Semiconductor Manufacturing IoTfM Case Study

A working example of the IoTfM in production.

Cimetrix has Been an Expert in Improving Manufacturing Automation for 25 Years

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SemiconductorIndustryRevenueinBillionsSource:SemiconductorIndustryAssocia7on

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SemiconductorEquipmentBillingsinBillionsSources:SEMIandSEAJ

*IncompleteYear’sData

Semiconductor Manufacturing Spans the Globe The technology used by fabricators for the production of semiconductors comes from suppliers all over the world.

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Distribu7onofFabricatorsbyRegion

RestofWorld Japan Americas China Europe

Moore’s Law Ifhomepricesfellatthesamerateastransistors,youcouldpurchaseahomeforthepriceofapieceofcandy

Ifasmartphonewerebuiltusinga1971technologythephone’smicroprocessorwouldbethesizeofacar

IffuelefficiencyimprovedatthesamerateasMoore’slawyoucoulddriveacaryourenTrelifeonatankofgasIfskyscraperconstrucTonfellinpriceatthepaceofMoore’slawyoucouldbuyonetodayforthepriceofaPC

IfthesizeofthatskyscrapergrewattheMoore’space,itwouldbe35TmestheheightofEverest

Modernfabscost$5B+ Atypicalfabstarts50,000wafersamonth

Awafertakes3-4monthstocyclethroughaplant

Awafercantakea1,000processestoproduce

About1,500toolsarerequiredtoproduceawafer

Around200differenttoolOEMsprovidetheequipmentforafab

SEMI Standards Node (nm) 800 600 350 250 180 130 90 45 32 22 14 10

Process Window (Cpk)

Key Applications SPC R2R FDC VM PDM Big Data

Data Generated 0.016 0.3 2.4 40 240 1500 (MB/sec)

Supporting SECS-II GEM GEM300 EDA I EDA II E164… SEMI Standards

SEMI Semiconductor Equipment and Materials International is the global industry association serving the manufacturing supply chain for the micro- and nano-electronics industries, including: ◤  Semiconductors ◤  Photovoltaics (PV) ◤  High-Brightness◤  LED ◤  Flat Panel Display (FPD) ◤  Micro-electromechanical systems

(MEMS) ◤  Printed and flexible electronics ◤  Related micro- and nano-electronics

Typical Factory System Architecture

MES

Factory Information and Control SystemsAMHS

MES,RMS

Other DB

SensorGateway

OEM ToolS S S

GEM

…

Equipment Integration

Server

YMSAPC, FDC RMS

SOA

TCP/IP

Equipment Integration

ServerLocalDB

LocalDB

OEM Tool

GEMOEM Tool

GEMOEM Tool

GEM

EDA/Interface A Opens Up a Whole New World of Information

EDA In a Nutshell... EDA is a suite of model-based communication standards that enables devices of arbitrary size and complexity to securely publish data to multiple, distributed clients using standard Internet technologies.

What could be better suited for the IoT for manufacturing?

PHM

DOE Modeling

S/W Test

Additional Applications

VM

Process Development

Simulation

Field Service Support

ACM

OEMToolRetrofi^ed

withInterfaceA

MES

Factory Information and Control Systems AMHS

MES, RMS

Other DB

SensorGatewayOEMTool

Integratedwith

InterfaceAS S S

Control

…

EquipmentIntegraTonServer

YMS

APC, FDC RMS

EquipmentIntegraTonServer

LocalDB

LocalDB

OEMTool,Retrofi^ed

withInterfaceA

OEMTool,withEDA

Control Control Control

FaciliTesData

TCP/IP ~??

HTTP

ProcessDevelopment

Simulation

AMC

Field ServiceSupportEDA-Enhanced

Factory System Enables remote viewing of the tool data.

OperatorInput

EDA Takes Advantage of 30 Years of Semiconductors Experience ◤  Ability to query the equipment for its metadata◤  Multiple independent client application access◤  Use of mainstream communications technologies◤  Powerful event/alarm-based trace request structure◤  Support for “data-on-demand”◤  Performance monitoring and notification features◤  Secure access (local and remote)

Get the data you want…when and where you need it.

Unified Equipment Model The one element that is wafer specific needs to be modified for your industry.

E164Model

ConfiguraTonSedngs

EDA Enables Factories to… ◤  Give everything a voice: equipment, material, processes,

people, and the context to make it powerful, allowing you to:◤  Convert raw data to actionable information◤  Know why things happen…or don’t◤  Understand where all the time goes◤  Attack variability and minimize its impact◤  Build manufacturing domain knowledge◤  Reduce “time to money” for new products

Optimize performance, productivity, and profit.

Merci Danke

Thank you

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