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Sharon Hornstein, PhD MARADIN MEMS SCANNING MIRROR Applications and Synchronization Notes Optical Engineering Conf. February 26 th , 1

Sharon Hornstein, PhD Optical Engineering Conf. February 26 th, 2014 1

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  • Slide 1
  • Sharon Hornstein, PhD Optical Engineering Conf. February 26 th, 2014 1
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  • Outline About Maradin MEMS Mirror - motion definition Problem definition: Why are image corrections needed when a scanning mirror is used for projection? The algorithm for image correction, using laser modulation. Summary 2
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  • Fabless MEMS company (Founded in 2007) Develop innovative MEMS Scanning Mirror solutions for laser projection and laser scanning applications Experienced and committed Team, in MEMS, Semiconductors, and System Electronics, Mechanics, Dynamics, Control, Material Science, Semi-conductors processing Privately held, backed by solid investors and industry veterans About Maradin 3
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  • The Core of Laser Steering Systems Maradin Chipset Laser Diodes + Optics Maradin 2D MEMS Scanning Mirror Maradin MEMS Drive & Control Maradin Laser Timing Algorithm Laser Driver Video Data 4
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  • Markets and Applications 5 Gesture Sensing Pico Projectors Eyewear DisplaysLarge Displays Automotive HUD Medical Industrial More to emerge
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  • 2D MEMS Mirror Horizontal Axis: Electro-static actuator built into Silicon Operation at resonance (~10KHz) Capacitive sensing and resonance lock control Vertical Axis: Hybrid Electro-magnetic actuator (DC motor) Step function scanning Modulated capacitance sensing and position control 6
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  • MEMS Mirror - motion definition Horizontal Axis Sinusoidal Motion 7 Vertical Axis Saw Tooth Pattern Reference signal Sensor measurement (~10KHz]) (60Hz])
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  • Projection System Sketch 8 Mirror position Spherical (3D) Projected Surface Planar (2D) image
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  • Projection 3D Surface and Projections 9 Side View X-Z Plane Front View X-Y Plane Optical Distortions
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  • X Y X direction Y direction Problem Definition 10 The mirror is resonating in a sinusoidal profile. Its non-constant velocity implies a non-uniform distribution of pixels along the lines. The scanning mirror creates a 3D surface. The image is created by intersection of light onto a 2D plane. Pincushion distortion (e.g. bowed boundaries) due to geometry. Differences in mirror velocity create non-uniform brightness along the lines
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  • Solution Method Laser Modulation 11 70% (T/2) Avoid edge-effects only 70% of the mirrors period is used for projection
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  • Algorithm Eliminate Distortions 12 Eliminate geometrical (Pincushion, Barrel) distortions by defining a different initial projection time for each row
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  • Algorithm Uniform Distribution of Pixels 13 2 3 1 4 Result: uniform distribution 1 2 34 5 6 7 8 9 101112 13 14 5 8 10 12 14 15 17 19 21
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  • Results 14 Target Resolution: Linearly distributed pixels along the x axis Vertical lines are one-pixel width Fine Forward\backward alignment Diagonal lines are sharp (not bowed)
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  • Maradin Ltd. P.O. Box 56 Yokneam Industrial Park, South Yokneam 20692, Israel Tel. +972 (4) 627 3653 | Fax. +972 (4) 959 0327 www.maradin.co.il 15