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ABOUT THE CONTRIBUTORS SURYADEVARA BABU is currently Professor of Chemical Engineering at Clarkson University. He received his Ph.D. in 1971 from the State University of New York at Stony Brook. He spent 1987-88 with Bell Communications Research in Red Bank, NJ on sabbatical leave and was with IBM at Endicott as a visiting professor/summer faculty member during 1983-86. Prior to that he was on the faculty at the Indian Institute of Technology in Kanpur and was a visitor at the Niels Bohr Institute in Copenhagen and the International Center for Theoretical Physics in Trieste. His current research interests include optical micro lithography , plasma and laser processing, and molecular thermodynamics. CHARLES BAUMGARTNER is a Senior Scientist with GE Corporate Research and Development in Schenectady, NY. Before joining GE in 1980, he received his Ph.D. from Rensselaer Polytechnic Institute. His interest in surface and interfacial chemistry has prompted diverse studies in battery and fuel cell electrodes, piezoelectric ceramic fabrication, and metallization for GE. His recent activities in the realm of plastic metallization are concerned with understanding the relationship between plastics surface chemistry and adhesion. HOWARD K. BIRNBAUM is in the Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign. He received his Ph.D. degree from University of Illinois. He has carried out research in the areas of diffusion, plastic deformation, phase transitions, hydride structures and transitions, acoustic attenuation, and elastic constants. His recent research is on hydrogen effects on deformation and fracture and on the chemistry and mechanical properties of interfaces and grain boundaries. BO BOATWRIGHT is a senior technician in the Materials Engineering Laboratory at IBM Corp., Boca Raton, FL. He has coauthored various papers and invention disclosures dealing with new methods for stripping/etching metals, applications of conductive adhesives and corrosion of connectors. He is currently involved in the evaluation and development of conductive adhesives and metallized polymers. ANDREW B. BOCARSLY is Associate Professor of Chemistry at Princeton University where he has been active in research since 1980. In addition to interests in the photolithographic deposition of transition metals, he maintains research interests in the area of electrochemistry and photochemistry of organometallic complexes. PETER BODO is Assistant Professor of the Laboratory of Surface Physics and Chemistry at Linkoping University, Linkoping, Sweden. He received a Ph.D. in Materials Science at Linkoping University in 1986. During 1988- 1989 he held a ·Post-Doc position at IBM, T.J. Watson Research Center, 461

SURYADEVARA BABU CHARLES BAUMGARTNER …978-1-4899-0… ·  · 2017-08-231989 he held a ·Post-Doc position at IBM, T.J. Watson Research Center, ... became manager of VLSI Packaging

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Page 1: SURYADEVARA BABU CHARLES BAUMGARTNER …978-1-4899-0… ·  · 2017-08-231989 he held a ·Post-Doc position at IBM, T.J. Watson Research Center, ... became manager of VLSI Packaging

ABOUT THE CONTRIBUTORS

SURYADEVARA BABU is currently Professor of Chemical Engineering at Clarkson University. He received his Ph.D. in 1971 from the State University of New York at Stony Brook. He spent 1987-88 with Bell Communications Research in Red Bank, NJ on sabbatical leave and was with IBM at Endicott as a visiting professor/summer faculty member during 1983-86. Prior to that he was on the faculty at the Indian Institute of Technology in Kanpur and was a visitor at the Niels Bohr Institute in Copenhagen and the International Center for Theoretical Physics in Trieste. His current research interests include optical micro lithography , plasma and laser processing, and molecular thermodynamics.

CHARLES BAUMGARTNER is a Senior Scientist with GE Corporate Research and Development in Schenectady, NY. Before joining GE in 1980, he received his Ph.D. from Rensselaer Polytechnic Institute. His interest in surface and interfacial chemistry has prompted diverse studies in battery and fuel cell electrodes, piezoelectric ceramic fabrication, and metallization for GE. His recent activities in the realm of plastic metallization are concerned with understanding the relationship between plastics surface chemistry and adhesion.

HOWARD K. BIRNBAUM is ~rofessor in the Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign. He received his Ph.D. degree from University of Illinois. He has carried out research in the areas of diffusion, plastic deformation, phase transitions, hydride structures and transitions, acoustic attenuation, and elastic constants. His recent research is on hydrogen effects on deformation and fracture and on the chemistry and mechanical properties of interfaces and grain boundaries.

BO BOATWRIGHT is a senior technician in the Materials Engineering Laboratory at IBM Corp., Boca Raton, FL. He has coauthored various papers and invention disclosures dealing with new methods for stripping/etching metals, applications of conductive adhesives and corrosion of connectors. He is currently involved in the evaluation and development of conductive adhesives and metallized polymers.

ANDREW B. BOCARSLY is Associate Professor of Chemistry at Princeton University where he has been active in research since 1980. In addition to interests in the photolithographic deposition of transition metals, he maintains research interests in the area of electrochemistry and photochemistry of organometallic complexes.

PETER BODO is Assistant Professor of the Laboratory of Surface Physics and Chemistry at Linkoping University, Linkoping, Sweden. He received a Ph.D. in Materials Science at Linkoping University in 1986. During 1988-1989 he held a ·Post-Doc position at IBM, T.J. Watson Research Center,

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Yorktown Heights, New York. His research interests are focused at surface science of organic materials, especially interfaces between small organic molecules and inorganic surfaces.

MADELEINE BOU is currently preparing thesis at Ecole Centrale de Lyon, France. She graduated as Engineer from Lyon University. Her specific interest is in the application of spectroscopic tools and electron microscopy to adhesion of metal/polymer systems.

ALEXANDER MARIAN BRADSHAW is currently director of the Department of Surface Physics at the Fritz-Haber-Institut of the Max-Planck-Society in Berlin, Germany. He studied chemistry at Queen Mary College, University of London and received his Ph.D. in 1968. Subsequently, he did postdoctoral research at Ludwig-Maximilians-Universitat and Technische Universitat ~unchen, Germany.

JEAN-LUC BREDAS is Professor at the Universite de Mons-Hainaut (Chair of Chemistry of Novel Materials) and Head of the Service de Chimie des Materiaux Nouveaux. His main field of research is electronic properties and nonlinear optical properties of conjugated molecules and polymers. He has a Ph.D. degree.

L. PAIVIKKI BUCHWALTER is currently at IBM T.J. Watson Research Center, where she has recently transferred from IBM East Fishkill. She received her Diploma Chemical Engineer degree from Helsinki University of Technology in 1976. Her research and development efforts have primarily focused on polymer/inorganic adhesion and surface and interface characterization using X-ray photoelectron spectroscopy, and she has authored a number of publications in these areas.

STEPHEN L. BUCHWALTER has been with IBM T.J. Watson Research Center since 1985 where he has been involved in processing and characterization of polyimides, epoxy resins, and siloxanes for packaging applications, and became manager of VLSI Packaging Materials in 1987. He received his Ph.D. in physical organic chemistry from Harvard University in 1974 and did postdoctoral work at the University of Chicago before beginning his industrial research in 1976. His research publications have been primarily in the areas of physical organic and polymer chemistry, while patents have been on organic coating compositions and processes and novel materials and processes for electronic packaging.

DOUGLAS L. CHAHBERS currently General Manager of XYTORR Corporation. He has worked in vacuum deposition, sputtering, ion-plating, chemical vapor deposition, plasma spray coating processes, material development for solar energy, superconductivity, controlled thermonuclear reaction, and plasma gasification of coal. He is currently a member of the AVS' Vacuum Metallurgy Division's Executive Committee and Past President of the Society of Vacuum Coaters. He has authored numerous reports and papers. He is the inventor of more than a dozen patents involving coating processes which have won him numerous honors and awards.

RANDY CAHERON has been working for Lockheed Corp. since 1986. He received his Ph.D. from Princeton University in 1986, having completed a dissertation in the area of photochemistry of transition metal organometallic complexes.

MOHAHMED CHTAiB is Research Associate at Laboratoire Interd/partemental de Spectroscopie Electronique, Facultes Universitaires Notre-Dame de la Paix, Namur (Belgium). His main field of research is surface modifications of polymers (metallization, laser treatment). He has a Ph.D. degree.

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JEANINE A. CONKLIN is currently a graduate student in chemistry at the University of California at Los Agne1es. She received her B.S. degree in chemistry from the Pennsylvania State University in 1990. She represented the Penn State chemistry department at the National Conference on Undergraduate Research in 1990. While at Penn State she was actively involved with the Nittany Chemical Society and participated in several chemistry magic shows.

PER DANNETUN is a graduate student, Laboratory of Surface Physics and Chemistry, Physics Department, Linkoping University (Sweden). His main fields of research are electronic structure of conjugated polymers, and surface studies of biologically-active molecules.

JOHN H. DAS is currently completing his Ph.D. research on thermal stability of metals in polymers at the State University of New York at Binghamton. He received his MSEE degree from the South Dakota School Mines and Technology, and during his thesis research he developed a C02 waveguide laser with transverse RF excitation. His principal areas of research are microelectronics devices and materials, which also include quantum electronics and computer simulations of dynamic processes.

MOSES DAVID received his Ph.D. in Chemical Engineering from Clarkson University in September 1990. He received his B. Tech. degree in 1985 from Indian Institute of Technology and M. Eng. degree from McGill University in 1987. His research interests are in the area of novel laser and plasma based processes for depositing thin films and powders.

G. DIETLER has been working since 1988 on adhesion problems at the University of Fribourg, Switzerland. He received his Ph.D. in Biophysics at the ETH Zurich in 1985, and did postdoctoral research in Santa Barbara, where he studied fractal aggregates and phase transitions in surfactants solutions.

KARL DOBLHOFER is presently a group leader in electrochemistry at the Fritz-Haber-Institut der Max-P1anck-Gese11schaft in Berlin. He received his Ph.D. degree in Electrochemistry in 1969 from Colorado State University, Fort Collins, and had a postdoctoral appointment with A.A. Pilla at Electric Storage Batteries (ESB) , Inc., in Yardley, Pennsylvania. His current interests include the study of organic coatings with electrochemical and IR-spectroscopic techniques.

F.J. DUARTE is presently a Senior Research Scientist at Eastman Kodak Company. He is the author of some 40 research papers and is co-editor of Qye Laser Principles (Academic Press, New York, 1990). He received his Ph.D. in Physics in 1983 from Macquarie University, Sydney, Australia.

WILLIAM V. DUMAS is a Chemist at General Electric Armament Systems Department in Burlington, VT. He received his Bachelor's degree in Chemistry from Union College, Schenectady, in 1984. He is involved in the metallization of high performance plastics and metals.

RICHARD EISFELLER is currently a staff chemist, at the Davidson Technology Center in Dover, NH. He received a BS in chemistry from Illinois Institute of Technology in Chicago. He has had more than 20 years experience in the development of vacuum deposited thin films and the study of the adhesion of these films. He has authored several patents and publications in these areas.

THOMAS FLOTTMANN is with Akzo Research Laboratories Obernburg, Germany, which he joined in 1987. He received his Ph.D. in Physics from the University of Heidelberg in 1982 and carried out postdoctoral research at

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the Institut Laue Langevin in Grenoble. Since 1989 he has been the leader of the thin film technology group at Akzo. His current research interests include metallization for electronics packaging, adhesion of polymers to metals, and ion beam assisted processing for electronics applications.

DONALD F. FOUST is a Staff Chemist at General Electric Co. Corporate R&D Center in Schenectady, NY. He received his Ph.D. degree in Inorganic Chemistry from the University of Massachusetts, Amherst, in 1981. He is involved in the metallization of high performance plastics and has interest in the surface modification of polymers.

BRUCE K. FURMAN has been a Research Staff Member since 1985 at the IBM T.J. Watson Research Center and is currently working on metallization and interconnection for high performance packaging. He received his Ph.D. in Chemistry from Cornell University in 1980. After working at Charles Evans and Associates as a consultant on surface analysis and materials characterization, he joined IBM EF Product Assurance in Poughkeepsie, NY.

FABIO GARBASSI has worked since 1968 at Istituto Guido Donegeni, Novara, Italy, the corporate research center of Enimont. He received his university degree in chemistry at the University of Trieste. He has authored over 90 scientific publications, holds 15 patents, and is the co-editor of the book High Energy Density Technologies in Materials Science. His experience encompasses x-ray diffraction studies of inorganic and organic structures, heterogeneous catalysis, chemico­physical characterization of surfaces, adhesion studies, and modification of polymer surfaces. In 1984 he was appointed Senior Scientist by Montedison for his studies in surface science.

MICHAEL GRUNZE has been with the Fritz-Haber-Institute of the Max-Planck­Gesellschaft in Berlin for seven years and was Professor of Physics at the University of Maine and Director of the Laboratory for Surface Science and Technology before he returned to Germany in 1987 as Chair Professor in Applied Physical Chemistry at the University of Heidelberg. He received his Ph.D. in Physical Chemistry in 1974 and his Habilitation in Physical Chemistry in 1980 from the Freie Universitat in Berlin, Germany. He has published over 90 papers in scientific journals, has edited three books, and has been an invited speaker at many international conferences. His research interest presently focuses around the chemical and physical interactions at organic/inorganic interfaces.

CHRISTA HAAG is Processing Engineer at IBM in Sindelfingen, Germany. Prior to that she did postdoctoral research in the adhesion of metals to PTFE and other polymers by plasma deposited thin metallic films at the University of Tuebingen. She received her Ph.D. in Chemistry at the University of Tuebingen in 1987.

CHRISTIAN HAHN is a graduate student at the University of Maine working in the Laboratory for Surface Science and Technology. He received Diploma-Physiker in 1990. His current research interest is in polymer adhesion.

J.K. HIRVONEN is a Senior Scientist with the Advanced Films Division of Spire Corporation. He has more than 18 years of experience involving beam effects on materials. Prior to joining Spire Cop oration , he was a founder, V.P., and Director of Research for Zymet. From 1971-1982 he was a technical staff member at the Naval Research Laboratory where he headed a seven member technical group (1976-1982) conducting basic and applied R&D on the application of ion implantation. He received his Ph.D. in Physics, and has coauthored over 60 papers and has edited two books on ion implantation. He has organized topical symposia and has presented papers at numerous international conferences.

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KARSTEN HORN is presently staff scientist at Fritz-Haber-Institut of the Max-Planck-Society in Berlin, Germany. He studied physics at Rheinisch­Westfalische Technische Hochschule in Aachen and Queen Mary College, University of London. He received his Ph.D. in 1976.

R. ANDERS INGEMARSSON is presently working on electroceramic materials at Asea Brown Boveri in Baden-Dattwil, Switzerland. He received his Ph.D. degree from Uppsala University, Sweden in 1989.

ILEANA ISERN-FLECHA is an advisory scientist in the Materials Engineering Laboratory at IBM Corp., Boca Raton, FL. She received her Ph.D. in analytical chemistry from Purdue University (1986). She has authored or coauthored various papers covering a variety of topics in mass spectrometry, thermal analysis, surface analysis and corrosion. Her current research interests include applications of surface analysis to studies on mechanisms of corrosion and polymer metallization.

HYO-SOO JEONG is a graduate research assistant in the Microelectronics Sciences Laboratories, Columbia University. He received his MS degree in Materials Science from Columbia University in 1986, and is currently working toward the Ph.D. His research topics include low energy ion beam modification of high performance polymers used in electronics applications and direct measurement of the adhesion strength between these polymers and thin films used for microelectronics packaging.

JOHN S. JUDGE is currently president of an independent consulting firm, John Judge & Assoc., Inc. He has had over 25 years experience in materials research and development in the electronic industry--primarily in magnetic recording and memory materials. He has worked for IBM, Control Data, Data General, Raytheon and Alcoa. He has a Ph.D. degree in physical chemistry from Syracuse University, and served as chairman of the Boston Section of the Electrochemical Society.

BRADLEY R. KARAS is a Staff Chemist at the General Electric Co. Corporate R&D Center in Schenectady, NY. He received his Ph.D. in Inorganic Chemistry from the University of Wisconsin-Madison in 1981. His research activities involve metallization of plastics and novel imaging techniques for 3-dimensional circuit boards.

ANDREAS KILLINGER is a Ph.D. student in Prof. Grunze's surface science group at the Physikalisch-Chemisches Institut, University of Heidelberg. He carried out Diploma research work at Dalhousie University, Canada. His main research deals with surface specific spectroscopy of organic and inorganic adsorbates on metal surfaces.

J.E. KLEMBERG-SAPIEHA has been research scientist in the Department of Engineering Physics, Ecole Poly technique , Montreal since 1978. Her major activity is in plasma processing for deposition of films and treatment of materials, that has resulted into more than 40 publications.

OTTO KNOTEK has held the Chair of Materials Science and has directed the Materials Science Institute in Aachen since 1970. He received his doctorate in 1950 from the Technical University in Graz, Austria. In 1957 he acquired his professorial' qualification (Habilitation) at the Technical University Aachen. He has authored some 300 papers and other publications.

LARRY J. KRAUSE is currently a Senior Research Specialist in the Industrial and Electronics Sector Research Laboratory of 3M in St. Paul. He received his Ph.D. in Chemistry in 1981 from the University of Illinois at Chicago. After a postdoctoral appointment at Argonne National

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Laboratory, he joined 3M in 1982 in their central laboratories in St. Paul. His current research interests include physical polymer chemistry and physical electrochemistry.

o. KUTrEL is a researcher at the University of Fribourg, Switzerland. He received his education in plasma physics. During 1989-1990 he spent his fellowship in the Engineering Physics Department, Ecole Poly technique , Montreal, with the main emphasis on plasma processing.

ROBERT H. LACOMBE is with IBM Corporation, E. Fishkill Facility, in Hopewell Junction, NY.

EDWARD J. LAMBY is a Chemist at the Corporate R&D Center of General Electric at Schenectady, NY. He received his M.S. degree from Union College, Schenectady, NY, in 1971. He is involved in the metallization of high performance plastics and photopatterning processes.

ROBERTO LAZZARONI is Charg{ de Recherches of the Belgian National Fund for Scientific Research (FNRS) , presently working at the Service de Chimie des Materiaux Nouveaux, Universite de Mons-Hainaut (Belgium). His main field of research is electronic structure of organic molecules and conjugated polymers. He has a Ph.D. degree.

WEN-CHIEH (JERRY) LEE is continuing his studies toward a Ph.D. at The State University of New Jersey at Rutgers. He received his MS in Materials Science and Technology from Rochester Institute of Technology.

THIERRY LEMOGNE is C.N.R.S. engineer at Ecole Centrale de Lyon, France. His interests are tribo1ogy, adhesion, XPS, metals, ceramics and polymers, and has published more than 5 papers.

VERN LINDBERG has taught at the Rochester Institute of Technology for the past 11 years and is currently an Associate Professor in the Physics Department and in the Center for Materials Science and Technology. He received his Ph.D. from Case Western Reserve University. His interests are in adhesion of metals to polymers, surface modification of polymers, and optical coatings. He has been active in the Upstate Chapter of the American Vacuum Society, and will serve as president for the next two years. FRANK LOFFLER has worked as a research scientist at the Technical University Aachen since 1986 and since 1989 has directed The Department of PVD Technology at the Institute of Materials Science. He received his doctorate in the field of ceramic hard coatings in 1989, and is the author of some 20 papers and other publications.

MICHAEL LDGDLUND is a Graduate student, Laboratory of Surface Physics and Chemistry, Physics Department, Linkoping University (Sweden). His main fields of research are electronic structure of conjugated polymers and surface studies of biologically-active molecules.

WOLFGANG LOHMANN is with the Akzo research laboratories in Obernburg, Germany which he joined in 1987 and was appointed leader of the physical surface modification laboratory. Since 1989, he has been manager of the Department Physics and Ana1ytics. He received his Ph.D. in Materials Science from the Technical University in Aachen. During 1979-1986, he was affiliated with the Nuclear Research Center Ju1ich, Germany, and during this period he spent one year at The Los Alamos National Laboratory. His current research interests are in surface-sensitive characterization methods.

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DAVID MAGER, Executive Vice President - Vapor Technologies, Inc., is one of the company's founders. He has 15 years experience in high technology product development and program management with inventions, and experience in the PVD, power generation, electronics, food and biotechnology industries. He holds two u.s. patents and has B.S. degree in Biology from State University of New York, Stony Brook.

GIOVANNI MARLETTA has been since 1984 Assistant Professor of Chemical Physics at the University of Catania, Italy, where he received his Dr.Sc. in Chemistry in 1980. Since 1988 he has been a Member of the National Committee for Chemistry and the National Committee for Informatics of the C.N.R. (Italy). His research interests cover surface and interface chemistry by electron spectroscopies with application to microelectronics, photovoltaics and metallurgy; and ion- and electron­beam effects on inorganic salts and polymers. He has bee invited speaker in many international conferences, and has authored more than 30 papers.

JEAN MICHEL MARTIN is presently professor at the Ecole Centrale de Lyon engineer school. He graduated as chemical engineer from the ESCIL school in Lyon in 1972 and was awarded a Ph.D. degree in 1978. He has published over 40 papers, and his interests cover mainly tribochemistry and the application of microscopic analysis in the field of mechanics.

L. MARTINU has been with Ecole Poly technique , Montreal since 1988 and is a senior researcher with the main interests in plasma-surface interactions, plasma chemistry and thin film physics, that have resulted into more than 40 publications. He received his education at The Charles University, Prague.

R. MAURON is a student who worked on surface analysis for his Masters degree at The University of Fribourg, Switzerland.

HEINRICH MEYER has been since 1985 research director of the Electroplating Division of Schering AG in Berlin, and has been qualified for university lecturing in Inorganic Chemistry since 1987. He received his Ph.D. from the Ludwig Maximilian University in Munich. In 1981 he joined W.C. Heraeus GmbH, Hanau (Germany) as head of research and development of the Chemical Division. His main areas of research are electrochemistry, catalysis, reaction mechanisms, and relationship between properties and structure of solid materials.

KASHMIR! LAL MITTAL * is presently employed at the IBM US Technical Education in Thornwood, N.Y. He received his M.Sc. (First Class First) in 1966 from Indian Institute of Technology, New Delhi, and Ph.D. in Colloid Chemistry in 1970 from the University of Southern California. He has organized and chaired a number of very successful international symposia and in addition to this volume, he has edited 34 more books as follows: Adsorption at Interfaces, and Colloidal Dispersions and Micellar Behavior (1975); Micellization Solubilization. and Microemulsions, Volumes 1 & 2 (1977); Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings (1978); Surface Contamination: Genesis, Detection. and Control, Volumes 1 & 2(1979); Solution Chemistry of Surfactants, Volumes 1 & 2 (1979); Solution Behavior of Surfactants: Theoretical and Applied Aspects, Volumes 1 & 2 (1982); Adhesion Aspects of Polymeric Coatings, (1983); Physicochemical Aspects of Polymer Surfaces, Volumes 1 & 2 (1983);

* As the editor of this volume.

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Surfactants in Solution, Volumes 1, 2 & 3 (1984), Adhesive Joints: Formation. Characteristics. and Testing (1984), Polyimides: Synthesis. Characterization and Applications, Volumes 1 & 2 (1984); Surfactants in Solution, Volumes 4, 5 & 6 (1986); Surface and Colloid Science in Computer Technology (1987); Particles on Surfaces 1: Detection. Adhesion and Removal, (1988); Particles in Gases and Liquids 1: Detection. Characterization and Control (1989); Particles on Surfaces 2: Detection, Adhesion and Removal (1989); Surfactants in Solution, Volumes 7-10 (1989); Metallized Plastics 1: Fundamental and Applied Aspects (1989); Polymers in Information Storage Technology (1989) and Particles in Gases and Liquids 2: Detection. Characterization and Control (1990). Also he is Editor of the Series, Treatise on Clean Surface Technology, the premier volume appeared in 1987. In addition to these books he has published about 60 papers in the areas of surface and colloid chemistry, adhesion, polymers, etc. He has given many invited talks on the multifarious facets of surface science, particularly adhesion, on the invitation of various societies and organizations in many countries allover the world, and is always a sought-after speaker. He is a Fellow of the American Institute of Chemists and Indian Chemical Society, is listed in American Men and Women of Science, Who's Who in the East, Men of Achievement and many other reference works. He is or has been a member of the Editorial Boards of a number of scientific and technical journals, and is the Editor of the Journal of Adhesion Science and Technology, which made its debut in 1987. In 1990 he received the Charles B. Dudley Award of the American Society for Testing and Materials.

RICHARD A. HooDY is a Staff Scientist within the Polymer Development Group of the Materials Modification Division of Spire Corporation, and is currently working on a Ph.D. in Polymer Physics at the University of Lowell. His current research interests include the modification of the electrical, mechanical, optical and chemical properties of polymers using ion beam and laser processes. At the University of Lowell, he is active in several research programs including the synthesis and characterization of novel electroactive polymers and the characterization of Langmuir­Blodgett thin films. He has published over 15 papers and has several pending patents.

HARCO HORRA has been since 1987 at Istituto Guido Donegani, the corporate research center of Enimont, in Novara, Italy. He graduated with honors at the University of Torino in 1986. He has authored over 12 scientific publications and holds four patents. His experience includes chemico­physical characterization of surfaces and technologies for modification of polymer and glass surfaces.

JAMES HORRIS is Professor and Chair of Electrical Engineering in the Thomas J. Watson School at The State University of New York at Binghamton. He has degrees in physics and electrical engineering and has held academic appointments in both disciplines. He is active in many professional societies and was the first director of SUNY-Binghamton's Institute for Research in Electronics Packaging. He is editor of the new VNR monograph series: Electronics Packaging Forum. His primary research interests cover a wide variety of thin film topics, especially the nucleation, growth and electrical properties of discontinuous metal films.

HANISH NANDI is currently a research chemist with ARCO Chemical Co. in Newton Square, PA, He obtained his Ph.D. degree in Chemistry from the Pennsylvania State University working on the chemistry of polymers, ceramics and composite materials.

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K.R. NARENDRNATH is Manager of Coating Operations and Analysis at Vapor Technologies, Inc. He obtained his Ph.D. in Metallurgy and Materials Science from Polytechnic University, Brooklyn, New York. His areas of interest include coating deposition for industrial and aerospace applications, advanced materials processing, property evaluation and correlation to structure, bulk and surface analyses through SEM/EDS, WDS, X-ray diffraction, XPS/ESCA, TEM, substrate surface preparation and adhesion, and failure analysis.

DANIEL NEUGROSCHL is a graduate student at the Henry Krumb School of Mines, Columbia University. This work was done during a temporary assignment at the IBM T.J. Watson Research Center. He holds M.S. in Materials Science from Columbia University.

S. NOWAK has been working since 1988 on surface treatment and analysis of polymers at the University of Fribourg, Switzerland where he received his Ph.D. in Physics in 1986. He did postdoctoral research in Eindhoven on spectroscopy of thermal plasmas.

ERNESTO OCCHIELLD has been since 1985 at Istituto Guido Donegani, the Corporate research center of Enimont, in Novara, Italy. He graduated in Chemistry with honors at the University of Torino in 1984. In 1986, on a sabbatical, he worked at the IBM Almaden Research Center, San Jose, CA studying plasma etching and deposition processes. He has authored over 25 scientific publications and holds 8 patents. His experience includes NMR spectroscopy, chemico-physical characterization of surfaces, applications of high energy density technologies (laser, plasma) in materials science, and synthesis and modification of polymers.

AARON ORTEGA-VILLAMIL is presently Associate Professor at the National University of Colombia, Bogota. He studied physics at the University of Colombia, at State University of New York at Buffalo, and at Technische Universitat Berlin. He received his Ph.D. in 1980.

RAGHUNATH PADIYATH is currently a Ph.D. student in the Department of Chemical Engineering at Clarkson University. He received his B. Tech. degree in 1988 from Calicut University, India and his M.S. degree from Clarkson University in 1990. He is interested in thin films and metallization processes for VLSI applications.

SALVATORE PIGNATARO is Professor at the University of Catania, Italy which he joined as Chairman of Physical Chemistry in 1975. He is currently also general manager of a Consortium between Catania University and several industries and public agencies. He received his degree in chemistry in 1962 from the University of Catania. He has been or is on the editorial boards of some journals, and has been very active as member of various scientific or steering committees of Italian National Research Councilor Italian Chemical Society. He has published more than 120 papers in the areas of mass spectrometry, photoelectron spectroscopy, interaction of ion beams with matter, and physical chemistry of surfaces.

MIRD M. PLECHATY is presently employed at the IBM T.J. Watson Research Center in Yorktown Hts., NY. He is a graduate of the Technical University in Prague, Czechoslovakia (M.Sc.) and the Union Institute in Cincinnati, Ohio (Ph.D.). His interest is in the field of trace analytical chemistry and has published in this area.

SAMPATH PURUSHOTHAMAN is Manager/Research Staff Member in the High Performance Packaging Technology department at the IBM T.J. Watson Research Center, Yorktown Hts., NY. He holds D.E.Sc. degree in Materials Science from Columbia University. Prior to joining IBM, he was a Senior

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Research Associate and Adjunct Professor at the Henry Krumb School of Mines, Columbia University. He holds several patents in microelectronic packaging and has published over 30 technical papers.

WILLIAM R. SALANECK is Professor of the Laboratory of Surface Physics and Chemistry at Linkoping University, Linkoping, Sweden. Previously, he studied at the University of Pennsylvania, Philadelphia, receiving a Ph.D. in Solid State Physics in 1968. He subsequently held several scientific positions at the Xerox Webster Research Center in Webster, New York, before moving to Linkoping in 1983. His principal research interests include the surface science of organic molecular solids, polymeric materials, especially conjugated polymers, and polymer interfaces.

HARK J. SCHADT is a Staff Scientist at IBM Systems Technology Division in Endicott, NY. His graduate research was in the area of photochemistry. He joined IBM in 1985 at the Thomas J. Watson Research Center in Yorktown Hts., NY and worked on the development of photoresist processes for sub­micron applications. Since 1988 he has been working on the metallization of dielectric materials for Thin Film packaging applications.

GISELA SCHAMHLER is currently scientist/group leader in the Research Center for Microperipheric Technologies at the Technical University of Berlin, where she received her Ph.D. in chemistry in 1989. She was for two years an associated researcher at Schering AG, Berlin, electroplating division. Her professional experience includes polymeric materials and glasses, electrodeposition and electroless plating of polymers. She has several publications in the field of electroplating of polymers.

L. SCHLAPBACH has been since 1988 professor of experimental physics at the University of Fribourg, Switzerland. He received his Ph.D. from the ETH Zurich in 1973 for work done on magnetic properties of liquid alloys. He is editor and coauthor of Topics in Applied Physics, Vols. 63 and 64 on Hydrogen in Intermetallic Compounds I and II, Springer, 1988 and 1990.

RALF SCHULZ has been working since 1986 in the Research Department of Schering Electroplating in Berlin. He studied chemistry at the Technical University of Berlin and received his Ph.D. degree. He has carried out basic and applied research on the metallizing of polymers, especially the investigation of the metal/polymer interphase, and his current responsibilities are quality assurance and materials science of plated metal coatings.

FRANK SCHWAB received his B.A. degree from Princeton University in 1986 and is currently completing a degree in medicine.

AYUSHAN SEN is currently a Professor of Chemistry at the Pennsylvania State University, which he joined in 1979. He holds a Ph.D. in Chemistry from the University of Chicago, and carried out research at the California Institute of Technology. His awards include an Alfred P. Sloan Research Fellowship and the Paul J. Flory Award from IBM.

KABUL S. SENGUPTA is currently pursuing his Ph.D. degree as a Research Assistant with Professor Howard K. Birnbaum in the Department of Materials Science and Engineering, University of Illinois at Urbana­Champaign. His interests include metal-polymer and metal-ceramic interfaces using microscopy and surface analysis techniques.

KRISHNA SESHAN is with IBM Corporation, E. Fishkill Facility, in Hopewell Junction, NY.

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PHILIPPE SNAUWAERT is a Graduate student, Laboratoire Interdepartemental de Spectroscopie Electronique, Facultes Universitaires Notre-Dame de la Paix, Namur (Belgium). His main field of research is synthesis and characterization of conducting polymers (polyanilines).

TOH SPECKHARD is currently a Chemical Engineering Specialist in the Commercial Graphics Division Laboratory of 3M in St. Paul working in electrostatic printing. Since joining 3M he has worked in the Electronic and Information Technologies Sector Laboratory and the Industrial and Electronic Sector Laboratory with projects in the areas of antistatic materials and metallization of polyimide. He received his Ph.D. in Chemical Engineering from the University of Wisconsin in 1985.

JURGEN SPRINGER has been Professor of Macromolecular Chemistry at the Technical University of Berlin since 1972. He worked on polymers in the Fritz-Haber-Institute of the Max-Planck-Gesellschaft and in 1963 he was awarded the doctorate degree in Natural Sciences (Dr. rer. nat.) from the Free University of Berlin. From 1963 to 1972 he was a research scientist at the Fritz-Haber-Institute. His research has been concerned with solution properties as well as permeability and adhesion phenomena of polymers, and has written numerous papers in these areas.

THOHAS STRUNSKUS is a graduate student at the University of Maine working in the Laboratory for Surface Science and Technology. He received Diploma-Chemiker in 1988. His current research interest is in polymer adhesion.

HARALD SUHR has been since 1960 at the Department of Organic Chemistry, University of Tubingen, Germany. He received his Ph.D. in Physical Chemistry from the University of Frankfurt in 1956. His main area of research is plasma chemistry of organic and organometallic compounds.

GUY T. SUSI is currently Manager of Manufacturing for XYTORR Corporation. He has over 25 years experience in setting up, checking out, and directing the manufacturing operations of large coating systems.

KENNETH A. TAYLOR is currently a consultant to XYTORR Corporation responsible for the design and development of production-scale vacuum coating systems. He has more than twenty years of experience in design and manufacturing of vacuum coating systems utilizing many different Physical Vapor Deposition processes. He has published many technical papers pertaining to thin film coatings and the mechanics of systems needed to produce such coatings.

T.G. TETREAULT is a Staff Scientist within the Advanced Films Section of the Surface Modification Division of Spire Corporation. His interests are in the development and tailoring of IBAD coatings to specific application needs which may require certain optical, mechanical, or tribological properties. He received B.S. degree in Physics from the University of Vermont in 1980. He has published several papers and has coauthored a chapter in the book Synthesis and Properties of Boron Nitride.

RICHARD R. THOHAS is currently a Research Staff Member in the VLSI Packaging Materials group at IBM T.J. Watson Research Center, Yorktown Hts., NY. He received Ph.D. degree in Inorganic Chemistry from the Pennsylvania State University in 1985. His research interests include adhesion, polymer modification and electroless plating of metals on polymeric substrates.

CHRISTINA TnUHHLER is a Ph.D. student in Prof. Grunze's surface science group at the Physikalisch-Chemisches Institut, University of Heidelberg.

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She carried out Diploma research work at Fritz-Haber-Institut der Max­Planck-Gesellschaft, Berlin. Her main research deals with organic and inorganic adsorbate/metal interfaces.

KAJSA UVDAL is a graduate student of the Laboratory of Surface Physics and Chemistry at Linkoping University, Linkoping, Sweden. Her main research interest is surface science of organic molecular solids, especially conjugated polymers, and interfaces between small organic molecules and inorganic surfaces.

ALFRED VIEHBECK is a Research Staff Member at IBM Research Division, T.J. Watson Research Center, Yorktown Hts., NY and is currently managing the Dielectric Materials and Processes Group in the Packaging Department. He received his Ph.D. degree in Physical Chemistry from Rice University in 1982. His research background includes electrochemistry and corrosion science. Since joining IBM in 1986, he has been involved in the development of new packaging processes with primary emphasis on metallization of polymeric materials.

LOUIS VOVELLE is presently working at Rhone-Poulenc in Saint Fons, France. He graduated as chemical engineer from the Paris chemistry school in Paris 6 and was awarded a Ph.D. degree in 1986. He has published over 20 papers.

CHONG T. WAN is currently Director of Research and Development at the XYTORR Corporation. He has worked in the areas of: (1) reactive sputtering of various nitrides and oxides, (2) monolithic and multilayer transparent conductive coatings, (3) magnetic thin films, (4) erosion and corrosion resistant coatings, and (5) titanium nitride coating for tool bits. He is the inventor of more than a dozen of patents on glass coating method and apparatus, glass coating materials and magnetron cathode.

M.R. WERTHEIMER has been Professor, Department of Engineering Physics, Ecole Polytechnic, Montreal since 1974. His principal research interests are plasma processing of materials, physics of dielectrics, and thin film science and technology. He has 180 publications and 10 patents to his credit. He is IEEE Fellow, and Killam Research Fellow (1990-1992).

ROBERT C. WHITE is currently Assistant Professor of Electrical Engineering at Columbia University. He received his Ph.D. in Chemical Physics from the University of Utah in 1986. He worked in the Physical Sciences Department, IBM T.J. Watson Research Center until 1988 when he went to Columbia. His current research efforts include surface physics and chemistry of microelectronics materials, polymers in electronics, interconnect and packaging technologies as well as sensors and transducers.

PAUL H. WOJCIECHOWSKI is currently Senior Staff Research Associate in the Physical Performance Laboratory at Eastman Kodak Company. Prior to joining Kodak in 1985, he served for 13 years as professor in the Department of Mechanical Engineering at Rochester Institute of Technology. He received his Ph.D. in Mechanical and Aerospace Sciences from the University of Rochester.

MEISHENG ZHOU recently received her Ph.D. from Princeton University and is currently carrying out postdoctoral research at the University of Rochester's Science and Technology Center. Her thesis work was in the area of photolithographic plating of platinum and copper.

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INDEX

Ablation (excimer laser) as a technique to measure thin film adhesion, 449-460

Adhesion of aluminum on plasma treated and

untreated polymer surfaces, table, 323

of aluminum on plasma treated polymers as a function of ageing, 369

of coatings deposited via low temperature arc deposition process, 138

of copper strips to PTFE, after various treatments, 123

of copper to polyimide, 283-292 of electroless copper to

polyetherimide surfaces, 387-403

of electrolessly plated copper on ~olycarbonate, 415-436

enhancement by ion assisted deposition, 373-386

enhancement by ion beam processing, 349-361

measurement of thin films using excimer laser ablation and tensile extension tests, 449-460

of metal films evaporated on PTFE, 351-357

of metals on PVC, 357-359 of metals on PTFE, 373-386 of metal-polymer systems 15-34 of metals to polyimide, 245-255 of silver films on PET, 458-459

Ageing effects on plasma treated polymers, 325-328, 363-371

Aluminum on conjugated polymers, electronic

structure of, 199-212 on plasma treated and untreated

polymer surfaces, adhesion of, table, 323

on polyethyleneterephthalate, XPS study of the interface, 219-231

Automotive trim (flexible) metallization by indium island films, 73-80

Base hydrolysis of polyimide, 293-303, 305-313

Ceramic/polymer composites (molecular level), 35-55

Chemical bonding of electro less copper to polyetherimide surfaces, 387-403

Chemical interactions in metallized polymers used for

microelectronic packaging, 213-218

at polymer-metal interfaces of interest to microelectronics, 179-188

Chemical pre-treatment of polyimide, 283-292

Chemical vapor deposition (plasma­enhanced) to metallize PTFE, 121-130

Conjugated polymers aluminum on, electronic structure

of, 199-212 Contact angle measurements

on plasma treated polymers, 363-371

on polyimide, 300-302 Copper

films on polymer surfaces, plasma induced deposition of, 113-120

(ion implanted) in polyimide, diffusion and gettering simulations of, 149-161

metallization layers on polyimide and polyimide films on copper, comparison between, 169-172

473

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photolithographic plating of, on insulating substrates, 57-71

-polyimide interface, transmission electron micrograph of, 10

-polyimide system, 213-218 -po1yimide system, adhesion of,

283-292 -Teflon adhesion, 357

Copper(electro1ess) chemical bonding of, to

polyetherimide surfaces, 387-403

layers on polystyrene, adhesion of, 405-414

on polycarbonate, adhesion of, 415-436

Degradation (water-induced) of metal-polyimide interfaces, 437-447

Degradative ambients behavior of metal-polyimide

interfaces under, 245-255 Diffusion

and gettering simulations of ion implanted copper in po1yimide, 149-161

of ions in a surface chemical1y­modified po1yimide, 305-313

Dual frequency plasma modification of polymer surfaces, 315-329

Electrochemical method of po1yimide metallization, 3-14

Electrochemical reduction of po1yimide and its effect on meta1/po1yimide interface reliability, 331-346

E1ectro1ess copper layers on polystyrene, adhesion

of, 405-414 to polyetherimide surfaces,

chemical bonding of, 387-403

Electronic structure of meta1/ polymer interfaces, 199-212

Electroplating of polymers, 15-34 Evaporation, metallization by, 83-88 Excimer laser ablation as a method

to measure thin film adhesion, 449-460

Flexible automotive trim metallization by indium island films, 73-80

Gas permeability of metal-polymer systems, 15-34

Gettering simulations of ion implanted copper in

474

po1yimide, 149-161 Gold/Teflon (ion beam mixed)

interface, ESCA depth profile of, 108

Hydrolysis (base) of polyimide, 293-303, 305-313

Hydrophobic recovery of plasma treated polymers, 363-371

Indium island films for metallization of flexible automotive trim, 73-80

Insulating substrates photolithographic plating of Pt

and eu on, 57-71 Interfacial chemistry

of metallized polyimide and polyimide films on bulk metal substrates, 165-177

of polymer-metal interfaces of interest to microelectronics, 179-188

Ion assisted deposition enhanced metal/polymer adhesion

by, 373-386 Ion beam

enhancement of adhesion of metal films to polymer substrates, 349-361

mixing, principle of, 98 processing, sticky polymers

through, 349-361 treatment of polyimide, 213-218 treatment of polypropylene, 233-

244 Ion beam assisted metallization of

plastics, 97-111 advantages and disadvantages of,

109 ion beam assisted deposition,

107-110 ion beam mixing, 103-107 ion implantation, 100-103 schematic set-up of equipment

for, 100 Ion implanation, principle of, 98 Ion implanted copper in polyimide,

diffusion and gettering simulations of, 149-161

Island (indium) films for metallization of flexible automotive trim, 73-80

Kapton (see also Po1yimide) adhesion of ion beam mixed Ti

film on, 104 film metallization, electro­

chemical method for, 3-14 plasma induced deposition of Cu

films on, 113-120

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Langmuir-Blodgett deposition of polyimide films, 173-175

Laser (excimer) ablation as a technique to measure thin film adhesion, 449-460

Low temperature arc vapor deposition (LTAVD)

adhesion strength of coatings deposited by, 138

characteristics of, 139 for metallization of plastics,

131-140 physical process underlying, 134 schematic of the hardware for, 133

Magnetically enhanced sputtering, 90-91

Magnetron sputtered TiN hard coatings on plastics, 141-148

Metal and metal oxide containing polyimides, 35-55

Metallization of flexible automotive trim 73-90 of Mylar, 57-71 of plastics

ion beam assisted, 97-111 via low temperature arc vapor

deposition, 131-140 by magnetron sputtering, 141-148 by physical vapor deposition

techniques, 81-95 by plasma induced deposition,

113-120 of PTFE by means of plasma­

enhanced chemical vapor deposition, 121-130

of polyimide, electrochemical method of, 3-14

by evaporation, 83-88 Metallized indium island films for

flexible automotive trim, 73-80

Metallized polyimides and comparison with polyimide films on bulk metal substrates, 165-177

Metallized polymers used for micro­electronic packaging, study of chemical interactions in, 213-218

Metal-polyimide interface(s) behavior of, under degradative

ambients, 245-255 reliability, electrochemical

reactions of polyimide and its effect on, 331-346

water-induced degradation of, 437-447

Metal-polymer interfaces electronic structure of, 199-212 XPS study of, 233-244

Metal-polymer system adhesion of, 15-34 gas permeability of, 15-34

Metal/PTFE interfaces, 351-357 Metal/PVC interfaces, 357-359 Microelectronic packaging

study of chemical interactions in metallized polymers used for, 213-218

Microelectronics chemical interactions at polymer­

metal interfaces of interest to, 179-188

Model study of the interface between polyimide and copper, 189-198

Molecular dynamic phenomena at polymer surfaces, 363-371

Molecular level metal and ceramic/ polymer composites, 35-55

Mossbauer spectra from Fe films on PTFE surfaces, 355-356

Mylar photolithographic plating of Pt

and Cu on, 57-71

Permeability of a metal-polymer system, 15-34

Photolithographic plating of Pt and Cu on insulating substrates, 57-71

Physical vapor deposition techniques

metallization of plastics by, 81-95

Plasma (dual frequency) modification of

polymer surfaces, 315-329 and adhesion improvement, 322-

325 and ageing effects, 325-328

enhanced chemical vapor deposition, metallization of PTFE by, 121-130

induced deposition of Cu films on polymer surfaces, 113-120

treatment of polymers and hydrophobic recovery, 363-371

treatment of polypropylene, 233-244

Plastics, metallization of ion beam assisted, 97-11 via low temperature arc vapor

deposition (LTAVD), 131-140 by magnetron sputtering, 141-148 by photolithographic plating,

57-71 by physical vapor deposition

techniques, 81-95

475

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Plastic surface modifications, 269-281, 283 -292, 293-303, 305-313, 315-329, 331-346, 387-403, 405-414

by base hydrolysis followed by protonation, 293-303, 305-313

by chemical modification, 405-414 by chemical pretreatment, 283-292 by dual frequency plasma, 315-329 by electrochemical reduction,

331-346 by ion beam induced chemical

reactions, 269-281 Plating (photolithographic) of Pt

and eu on Mylar, 57-71 Platinum

photolithographic plating of, on Mylar, 57-71

Polyalkylthiophene, aluminum on, 199-212

Polyaniline, aluminum on, 199-212 Polycarbonate

adhesion of electrolessly plated copper to, 415-436

Polyethyleneterephthalate XPS study of the interaction

between evaporated aluminum and, 219-231

Polyimide contact angle measurements on,

300-302 -copper interface, photoelectron

spectroscopy model study of, 189-198

diffusion and gettering simulations of ion implanted copper in, 149-161

electrochemical reduction of, and its effect on metal/ polyimide interfacial reliability, 331-346

films, Langmuir-Blodgett deposition of, 173-175

films on bulk metal substrates and comparison with metallized polyimides, 165-177

films, vapor deposition of, 172-173

metal-, interfaces under degradative ambients, 245-255

-metal system, 184-187 metal-, water induced degradation

of, 437-447 metallization by electrochemical

method, 3-14 metallized, and polyimide films on

bulk metal substrates, comparison of, 165-177

476

plasma treated, and contact angle measurements on, 315-329

surface chemical modification (base hydrolysis followed by protonation) of, 293-303

surface chemical pretreatment of, and metal coating, 283-292

surface chemically modified, diffusion of ions in a, 305-313

surface modification by ion beam treatment, 213-218

synthesis of metal and metal oxide containing, 35-55

titanium-, interface in a reducing environment, 257-266

Polymer(s) electroplating of, 15-34 membrane, permeability of, 17-25 -metal interfaces of interest to

microelectronics, chemical reactions at, 179-188

resin-metal system, 180-183 Polypropylene

surface treatment by ion and plasma techniques, 233-244

Polystyrene adherent electro less copper

layers on, 405-414 Polytetrafluoroethylene

adhesion of copper strips to, 123 metallization of, by means of

plasma-enhanced chemical vapor deposition, 121-130

Reducing environment study of titanium/polyimide

interface in a, 257-266 Reduction (electrochemical) of

polyimide and its effect on metal/polyimide interfacial reliability, 331-346

Simulations of diffusion and gettering of ion implanted copper in polyimide, 149-161

Sputtering magnetically enhanced, 90-91 (magnetron) for metallization of

plastics, 141-148 mechanism, 89-90 metallization by, 88-94 process parameters, 91-92

Sticky polymers through ion beam processing, 349-361

Surface modification (see Plastic surface modifications)

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Teflon (PTFE) adhesion of metal films to,

349-361, 379 Tensile extension test to measure

thin film adhesion, 449-460 Thin film adhesion measurement

using excimer laser ablation and tensile extension tests, 449-460

TiN hard coatings on plastics by magnetron sputtering, 141-148

Titanium film (ion beam mixed) on Kapton, adhesion of, 104

Titaniumjpolyimide interface in a reducing environment, study of, 257-266

Vapor phase deposition of polyimide films, 172-173

Vapor (physical) deposition techniques

metallization of plastics by, 81-95

Water-induced degradation of metal! polyimide interfaces, 437-447

Web metallizing process, 85-88 Wettability of plasma treat.ed

polymers, 318-329

477