SEM User’s Group Meeting10/12/2006

SEM User’s GroupMeeting 10/12/2006

• Agenda– Introduction:

• Who is this guy, David Frey?

– Plans, Ideas, and Status:• SW Upgrade• Schedule changes• Future needs• Current System Status• Suggestions

– Feedback

SEM User’s GroupMeeting 10/12/2006

• Introduction:– ~ 9.5 years with Carl Zeiss SMT (LEO)

– Conventional/Environmental SEM– FESEM– XB

– 2 Years @ Jackson Labs Bar Harbor, ME– Light Microscopy– IA– SEM– TEM– Webpage publishing– Desktop publishing

– 2.5 Years @ OCG Microelectronic Materials– SEM– Metrology– Desktop Publishing

– Lawrence University, Appleton, WI • Bachelor’s Degree in Biology

– TEM sample prep, and imaging– Light Microscopy

SEM User’s GroupMeeting 10/12/2006

• Current SW V05.01.07 (at right)

• Upgrade to V05.02.00.01 (next slide)

• Fix current bugs / Improve UIF– Annotation glitches– Blanked beam on

startup– Improved tracking of

conditions– More convenient menu

layouts– Animated UIF graphics

SEM User’s GroupMeeting 10/12/2006

• 1280 x 1024• SEM Image

surrounded by UIF no image under UIF

• Dock on right for frequently used menus

• Annotation at the bottom

• HFP on top• All toolbars

can be repositioned

SEM User’s GroupMeeting 10/12/2006

• Schedule changes– Time slots between 8am and 4pm restricted to 2 hours max– After 4pm 5 hour max unless special arrangements are made– STEM detector move to SUPRA 55 from XB

• Future needs– EDS system– Airlock– Plasma Cleaner

• Current system Status– New tip needed soon– Noise in image at fast scan speeds– Re-aligned apertures – Reduction of acoustic noise from pumps/chillers

• Suggestions

Feedback