• Home

  • Documents

  • Remote plasma source performance and its impact on film deposition rates and properties
1
Remote plasma source performance and its impact on film deposition rates and properties in a new, commercial ALD system Mark J. Sowa, Mark J. Dalberth, Eric W. Deguns, Ritwik Bhatia, Ganesh Sundaram, Jill S. Becker Cambridge NanoTech, Inc., Cambridge, MA, USA

Remote plasma source performance and its impact on film deposition rates and properties

Tags:

Embed Size (px)

DESCRIPTION

Paper presented at ALD 2009 conference: Affects of plasma-generated co-reactants on atomic layer deposition (growth rates, process temps, new materials, etc).

Citation preview

Page 1: Remote plasma source performance and its impact on film deposition rates and properties

Remote plasma source performance and its impact on film deposition rates and properties in a new, commercial ALD

systemMark J. Sowa, Mark J. Dalberth, Eric W. Deguns, Ritwik Bhatia, Ganesh Sundaram, Jill S. Becker

Cambridge NanoTech, Inc., Cambridge, MA, USA

Modern Thin Film Deposition Technologies€¦ · vapor phase thin film deposition technologies. Text book: by Donald L. Smith;

Modern Thin Film Deposition Technologies€¦ · vapor phase thin film deposition technologies. Text book: by Donald L. Smith;

Documents
Polysilicon and Dielectric Film Deposition

Polysilicon and Dielectric Film Deposition

Documents
Thin Film Deposition System

Thin Film Deposition System

Documents
Plasma-Enhanced Chemical Vapor Deposition (PECVD)

Plasma-Enhanced Chemical Vapor Deposition (PECVD)

Documents
Plasma Enhanced Etching and Deposition

Plasma Enhanced Etching and Deposition

Documents
OPTIMIZATION OF PLASMA DEPOSITION AND ETCHING …

OPTIMIZATION OF PLASMA DEPOSITION AND ETCHING …

Documents
Chapter 9 Thin Film Deposition

Chapter 9 Thin Film Deposition

Documents
A Supersonic Plasma Jet Source for Controlled and Efficient Thin Film Deposition · 2013. 12. 24. · thin film deposition techniques, such as CVD [6,7], sputtering [8] and pulsed

A Supersonic Plasma Jet Source for Controlled and Efficient Thin Film Deposition · 2013. 12. 24. · thin film deposition techniques, such as CVD [6,7], sputtering [8] and pulsed

Documents
Thin Tin and Tio Film Deposition in Glass Samples by ... · deposition (ALD)12-14. Chemical vapor deposition assisted by plasma (PECVD) has also been used to grow TiO 2 films on a

Thin Tin and Tio Film Deposition in Glass Samples by ... · deposition (ALD)12-14. Chemical vapor deposition assisted by plasma (PECVD) has also been used to grow TiO 2 films on a

Documents
II. Thin Film Deposition

II. Thin Film Deposition

Documents
High Rate Plasma Deposition - Pure - Aanmelden · In general the film deposition rates obtained with the conventional plasma deposition techniques are low (up to a couple of nm/s)

High Rate Plasma Deposition - Pure - Aanmelden · In general the film deposition rates obtained with the conventional plasma deposition techniques are low (up to a couple of nm/s)

Documents
HYBRID PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION

HYBRID PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION

Documents
Nb3Sn film deposition

Nb3Sn film deposition

Documents
Uniform Thin Film Deposition

Uniform Thin Film Deposition

Documents
MSN 551 THIN FILM DEPOSITION

MSN 551 THIN FILM DEPOSITION

Documents
Thin Film Deposition and Application Sputter deposition

Thin Film Deposition and Application Sputter deposition

Documents
Thin Film Deposition & Vacuum Technology - MTI Corp. Film Deposition (Thermal... · THIN FILM DEPOSITION & VACUUM TECHNOLOGY ... evaporation deposition is the most basic method used

Thin Film Deposition & Vacuum Technology - MTI Corp. Film Deposition (Thermal... · THIN FILM DEPOSITION & VACUUM TECHNOLOGY ... evaporation deposition is the most basic method used

Documents
Plasma Enhanced Chemical Vapor Deposition …€¦ · Plasma Enhanced Chemical Vapor Deposition ... Konuma, Mitsuharu. Film Deposition by Plasma Techniques. Berlin: Spring-Verlag,

Plasma Enhanced Chemical Vapor Deposition …€¦ · Plasma Enhanced Chemical Vapor Deposition ... Konuma, Mitsuharu. Film Deposition by Plasma Techniques. Berlin: Spring-Verlag,

Documents
Liquid Films and the Plasma-enhanced Deposition of Solid Coatings · 2018. 4. 25. · 5 Former use of liquid phases in plasma-based film deposition Liquid Assisted –Plasma Enhanced

Liquid Films and the Plasma-enhanced Deposition of Solid Coatings · 2018. 4. 25. · 5 Former use of liquid phases in plasma-based film deposition Liquid Assisted –Plasma Enhanced

Documents
Selective deposition of Ta2O5 by adding plasma etching ...kobus-tech.com/wp-content/uploads/2016/11/Selective-deposition-of... · in plasma enhanced atomic layer deposition steps

Selective deposition of Ta2O5 by adding plasma etching ...kobus-tech.com/wp-content/uploads/2016/11/Selective-deposition-of... · in plasma enhanced atomic layer deposition steps

Documents
Thin film deposition - Adnan Menderes University · Thin film deposition 1. Introduction to thin film deposition. 2. Introduction to chemical vapor deposition (CVD). 3. Atmospheric

Thin film deposition - Adnan Menderes University · Thin film deposition 1. Introduction to thin film deposition. 2. Introduction to chemical vapor deposition (CVD). 3. Atmospheric

Documents
Ion-plasma Cleaning Module for Vacuum Thin-film Deposition ... · was developed. Conclusions about the expediency of the using of the ion-plasma cleaning for substrates in the thin-film

Ion-plasma Cleaning Module for Vacuum Thin-film Deposition ... · was developed. Conclusions about the expediency of the using of the ion-plasma cleaning for substrates in the thin-film

Documents
Thin Film Deposition at NUFAB

Thin Film Deposition at NUFAB

Documents
Plasma-Enhanced Chemical Vapor Deposition (PECVD) Epitaxial Thin Film Growth Emil Blix Wisborg

Plasma-Enhanced Chemical Vapor Deposition (PECVD) Epitaxial Thin Film Growth Emil Blix Wisborg

Documents
Thin film deposition: key performance indices Deposition rate Film uniformity Film conformality: step coverage (e.g. evaporation has worst step coverage)

Thin film deposition: key performance indices Deposition rate Film uniformity Film conformality: step coverage (e.g. evaporation has worst step coverage)

Documents
Plasma deposition of hydrophobic coatings on structured ... · Interference Patterning before the film deposition proved to be an effective method to enhance the drop-wise condensation

Plasma deposition of hydrophobic coatings on structured ... · Interference Patterning before the film deposition proved to be an effective method to enhance the drop-wise condensation

Documents
itemlist.jakou.comitemlist.jakou.com/sputter/sntek.pdf · .Deposition : MO film deposition by DC magnetron sputtering method CIGS film deposition by MBE intrinsic and n type ZnO film

itemlist.jakou.comitemlist.jakou.com/sputter/sntek.pdf · .Deposition : MO film deposition by DC magnetron sputtering method CIGS film deposition by MBE intrinsic and n type ZnO film

Documents
BY CATHODIC ARC PLASMA DEPOSITION

BY CATHODIC ARC PLASMA DEPOSITION

Documents
Thin Film Deposition

Thin Film Deposition

Documents
Plasma Enhanced Chemical Vapor Deposition (PECVD) · PDF fileWhat is Plasma Enhanced Chemical Vapor Deposition? CVD process that uses plasma Uses cold plasma Keeps wafers at low temperatures

Plasma Enhanced Chemical Vapor Deposition (PECVD) · PDF fileWhat is Plasma Enhanced Chemical Vapor Deposition? CVD process that uses plasma Uses cold plasma Keeps wafers at low temperatures

Documents