The SERC (Science and Engineering Research Council) nano Fabrication, Processing and Characterisation (SnFPC) platform aims to make the extensive research facilities at the Agency for Science, Technology and Research (A*STAR) accessible to all researchers. The facility at the Institute of Materials Research and Engineering (IMRE) forms the hub of a wide network and provides easy access to a wide range of micro/nano fabrication and material characterisation techniques and the related expertise.

SnFPC AT IMREThe SnFPC group manages the maintenance and operation of the relevant IMRE facilities, and encourages researchers from other organisations to base associated research projects here.

The IMRE facilities include a large clean room which is purpose-built for research work into a variety of different materials, and an impressive range of major equipment.

SnFPC employs dedicated staff that are trained and experienced in the use of its specialist equipment. These staff are on hand to train and assist new users of such facilities, offer the service of baseline processes and characterisation as well as to contribute in research projects whenever necessary.

SCOPE AND OBJECTIVES• SnFPC encompasses a network of world-class facilities and expertise from

across the SERC Research Institutes.

• SnFPC offers an extensive range of characterisation, nanofabrication services and advice to all parties across Singapore.

• The range of baseline fabrication processes offered by SnFPC is constantly being updated through the results of research projects across the SnFPC user community.

• The dedicated facility staff are highly trained in the use of the equipment and its associated processes.

• The SnFPC staff contribute as team members in research projects, for consultancy or service work or to train new users on the equipment.

SnFPC is fully committed to provide efficient and excellent quality service in nanofabrication and material characterisation.

A platform facilitating ideas and innovations

Institute ofMaterials Researchand Engineering

LIST OF FABRICATION EQUIPMENTDeposition• Plasma Enhanced Chemical Vapour

Deposition System (Nextral)• Low Pressure Chemical Vapour Deposition

System (Centrotherm)• RF/DC Sputtering System 1 (Denton)• RF/DC Sputtering System 2 (Denton)• Unbalanced Magnetron Sputtering System

(Nanofilm)• E-Beam Evaporation System 1 (Edwards)• E-Beam Evaporation System 2 (Edwards)• Thermal Evaporation System (Edwards)

Dry Etching• Shuttle Lock Inductive Coupled Plasma (ICP)

Etching System (Unaxis)• DRIE/ICP Etching System (Oxford)• RIE II Etching System (Oxford)• RIE I Etching System (Trion Sirus)• UV & Ozone Dry Stripper (Samco)

Patterning• Mask & Bond Aligner, MA 8 (Karl Suss)• Mask & Bond Aligner, MA 6 (Karl Suss)• E-beam Direct Write Lithography System

(Elionix)• Laser Pattern Generator (Heidelberg)• HMDS/Image Reversal Oven (YES)• Inkjet Printer (Litrex)

Annealing• Rapid Thermal Processing System

(Jipelec)• Rapid Thermal Processing System

(Unaxis)• Vacuum Furnace (Jipelec)• Conventional Furnace

Metrology• Optical Microscope (Olympus)• Optical Microscope (Zeiss)• Film Thickness Measurement

(Nanocalc)• Surface Profiler (KLA-Tencor)

Backend Process• Lapping & Polishing System (Logitech)• Wafer Dicing System (Disco)• Wire Bonding System

(K&S)• Laser Ablation System

(ESI)• Freeze Drying System

(Labconco)

UltraViolet-assisted Rapid Thermal Annealing (UV-RTA)

Inductively Coupled Plasma Etching

Metalorganic Chemical Vapour Deposition

Microscopy• Transmission Electron Microscope (Philips)• Transmission Electron Microscope (JEOL)• Field Emission Scanning Electron Microscope (JEOL)• Scanning Electron Microscope (JEOL)• Ion Miller (EAF)• Ion Miller (Fischione)• Focused Ion Beam Single Beam (FEI)• Focused Ion Beam Dual Beam (FEI)• Multimode AFM (Veeco)• Microtome (Leica)

Surface & X-ray Analysis• Time 0f Flight - Secondary Ion Mass Spectrometer (ION)• GADDS Wide Angle XRD (Bruker)• MultiPurpose Diffractometer (Philips )• High Resolution XRD (PANalytical)• X-ray Photoelectron Spectroscopy (ESCALab)• X-ray Photoelectron Spectroscopy (Thetaprobe)

Spectroscopy• Nuclear Magnetic Resonance (Bruker)• Nuclear Magnetic Resonance (Varian)• Fourier Transform Infrared Spectrometer (Perkin Elmer)• Fourier Transform Infra Red Spectrometer (Bruker)• Micro Raman System (Jobin Yvon)• Photoluminescence Mapping System (Accent)• UV-Visible-NIR Range Micro-Spectrophometer (Craic)• Variable Angle Spectroscopic Ellipsometry (Woollam)• CHNS-O Element Analyser (Flash)

Mechanical Analysis• Universal Tester (Instron)• Zwick Mechanical Tester (Instron)• Microforce Tester (Instron)• Servohydraulic Universal Tester (Instron)• Impact Tester (Instron)• Nanoindentation System (UMIS)• Nano-Mechanical Probe (MTS)

Thermal Analysis• Thermo Gravimetric Analyzer (Perkin Elmer)• Thermo Gravimetric-Infra Red Analyzer (Perkin Elmer)• Micro Thermal Analyzer (Thermal Advantage)• Modulated Differential Scanning Calorimeter (TA instruments)• Photo Differential Scanning Calorimeter (TA instruments)• Dynamic Mechanical Analyzer (TA instruments)• Thermo Mechanical Analyzer (TA instruments)• Simultaneous DSC/TGA (TA instruments)

Electrical Analysis• Hall Equipment (Accent)• Electrochemical Capacitance Voltage Profiler

(Accent)• I-V Measurement System (Agilent)

Others• High Performance Liquid Chromatography (Waters) • Gel Permeation Chromatography (Waters) • Liquid Chromatography –Mass Spectrum

(Shimadzu)• Gass Chromatography Mass Spectroscopy

(Varian)• Rheometer (Rheometric)• Viscometer (BrookField)• Tensiometer (Kruss)• Brunaeur, Emmet and Teller Analyzer

(Quantachrome Nova)• Water Permeation system (Mocon)• Contact Angle Goniometer (Rame-Hart)

LIST OF CHARACTERISATION EQUIPMENT

Time of Flight - Secondary Ion Mass Spectrometer (ToF - SIMS)

X-ray Photoelectron Spectroscopy (XPS)

High-Resolution X-ray Diffractometry

Nanoindentation

Published May 2012

Institute of Materials Research and Engineering (IMRE)A research institute of the Agency for Science, Technology and Research

3 Research Link, Singapore 117602Tel: +65 6874 8111 Fax: +65 6872 0785Email: enquiry@imre.a-star.edu.sgwww.imre.a-star.edu.sg

ABOUT IMREAt the Institute of Materials Research and Engineering (IMRE),

we are committed to high-quality, extensive materials research

and development to bring about the latest in innovation and

technology. We stand by the importance of materials research,

which represents a vital platform for building Singapore’s

competitive advantage in a knowledge-based economy.

Established in 1997, IMRE undertakes research in selected fields

of materials science and engineering, including optoelectronics,

nanomaterials, chemicals, and polymers. Our new innovations

and discoveries are constantly being explored to help further the

applications of advanced materials and processes.

IMRE is a member of the Agency for Science, Technology and

Research (A*STAR), and is closely linked with the National

University of Singapore (NUS) and Nanyang Technological

University (NTU).

We develop core competence and interdisciplinary teams in

critical technology areas, enabling fundamental new discoveries,

the development of advanced materials that lead to new

commercial products, and the transformation of various

technologies.

Partnering international organisations, research institutes

and industry in a synergistic, multidisciplinary and collaborative

approach to materials research further fulfils IMRE’s vision

to be the leading research institute for materials science and

engineering.