The TrimSmart™ LT2100

Thick Film Hybrid Trim System

GSI Lumonics

Semiconductor & Microelectronics

We turn roadmaps into reality.™

What is Laser Trim?

Laser Trim is a safe, highly accurate micromachining

technique which can be used to fine-tune electronic

circuits, components, and ICs.

GSI Lumonics provides a range of TrimSmart™ laser

trim solutions.

Introducing the TrimSmart™ LT2100

The ideal solution for trim and test of thick film components and circuits, including PCBs, SMT components, and hybrids.

Design guided by our customers.

TrimSmart™ LT2100

Versatility to Address a Wide Range of Trim

and Micro-Machining Applications

Fully Integrated Test Functions for Fast and

Accurate Measurement.

Powerful Pattern Recognition for High-Speed

Precision Beam Positioning.

Enhanced Windows 2000® Operating System

for Easy Application Programming and Factory

Automation System Integration.

Utilizes VXI Architecture and Supports GPIB

and Other Interfaces for Custom

Instrumentation Capabilities.

Advanced Diode Pumped Laser Processing in

IR or Green Wavelengths for Demanding Trim

& Micro-Machining Applications

Laser Trim System

LT2100 – Advancements In Design

Modular System Design Allows for Field Upgrades and Application Changes – Includes Cutting Lenses, Lasers, and Laser Wavelengths

Windows 2000 Software Platform

Stiffer Frame for Greater Process Stability

Smaller Footprint for Decreased Facility Costs

Larger Work Area – Able to Process Devices up 10” x 12” in Size

New Heavy Duty Z Stage – Able to Handle Higher Probe Forces and Larger Parts

Motorized Z-adjustable Probe Frame – Computer Controlled Probe Height and Step Adjustment for Greater Probing Precision

New Beam Box – Modular, Multi-Wavelength Changeover for Greater Application Flexibility

Rotary Polarizer Laser Control for Greater Precision and Stability

Three Cutting Lenses to Choose From - 20µm to 50µm spot sizes.

New Latest Diode Pumped Laser Design with Single Fiber Module 40W Pump Design.

The LT2100 In Action

System & Subsystem

Descriptions

TrimSmart LT2100

Efficient, Compact Design

Footprint dimensions 32”W x 70”L x 61”H – less than 18 square feet

PC controller inside system

Monitors and keyboard can be configured for left or right side placement

Robust frame design for optical quality stiffness

Casters for easy movement during installation and transport

Only single phase power line and air line needed

System depth

Is 1770 (70)

813 (32.0)

1551 (61.1)

1677 (66)

LT2100 Major Subsystems

Trimmer System

Controller Z-Probe Assy

X, Y, Z, Theta

Table

V900 Measurement

System

Laser-Optical Rail

Trim

Controller

Pattern Rec.

CCD Camera Laser power meter

VXI-MXI

PCI

I/O

IEEE

DUT

Network

Laser

Optical and Laser System

Beam Positioner: High

speed galvanometer offers

an ideal balance of speed,

accuracy, and work area.

Lens Options 30µm IR 20µm IR 25µm 532nm

Field Size 100 x 100mm 65 x 65mm 100 x 100mm

Resolution 1.52µm 1.52µm 1.52µm

Repeatability <12µm <12µm <12µm

Spot Size 30µm 20µm 25µm

Depth of Focus 380µm 170µm 750µm

Optical & Laser Systems –

Patented Calibrated Beam Field

Without Calibration

beam placement

accuracy

cannot be specified

With Calibration

beam placement

accuracy

Is specified

according to system

model

Absolute coordinates - minimizes beam “walking”

Allows calculated moves throughout the beam field

Commonality between multiple systems

Optical and Laser System

Laser Type: The Latest in Diode Pumped Solid State laser

technology offering high stability, and low operation and

facilitization costs for lowest possible CoO.

6W DPL 1064nm 30ns Pulse Width

6W DPL 1064nm 70ns Pulse Width

3W DPL 532nm 30ns Pulse Width

3W DPL 532nm 70ns Pulse Width

6W DPL 532nm 70ns Pulse Width

10W Lamp Pumped 1064nm 100ns Pulse Width

Energy control: Programmable through rotary polarizer

technique and diode power for greater consistency, control, and

overall performance.

Precision Beam Positioning –

Standard Edge Sensing Vision System

Non-destructive edge

sensing capability using

gray scale contrast

levels to find Hi-Lo or

Lo-Hi transitions

Through-the-lens

viewing with LED or

Ringlight illumination

Vision Tool to set and

verify edge sense

parameters

search area target areas

trained images with coarse and fine granularity results

search area target areas

trained images with coarse and fine granularity results

High Precision Beam Positioning –

Optional Pattern Recognition System

Applies the latest

video and software

technology for the

ultimate in beam

positioning accuracy,

repeatability, and

reliability.

Pattern Recognition – Template

Matching

Locates basic and irregular

patterns regardless of color,

lighting, or surface texture.

Identifies elements based on

the granularity of a part, the

part shape, or a combination

of both.

Defines multiple elements

within a template to eliminate

problem areas.

1. Train

2. Locate

3. Process

Pattern Recognition – Ease of Use

Graphical tools and stored templates

expedite setup time:

– Allows for easy system training to understand,

interpret, and characterize images found on any

particular part, circuit, or substrate.

– Sets of pattern templates may be created for

multiple devices, stored in a library, and easily

loaded into a production program when needed.

Pattern Recognition – Ease of Use Graphical User Interface Template Library

Pattern Recognition – Ensuring

Success

An estimated recognition success rate, based

on the uniqueness and specific parameters of

a target, may be obtained as part of the

system setup.

Synthetic targets can also be created when

actual parts are not available.

Characteristics of desired shapes can be

drawn from the library to create an ideal part.

New Larger Work Area

Larger work area allows

for parts up to 10”Y x

12”X

11”Y x 13”X automated

load doors allow easy

access for part

load/unload

Chuck/Parts Positioning

Low maintenance, high reliability dual axis air bearing XY table

O.4 mil resolution

0.2 mil repeatability

New heavy duty Z-theta stage and chucktop for probe forces up to 25 lbs.

125 mil to 500 mil adjustable down stroke

0.001 degree theta resolution

Motorized Probe

Motorized probe card holder adjustability with three independent motor controls to adjust Z, roll and pitch with a 0.5” total travel range

Manual X and Y adjustment with a total 0.5” travel range

Operator control panel for simple convenient operation

V900 – Measurement System Fast, Accurate Dual Source Current Nulling Technology

if (rA/rB = r1/r2)

I at A = 0 amps

rA

rB

r1

r2

A

V+

GND

wheatstone

bridge

r Std

r Trim

ratio arm (r1/r2) Source

A

ratio arm

bridge

Source A

Source B

A

r Std

r Trim

dual source

bridge

V900

VXI

VXI-MXI

National Instruments

GSI DVS 350

V900

Matrix

3 X 24

V900

A/D

V900

Source

GSI AD 351

GSI MTX 352

PC to VXI interface

(AT-2000)

VM_hi

VM_lo

MUX_1

MUX_2 CMP_1

CMP_2

LSync

VXI interface - Probe Card V900

A/D

Comp A

Comp B

R Standard

R Trim

Delay

(crystal

controlled)

Trigger

Input

Select

Source A

Source B

Ammeter

Guard X1

X10

X100

Software

Line Sync

External

Diff VM

RMP A

RMP B

Mux 2 IN

Mux 1 IN

V900 Block Diagram

A Measurement Problem...

r1

r3

r2

r measured = r1 X (r2 + r3)

r1 + (r2 + r3)

V

(0V)

W V900

Active Guarded Measurement

r1

r3

r2

r measured = r1

V

(0V) (0V)

in (0V)

out

Guard Driver

Guard pin

Low pin

High pin

W V900

A Measurement Solution...

V900 Measurement System

High accuracy, wide range resistance, voltage, or current measurement with unparalleled throughput.

Dual source (force V) current nulling bridge:

– Two 18-bit sources + 32 Volts @ 200 milliAmps

16-bit A/D – measures Ohms, DC Volts & current.

High-speed 3-line x 24-pin matrix module:

– Expandable to 144 pins with standard card cage.

– Usable with any additional VXI or GPIB instrument.

Additional external inputs for voltage measurements.

Traceable calibration procedure.

VXI Instrument:

– Compact 2-board design – Standard “C” size format.

– Card cage accepts additional V900 source boards or third-party instruments.

V900 Measurement System

Resistance measurements: – 0.1 Ohm to 1000 MegOhms.

– Mid-range accuracy: + 0.02% (50 Ohms – 160 Ohms).

– Active guard driver (200 milliAmp capacity).

– Full Kelvin connections.

– Ratio measurements with internal or external standards.

– Easy to use spreadsheet for data entry.

– Low Ohm extension – 0.01 to 0.100 Ohms.

System card cage

provides connection

and expansion.

V900 Measurement System

Functional applications: – DC Voltage measurements:

• 11 voltage ranges – 100 milliVolts to 160 Volts

• Accuracy + 0.01% to + 0.05%

– DC sourcing:

• Three ranges: + 4, + 16, & + 32 Volts

• Accuracy + 0.005%

• Programmable current limit – 40 or 200 milliAmps

– DC current measurement:

• 7 Ammeter ranges 2 microAmp to 200 milliAmps

• Accuracy + 1.5% to + 0.05%

– Comparator trim outputs.

– Selectable trigger event.

Instrument Compatibility

National Instruments MXI-VXI compatible

National Instruments GPIB compatible

National Instruments LabWindows CVI

compatible

Note: GSI Lumonics offers procurement &

integration of special measurement

equipment

TrimSmart™ Operating Software for

Windows 2000®

TrimSmart™ Operating Software for

Windows 2000®

Spreadsheet editor eliminates programming for setup and execution of laser trim applications.

Continual collection of test results and statistical data can be downloaded or linked in real-time to most third-party SPC programs for continual process improvement.

Trim Interface Program (TIP) -- GUI with powerful set of built-in system trim tools.

Expansive capabilities through use of Dynamic Link Libraries.

New – More Powerful & Flexible

Operating Platform

Spreadsheet editor eliminates programming for set-

up and execution of laser trim applications

Continual collection of test results and statistical data

can be downloaded or linked in real-time to most

third-party SPC programs for continual process

improvement

Trim Interface Program (TIP) – GUI with powerful set

of built-in system trim tools

Expansive capabilities through use of Dynamic Link

Libraries (DLL’s)

Software Components

Windows 2000 – Operating system for PC

– I/O control & file management

National Instruments – PC to VXI Interface

Laser System Software – TIP - Trim Interface Program - graphical user interface

– Spread Sheet - trim program database

– System control programs and laser API library (dlls)

Visual C/C++ Developer Studio (Microsoft) – Editor-Compiler environment / API library

Cognex / Data Translation – Vision processing

Separating the Logic and Uniqueness

of a Program The Algorithm (process instructions)

Resistor nominals

tolerance

trim types

Resistor nominals

tolerance

trim types

The Part specific details

Common

Source(s) / Executable(s)

trim algorithm.cpp

trim algorithm.exe GSIL laser library

MS C/C++ library

SPREADSHEET Data Files

jobplan_1.sst

jobplan_2.sst

……

jobplan_n.sst

Jobplan

description

folder

…..jobplan_n

Jobplan

description

folder

…..jobplan_2

Jobplan

description

folder

…..jobplan_1

spreadsheet file

jobwalk file

cognex template data

datalog setup file

summary sheet file

Trim Interface Program

graphical user interface jobplan description, system control

algorithm & spreadsheet paths

TIP

Software - User’s Environment

Common

Executable

trim algorithm.cpp

trim algorithm.exe

SPREADSHEET file

jobplan_1

trim/test

parameters

identification criterea

image templates

VISION file

jobplan_1

S&R location

&

resistor trim locations

JobWalk file

jobplan_1

Jobplan Description

Folder

…..jobplan_1

The TIP & Jobplan Description Folder

SpreadSheet Features - Resistor Trim

Passive Trim Nominals can be expressed as mathematical expression

Applied Voltage per resistor

Measurement delay per resistor

Low Ohm option

Precision Linear-Link function

Functional Trim V source

V measure and trim

Wide selection of trim types and options U-cut

Retrace - cleans kerfs on thick materials and scan type trims

Radius specified corners - L, Hook & U-cuts

SpreadSheet Features - General Part Processing

Step & Repeat Multi-probings, circuits & substrates

Non-measurement cuts Pass / fail marking, alpha-numerics

Multi structure - combined cut types

Group association (Group ID) Beam position offset

Qrate & bitesize

Laser transmission

Generic data test Statistical, summary and datalogging features applicable

The SpreadSheet - Resistor Page

The SpreadSheet - Defaults Page

Available LT2100 Options

Milli-Ohm measurement option

Additional matrix

Six Laser Option

3 Lens Options

Vision processor

Laser power meter

PC/AT GPIB (IEEE) interface card

Global Reach

Conclusion

Modular, Versatile System to Meet Widest

Possible Range of Applications

Stiffer Frame for Greater Process Stability

Smaller Footprint for Reduced Facility Costs

Wider Range of Features for Greater Process

Flexibility and Ease of Use

Windows 2000 Software Platform

Global Application and Service Support