PRODUCT INFORMATION

SMART AUTOMATION FOR SEMICONDUCTOR FABS

SMART AUTOMATION

Manually operated semiconductor fabs with abroad range of products and technologies areincreasingly faced with on-site logistical chal-lenges. Demanding performance objectivessuch as zero-defect, on-time delivery or reducedcycle time need be achieved, while cost pressureis still high. The common approach to improvemanual fab logistics is to implement "HardAutomation" technologies, such as conveyersystems or stockers. These technologies requirehigh investments, decrease flexibility and donot improve the overall fab situation.

To cope with these challenges, Intellion realizedthe LotTrack system based on a "Smart Auto-mation" approach to control the logistic flow.The key is to radically rethink the role of theoperator in the fab: Following the Smart Auto-mation approach, the operator becomes thecenter of the information processing world.Instead of seeing the operator as a lot searcher,system user or information collector, LotTrack

empowers him to be an effective contributorto the overall production flow, avoiding alluseless activities.

LotTrack supports the operator by assisting andtracking all operator actions in real time rightat the point of action: at the "smart" wafer-carrier. LotTrack uses wireless technologies inorder to make each single wafer-carrier a smartmobile device that is able to deliver and collectinformation in real time. As a result, all operatoractions will be compliant to global control ob-jectives and rules. All local shop floor activitieswill be sensed and sent to the fab control sys-tem (MES, dispatcher) as a basis for increasedlogistic capability.

Smart Automation significantly improvesin parallel the capability of productionlogistics, operator handling efficiency andenhances operational flexibility in manuallyoperated fabs.

INVEST IN MOVEMENT, NOT STORAGEINVEST IN MOVEMENT, NOT STORAGE

REFERENCES

LotTrack has been imple-mented and is beingoperated by Intellion inthree major European andAsian fabs of InfineonTechnologies AG. LotTrackhas proven highest reliabilityin a 24/7 environment overseveral years of operation.

BENEFITS

Reduced Cycle Time and WIPFull shop floor visibility provides a platform for logistic optimizationleading to shorter cycle times and lower WIP. Dispatch lists cannow easily be followed by operators, because every lot can befound immediately. As a result, compliance to dispatch prioritiesis achieved.

Increased Operator EfficiencyIncreased operator efficiency is achieved by avoiding lot searchingactivities due to exact lot positions in the fab at any time.Furthermore, all relevant and correct information (such as nextdestination, lot priority) is available at the point of action,reducing operator efforts to gather information from differentIT-systems.

Paperless FabLotTrack is the shop floor enabling part of paperless manufacturing.Paper based run cards are substituted by the DisTag’s largedisplay. Using this display, the operator is assisted at any time:operation and transport information (e.g. lot number and states,next scheduled operation, next destination) are available at eachindividual lot in real time, regardless of the actual lot location.

SOLUTION LOTTRACK

LotTrack is an operator focused wireless infrastructure tothoroughly track and assist manual logistics and handlingoperations inside a wafer fab. Working like an "indoor GPS", thesystem delivers the position of each wafer-carrier in real timeand assists the operator according to the next operation anddestination information. LotTrack offers global tracking andcontrol functions based on two major functionalities:

High precision real time localization (< 0.5m) of wafer-carriersin bays

Energy efficient, high resolution user interfaces (display,markers, signalers) on each wafer-carrier.

LotTrack is the most efficient system to achieve "line control"for manually operated fabs. The solution has received severalawards and is unmatched in the semiconductor industry.

SMART LOGISTICS DELIVERED

SOLUTIONARCHITECTURE

SYSTEM COMPONENTS

LotTrack enables a Smart Automation environ-ment for localization, communication and operatorassistance. The system architecture is based onthree main components:

LotTrack Control Suite: the software that ope-rates the LotTrack solution and integrates allrelevant information systems in the fab, such asMES and Dispatcher.

LotTrack Antenna Lines: an industry proven,patented wireless infrastructure that enablescommunication and localization functionalityin all fab areas without any physical processrestrictions.

DisTag: The smart device, placed on each wafer- carrier, allowing localization of wafer-carriers all

over the fab and communication with the operatorat the point of action.

The LotTrack architecture is the basis for real timelogistic control while keeping operational flexibilityof manual operated fabs.

PERFORMANCE FIGURES

High ReliabilityLotTrack has proven highest reliability in a 24/7environment over years of operation. Our Swissengineering team combined cutting-edge technolo-gies with profound semi-conductor process know-how in order to achieve this "design in"-reliability.LotTrack tolerates alterations of the shop floor anddoes not require a continuous line of sight betweenthe DisTag and the Antenna Lines (localization andcommunication infrastructure).

Easy to integrate and operateLotTrack consists of different modules that are easyto implement and integrate. Software interfaces(API) to superior IT-systems (particularly the MES)are available. In order to reduce implementationactivities for the LotTrack Antenna Lines within thefab to a minimum, a modular mounting system isused for installation to the fab s ceiling. This moun-ting system integrates all required controllers,antennas and sensors, making installation of addi-tional cables almost unnecessary.

CORE FUNCTIONS

LocateLotTrack allows the locating of all wafer-carriers in real time allover the fab. On the shop floor level, this enables operators tolocate and find each individual lot at any time. On the controllevel, an overall visibility of all lots in the fab is provided as thebasis for material flow control and operator assistance.

AssistIn order to increase the logistical performance of the fab, lotlocation is the basis, but not enough. Appropriate operatorassistance at any time right at the point of action - the individuallot - is key to really controlling the material flow. This is doneusing the DisTag’s display and signaling devices. Fully integratedin the fab’s MES and dispatcher, LotTrack can deliver all relevantinformation in real time to each individual lot.

Robust localization and active assistance is key to benefitingfrom an operator centered automation approach.

SMART LOGISTICS DELIVERED

SYSTEM COMPONENTS

LotTrack Control SuiteLotTrack Antenna LineDisTag

PRODUCTCOMPONENTS

DISTAG

The DisTag is the smart man-machine interfaceplaced on each wafer-carrier, allowing it to be loca-ted with an accuracy of < 0.5 meter. A large energyefficient, high resolution display allows communi-cation with the transport operators. Signaling devices(e.g. LED, Flipdot) provide priority and searchfunctions. Using the DisTag’s control panel, aninteractive dialogue can be carried out by theoperator. The DisTag’s battery lasts about two yearswith normal use and can be replaced easily.

LOTTRACK ANTENNA LINE

LotTrack Antenna Lines are the wireless localizationand communication infrastructure mounted to theclean room ceiling along the inter- and intrabaysof the fab. Thanks to the modular mounting systemthey can easily be adapted to every fab layout,reducing implementation time to a minimum. Thismounting system integrates all required controllermodules, antennas and sensors, making installationof additional cables almost unnecessary.

LOTTRACK CONTROL SUITE

At the core of the LotTrack System is the LotTrackControl Suite, composed of three integrated softwareapplications. The LotTack Server links all shop flooractivities to the MES, the dispatcher or other ITclients. The LotTrack FabViewer provides full visibilityof all transport and storage activities. The LotTrackMonitor serves as a tool for advanced diagnosticsand surveillance of all system components andconditions. Overall, highest availability, failover andDB caching as well as exception handling mecha-nisms are delivered by the LotTrack Control Suite.

ANTENNA LINE

LED

INTERFACES

Interfaces (API) for easyintegration into the fab’sManufacturing ExecutionSystem (MES) are providedby the LotTrack ControlSuite. The API provides allfunctions to interact withthe DisTags.

Adapters for mounting theDisTag onto the wafer-carriers are also provided.

SMART LOGISTICS DELIVERED

DISTAG

FLIPDOT

CONTROLLER MODULE

FAB VIEWER

Intellion AGSchuppisstrasse 89016 St. GallenSwitzerland

+41-71-280 81 81+41-71-280 81 82info@intellion.comintellion.com

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ABOUT INTELLION

Intellion provides innovative system solutions that support and monitormanual processes of production logistics. By using these solutions ourclients increase their operative productivity without having high investmentcosts for fixed automation solutions. In the focus of our solutions aremobile means of transport and production, which we turn into "SmartThings" using sensor, display and wireless technologies. With this weestablish visibility for process control and support the work of theoperative staff.

As general contractor, and in close collaboration with our clients, weconceptualize and develop individual solutions for the monitoring andassistance of manual processes in production logistics. Based onidentified productivity potentials, RFID, sensor and localization as wellas display and communication technologies are combined to an effectivetracking and assistance solution.

The basis of our success is our integrated engineering approach at theinterface between application and technology. An experienced teamintegrates process, software and hardware know-how to robust solutions.Partnerships with leading research institutes (University of St. Gallen,M-Lab, ETH Zurich, MIT, RWTH Aachen) guarantee our access to latestdevelopments in business and technology.

Intellion was founded in 2000 as a spin-off of the University of St. Gallen(HSG) in Switzerland and has continually evolved into the innovationleader for wireless based turn key solutions.

All product specifications and information are subject to changes.LotTrack is a registered Community Trademark of Intellion. 2007