around electrodes in volume production of QCM biosensors and through hole electrode coating.

DISCOVERY

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MULTIPLE PROCESSES IN ONE SYSTEM

EXPLORER - A SPLIT CHAMBER SYSTEMThe Explorer platform series covers a range of split chamber systems with a number of benefits counting among other very flexible and easy substrate loading/mounting, separated process and loading chamber, fast pump down (load lock benefits).

A valuable tool for development or pilot line to medium volume production.The platform has existed for more than 10 years – now in a new updated design!

BENEFITS

• Short pump down for a batch process• No oxidation of sensitive target or evaporation material• Multiple process combinations

• Ebeam evaporation• Thermal evaporation • Sputtering• Griddles ion source (IBAD)

• Standard batch capacity• 6 pcs 150mm wafers• 8 pcs 100mm wafers• 40 pcs 50mm wafers

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ENDLESS VERTICAL SPUTTERING

NUMEROUS BENEFITS

• Modular design• Short pump down times• High uniformity coating• Vertical sputtering• Limited pinhole defects• High volume – Large area manufacturing

PROCESSES

• Sputtering of metals and dielectrics• Controlled reactive sputtering• Proven through hole deposition on large area• DC/RF/Bipolar/HiPIMS• Up to 6 linear magnetrons• Dual side sputtering• Plasma cleaning and degassing

TYPICAL APPLICATION AREAS

• Sheet coating (standard up to 650 x 650mm)• Sheet coating (extended up to 650 x 3000mm)• MEMS and Piezo sensor fabrication• AR and high reflective mirror coatings• Battery, Fuel cell and TEG production• Membranes and solar absorbers

A vertical sputtering platform for single or dual side deposition on substrates or multi-substrate fixtures up to 650x3000mm. The system is a modular system comprised of minimum one process chamber and a load lock. The throughput can gradually be increased by adding automatic multi-substrate loading magazine (10 pcs) or upgrading to a fully in-line production plant.

For substrates up to 650x650mm it is available with active substrate cooling, a proven high aspect ratio sputtering process combining HiPIMS and biasing for through hole metallisation on temperature sensitive piezo ceramic composites.

INFINITY SYSTEMS

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SPECIALISED APPLICATONS

TURNKEY SYSTEMS

• From proof-of-concept to volume production• Roll-to-roll (batch or air-to-air)• Tube coating (internal and external)• Integration of in-situ analysis for dynamic process

control• Process verification and characterisation

ROLL-TO-ROLL

• Modular roll-to-roll platform• Linear or drum design

• Substrates: Metals, polymers, textiles etc.• Special substrate: Silicone web• Foil width: 40-1200mm• Transparent conductive oxides• Metallisation, electrode layers• Semiconducting oxides

TUBE COATING

• In-line CSP absorber tubes• Multilayer optical absorber coating• Up to 3m tubes – variable diameter• Automated process

• Internal tube coaters• Accelerator and synchrotron components• Up to 3m tubes

The engineering and process teams at Polyteknik AS are ready to take care of your non-standard coating challenge. Polyteknik AS posses more than 10 years of experience with roll-to-roll sputtering processes including turnkey system deliveries, various proof of concept projects and funded European projects like Roll-OUT. This ensures a specialised knowledge within up-scaling of advanced deposition processes – ensuring high reliability, high quality and optimised throughput of the production line.

CUSTOM COATING SYSTEMS

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POLYTEKNIK ASMoellegade 21DK9750 OestervraaDenmark

PHONE: +45 9689 2800 EMAIL: sales@polyteknik.dk

WEB: www.polyteknik.com

MADE IN DENMARK