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Guilhem Delpu -
SMART platform for flexible manufacturing
Collaborative programs manager
Brief profile of RECIF Technologies
Brief profile – Worldwide locations
KoreaLSTec
(Sales, Service)
ChinaBD Tech
(Sales, Service)
United-KingdomEMU Technologies
(200mm sales service)
JapanKMT
(Sales, Service)
Singapore, MalaysiaDOU YEE
(Sales, Service)
RECIF Tech France - HQ (Admin, R&D, Sales, service, training facility)
RECIF Tech U.S.A. (Sales, service, training facility)
RECIF Tech Taiwan(Sales, service, training facility)
IndiaIHE
(Sales, Service)
Brief profile – Over 30 years experience
1982
20021985 - 1990
1996 2005
Vacuum Handling Systems
Manual and
Automated tools
First 300mmWafer sorters
300mm wafer sorter World Leader
G5 generation 300mm sorter
2011
Project leader in NGC450 project
2013
300mm cleanliness breakthrough @ 26 nm particle size
2014
450mm EFEM for EU pilot line
2016
G5+ new 300mm wafer sorter
2015
Project leader inTSV-HANDY project
At
Acknowledged as a leader for 300mm wafer sorters
- Over 90% of turnover outside Europe
- 750++ units shipped worldwide
- Supports most advanced manufacturing sites and R&D centers
- Partnering in leading edge collaborative development programs
- Offers unsurpassed performance levels
Problem statement
Flexible manufacturing – Problem statement
Flexible manufacturing seen by RECIF is the ability for robotics to offer:
Flexibility for hardware challenges:
- Different substrate sizes (200mm, 300mm, 380mm, …)
- Different substrates shapes (round wafers, panels)
- Different substrate materials (Si, glass, molding compound, …)
Flexibility for software challenges:
- Different tool controller providers to interface with
- SMART manufacturing prerequisites (connectivity / security)
Data collection / internal exchange capability / secured external exchange / predictive maintenance …
Solution developed by RECIF Technologies
Modular approach for EFEM’s and Sorters
Common robotics core interfaced with all necessary loading stages and end effectors to support:
- Advanced cleanliness for node reduction on silicon wafers
- Hetegogeneous substrates in 3D IC, TSV, advanced packaging, etc…
Solution – SMART Platform – Hardware open platform
Solution – SMART Platform – Multi Software platform
Collaborate with major software solution providers
Involved in SMART manufacturing, INDUSTRY 4.0, « Factory of the future »…
Demonstrated software integration with:
A2CF frameworkLink
Tool commanderLink
PEER group Tool OrchestratorLink
RECIF 300mm EFEM integration with IBS implanter tool for 5nm
demonstration. Driven by AIS tool commander
(with ASML; imec; AMIL)
RECIF 300mm EFEM & Frame EFEM integrated with UNITY
metrology / inspection modules driven by PEER PTO.
To be demo at Amkor Technology Portugal
Solution – SMART Platform – Multi application platform
(Running CATRENE project)
Integration with:
inin
(Running ECSEL JU project)
Collaboration with major European OEM’s
To challenge the performance and the maturity of RECIF SMART Platform
- Heterogeneous wafer handling and inspection platform
Bonded wafers Warped FO-WLP wafers Glass wafers
Solution – SMART Platform – « More than Moore » applications
(Running CATRENE project)
One challenge is the multi substrates management
with SMART auto-tuning capability (robot) depending
on substrate detected
- Frame handling and metrology platform
Prototype 380 frame
with RFID tag
New 380 shipper New 380 FOUP
Solution – SMART Platform – « More than Moore » Application
(Running CATRENE project)
Innovative modules to improve the logistics of frames inside
and outside the Fab.
Solution – SMART Platform – « More Moore » application
(Running ECSEL JU project)
- European wafer handling platform
Demonstration of :
- Robotics superior cleanliness and throughput for 5nm implant
- Advanced software services
Predictive maintenance
SMART maintenance mode
Conclusion
Conclusion
• Automation equipment suppliers face new challenges with flexible manufacturing requirement
• RECIF issued its vision of the SMART platform concept in 2016
- Accomodate different substates size / material / shape with the platform
- Be compatible with key tool controlers
• Collaborative approach to speed-up learning cruve and demonstrate in positive ecosystem
• RECIF will deploy its SMART platform solution by 2018 to support industry