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Silicon’s Limitations Chris Kenney April 28, 2011

Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

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Page 1: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Silicon’s Limitations

Chris Kenney

April 28, 2011

Page 2: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 2

Key Parameters

•  Material properties: mobilities, band gap, dielectric constant is 12!

•  Geometry of device

•  Operation: fields, temperature

GLAST/FERMI prior to launch

Page 3: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 3

Optical Light Absorption

•  Very sensitive to wavelength

0.01

0.1

1

10

100

0 300 600 900 1200 1500

Abs

optin

Dep

th (m

icro

ns)

Wavelength (nm)

Optical Absorption

Page 4: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 4

X-ray Absorption

0.01

0.1

1

10

100

0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Abs

orpt

ion

Dep

th (m

icro

ns)

Energy (eV)

X-Ray Absorption

Page 5: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 5

Electron Absorption 3 keV electrons from Casino Almost all energy deposited in a sphere with a 100 nm diameter

Page 6: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 6

Electron Absorption

Page 7: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 7

Direct Sensing

•  Primary, science particle is absorbed in silicon

•  Match

Page 8: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 8

Current pulse

3D sensor Field null point

Page 9: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 9

Avalanche Mulitplication

•  Intrinsically limited to thin regions •  Electron multiplication factor much

higher than for holes •  Requires careful device design

and fab •  Can have slower recovery time •  Can add extra noise

Page 10: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 10

Mobility - Electrons

Colder is faster Electrons

Page 11: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 11

Electrons go the distance

•  Time for complete signal charge higher for holes

Page 12: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 12

Electrons go the distance

Collect electrons on the far face, if there is one. Minimize hole drift distance and maximize electron drift distance for a given thickness

p+

n+

i

Page 13: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

3D Sensor

Use 200 microns thick sensor

100 micron pitch

50 micron n-to-p electrode spacing

Trench electrodes = uniform electric field

p+

n+

p+

n+

i i i

Page 14: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Delta Rays

•  Changes total charge

•  3D scales waveform

•  Planar introduces waveform distortion

•  Large energy deltas will always degrade the timing

p+

n+

p+

n+

i i i

p+

n+

i

Page 15: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 15

Entrance Face

•  Dielectrics – bad for electrons •  Metals – bad for photons and

electrons •  Heavily doped silicon – bad for

both – inefficient and slower •  Anti-reflection coatings critical for

optical photons

Page 16: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 16

Diamond

•  Higher mobilities •  Lower dielectric constant •  Higher bandgap •  Optical transparency •  Easy of fabrication?

30 nanometers

Platinum (3000A) on Mo (30 A) 18 Microns Thick Diamond

Collaboration with D. Pickard Nat. Univ. Singapore

Page 17: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

ESRF Test

Placed in synchrotron beam

Attached to fast, discrete amplifier

Recorded bunch spacing period

Scope Trigger Count

I n t e r v a l (ns)

0 5

176.01

176.02

176.03

176.04

176.05

176.06

176.07

10 20 30 0

measured: mean=176.036ns σ = 16ps

σ = 16 ps

Collaboration with J. Morse of ESRF

Page 18: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 18

Signal to Noise

•  Noise often limits the achievable resolution

•  Encourages indirect sensing after multiplicative amplification of the primary

•  Capacitance can be critical •  Entrance face loss of electron energy

Page 19: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 19

Ideal

•  Secondary electron accelerated to 3 keV – decent signal

•  300 nm sensor thickness •  All singal charge collected within 5

picoseconds •  Current pulse will have a rise time

several times faster

Page 20: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 20

Summary

•  Match absorption thickness to particle

•  Maximize electric fields

•  Run cold

•  Choose between direct and indirect sensing

•  Entrance-face dead layer must be minimized

•  Have electrons transit the long way

•  Beware of capacitance

Page 21: Silicon’s Limitations€¦ · Page 4 X-ray Absorption 0.01 0.1 1 10 100 ) 0 2000 4000 6000 8000 10000 12000 14000 16000 18000 20000 Energy (eV) X-Ray Absorption

Page 21

Personnel

Sherwood Parker, Gary Varner, John Morse, Ed Westbrook, Al Thompson, Jasmine Hasi, Cinzia Da Via, Angela Kok, Giovanni Anelli, Dan Pickard, Niels van Bakel