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Copyright © 2019 Silvaco Inc. R1 FROM ATOMS TO SYSTEMS SPICE Modeling of Power Devices Bogdan Tudor December 2019

SPICE Modeling of Power Devices - MOS-AK

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Page 1: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

R1

FROM ATOMS TO SYSTEMS

SPICE Modeling of Power Devices

Bogdan Tudor

December 2019

Page 2: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc. Copyright © 2019 Silvaco Inc.

Agenda

• Power MOSFET capacitances

• Capacitance modeling of symmetric GaN HEMT

• Asymmetric GaN HEMT example

• Advantages of TCAD-based SPICE modeling

• Other TCAD-based SPICE modeling examples: VDMOS, IGBT

• Power MOSFET macromodeling in Utmost IV and SmartSpice

• Conclusion

Page 3: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

MOSFET Capacitance Modeling

• 4-terminal MOSFET gate capacitance characterization

• Symmetric devices: Cgs and Cgd are often characterized together as Cgc = Cgs + Cgd.

• Cgc: the LCR “low” terminal connects to both s and d.

• Cgg = Cgs + Cgd + Cgb: LCR “low” terminal connected to s, d and b.

• Capacitances are measured with Vgs swept from negative to positive, at Vds = 0.

Page 4: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Specific Power MOSFET Capacitances

• 3-terminal MOSFET• The b and s nodes are always connected together

• Main bias sweep is Vds

• Typical capacitances to measure:• Crss = Cgd

• Coss = Cgd + Cds

• Ciss = Cgs + Cgd

Page 5: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Symmetric GaN HEMT Device

• Symmetric GaN HEMT structure study, presented at MOS-AK 2018

• 3 device structures: L = 1mm, 2mm and 3mm, respectively

Page 6: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Symmetric GaN HEMT Capacitances

• MVSG HEMT model: Coss and Crss vs. Vds

Page 7: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Asymmetric GaN HEMT Device Structure

• TCAD device structure calibrated based on published data

• P-type doped GaN gate resulting in Vth > 0 (“normally-off” device)

Page 8: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Asymmetric GaN Device Structure: Challenges

• “Floating” GaN Buffer: SOI-like structure.

• Need to consider the gate current.

• Existing compact models are not based on this structure: may have to deal with unexpected device effects.

Page 9: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Unusual Subthreshold Region Behavior

• Unusual behavior observed in the subthreshold region of Id(Vgs).

Page 10: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Unusual Subthreshold Region Behavior

• The effect is due to carrier accumulation inside the GaNbuffer layer.

• A current path is formed through the GaN buffer’s inner region.

• This is different from the channel current of the main device.

• This appears to be a parasitic FET, in parallel with the main device, having a much lower effective mobility.

Page 11: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Confirmation and SPICE Modeling

• The “parasitic FET” device is confirmed from the Id(Vds) characteristics at Vgs < 0.5V.

• The effect can be modeled by adding a GaN FET device in parallel with the main one, in the Utmost IV Netlist.

Page 12: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Two FET SPICE Model Validation

• After extracting the linear region Id(Vgs) parameters, the modified netlist is confirmed.

Single FET netlist Netlist with added parasitic FET

Page 13: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Unusual Behavior of the Cgs and CgdCapacitances

• The issue appears for Vgs > 1.6V.• Similar to the HVMOS LDD-related Cgs and Cgd behavior.

• May be modeled by an extra resistor in series with the drain of the two FET devices.

Page 14: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Validation of the SPICE Macromodel

Netlist without the extra drain resistor Netlist with added drain resistor

Page 15: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Gate Current Effect on gm

Gate current disabled Gate current enabled

Page 16: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Asymmetric GaN HEMT: Macromodel Results

• Id(Vgs), gm(Vgs) and Ig(Vgs), at various Vds from 0.1V to 20V.

• Id(Vds) at Vgs < 0.5V (parasitic FET).

• Cgs(Vgs), Cgd(Vgs)

• Id(Vgs) at various temperatures

• Id(Vds) at Vgs >= 1V (self-heating)

Page 17: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

• TCAD simulations allows a separation of physical effects, not easy to achieve in real life (e.g., disabling self-heating).

TCAD-based SPICE Modeling:Unique Advantages

Page 18: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

TCAD-based SPICE Modeling:Unique Advantages (cont.)

• Model development: identifying specific device effects or parasitics and adding them to a SPICE macromodel, as extra circuit elements.

• Essential feature of Power MOSFET SPICE (macro)modeling.

Page 19: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

VDMOS Example: TCAD Structure

Page 20: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

VDMOS SPICE Modeling

• HiSIM_HV2 SPICE model using TCAD data

Page 21: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

IGBT SPICE Modeling

• HiSIM-IGBT SPICE model using TCAD data

Page 22: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Power MOSFET Macromodel Example

• Power MOSFET typical macromodel, netlist definition and model cards in Utmost IV

Page 23: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Power MOSFET MacromodelI-V and C-V Parameter Extraction

• Global I-V and C-V parameter optimization using Utmost IV

Page 24: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Dynamic Characterization

• Gate charge test circuit and waveforms [1, 2]

• Reverse recovery time of the body diode [1]

Page 25: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Gate Charge Parameters Tuning

• Using SmartSpice Rubberband with transient analysis

• Gate charge parameters

• Miller Plateau parameter tuning

Page 26: SPICE Modeling of Power Devices - MOS-AK

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Reverse Recovery Parameter Tuning

• Reverse recovery time and charge (trr, Qrr) parameters

Page 27: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc. Copyright © 2019 Silvaco Inc.

Conclusion

• Symmetric GaN HEMT capacitance modeling

• Macromodel for Asymmetric GaN HEMT developed in Utmost IV using TCAD information

• TCAD-based SPICE modeling carries unique advantages

• Power Device modeling examples based on the HiSIM SPICE model family: VDMOS, IGBT

• Combining the capabilities of TCAD, Utmost IV and SmartSpice enables a complete modeling methodology of Power devices, including dynamic characterization

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Page 28: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc. Copyright © 2019 Silvaco Inc.

References

1. *** “Power MOSFET Electrical Characteristics”, Toshiba Corporation, November 2016.

2. *** “Power MOSFET Basics”, Alpha & Omega Semiconductor, Application Note (http://www.aosmd.com/res/application_notes/mosfets/Power_MOSFET_Basics.pdf).

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Page 29: SPICE Modeling of Power Devices - MOS-AK

Copyright © 2019 Silvaco Inc.

Thank you!