44
1 Soft, Thin Skin-Mounted Power Management Systems and Their Use in Wireless Thermography Jung Woo Lee 1,2,† , Renxiao Xu 3,† , Seungmin Lee 1,† , Kyung-In Jang 1 , Yichen Yang 1 , Anthony Banks 1 , Ki Jun Yu 1 , Jeonghyun Kim 1,2 , Sheng Xu 4 , Siyi Ma 1 , Sung Woo Jang 1,5 , Phillip Won 1 , Yuhang Li 6 , Bong Hoon Kim 1 , Jo Young Choe 1 , Soojeong Huh 1,7 , Yong Ho Kwon 1 , Yonggang Huang 3,* , Ungyu Paik 2,* , John A. Rogers 1,* 1 Department of Materials Science and Engineering, Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA. 2 Department of Energy Engineering, Hanyang University, Seoul, 133-791, Republic of Korea. 3 Department of Mechanical Engineering, Civil and Environmental Engineering, Materials Science and Engineering, and Skin Disease Research Center, Northwestern University, Evanston, IL 60208, USA. 4 Department of NanoEngineering, Center for Wearable Sensors, Sustainable Power and Energy Center, Materials Science and Engineering Program, University of California, San Diego, La Jolla, CA 92093, USA 5 Department of Chemical and Biomolecular Engineering (BK21 Program), Korea Advanced Institute of Science and Technology, Daejeon, 305-701, Republic of Korea. 6 The Solid Mechanics Research Center, Beihang University (BUAA), Beijing 100191, China. 7 Samsung Display Co. Display R&D Center, Yongin-city, Gyeongki-do 446-711, Republic of Korea. †These authors contributed equally to this work. *Correspondence: [email protected] (J.A.R.), [email protected] (U.P.), y- [email protected] (Y.H.) Keywords: solid state lithium ion battery, multi-junction solar cell, stretchable electronics, energy harvest/storage/management, wearable technology

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Page 1: Soft, Thin Skin-Mounted Power Management System and …...As a control experiment, the NFC (SL13A, AMS) device collected data every 1 min with operation of a standard, NFC equipped

1

Soft, Thin Skin-Mounted Power Management Systems and Their Use in Wireless

Thermography

Jung Woo Lee1,2,†, Renxiao Xu3,†, Seungmin Lee1,†, Kyung-In Jang1, Yichen Yang1, Anthony

Banks1, Ki Jun Yu1, Jeonghyun Kim1,2, Sheng Xu4, Siyi Ma1, Sung Woo Jang1,5, Phillip Won1,

Yuhang Li6, Bong Hoon Kim1, Jo Young Choe1, Soojeong Huh1,7, Yong Ho Kwon1, Yonggang

Huang3,*, Ungyu Paik2,*, John A. Rogers1,*

1Department of Materials Science and Engineering, Frederick Seitz Materials Research Laboratory,

University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA. 2Department of Energy Engineering, Hanyang University, Seoul, 133-791, Republic of Korea. 3Department of Mechanical Engineering, Civil and Environmental Engineering, Materials Science and

Engineering, and Skin Disease Research Center, Northwestern University, Evanston, IL 60208, USA. 4Department of NanoEngineering, Center for Wearable Sensors, Sustainable Power and Energy

Center, Materials Science and Engineering Program, University of California, San Diego, La Jolla, CA

92093, USA 5Department of Chemical and Biomolecular Engineering (BK21 Program), Korea Advanced Institute of

Science and Technology, Daejeon, 305-701, Republic of Korea. 6The Solid Mechanics Research Center, Beihang University (BUAA), Beijing 100191, China. 7Samsung Display Co. Display R&D Center, Yongin-city, Gyeongki-do 446-711, Republic of Korea.

†These authors contributed equally to this work.

*Correspondence: [email protected] (J.A.R.), [email protected] (U.P.), y-

[email protected] (Y.H.)

Keywords: solid state lithium ion battery, multi-junction solar cell, stretchable electronics,

energy harvest/storage/management, wearable technology

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Supplementary Information

Supplementary Note 1: Materials and Methods

Interconnect fabrication. A ~100 µm thick layer of polydimethylsiloxane (PDMS, Sylgard

184) spin-cast on a glass slide and cured on a hotplate at 180 ˚C for 30 min served as a

temporary substrate for circuit fabrication. Placing this substrate in an ultraviolet/ozone

generator for 4 min created a hydrophilic surface on the PDMS. A polyimide (PI, HD

MicroSystems, 4.8 µm) layer spin-cast on top of the PDMS substrate, pre-baked on a hot

plate at 150 ˚C for 5 min and then hard-baked in the vacuum oven at 250 ˚C for 75 min

formed the base layer for the device. A 500 nm thick layer of Cu deposited with an

electron beam evaporator (e-beam evaporator, AJA) formed the active metallization.

Photolithography (AZ P4620, AZ 400K) and etching (Type CE-100) defined patterns of

electrodes and interconnects in this layer. Another PI (4.8 µm) layer coated on the Cu

encapsulated these traces. Deposition of SiO2 (50 nm) by plasma enhanced chemical vapor

deposition (PECVD, Plasma-Therm) yielded a layer for a hard etching mask. Photolithography

and reactive ion etching of the SiO2 (RIE, Plasma-Therm, 20 SCCM CF4, 100 W, 50 mT) and PI

(RIE, March, 20 SCCM O2, 150 W, 195 mT) and then the PI defined features to match the

geometry of the underlying Cu traces. Immersion in buffered oxide etchant removed the

remaining SiO2. A water soluble tape (Aquasol, USA) facilitated transfer of the resulting stack

to a stretchable substrate.

Substrate preparation and encapsulation. Mixing a base and curing agent for a silicone

elastomer (Ecoflex, Smooth-on inc., E~60 kPa) at a weight ratio of 1:2 and then spin casting

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at 250 rpm for 3 min and curing at room temperature overnight yielded a soft, stretchable

substrate with thickness of ~300 μm. An ultra-low modulus silicone material (Silbione 4717,

Bluestar, E~3 kPa) also mixed in a 1:2 (A:B) weight ratio spin-coated at 300 rpm for 6 min on

top of this substrate defined the based layer of the soft core for the devices. After transfer

printing the electrode/interconnect stack and bonding the components, another layer of

ultra-low modulus silicone material and silicone elastomer encapsulated the system to

complete the fabrication.

Component assembly. The solid state battery components are in a bare die format

(Enerchip CBC005 and Enerchip CBC050, Cymbet, ~ 200 µm thick) with Au ball bumps on

both anode/cathode electrodes to enable contacts via wire ball bonding (4524 Wire Ball

Bonder, Kulicke & Soffa). An impregnable insulation resin (IR0001, TEMCO) applied at the

edge of the solar cells (GaAs/InGaP dual junction, MicroLink, ~ 32 µm thick) and cured at

150 °C for 3 hr passivated the p-type contacts. A flip-chip method allowed assembly of

components on the metal electrodes using In97Ag3 alloy solder paste (Indalloy 290, Indium

Corporation) with heating at 190 °C for 1 min.

Mechanical testing of the device. An array of circular disks (200 µm radius) of chromium

(100 nm thick) deposited on the substrate through a shadow mask by electron beam

evaporation facilitated optical analysis of the distributions of strain. A customized

uniaxial/biaxial stretcher provided means for inducing controlled deformations. A single-lens

reflex camera captured images at different deformation levels. A dynamic mechanical

analyzer (TA instruments, Q800) yielded the stress/strain curves, under uniaxial tensile

loading. In addition, a DC sourcemeter (model 2400, Keithley) allowed measurement of the

I-V characteristics under biaxial stretching to confirm the mechanical/electrical integrity of

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the contact pads and interconnects. A flexural endurance tester (CK Trade, Korea) enabled

cyclic testing through sets of 1000 cycles at 0.5 Hz. Measurements of the solar cell and

battery array performance occurred before deformation and after 1, 100, 500, 1000 cycles of

uniaxial stretching.

Characterization of the device performance. An AM 1.5G solar simulator (91192, Oriel)

combined with a DC sourcemeter (model 2400, Keithley) allowed measurements of the I-V

characteristics of the solar cell array. A Gamry Reference 600 (Gamry Instruments,

Warminster, PA) in a two-electrode cell configuration enabled galvanostatic evaluation at

room temperature. The cut-off voltage was between 4.1 and 3.0 V during charge/discharge

steps. Chronopotentiometry methods yielded information on the solar cell and battery

integrated in a folded geometry. The working and counter/reference electrodes connected

to positive and negative output voltage pads of the system, respectively.

NFC Data-logging. Photolithographic patterning techniques applied to Cu foils (18 µm)

yielded stretchable NFC coils. A commercial NFC chip (RF430FRL152H 15xH NFC ISO 15693

Sensor Transponder, Texas Instruments) provided for temperature sensing, data storage and

voltage regulation, with a releasable battery backup as a power module. The regulated

working voltage ranges from 1.45 to 1.65 V. The chip includes a microcontroller (MSP430),

with 2kB, 4kB and 8kB of FRAM, SRAM and ROM, respectively. A customized NFC reader

collected and recorded temperature data wirelessly after measurement with data-logging.

An impedance analyzer (4291A RF impedance/material analyzer, Hewlett Packard) was used

for electromagnetic characterization. As a control experiment, the NFC (SL13A, AMS) device

collected data every 1 min with operation of a standard, NFC equipped smartphone (Galaxy

Note 4, Samsung).

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Mechanical Analyses of Fully-encapsulated/ Fully-bonded Cell Arrays: FEA. Full three-

dimensional (3D) FEA was used to analyze the post-buckling deformation, plastic yielding

and fracture of serpentine interconnects under uniaxial/biaxial stretching and compression.

The results also defined the elastic stretchability (or interchangeably used “reversibility”)

and total stretchability for interconnects with different geometric patterns and cross-section.

The simulation results presented in this work used commercial FEA software (ABAQUS). In

each FEA model, elastomeric composite silicone (Ecoflex/Silbione) substrates and

superstrates, as well as the comparatively thick battery cells were modeled employing 8-

node hexahedral brick solid elements (C3D8R), while the thin PI (4.8 um)/Cu (0.5 um)/PI (4.8

um) -layered serpentine interconnects and solar cells employed quadrilateral shell elements

S4R, defined by composite layups. Refined meshes yielded accurate results. Since the

adhesion between the PI and elastomeric surfaces was good, FEA models assumed that the

serpentine interconnects were perfectly bonded to the elastomer. The material properties,

namely effective elastic modulus (𝐸) and Poisson’s ratio (𝜈) were 𝐸𝑆𝑆𝑆𝑆𝑆𝑆𝑆𝑆=0.003 MPa and

𝜈𝑆𝑆𝑆𝑆𝑆𝑆𝑆𝑆=0.499 for Silbione; 𝐸𝐸𝐸𝑆𝐸𝑆𝑆𝐸=0.06 MPa and 𝜈𝐸𝐸𝑆𝐸𝑆𝑆𝐸=0.499 for Ecoflex; 𝐸𝐶𝐶=119

GPa and 𝜈𝐶𝐶=0.34 for copper; 𝐸𝑃𝑃=2.5 GPa and 𝜈𝑃𝑃=0.34 for PI; and 𝐸𝑆𝑆𝑆𝑆𝐸𝑆𝑆𝑆𝐶𝐸𝑆𝑆𝑆=85.9

GPa and 𝜈𝑆𝑆𝑆𝑆𝐸𝑆𝑆𝑆𝐶𝐸𝑆𝑆𝑆=0.34 for semiconductor components like solar cells and batteries.

Since both solar cell and battery arrays and their interconnects have periodicity in two

planar directions x and y, a representative “unit cell” was initially studied in design

optimization for maximum elastic stretchability. For serpentine interconnects, the elastic

stretchability (or reversibility) 𝜀𝑆𝐸𝑆−𝑆𝑆𝑒𝑒𝑆𝑆𝐸−𝑒𝑆𝑆𝑆𝑆𝐸ℎ was defined as the maximum applied

strain before plastic yielding. Total stretchability 𝜀𝑆𝐸𝑆−𝑆𝑆𝑆𝑒𝑆−𝑒𝑆𝑆𝑆𝑆𝐸ℎ, on the other hand, was

similarly defined for the fracture strain ~5% of the material. After iterative FEA-based design

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optimization, the final interconnect geometry was found to be a simple serpentine pattern

connecting the edge mid-points of two adjacent cells, with parameters detailed in

Supplementary Fig. S6a. Since the much more rigid component (solar cell or battery) islands

remain almost unaffected during deformation, interconnect stretchability (both elastic and

total) can be converted to their corresponding system-level stretchability via:

𝜀𝑒𝑠𝑒−𝑆𝑆𝑒𝑒𝑆𝑆𝐸−𝑒𝑆𝑆𝑆𝑆𝐸ℎ = �1 −�𝜂� ∗ 𝜀𝑆𝐸𝑆−𝑆𝑆𝑒𝑒𝑆𝑆𝐸−𝑒𝑆𝑆𝑆𝑆𝐸ℎ

𝜀𝑒𝑠𝑒−𝑆𝑆𝑆𝑒𝑆−𝑒𝑆𝑆𝑆𝑆𝐸ℎ = �1 −�𝜂� ∗ 𝜀𝑆𝐸𝑆−𝑆𝑆𝑆𝑒𝑆−𝑒𝑆𝑆𝑆𝑆𝐸ℎ

, where η is the areal coverage of electronic components.

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Supplementary Note 2: Fabrication procedures.

1) Energy device fabrication

Carrier substrate preparation

1. Clean a glass slide with acetone, IPA, and DI water.

2. Spin coat polydimethylsiloxane (PDMS; Sylgard 184) at 1500 rpm, 1 min.

3. Cure on a hot plate at 180 °C for 30 min.

Metal deposition and patterning

4. Expose PDMS/glass substrate to UV-ozone for 4 min.

5. Spin coat twice poly(pyromellitic dianhydride-co-4,4’-oxydianiline) amic acid solution (PI, PI 2545, HD Microsystems) at 1500 rpm for 1 min.

6. Soft-bake the substrate on a hot plate at 150 °C for 5 min.

7. Cure in a hot oven at 250 °C for 75 min.

8. Deposit 500 nm thickness of Cu using an e-beam evaporator (AJA International Inc.).

9. Spin coat photoresist (AZ 4620) at 3000 rpm for 30 s.

10. Cure on a hot plate at 110 °C for 3 min.

11. Align iron oxide mask and expose UV for 300 mJ cm-2.

12. Develop in aqueous developer (AZ 400 K).

13. Etch Cu with Cu etchant (CE-100, Transense).

14. Remove photoresist with acetone and IPA.

15. Spin coat twice poly(pyromellitic dianhydride-co-4,4’-oxydianiline) amic acid solution (PI, PI 2545, HD Microsystems) at 1500 rpm for 1 min.

16. Soft-bake the substrate on a hot plate at 150 °C for 5 min.

17. Cure in a hot oven at 250 °C for 75 min.

Device Isolation

18. Deposit 50 nm thickness of SiO2 using an e-beam evaporator (AJA International Inc.).

19. Spin coat photoresist (AZ 4620) at 3000 rpm for 30 s.

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20. Cure on a hot plate at 110 °C for 3 min.

21. Align iron oxide mask and expose UV for 300 mJ cm-2.

22. Develop in aqueous developer (AZ 400 K).

23. Remove SiO2 with reactive ion etching (RIE, Plasma-Therm) at 50 mTorr, 20 SCCM CF4, 100 W, 10 min.

24. Remove PI with reactive ion etching (RIE, March) at 195 mTorr, 20 SCCM O2, 150 W, 1500 s.

25. Clean with acetone and IPA.

26. Remove oxide with buffered oxide etch.

Retrieval and transfer printing

27. Retrieve the patterns using water soluble tape (Aquasol, USA).

28. Transfer the patterns on the Core/Shell substrate.

29. Remove water soluble tape with water.

Component assembly

30. Ball bond bare die components with wire ball bonder(4524 Wire Ball Bonder, Kulicke & Soffa) and passivate the components with impregnable insulation resin (IR0001, TEMCO).

31. Remove native oxide from the surface of the patterns with oxide remover.

32. Solder using In97Ag3 alloy solder paste (Indalloy 290, Indium Corporation) with heating at 190 °C for 1 min.

33. Encapsulation with Core/Shell superstrate.

2) NFC device fabrication

Carrier substrate preparation

1. Spin coat poly(pyromellitic dianhydride-co-4,4’-oxydianiline) amic acid solution (PI,

PI 2545, HD Microsystems) at 4000 rpm for 1 min on Cu foil (18 μm thick, Oak

Mitsui Micro-thin series).

2. Soft-bake the substrate on a hot plate at 150 °C for 5 min.

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3. Cure in a hot oven at 250 °C for 75 min.

4. Clean a glass slide with acetone, IPA, and DI water and spin coat polydimethylsiloxane (PDMS; Sylgard 184) at 1500 rpm, 1 min. Cure it at room temperature overnight.

5. Laminate PI coated Cu foil.

#1 Metal layer patterning

6. Spin coat photoresist (AZ 4620) at 3000 rpm for 30 s and cure on a hot plate at 110 °C for 3 min.

7. Align iron oxide mask and expose UV for 300 mJ cm-2 and develop in aqueous developer (AZ 400 K).

8. Etch Cu with Cu etchant (CE-100, Transense) and remove photoresist with acetone and IPA.

Via hole patterning

9. Spin coat poly(pyromellitic dianhydride-co-4,4’-oxydianiline) amic acid solution (PI, PI 2545, HD Microsystems) at 4000 rpm for 1 min on it.

10. Soft-bake the substrate on a hot plate at 150 °C for 5 min and cure it in a hot oven at 250 °C for 75 min.

11. Spin coat photoresist (AZ 4620) at 3000 rpm for 30 s and cure it on a hot plate at 110 °C for 3 min.

12. Align iron oxide mask and expose UV for 300 mJ cm-2 and develop in aqueous developer (AZ 400 K).

13. Remove PI with reactive ion etching (RIE, March) at 195 mTorr, 20 SCCM O2, 150 W, 600 s.

14. Remove photoresist with acetone and IPA.

#2 Metal layer patterning

15. Deposit 1 μm thickness of Cu using an e-beam evaporator (AJA International Inc.).

16. Spin coat photoresist (AZ 4620) at 3000 rpm for 30 s and cure it on a hot plate at 110 °C for 3 min.

17. Align iron oxide mask and expose UV for 300 mJ cm-2 and develop in aqueous developer (AZ 400 K).

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18. Etch Cu with Cu etchant (CE-100, Transense).

19. Clean with acetone and IPA.

20. Spin coat poly(pyromellitic dianhydride-co-4,4’-oxydianiline) amic acid solution (PI, PI 2545, HD Microsystems) at 4000 rpm for 1 min on it.

21. Soft-bake the substrate on a hot plate at 150 °C for 5 min and cure it in a hot oven at 250 °C for 75 min.

Device Isolation

22. Deposit 50 nm thickness of SiO2 using an e-beam evaporator (AJA International Inc.).

23. Spin coat photoresist (AZ 4620) at 3000 rpm for 30 s.

24. Cure on a hot plate at 110 °C for 3 min.

25. Align iron oxide mask and expose UV for 300 mJ cm-2.

26. Develop in aqueous developer (AZ 400 K).

27. Remove SiO2 with reactive ion etching (RIE, Plasma-Therm) at 50 mTorr, 20 SCCM CF4, 100 W, 10 min.

28. Remove PI with reactive ion etching (RIE, March) at 195 mTorr, 20 SCCM O2, 150 W, 1500 s.

29. Clean with acetone and IPA.

30. Remove oxide with buffered oxide etch.

Retrieval and transfer printing

31. Retrieve the patterns using water soluble tape (Aquasol, USA).

32. Transfer the patterns on the Core/Shell substrate.

33. Remove water soluble tape with water.

Component assembly

34. Remove native oxide from the surface of the patterns with oxide remover.

35. Solder using Sn42Bi58 alloy solder paste (SMDLTLFP-ND, Chip Quik Inc.) with heating at 190 °C for 1 min.

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Supplementary Figure S1 | Images of a system that includes a 4x4 array of 2J solar cells

and magnified view of one of the interconnects during stretch. (a) 4 X 4 array of solar cells

and interconnect (inset). (b) Deformation of an interconnect on a layer of core material from

an initial (0%) to a stretched (30%) state.

a

b

0.5 mm 1 mm

1 cm

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Supplementary Figure S2 | Comparison of 3D-FEA modeling of a unit cell during uni-axial

tension. Stretchable units with (a) core-shell encapsulation and (b) encapsulation only with

the shell material, both stretched from 0% to 30%. The results highlight strains in the

metal layer of the interconnect structure.

0%

10%

20%

30%

Core/Shell Shell

0%

10%

20%

30%

0.3

0ε m

ax(%

)

a b

0.3

0

ε max

(%)

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Supplementary Figure S3 | 3D-FEA results of the device components z-axis strain

distribution with spatial mapping. (a) Full geometry view of 3D-FEA results of Fig. 1e and (b)

maximum principal strain across the thickness direction for three different locations across a

system with core-shell design. The strain in the elastomer reaches a peak value in the

plane of electronics for the most severely deformed location

150

0εm

ax(%

)

0.3

0εm

ax(%

)

90

0εm

ax(%

)

90

0εm

ax(%

)

150

0εm

ax(%

)

Electronics

Bottom Core

Bottom Shell

Top Shell

Top Core

2 1

3

Bottom Core

BottomShell

TopCore

TopShell

0.0 0.2 0.4 0.6 0.80

40

80

120

160 Point 1Point 2Point 3

Max

.Prin

cipa

l Str

ain

in E

last

omer

(%)

Distance from top surface (mm)

a

b

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Supplementary Figure S4 | 3D-FEA modeling results for the distribution of strains in

different layers of a single unit cell upon uniaxial elongation. The two cases correspond to

(a) core-shell encapsulation with insufficient core thickness (200 μm with tPI=4.8 μm; Fig. 1e)

and (b) encapsulation only with the shell material, both stretched to ~39%, corresponding to

an elongation of 170% in the interconnects.

90

0

ε max

(%)

0.3

0εm

ax(%

)

a

150

0ε m

ax(%

)

0.3

0εm

ax(%

)

b

150

0

ε max

(%)

Electronics

Bottom Core

Bottom Shell

Electronics

Bottom Shell

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Supplementary Figure S5 | Experimental and computational studies of strain decoupling,

and rate dependent moduli. (a) Layout of the test structure and image of a corresponding

device mounted in a clamp used for DMA measurements. Stress/strain curves from (b)

experiment and (c) 3D-FEA. Stress/strain curves of the Core/Shell (d) with and (e) without

the device components at different strain rates (5% / min, 50% / min, 100% / min).

a

clamping line

11.5

2 m

m

5.02 mm

Stretchable design

bFEA

0 5 10 150

5

10

15

20

25

Stre

ss (k

Pa)

Strain (%)0 5 10 150

5

10

15

20

25

Strain (%)

Stre

ss (k

Pa)

Experimentc

DMA set-up

Shell w/ deviceShell w/o deviceCore/Shell w/ deviceCore/Shell w/o device

0 1 2 3 4 50

1

2

3

4

Stre

ss (k

Pa)

Strain (%)

5%/min50%/min100%/min

0 1 2 3 4 50

1

2

3

4

Stre

ss (k

Pa)

Strain (%)

dWithout deviceWith device

e

Shell w/ deviceShell w/o deviceCore/Shell w/ deviceCore/Shell w/o device

5%/min50%/min100%/min

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Supplementary Figure S6 | 3D-FEA modeling results for different interconnect designs. (a)

Schematic illustration and dimensions of an overall system (left), and simple and self-similar

interconnect geometries (right). (b) Interconnect patterns in their initial, unloaded states.

Simple interconnects show higher elastic stretchability than self-similar interconnects in

both with (c) core-shell encapsulation and (d) shell-only encapsulation.

a

b

c

d

Cu (0.5 µm, 119 GPa)PI (4.8 µm, 2.5 GPa)

PI (4.8 µm, 2.5 GPa)

Simple serpentine pattern

Embedded in Core/Shell, =170%

Embedded in Shell, =42%

Self-similar pattern

Embedded in Core/Shell, =94%

Embedded in Shell, =24%

radius=0.175mm

2.2m

m

1.5mmSerpentine width=0.1mm

radius=0.1375mm

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Supplementary Figure S7 | Elastic stretchability evaluated by 3D-FEA for various types of

interconnects with core/shell encapsulation. The geometries include (a) half-period simple

serpentine, (b) half-period self-similar, (c) 1.5-period simple serpentine, and (d) horseshoe

curve, all with the same core-shell encapsulation. All cases show inferior interconnect

stretchability compared to the simplest design (170%).

a Half-period simple serpentine

=92%

Half-period self-similar

=118%

b

c 1.5-period simple serpentine

=130%

Horseshoe

=110%

d

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Supplementary Figure S8 | Computational mechanics studies of interconnects with various

cladding geometries and encapsulation configurations. (a) Elastic stretchability as a

function of PI cladding layer thickness showing a non-monotonic dependence of

interconnect elastic stretchability εict-elastic-stretch on PI thickness, where the maximum εict-elastic-

stretch obtains at a thickness of 4.8 μm. (b) Maximum principal strains in the metal as a

function of unit cell elongation with (blue) and without (red) the core material.

t PI

t PI

t Cu =0.5 µm

a

b

0.3 2.7 5.1 7.5 9.9 12.360

100

140

180

Elas

tic S

tret

chab

ility

(%)

PI Layer Thickness (um)

00.0

0.1

0.2

0.3

0.4

0.5

Core/ShellShell

Stra

in o

n M

etal

(%)

Unitcell Strain (%)

Plastic

Elastic

10 20 30 40

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19

Supplementary Figure S9 | System layouts that consist of 2X2 and 4X4 arrays of 2J solar

cells.

11.5

2 m

m

20.52 mm

24.5

2 m

m

33.52 mm

2X2 array

4X4 array

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20

Supplementary Figure S10 | System layouts that consist of 2X2 and 4X4 chip-scale

batteries.

13.7

2 m

m

22.72 mm

28.9

2 m

m

37.92 mm

2X2 array

4X4 array

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21

Supplementary Figure S11 | Computational and experimental studies of a system with a

2X2 array of 2J solar cells on core material. (a) Optical images and (b) 3D-FEA modeling of

the array at different levels of bi-axial stretching. The strains in the metal and in the core

material are highlighted.

a b

After stretching

Stain of substrate

0 %

10 %

20 %

30 %

Top surface of bottom core

0.30 εmax(%)

1500 εmax(%)

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22

Supplementary Figure S12 | Computational and experimental studies of a system with a

2X2 array of chip-scale batteries on core material. (a) Optical images and (b) 3D-FEA

modeling of the array at different bi-axial stretching levels. The strains in the metal and in

the core material are highlighted.

0 %

10 %

20 %

30 %

After stretching

a b

Top surface of bottom core

0.30 εmax(%)

1500 εmax(%)

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23

Supplementary Figure S13 | 3D-FEA results with a focus on total stretchabilities for bi-axial

tensile loading of a unit cell embedded in a core/shell encapsulation. Simple serpentine

unit cell structures (a) without and (b) with the use of pre-strain. Systems composed of 2X2

arrays of (c) 2J solar cells and (d) chip-scale batteries.

a

c

d

5

0εm

ax(%

)

=57.2%

b

~55%

~45%

=73.0%

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24

Supplementary Figure S14 | Optical images of strain mapping associated with bi-axial

stretching (to 30%) applied to a system consisting of a 2X2 array of 2J solar cells (a)

without and (b) with core material.

a

b

30 %

30%

30 %

30%

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25

Supplementary Figure S15 | 3D-FEA results for stretchability as a function of the thickness

of the top layer shell of the encapsulation thicknesses.

Core Encapsulant (0.3 mm)

Core Substrate (0.3 mm)

Shell Superstrate (x)

Shell Substrate (0.3 mm)

Device

0 100 200 300

34

36

38

40

Uni

t cel

l ela

stic

str

etch

abili

ty (%

)

Shell superstrate thickness (µm)

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26

Supplementary Figure S16 | Computed and experimentally observed deformation of a

system that consist of a 2X2 array of 2J solar cells with core-shell encapsulation under 30%

biaxial load.

30 %

30%

5 mm0 %

0%

5 mm

0.30 εmax(%)

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27

Supplementary Figure S17 | Mechanics of a system consisting of 2X2 and 4X4 of 2J solar

cells. (a) Computational and experimental studies of a device formed using a pre-strain

strategy, stretched bi-axially up to the limit of elastic stretchability (53%). (b) 3D-FEA result

for stretching along the vertical direction. (c) Photos of a system that consists of a 4X4 array

of 2J solar cells mounted near the wrist and deformed with compressing and stretching.

0.30 εmax(%)

0 %

53 %

5 mm

36%

0.3

0εm

ax(%

)

a

b

c

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28

Supplementary Figure S18 | Current – Voltage curves measured from the serpentine

interconnects under different levels of biaxial strain (0% - 50%). The resistance value is

almost consistent with ~10.6 Ω.

-0.1 0.0 0.1

-10

-5

0

5

10

Voltage (V)

e = 0%e = 10%e = 20 %e = 30%e = 40 %e = 50 %

Cur

rent

(mA)

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29

Supplementary Figure S19 | Electroluminescence from a system that consists of a 2X2

array of 2J solar cells, measured before and during deformation. Optical images of

electroluminescence at (a) 0% (before application of bias; right panel) and (b) 20% uni-axial

stretching.

a

b

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30

Supplementary Figure S20 | Output voltage from a system that consists of a 2X2 array of

chip-scale batteries, measured before and during deformation. Optical images of output

voltage at (a) 0% and (b) 30% of bi-axial stretching.

a

b

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31

Supplementary Figure S21 | Performance for solar cell and battery systems under cyclic

deformation. Performance of systems that consist of 2X2 arrays of (a) 2J solar cells under

AM 1.5 illumination and (b) chip-scale batteries during 500 μA of discharge current. The data

shown here were collected after application of 1st, 100th, 500th, and 1000th cycle of 15 %

uni-axial tensile strain.

b

a

0 1 2 3 4 50

-1

-2

-3

-4

Cur

rent

(mA)

Voltage (V)

@ 500 µA

@ AM 1.5

1st100th500th1000th

0 300 600 900 1200 15003.0

3.5

4.0

Volta

ge (V

)

Time (s)

1st100th500th1000th

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32

Supplementary Figure S22 | Isolated component performance for 2J solar cells and

batteries. Performance for (a) 2J solar cell under AM 1.5 illumination and (b) chip-scale

battery under 100 μA of discharge current.

a

b

@ 100 μA

@ AM 1.5

0 500 1000 1500 20003.0

3.5

4.0

Volta

ge (V

)

Time (s)

ChargeDischarge

0.0 0.5 1.0 1.5 2.0 2.50

-1

-2

Voltage (V)

Cur

rent

(mA)

0

1

2

3

4

5

Pow

er (m

W)

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33

Supplementary Figure S23 | Array performance of interconnected 2J solar cells and chip-

scale batteries. Performance of systems that consist of 4X4 arrays of (a) 2J solar cells

under AM 1.5 illumination and (b) chip-scale batteries at 500 μA, 1 mA, 5 mA, 10 mA, and 20

mA of discharge current.

b

a

@ AM 1.5

0 10 20 300

-1

-2

Voltage (V)

Cur

rent

(mA)

0

20

40

60

Pow

er (m

W)

0 2000 4000 60003.0

3.5

4.0

Volta

ge (V

)

Time (s)

500 µA1 mA5 mA

10 mA20 mA

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34

Supplementary Figure S24 | Enlarged graphs of battery module performance at high

power operation. Performance of a system that consist of a 4X4 array of chip-scale battery

at 5 mA, 10 mA, and 20 mA as (a) voltage (V) vs. time (s) and (b) power (mW) vs. time (s).

0 200 400 6003.0

3.5

4.0

Volta

ge (V

)

Time (s)

0 200 400 6000

20

40

60

80

Pow

er (m

W)

Time (s)

5 mA 10 mA20 mA

5 mA 10 mA20 mA

b

a

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35

Supplementary Figure S25 | Re-charging of a battery module by use of a releasable solar

cell module. (a) Layout of the releasable solar cell module and (b) an optical image of the

actual device and its performance under AM 1.5 illumination. (c) A photo of a battery

module and solar cell module laminated together for battery charging under sunlight.

Changes in output voltage of a battery module (d) before and (e) after re-charging using the

procedure shown in (c). (f) Image of battery re-charging in water. (g) A graph of output

voltage as a function of time during battery re-charging under room light.

16.8

5 m

m

39.44 mm

Solar cell

Battery

Before charging After charging

b

a c

d e

f g

0 1 2 3 4 50

-1

-2

Voltage (V)

Cur

rent

(mA)

0246810

Pow

er (m

W)

0 2000 4000 6000 80003.8

4.0

Volta

ge (V

) light-onlight-off

Time (s)

Charging under sunlight

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36

Supplementary Figure S26 | An integrated system consisting of an LED module laminated

onto a battery module. (a) Image of integration of a stretchable LED module and a battery

module. (b) Operation of the LED module using power supplied underwater and mounted on

a human forearm.

b

a

LED

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37

Supplementary Figure S27 | Layout of a foldable solar cell/power management

circuit/battery integrated device.

22.7

2 m

m

45.98 mm

Battery Solar cell

1

2 3PMC

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38

Supplementary Figure S28 | Geometry and performance of a foldable solar cell/power

management circuit/battery integrated device. (a) X-ray computed tomography images of

the folded system, with magnified view of overlapped interconnect. (b) Output voltage as a

function of time under constant uni-axial strain (15%) for conditions with and without

exposure to light.

0 30 60

3.8

4.2

4.6

Volta

ge (V

)

Time (s)

relaxedstretched

lightoff

lighton

lightoff

b

a

90

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39

Supplementary Figure S29 | Layout of (a) battery-integrated NFC device and (b) the system

with integrated LED alarm.

a28

.8 m

m

35.86 mm

12

3 4

56

6

7

8 910

10

releasable battery

b

12

3

4 5

36

7

8

9

1011

12

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40

Supplementary Figure S30 | Sensor calibration. Each point represents the averaged value of

the wireless output of an NCF system at different temperatures (30, 35, 40, 45, and 50 °C).

The plot shows a linear relationship with r (Pearson’s correlation coefficient) ~99.9%, where

xi and yi correspond to the ith sample, and and , respectively.

5100 5400 5700 6000 6300

30

35

40

45

50

A. U.

Averaged values of TI ChipLinear fitting

Tem

pera

ture

(°C

)y=0.01693x-54.71238

r= 0.99979

∑∑ ∑

ni ii=1

n n2 2i ii=1 i=1

(x - x)(y - y)r =

(x - x) (y - y)

=

= ∑n

ii 1

1x xn =

= ∑n

ii 1

1y yn

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41

Supplementary Figure S31 | Atmospheric temperature logging using a battery-integrated

NFC device.

Indoor Outdoor

0 300 60020

22

24

26

28

30

Tem

pera

ture

(°C

)

Time (s)

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42

Supplementary Figure S32 | Voltage measured from the regulator and a battery module.

Voltage monitoring by chronopotentiometry of (a) regulator and (b) battery module that

consists of a 4X4 array of chip-scale batteries. The enlarged graphs on the right highlight the

active and sleep modes of NFC device operation. (c) Voltage level of a battery module

monitored via the NFC device.

0 4000 8000 120000

1

2

3Vo

ltage

(V)

Time (s)

Regulator

0 4000 8000 12000

3

4

Volta

ge (V

)

Time (s)

Battery

6100 6150 6200 62503.879

3.880

3.881

3.882

3.883

3.884

Volta

ge (V

)

Time (s)

Battery

0 200 400 600

0

1

2

3

4

Volta

ge (V

)

Time (s)

Regulatoractive mode

sleep mode

sleep mode

active mode

battery connect

b

a

c

0 4000 8000 12000

3

4

Volta

ge (V

)

Time (s)

Battery

Wireless monitoring

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43

Supplementary Figure S33 | Temperature alarm system that includes an LED integrated

with a battery-NFC device. Optical images of (a) battery-NFC device and (c) application of

ice pack to trigger the temperature alarm, seen through activation of the LED. (b) IR images

before and after applying the ice pack.

a

b 35

Tem

pera

ture

(°C

)-10

c

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44

Supplementary Table S1 | Information on components used in the device. The specification

of the chips for (a) foldable power management device (Supplementary Fig. 27), (b) battery

integrated NFC device (Supplementary Fig. 29a), and (c) battery-integrated system with

integrated LED alarm (Supplementary Fig. 29b).

aDevice number Specification

1 Jumper

2 0.1 μF

3 CBC910

bDevice number Specification

1 RF430FRL152H

2 10 pF

3 24 kΩ

4 0.01 μF

5 440 kΩ

6 Jumper

7 560 kΩ

8 BD9120

9 4.7 mH

10 10 μF

Device number Specification

1 RF430FRL152H

2 10 pF

3 10 μF

4 24 kΩ

5 Jumper

6 196 kΩ

7 825 kΩ

8 100 Ω

9 625 nm, InGaAlP, LED

10 500 Ω

11 0.1 μF

12 1 μF

c