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Semiconductor Lasers Semiconductor Lasers for Optical for Optical Communication Communication (part 1) (part 1) Claudio Coriasso R&D and Production Engineering Manager [email protected] 1 C. Coriasso – Nov 2011 Turin Technology Centre MQW 10Gb/s DFB Laser

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Page 1: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Semiconductor LasersSemiconductor Lasers

for Optical for Optical CommunicationCommunication

(part 1)(part 1)

Claudio CoriassoR&D and Production Engineering Manager

[email protected]

1

C. Coriasso – Nov 2011

Turin Technology Centre

MQW

10Gb/s DFB Laser

Page 2: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

OutlineOutline

1) Background and Motivation

• Communication Traffic Growth

• Photonics evolution

2) Optical Feedback and Active materials

2

C. Coriasso – Nov 2011

2) Optical Feedback and Active materials

• Distributed FeedBack Lasers(DFB)

• Strained Multiple Quantum Wells (MQW)

3) Avago snapshot

• Turin Technology Center (TTC)

Page 3: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Communication GrowthCommunication Growth

Tim Berners-Lee computer at CERN:

World’s first Web Server 1991

Communication has always been one of the main driving force for the

development of new technologies: Telegraph, Telephone, Fiber Optic,

Laser, …

3

C. Coriasso – Nov 2011

The Internet (30.2% world population)

Worldwide communication traffic is doubling every 18 months (2dB/year)

Page 4: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Traffic structure and Energy ConsumptionTraffic structure and Energy Consumption

• Data Centers and the Internet consume about 4% of electricity today

(8.7 × 1011 kWhr/year including PCs)

• By 2018 the energy utilized by IP traffic will exceed 10% of the total electrical power

generation in developed countries (1)

• Most of the traffic is between machines and much of the information created today cannot

even be stored (2)

4

C. Coriasso – Nov 2011

(1) L.Kimerling, MIT

(2) R.Tkatch, Alcatel Lucent

(3) D. Lee, FacebookEuropean Conference on Optical Communication 2010

FACEBOOK (3) :

• 800 milion active users worldwide

• 20.6 miliion active users in Italy

• 8 billion minute/day

Page 5: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Photonics in Optical CommunicationPhotonics in Optical Communication

Photonics

Electronics

5

C. Coriasso – Nov 2011

Today Photonic Network:

Storage Area Network Local Area Network

Wide Area Network

Metro Area Network

10km 100km100m10m 1km 1000km

Traffic volume

Page 6: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Photonics in Optical CommunicationPhotonics in Optical Communication

Emission,

Transmission,

Processing (modulation, switching, amplification, …)

Detection

Photonics:

Science and technology of light

Began with Laser (1960) and Fiber Optic (1966) inventions.

These inventions formed the basis for the telecommunications revolution

6

C. Coriasso – Nov 2011

These inventions formed the basis for the telecommunications revolution

of the late 20th century and provided the infrastructure for the internet.

1st Laser demonstration : T. Maiman 1960 1st Low-Loss Fiber Optic Proposal: C. Kao 1966

Page 7: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Fiber OpticsFiber Optics1966: First proposal of fiber optic for telecom. Basic design [Kao STC]

1970: Production of first fiber optic [Corning]

1976-77: First fiber optic networks

1988: First transoceanic fiber-optic cable (3148 miles, 40000 simultaeous telephone calls)

7

C. Coriasso – Nov 2011

C. K. Kao receiving

his Nobel Prize

Stockholm 2009

First operative optical cable in urban areas

Torino 1976First optical system carrying live traffic

over public network Chicago 1977

Page 8: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Semiconductor LASERSemiconductor LASER1962: First Realization of Semiconductor Laser (GaAs @T = - 200 oC) [GEC, IBM, MIT]

1963: Proposal of Heterostructure Semiconductor Laser (H. Kroemer, Z. Alferov: Nobel Prize 2000)

1970: First Realization of Heterostructure Semiconductor Laser (Z. Alferov)

1972: Proposal of Distributed Feedback Laser (DFB)

1970: Room Temperature CW operation of 1.5µm Laser

1977: Proposal of Vertical Cavity Surface Emitting Laser (VCSEL)

1984: First Realization of Strained MQW in semiconductor laser

1988: First Realization of VCSEL

8

C. Coriasso – Nov 2011

2000: First Uncooled Telecom Lasers

Z. Alferov receiving

his Nobel Prize

Stockholm 2000

Page 9: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Grating

(optical feedback)Electrodes

(current injection)

Laser requirements for optical communicationLaser requirements for optical communication

• High bandwidth (≥≥≥≥ 10Gb/s)

• Single mode operation

• Low consumption

• Uncooled operation (up to 80oC)

25Gb/s

9

C. Coriasso – Nov 2011

Quantum wells

(optical gain)Waveguide

(optical confinement)

DFB MQW Laser

State of Art

Page 10: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Distributed FeedbackDistributed Feedback

a+a-

+da π

Λ

∆Φ = π ⇒ λ/4a+

a-

10

C. Coriasso – Nov 2011

T

R

λB

⋅=

= −

2.32

24.0

651

λ

πβ

µ

κ

m

cm

Λ−+=

Λ−−=

−+−

−++

aiikadz

da

ikaaidz

da

πβ

πβ

T

R

λB

T

R

λB

( )

×+⋅=

=

i

m

cm

4

1

104.32.32

24.0

65

λ

πβ

µ

κ

Page 11: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

• Optical gain, light emission (direct band gap) ...

Semiconductor material basic requirementsSemiconductor material basic requirements

for photonic devicesfor photonic devices

e

h

photon emission

through e-h

recombination

ωh

11

C. Coriasso – Nov 2011

•... at wavelength of interest: λ = 1,3 µm e 1,55 µm

• compatibility with semiconductor substrates: Si, GaAs, InP

Page 12: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

III V

IIIIII--V semiconductor materialsV semiconductor materials

12

C. Coriasso – Nov 2011

There are no single elements or binary compounds compatible with commercial substrates and emitting light at 1.3 µµµµm e 1.55 µµµµm.Semiconductor alloys of III-V elements are the best materials for photonic devices.

Page 13: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Semiconductor HeterostructuresSemiconductor Heterostructures

A

A

BB

A

Double Heterostructure (DH)

n

pe-h confinement

A

A

BB

A

Separate Confinement Heterostructure (SCH)

n

p C

C

13

C. Coriasso – Nov 2011

A

(Substrate)

Eg(A)> Eg(B)

A

(Substrate) photon

confinementEg(A)> Eg(B) )> Eg(B)

n(A)< n(C) < n(B)

Combination of layers of different crystalline semiconductors.

H. Kroemer, Varian associates 1963

(Nobel Prize in Physics, 2000)

The idea was experimentally demonstrated using the Liquid Phase Epitaxy (LPE)

Page 14: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Quaternary alloys InGaAsP / AlGaInAsQuaternary alloys InGaAsP / AlGaInAs

T. P. Pearsall, , Wiley (1982)

In1-xGaxAsyP1-y / Al1-x-yGaxInyAs

alloys cover all the spectral range

required for optical telecom

• High quality material

• Established

growth techniques

and material processing

14

C. Coriasso – Nov 2011

and material processing

• Suited for active devices (lasers,

amplifiers, modulators, ...) and

passive structures (waveguides,

couplers, ...)

In1-xGaxAsyP1-y

lattice matched to InP

(λ(λ(λ(λg=0.92 - 1.65µµµµm))))

InGaAs

(λλλλg=1.65µµµµm))))

InP (λλλλg=0.92µµµµm)

Page 15: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

(Basic) Optical properties of semiconductors(Basic) Optical properties of semiconductors

lhhh

e

E

Eg

JDOS

αk

15

C. Coriasso – Nov 2011

**

**9

elh

ehh

mm

mm

>

Three bands are involved in optical transitions:

- Electrons Conduction Band

- Heavy holes

- Light holesValence Band

Eg

gEJDOS −∝ ωh

Joint density of states (available for optical

transitions) is a square root function of the

energy in excess of the energy gap

Page 16: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Quantum WellsQuantum Wells

Quantum-Size Double Heterostructure (Quantum Well) is a planar waveguide for electrons

C. H. Henry, Bell Labs 1972

The idea was experimentally demonstrated in 1974 using the newly developed Molecular

Beam Epitaxy (MBE).

A d = 3

BULK2

B A B

16

C. Coriasso – Nov 2011

A

QUANTUM WELL

d = 3

z

y

x

d = 2 Lw ~ λe

EgAEg

B EgQW

1

21

Lw

QW is now a widely spread

quantum product

based in atomic-scale technology

B A B

Transmission Electron Microscope

view of QW

Page 17: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

)()()(222

0

2

2znzznk

dz

deff ψψ =

+ neff

2

Ψ(z)

n2(z)

Photon wave eqn. vs. Electron wave eqn.Photon wave eqn. vs. Electron wave eqn.

Ψ(z)

Helmholtz equation (photon)

Schroedinger equation (electron)z

17

C. Coriasso – Nov 2011

)()()(2

2

22

zEzzVdz

d

mψψ =

+−

h

E

Ψ(z)V(z)

)()(2

zVzn −⇒potential wells confine electrons (quantum wells)

refractive index ridges confine photons (optical waveguides)

z

cladding ⇒ barrier

core ⇒ well

Page 18: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Eigenfunction/Eigenvalues CalculationEigenfunction/Eigenvalues Calculation

nTE0

nTE1E0

E1ΨTE0

ΨTE1

Ψ1

Ψ0

Waveguide Quantum Well

18

C. Coriasso – Nov 2011

E0

E1nTE0

nTE1

)()(

)()(

+−

+−

Ψ∂

∂=Ψ

Ψ=Ψ

zz

zz

zz

TETE

TETE

)()(

1)(

)(

1

)()(

+

+

+−

Ψ∂

∂=Ψ

Ψ=Ψ

zzzm

zzzm

zz

Page 19: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Reduced dimensionality structuresReduced dimensionality structures

A

QUANTUM WELL

d = 3z

y

x

d = 2

Lz ~ λe

BULK

PLANAR WAVEGUIDE

E.M.

AB

B

Q.M.

1975: R.Dingle and C.Henry

USA Patent Application

19

C. Coriasso – Nov 2011

Lz ~ λe USA Patent Application

QUANTUM WIRE

d = 1

Lz ,Ly ~ λe

AB

B

QUANTUM DOT

d = 0

Lz ,Ly ,Lx ~ λe

CHANNEL WAVEGUIDE

OPTICAL RESONATORA

B

B

Page 20: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

MQW heterostructuresMQW heterostructures

Multi Quantum Wells are stacks of decoupled QWs (with sufficiently thick barriers): enhancement of single QW effects

ZY

XZ

VA

LE

NC

E B

AN

D

CO

ND

UC

TIO

N B

AN

D

20

C. Coriasso – Nov 2011

ENERGY

WELLSSUBSTRATE BARRIERS

VA

LE

NC

E B

AN

D

CO

ND

UC

TIO

N B

AN

D

Page 21: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

QW band structureQW band structure

E

hh1

e1

e2

hh2

lh2

lh1

11 1’1

TETM

22hω

JDOS

1

hω1 2

One step for

every

allowed

transition

21

C. Coriasso – Nov 2011

lh2

z

2D JDOS related features:

• Sharp absorption edge (2D JDOS)

• High differential gain

• Wide gain bandwith

• High electroabsorption efficiency (QCSE)

• Strong optical nonlinearities

• . . .

e1-h

h1

EgQW

Egbulk

e1-l

h1

e2-h

h2

( )∑ −Θ=ji

ji

jiEJDOS ω

π

µh

h2

Page 22: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

ExcitonsExcitons

e

h

e - h semi-bound states (τ ∼ 100 fs) whichproduce sharp absorption peaks detuned from the transition energies (absorption steps) by their binding energy

22

C. Coriasso – Nov 2011

Eb (~8 meV per InGaAsP)

E

α

Page 23: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

QW optical propertiesQW optical properties

αTE

αTM

nTEnTM

ω

ωαωω

ωω

ωωα

πωωα

2

)()()(n̂

'

')'(1)()(

0

22

cin

dcnstateexcitonJDOS +=⇒

−Ρ+=⇒+∝ ∫

23

C. Coriasso – Nov 2011

Polarisation selection rules:

TE: 3/4 hh, 1/4 lhTM: 0 hh, 1 lh

e1-h

h1

e1-l

h1

e1-h

h1

e1-l

h1

αTM

Strong dichroism ⇒

Page 24: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

ma a

a

a lattice parameter of epitaxial layer

a lattice parameter of substrate

L S

S

L

S

=− =

=

RST

Strain(1) Strain(1)

The epitaxial layer can be grown with a lattice parameter slightly different from the

substrate lattice parameter (lattice mismatch).

, aL = lattice parameter of the epitaxial layer

aS = lattice parameter of the substrate

24

C. Coriasso – Nov 2011

compressive strain tensile strain

aL

aS

aL

aS

m>0 m<0

Page 25: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

T. P. Pearsall, , Wiley (1982)

Strain(2) Strain(2)

InP

25

C. Coriasso – Nov 2011

InGaAs

InP

InGaAs

±1%

Page 26: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

k

E

lhhh

e

m=0

Strain effect on band structure: Strain effect on band structure:

k

E

lhhh

e

m>0

compressive

strain

k

E

lhhh

e

m<0

tensile

strainunstrained

26

C. Coriasso – Nov 2011

hh1

e1

e2

lh1

11 1’1

m=0

TM

TE

lh1

m>0

hh1

e1

e2

11 1’1

TM

TE

Low escape time

Fast devices

High To

m<0

hh1

e1

e2

lh1

11 1’1

TE, TM

Low dichroism

Polarization-independent devices

Page 27: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Optical gain in MQW vs. bulkOptical gain in MQW vs. bulk

Bulk MQW

27

C. Coriasso – Nov 2011

• higher differential gain (dG/dN)

• wider spectral bandwidth

0 5 10 15 20-15

-10

-5

0

5

10

Rel. A

mplitude (dB)

νννν [GHz]

thdB IIdN

dG−∝−3ν

Page 28: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

SEMICONDUCTOR LASER

Quantum Wells: Quantum Wells:

AtomicAtomic--Controlled Artificial StructuresControlled Artificial Structures

ACTIVE LAYER MQW

BARRIER

28

C. Coriasso – Nov 2011

ATOMS

QUANTUM WELL

BARRIER

)()()(2

2

22

zEzzVdz

d

mψψ =

+−

h),,(),,( FNkiFNn λλ +

Control of Optical Properties through atomic-scale technologyQuantum Well requires sub-monolayer manufacturing control (σ < σ < σ < σ < 0.1nm over 10cm2 )achievable with MBE or MOCVD.

Page 29: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

1939

Hewlett Packard

Foundation (T&M)

• Test & Measurement

November 1, 1999

Agilent spin-off

~40000 employees

T&M, Life science,

semiconductor components

Avago’s historyAvago’s historyDecember 1, 2005

Avago spin off

~ 6500 employees

Semiconductor

components

Former HP’s semiconductor components division

29

C. Coriasso – Nov 2011

• Test & Measurement

• Life science

• Semiconductor components

• Computers/imaging…

~80000 employees

Computers, printers, imaging, …

T&M, Life science

Acquisition of TTC (Torino Technology Center)

former optoelectronic technology division of CSELT

R&D Corporate Center of STET (now Telecom Italia)

Page 30: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Product leadership in target marketsProduct leadership in target markets

6500 products, more than 5000 patents

Headquarters: San Jose, Singapore

30

C. Coriasso – Nov 2011

Page 31: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Fiber Optic Business

Worldwide OperationsSingapore� Device Manufacturing

� Product ManufacturingSan Jose, CA � Product R&D

� Marketing

31

C. Coriasso – Nov 2011

Torino, Italy Turin Technology Center (TTC)

� III-V Devices R&D & Manufacturing

Page 32: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

• Manufacturing of 10Gb/s FP and DFB lasers(>900k laser chips fabricated and delivered since 2007)

• R&D on high bandwidth uncooled DFB lasers

TTC current main activitiesTTC current main activities

32

C. Coriasso – Nov 2011

• R&D on semiconductor technology

R&D on photonic devices

since late 70’s

Page 33: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

• Lasers: FP, DFB, DBR, EML, WDM tuneable

• Detectors: PIN, APD

• SOA: gain blocks, clamped-gain, XGM and XPM

• Modulators

TTC activity in photonics devicesTTC activity in photonics devices

since late 70’ssince late 70’s

33

C. Coriasso – Nov 2011

• Modulators

• All-optical (nonlinear)

photonic devices

• Wavelength converters

• …

tuneable laser

10Gb/s λ−converter

Page 34: Semiconductor Lasers for Optical for Optical ...personalpages.to.infn.it/~botta/Fisica_Nov2011-Coriasso.pdf · Communication has always been one of the main driving force for the

Laser fabrication Laser fabrication requires team work across the globe: requires team work across the globe:

not an easy task!not an easy task!

San Jose

-9h

Torino

Singapore

+7h

34

C. Coriasso – Nov 2011

[email protected]

Thanks for your attention

BOOKS:

• L. A. Coldren, S. W. Corzine, Diode Lasers and Photonic Integrated Circuits Wiley Series in Microwave and Optical Engineering

• G. Ghione, Semiconductor Devices for High-Speed OptoelectronicsCambridge University Press

LINKS:

• http://www.lightwaveonline.com

• http://www.photonics.com/

• http://www.avagotech.com/