UMC 0.18µm radiation hardness studies Progress since last Collaboration Meeting Sven Löchner

Experiment Electronics

UMC 0.18µm radiation hardness studies

Progress since last Collaboration Meeting

Sven LöchnerGSI Darmstadt

15th CBM Collaboration MeetingApril 13th, 2010

April 13th, 2010 15th CBM Collaboration Meeting - Sven Löchner 2Experiment Electronics

AgendaAgenda

• GRISU Project - Reminder– ASIC– Single Event Effects Testing site– Microprobe Testing site– Total Ionising Dose Testing

• Progress / News since last Collaboration Meeting– TID– SEE– Microprobe

• Summary


Reminder: GRISU projectReminder: GRISU project

Project objectives: Characterisation of UMC 0.18µm CMOSprocess concerning :• Vulnerability against Single Event Effects (SEE), especially

Single Event Upsets (SEU) and Single Event Transients (SET)– SEU cross section for different Flip-Flop designs and layouts– SET sensitivity of the UMC 0.18µm process – Critical Linear Energy Transfer (LETcrit )

• Single Transistor measurements– Comparison of transistor models by simulation– Total Ionising Dose (TID)

Characterisation of the UMC 0.18µm process under irradiation• leakage currents• threshold shifts,• annealing


GRISU test ASICGRISU test ASIC

Test structures for TID

measurements

Test structures for SEU measurements

Test structures for SET measurements, Qcrit

Ring oscillator for TID / SEU measurements

GRISU chip

• UMC 0.18µm process

• 1.5 x 1.5 mm²

• 64 pads– 28 core pads– 36 pads


Low Energy testing siteLow Energy testing site

• Installation of a test facility for ASIC irradiation with heavy ions at X6 cave at GSI (in cooperation with bio physics group)

• Beam monitoring via ionisation chamber

• Dosimetry setup available• Irradiation of DUT in air• Testing parameters:

– 11.4 MeV/u

– LET in the range of 1...62 MeV·cm2/mg (SiO2)

– 103…1012 ions / (cm2 s)

– 50mm beam size


Microprobe testing siteMicroprobe testing site

Setup of a single hit heavy ion test environment for ASIC

irradiation (micro beam test line)

• possibility of a localised radiation of the DUT

• resolution: ~500nm

• scanning area: down to 10x10µm²

• energy of ions: 4.8 MeV/u

First results from Xe-132 test:

• plot shows overlay of detected ion positions (3) which triggered an SET and chip layout

SET homogeneity map of ASIC


TTotal otal IIonizing onizing DDose (TID) testsose (TID) tests

• TID testing with X-rays– Irradiation facility at Institute for Experimental Nuclear Physics,

University of Karlsruhe– 60keV X-ray, 40...240krad/h

• GRISU chips tested– Total dose between 320krad and 1000krad(SiO2)

– Operating dose rate between 80krad/h and 230krad/h– Measurements: leakage current, threshold shift, transition times, total

power consumption, annealing, … of non-hardened digital library

Leakage current of ESD protection diodes increased by factor of 100 Average core current increased by factor 2 (after 600krad) Transition times of ring oscillator inverters decrease (changing of

NMOS / PMOS ratio) Good annealing performance


Progress (since last meeting)Progress (since last meeting)

TID testing with X-rays

Due to a miscalibration of the X-ray system at Karlsruhe:

dose rate was only ~40% than displayed by the diagnostic system(wrong for all measurements between 2008 and 2009)

all results are now updated Cadence simulation models (for different dose levels) still need

to be updated

No influence on annealingStill good annealing performance



SEE testing

• 7 irradiation tests so far– C-12, Ar-40, Ni-58, Ru-96, Xe-132– final dosimetry for Ar-40 and Ru-96 run are not yet done

• problems with the “old” GSI scanning electron microscope (SEM)

• now scheduled with new system for end of April

All Cross section measurements will then be updated



Microprobe testing

• 2nd testing with the GSI microprobe system (Au-197 run 02/2010)– Improve of the spatial resolution– First results are combined together with ASIC layout

D-FlipFlop with additional buffersPosition of triggered SEE events – DFF loaded with „0“Position of triggered SEE events – DFF loaded with „1“Overlay of both triggered events

Redundant layout structures should keep at least 1um apart


Work progress at GSI so far…Work progress at GSI so far… Development of a UMC 0.18µm Test-ASIC (GRISU) Installation of testing site for SEE measurements Installation of a micro beam testing site for single ion hit

measurements TID testing of the UMC 0.18µm process at Karlsruhe

Still to do: TID irradiation with low dose rates Long term test with gamma source (for example Co-60) Neutron test “On hold”: 3rd iteration of GRISU test ASIC “on hold

• Triple redundant test structures (for SEU / SET improvement)• Test circuits for SET suppression• Re-design of the DICE layout cells (decrease SEU cross-section)

Right now nothing is contradicting against the UMC 0.18µm process


Additional Talks & DocumentsAdditional Talks & Documents

Reference to further talks:• EE-Gruppenmeeting (7.7.2008)

GRISU Statusreport

• CBM-XYTER Family Planning Workshop (5.12.2008)UMC 0.18μm radiation hardness studies

• IT/EE-Palaver (20.1.09) Untersuchung von Strahlungseffekten in anwendungs- spezifischen

integrierten Schaltungen (ASIC) Strahlungseffekte

• 13th CBM Collaboration Meeting (12.3.2009)Radiation hardness studies - Update

• EE-Gruppenmeeting (29.6.2009)GRISU Microbeam Irradiation

• 14th CBM Collaboration Meeting (7.10.2009)UMC 0.18μm radiation hardness studies - Update

Link: http://wiki.gsi.de/cgi-bin/view/EE/GRISU