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Valves & Controls for Semiconductor Fabs
Executive Summary:
Engineered thermoplastic valves, automatic controls, and specialty piping components that provide performance, longevity, and value that is superior to all other brands.
Standard and custom products that solve pressure and flow control problems.
PVC, Corzan CPVC, Natural Polypro, PTFE, Kynar PVDF, and custom materials.
Manufactured in USA since 1967.
Products for Improving Performance in:
PVAC ICW, PCW, RO WATER
DI WATER AQUEOUS CHEMICALS
ACID WASTE
Pressure Reducing Valves
ICW, PCW
RO WATER
DI WATER
AQUEOUS CHEMICALS
The most significant advantage of a Plast-O-Matic regulator is flow capacity. As you can see from the next performance curve, the Plast-O-Matic regulators have much higher flow capacities than “the Competition.”
These higher flow capacities are achieved at much lower pressure losses resulting in greater sensitivity,finer adjustability and superior accuracy.
Now Available:
New design features non-rising stem
No exposed external fasteners
Same superior flow performance of standard Plast-O-Matic Regulator
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
PRHM RE-DESIGNOLD NEW
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
SUMMARY OF IMPROVEMENTSSERIES PRHM ¾” & 1” (Molded Body)
Non-Rising Stem
Overall Height Reduced
Upper Housing Ribs Extended & Strengthened
ALL Elastomers now Metal Ion-Free EPDM
Connection Hubs Enlarged & Strengthened
Shaft & Seat Redesigned
Base Plate Cross Section Increased
Bolts Recessed
Mounting Support Holes Added
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
SUMMARY OF IMPROVEMENTSSERIES PRH 1½” & 2” (Machined Body)
ALL Elastomers now Metal Ion-Free EPDM; optional FFKM or Kalrez
Shaft & Seat Redesigned
Base Plate Cross Section Increased
Bolts Recessed
Mounting Support Holes Added
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
PVDF SHAFT RE-DESIGN
OLD NEW
• NO metal components in flow area
• Smooth flow design tapered seat & lower profile has improved flow
performance by 13%
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
Summary Depicting Finite Element Analysis (FEA) performed on 1 pc stem – Loadings from Pressure
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
Summary Depicting FEA performed on 1 pc stem, continued
Pro-Mechanica analysis of stem P/N 7828 used in PRH075EP-U & PRH100EP-U. These loadings represent 125 PSI outlet pressure with no spring load (worst case). The tensile strength is 7,450 PSI. The maximum stress is 4,563 PSI.
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
EFFECT OF BODY, BASE & SHAFT RE-DESIGN
FULLY OPEN FULLY CLOSED
Lowest Cost of Ownership:Best Performance
Lifetime Cost of OwnershipPlast-O-Matic PRH200 Ultra Pure Regulator vs Competitive Regulator
$0
$2,000
$4,000
$6,000
$8,000
$10,000
$12,000
$14,000
$16,000
$18,000
Initial Cost 200,000 400,000 600,000 800,000 1,000,000 1,200,000 1,400,000 1,600,000 1,800,000 2,000,000
cum
ula
tive
co
st
Plast-O-Matic Competitor
Assumes Plast-O-Matic initial cost $4300. (PRH200EPU1-PF). Plast-O-Matic is inspected and serviced with seal kit every 1,000,000 cycles; competitive valve requires replacement every 400,000 cycles or less.
Connections Available in:
• Virgin Polypro
• PVDF
• PTFE
PVDF or PTFE Body
Plast-O-Pure, continued
THOUSANDS of Plast-O-Matic Pressure Regulators are “White Paper” specified & installed at Intel
Fabs worldwide.
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
Summary of Upgrades & Differences between standard Plast-O-Matic Regulators and High-
Purity PVDF Regulators:
• Includes Spigot Connections
• Proprietary Cleaning Process
• Two Day DI Hot & Cold Rinse
• Contracted Class 10 Clean & Double-Bag Procedure
1/2" PRH050EP-U1-PF3/4" PRH075EP-U1-PF1" PRH100EP-U1-PF1½" PRH150EP-U1-PF2" PRH200EP-U1-PF
Kynar PVDF & Metal Ion-Free EPDM Part #Size
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
METAL ION-FREE EPDMTEST DATA
POM POM 4/30/08 POMCleaned Not Cleaned Cleaned Seal Kit
Contaminate EPDM EPDM EPDM GF++Al ND* 10 20 46Ca ND 50 62 2900Pb ND 9 27 NDMg ND 20 17 180K ND 5 11 33
Na ND 20 16 98Zn ND 590 180 0.77
*ND=Not Detected
ETA Labs
Results reported as ppb (parts per billion)
Balazs Labs
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
METAL ION-FREE EPDMBENCHMARK OF SUCCESS:
• Since 2008, ALL Plast-O-Matic Series PRHM/PRH-U Pressure Regulators have been shipped with Metal Ion-Free EPDM Rolling Diaphragms…
Part # 0940-02.
Installed Population with Metal Ion-Free EPDM Rolling Diaphragm: 1210
Installed Population with ALL elastomers (including U-Cups, Seat, Rolling Diaphragm) Metal Ion-Free EPDM / CDB Procedure: 250
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
Kynar PVDF Resin & Extruded RodTEST DATA
Click image for EXCEL file
Source: Arkema/Balasz Labs
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
Plast-O-Matic Proprietary 2-Part Cleaning Process (Prior to CDB Procedure)
1. Surface is treated to be amenable to the scavenging of metallic residues, mold release agents and ancillary contaminants.
2. SEMI F-57 compatible agents are then used to scour the activated surface of the previously indicated classes of contaminants. The contaminants and scouring agents are then flushed from the EPDM parts with 18 meg ohm water for 16 hrs.
• Internal valve components are carefully cleaned and scrubbed using 18 meg ohm water. The valves are then assembled in our clean room prior to secondary CDB procedure.
CONFIDENTIAL: Independent test data from a semiconductor fab customer.
SUPERIOR FLOW PERFORMANCE HAS BEEN MAINTAINED THROUGHOUT THIS PROCESS…
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
POM PRHM Exceeds requirements
Parker PR3
GF V182
COMPARATIVE ANALYSIS1” Pressure Regulator Droop Performance Curves
Industry requirement 20 GPM @ 14 PSI droop
Do not meet requirements
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
Valve Body, Shaft/Seat Retainer and Base Plate Redesigned
ALL Clean Kynar, All standard Elastomers now Metal Ion-Free EPDM, or optional Kalrez or FFKM, Cleaning procedures standardized
Improved Flow Performance
HIGHLY CONFIDENTIAL – PROPRIETARY DATA
ULTRA-PURE REGULATOR • RE-DESIGNEDNO WETTED ELASTOMERS IN DEVELOPMENT
ALL WETTED MATERIALS SEMI F-57 COMPLIANT:
TFM BODY
PTFE DIAPHRAGM
PVDF SPIGOTS
The best case for POM Regulators:
“White Paper” specs & thousands of valves at Intel Fabs worldwide…
Pressure Sustaining Valves
ICW, PCW
RO WATER
DI WATER
AQUEOUS CHEMICALS
Also known as Relief Valves, Backpressure Valves, Bypass Valves, and Backpressure
Regulators
The most significant advantage of a Plast-O-Matic pressure sustaining valve is flow capacity. As you can see from the next performance curve, the Plast-O-Matic valves have much higher flow capacities than “the Competition.”
These higher flow capacities provide significant improvements in system performance, with far less wear and tear on the pump.
Lowest Cost of Ownership:Best Performance
The Difference is inside…
Plast-O-Matic orifice
Competitor’s orifice
Better engineering results in superior flow capacity
Now Available: PTFE “flanged” PSV for use on Lined CS for CUP Chemical Applications
PROCESS COOLING WATER APPLICATIONS
Lateral Drops:• LMBV
• Manifolds• Custom Products
Supply Side:• PCWS
• Custom Products
Return Side:• PCWR
Ball Valve orDiaphragm Valve
• Custom Products
PROCESS COOLING WATER APPLICATIONS
Plast-O-Matic Lateral Ball Valves are “White Paper” specified & installed at Intel Fabs worldwide.
PROCESS COOLING WATER APPLICATIONS
Process Cooling Water SticksSupply & Return, Fully Customizable
ADVANTAGES OF PLAST-O-MATICWATER STICKS VS. METAL
• Superior pressure regulator performance
• No corrosion, no maintenance
• 2 connections per stick
• Lower cost
• One tag number per stick
• Molded, Machined & Assembled in USA
• 100% tested at the factory
• No glue joints
• Smaller footprint
• Easily adapts to any piping configuration
Standardizing on Plast-O-Matic Summary of Benefits:
• Plast-O-Matic exceeds all equipment regulator specifications for flow
• Plast-O-Matic has the highest purity level of any valve supplier
• Plast-O-Matic is moving towards Semi F57 standards on all UHP regulators and is currently the UHP standard in many FABs