SESHA PFC Abatement 2013

Aug 2013 Jay Jung VP of Marketing

Global Warming?

GST Confidential 2

Global Warming!

“The average mass balance of the reference mountain glaciers around the world continues to decrease…” Source: World Glacier Monitoring Service http://www.geo.unizh.ch/wgms/

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WSC Commitments

Kyoto Protocol Rejected Not

Approved Approved Approved Approved Approved Approved Not Party to

WSC Commitment √ √ √ √ √ √ √ √

PFC Reduction

Commitment

10% below

1995

Baseline by

2010

No Target

10% below

1995

Baseline by

2010

10% below

1995

Baseline by

2010

No Target No Target

10% below

1997

Baseline by

2010

10% below

1998

Baseline by

2010

The World Semiconductor Council (WSC) voluntary commitment to reduce PFC emissions 10% below baseline year levels by 2010

Semiconductor industry defines PFCs as CF4, CHF3, C2F6, C3F8, C4F8, NF3, & SF6

USA Singapore Japan European Union Malaysia China Korea Taiwan

GST Confidential 4

CALIFORNIA’S CLIMATE PLAN The facts on California’s plan to reduce greenhouse gases and move toward a clean, green economy

The Climate Change Scoping Plan is the state’s roadmap to reach the greenhouse gas reduction goals required

in the Global Warming Solutions Act of 2006, or AB 32. This plan calls for an ambitious but

achievable reduction in California’s carbon footprint – toward a clean energy future. Reducing greenhouse gas

Emissions to 1990 levels means cutting approximately 30% from business-as-usual emissions levels projected

for 2020, or about 15% from today’s levels. On a per-capita basis, that means reducing annual emissions of

14 tons of carbon dioxide for every man, woman and child in California down to about 10 tons per person

by 2020. This challenge also represents an opportunity to transform California’s economy into one that runs on clean and sustainable technologies, helping secure our energy independence and security, and ensure that all

Californians are able to enjoy their rights to clean air, clean water, and a healthy and safe environment.

Regulations - 2006

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Semiconductor PFC

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Compound Atmospheric

Lifetime (years)*

Global Warming Potential

(100 year)*

Decomposition Temperature

CF4 50,000 7,390 > 1,200°C

C2F6 10,000 12,200 1,000 ~ 1,200°C

SF6 3,300 22,800 1,000 ~ 1,200°C

c-C4F8 3,200 10,300 < 1,000°C

C3F8 2,600 8,830 < 1,000°C

NF3 740 17,200 < 900°C

CHF3 270 11,700 < 900°C

* Source: http://www.epa.gov/semiconductor-pfc/basic.html

Available PFC Abatement in 2013

GST Confidential 7

Technology Application Cost CF4 DRE

SF6 DRE

NF3 DRE

Suppliers

Plasma (pre-pump)

Etch $$$$ >90% >95% >95% Applied Materials

Plasma-Wet Etch, limited CVD $$$ >90% >95% >95% GST, YoungJin, CS, KT

Burn-Wet CVD, Etch $$$ >90% >95% >95% GST, Edwards, DAS, Centrotherm

Heat-Wet CVD $ ~0% <25% >95% GST, KT, Applied

Catalyst (Wet-Heat-Wet)

Etch, limited CVD $$ >95% >95% >95% GST, Guild, Techarmonic

Key Attributes Zero footprint High DRE * CF4 DRE >90% Low NOx emissions Requires pressure control Limited capacity – etch applications Consumable reactor

Plasma Abatement (pre-pump)

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Key Attributes High DRE CF4 DRE >90% Moderate NOx emissions Consumable electrodes 1200+°C

Plasma-Wet Abatement (post-pump)

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Cooling

Chamber

Wet

Chamber

Circulation

Tank

Waste Gas

Inlet

Gas Exhaust

Reactor

Torch

Tungsten

Cathode

O2 Free

Copper

Anode

Burn-Wet Abatement

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Key Attributes: Powder tolerant Low NOx emissions High DRE LE – NF3 DRE >95% HE – C2F6 DRE >95% 800~1200+°C

Stage 1 NOx Control

Fuel rich combustion NOx suppression ₋ Low NOx (<10 ppm) ₋ High CO (>1000 ppm)

Stage 2 CO Control

2nd stage combustion CO conversion ₋ Low NOx (<10 ppm) ₋ Low CO (<10 ppm)

Key Attributes Powder tolerant CDA / steam as reagent NF3 DRE >95% Low NOx emissions 850°C

Heat-Wet Abatement

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SiC Heater

5.5kW × 6

INCONEL600

Heater Housing

Key Attributes High DRE PFC DRE >95% Low NOx emissions 750°C

Wet-Catalyst-Wet Abatement

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Temperature, oC

200 300 400 500 600 700 800

Con

vers

ion,

%

0

20

40

60

80

100

NF3

CHF3

SF6

CF4

C2F

6

C3F

8

c-C4F

8

[PFC] = 1,000 ppm

[H2O] = 3.5 %

Pre-scrubber

Thermal

Module Catalyst

Module

Heat

Exchanger

Post-

scrubber

Exhaust

Fan

1. CVD Chamber Clean Effluent

C2F6 & NF3

2. Etch Process Effluent

CF4, SF6, CHF3, C3F8 & C4F8

3. Other GHG Effluents

N2O

Typical Priority - PFC Reduction Target

GST Confidential 13

1. NF3 & F2 – RPS

Burn-Wet Heat-Wet Plasma-Wet

2. C2F6 - Chamber Plasma

Burn-Wet Plasma-Wet Wet-Catalyst-Wet

CVD Options

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Considerations for CVD Clean PFCs

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Chamber A

Abate flammable gases at a minimum

House Exhaust

Chamber B

Process Step

Process Gas

Deposition SiH4 / TEOS

Clean C2F6 / NF3

POU Abatement

Considerations for CVD Clean PFCs

GST Confidential 16

RPS

Chamber

NF3 – 1 slm

95~99% Breakdown Efficiency

NF3 – 10~50 sccm

F2 – ~1.5 slm

NF3 – 10~50 sccm

F2 – 0 ~ 1.5 slm

$$$

$$ Abatement

Chamber 50~60% Breakdown Efficiency

C2F6 – 1 slm

C2F6 – 400~500 sccm

F2 – 0 ~ 1.5 slm

Abatement $$

CF4, SF6, CHF3, C3F8 & C4F8

Burn-Wet Plasma-Wet Plasma (pre-pump) Wet-Catalyst-Wet

Etch Process Options

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$55M in 2012 Abatement Revenue

287 direct employees

>3,500 installed base

Global Standard Technology Co., Ltd.

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Jincheon Manufacturing Plant - 50,000 ft2 Head Quarters, Dongtan Industrial Complex

>5 concurrent development projects

Engineering Capacity

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Head Quarters

Scrubber R&D Lab

>100 scrubbers per month

Scalable to 300 units in 2 months

Manufacturing Capacity

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Manufacturing Plant

Scrubber Assembly Line Final Test and Evaluation Unit Area

PUMP & ABATEMENT

EXCELLION

PLASMA-WET

Durian

DRY

SDS-500

HIGH CAPACITY BURN-WET

GALLANT

HEAT-WET

ISIS-I,II,III,IV

GST Abatement Product Line

GST Confidential 21

BURN-WET

DRAGON / DRAGON DUO

WET & WET-EP

SWS-500 / AQUA EP

FACILITY LEVEL PFC ABATEMENT (CATALYST & RTO)

PROJECT RCO and PFC Zone Scrubber

GST Principle Locations

GST Confidential 22

GST AMERICA Scrubber Service

TEL: +1-512-289-6249 AUSTIN

AUSTIN WUXI

GST CHINA Scrubber & Chiller Service

TEL: +86-159-5157-7530 WUXI

GST HQ/R&D TEL: +82-31-371-2200

HWASEONG

MANUFACTURING PLANT

TEL: +82-43-531-2000 JINCHEON

Regional Support

North America

BAZM Solutions Brian Kingston +1 408 887 6132 sales@bazmsolutions.com

Dynaxa LLC Stephen Griffing +1 203 470 8323 Steve.griffing@dynaxallc.com

GST America Jason Smith +1 916 969 9829 Jason_smith@gst-in.com

Head Quarters

GST – Sales & Marketing Jay Jung +1 408 338 7263 jay_jung@gst-in.com

Thank you