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Quantum engineered field-effect transistors for warm, wide- bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department and Institute for Terahertz Science and Technology

Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

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Page 1: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Quantum engineered field-effect transistors for warm, wide-bandwidth,

near quantum-limitedTerahertz heterodyne receivers

Mark Sherwin

UCSB

Physics Department

and

Institute for Terahertz Science and Technology

Page 2: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Herschel Space Observatory

Bilpratt et. al., A&A 518 L1 (2010)

Page 3: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Heterodyne Instrument for Far Infrared (HIFI)

Th. De Grauw, et. al., A&A 518 L6 (2010)

Page 4: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

HIFI spectrum of Orion hot core

Th. De Grauw, et. al., A&A 518 L6 (2010)

Page 5: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

35Cl/37Cl ratio in dense molecular clouds

J. Cernicharo et. al., A&A L115 (2010)

Page 6: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

H2O in cometary atmosphere

3x105 km

P. Hartogh et. al., A&A 518, L150 (2010)

Page 7: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Coherent detection (e. g., heterodyne mixing)

Frequency

Sig

nal

fLO= 1 THz to 5 THz

fsigfIF = 1 - 10 GHz

• Receiver Noise:

Top = TA+ TM + TAmp / M

• Integration Time:

(TR)2

Mixer

TM

M

PLO

fLO

TAmpfIF

IF AmpBackend

SpectrometerfIF = | fLO - fsig|

HETERODYNE RECEIVERf / f = 107 - 108

Quantum Limit

(double sideband)TM≥hf/2kB

TQ= 25K @ 1 THz

TA

Page 8: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

DSB system noise temperature on HIFI

Th. De Grauw, et. al., A&A 518 L6 (2010) Operating temperature 1.7K

Page 9: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Heterodyne receivers for future missions

• Higher frequency (HD @ 2.7 THz, [email protected] THz)

• Lower noise

• High temperature operation (40-100K)

• Wider bandwidth (>15 GHz vs. 4 GHz for phonon-cooled HEB)

• Low LO power

• Arrays

Page 10: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Superconducting hot-electron bolometers

Page 11: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Superconducting hot-electron bolometers

Theory, proposed mixers

Page 12: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Proposed mixers

• Mixer noise temperature (classical theory): 200K DSB

• Operating temperature: Top=30-100K

• LO frequency: 1.5-5 THz

• IF bandwidth: >15 GHz

• LO power requirement: – ~1 µW@ Top=30K

– ~100µW@ Top =100K

• Planar, suitable for arrays

Page 13: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Quantum-engineered FET as hot-electron bolometer

SourceDrain

IF

THz

Front gate (to antenna)

Back gate (to antenna)

absorberdetector

“Tunable antenna-coupled intersubband terahertz (TACIT) sensor”

Page 14: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Relevant physics in quantum wells

• Absorption: intersubband transition in quantum well

• Detection: temperature-dependent mobility of 2-D electron gas

IF

THz

absorber

IF

THzdetector

Page 15: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Example: intersubband absorption in square quantum well

Page 16: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Intersubband absorption in square well

0 20 40 60 80Position (nm)

Ene

rgy

(meV

)250

150

50

0

100

200

Al0.3Ga0.7AsGaAs

in-plane wavevector k

Ene

rgy

Page 17: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Absorption vs. dc electric field, constant Ns

2.4 THz 4.8 THz

Page 18: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Absorption peak vs. dc electric field, charge density

Experiment:Williams et. al., PRL, 2001)

Theory:Ullrich and Vignale Ibid.

ns=1010 cm-2

ns=13x1010 cm-2

Time-dependent Local density approximationAll parameters from experiment

Frequency (T

Hz)2.4

4.8

Page 19: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Intersubband absorption below 1 THz

Page 20: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Detection: temperature-dependent mobility

IF

THzdetection

• Mobility of 2-D electron gases vs. temperature

• Mobility determined by electron temperature Te.

Page 21: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Detection

• Hot-electron bolometric

IF

THzdetection

1R||

dR||

dT

⎝ ⎜

⎠ ⎟ ≡γ =0.01−0.03K−1@50K

ρ=dVdP

=IR||γT1

CV

=IR||γT1

1NSAkB

Page 22: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Speed

• Phonon cooling

• Diffusion cooling– 20 GHz IF bandwidth demonstrated in 4µm long millimeter-wave mixer. (M.

Lee et. al., APL 2001)

J. N. Heyman et. al., PRL 74, 2682 (1995)

109

1010

1011

0 0.04 0.08 0.12

1/T (K-1)

50 25 10

T (K)IF

bandwidth (G

Hz)

0.16

1.6

16

Page 23: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Coupling efficiency: impedance of active region

LV(t)

Area ACharge Q+ + + + + + + + + + + + + + + + + + + + +

- - - - - - - - - - - - - - - - - - - - - - - - - - - - -2-DEG=

Dipole sheeton springs

On resonance

C =ε 0εA

L

R =q2

ε 2ε 02m *

Ns f12n(T)

2πf( )2A2Γ

R can be 20 in future designs

C can be tuned out byrf embedding circuit design

Source-Load coupling can be>90%!

Page 24: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

The math

Z ω( ) =Vω

Z(ω*) =Vω*

Iω*

=L

iω*εε0A+

NSe2 f12n(T )ε 2ε0

2Am *ω*2 2Γ=

1iω*C

+ Rzz

= 1iωεε0A

L −χ 2D ω( )

εε0

⎝ ⎜

⎠ ⎟€

Vω = EωL − P2D /εε0€

χ2D ω( ) =NSe2 f12n(T )

m *1

ω*2 −ω2 + i2ωΓ

P2D(ω) = χ 2D(ω)Eω

M. Sherwin et. al., Proceedings of 2002 Monterey Submm workshop

LV(t)

Area ACharge Q+ + + + + + + + + + + + + + + + + + + + +

- - - - - - - - - - - - - - - - - - - - - - - - - - - - -

Page 25: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Can couple efficiently to ~10,000 electrons!

LV(t)

Area ACharge Q+ + + + + + + + + + + + + + + + + + + + +

- - - - - - - - - - - - - - - - - - - - - - - - - - - - -2-DEG=

Dipole sheeton springs

On resonance

49 Ohms*

18 Ohms*

*on resonance for high-quality 40 nm square well, Te=50 K, f=2.3 THz, A=5µm2,L=0.15 µm

Page 26: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Theory for NEP, TM

• NEP (direct detector)

– =insertion loss, =1/R(dR/dT), NS= sheet density, A=active region area

• Double sideband noise temperature (mixer)€

NEP = α −12kB

NS A

τ

4

γ 2+ Te

2

TM = α −1 4

γ 2Te

+ Te

⎝ ⎜

⎠ ⎟

M. Sherwin et. al., Proceedings of 2002 Monterey Submm workshop

Johnson noise Thermal conductionnoise

Page 27: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Performance limits for TACIT mixer

10,000 electrons106 cm2V-s @ low temp.Bulk LO phonon scattering

Page 28: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

First-generation devices

• Twin slot coupled to coplanar waveguide

• Demonstrated direct detection, electric field tuning

• Difficult fabrication with very low yield

• Quantum well far from optimal

• Microwave embedding circuit far from optimal

• Collaboration with W. R. McGrath, Paolo Focardi

Page 29: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department
Page 30: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department
Page 31: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Completed TACIT detector

Source

Drain

Front gate bias line

Back gate bias line

Page 32: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

10nm

130

nm

10.8 nm

197

nm

500

nm

1000

nm

200

nm

70 n

m9 nm

70 n

m

3 nm

0.5

mm

subs

trat

e

buff

er

etch

sto

p

cap Si d

elta

Dop

ing

(101

2 c

m-2)

Coupled quantum wellsba

rrie

rs

cap

GaAs Al0.3Ga0.7As

Sample structure design and growth

Page 33: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Intersubband absorption characterization

THz in (FTIR) THz out

bolometer

1.6 THzDesign frequency

theory

Electrons in quantum well

Page 34: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Fabrication of 1st generationTACIT detector

Epoxy Bond and Stop-Etch (EBASE), Sandia

1. Process front side

2. Epoxy bond to GaAs wafer

3. Etch away substrate

4. Process back side, etch vias

Page 35: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Experimental Set Up

IF

THz

GaAs Host Substrate

Silicon LensUCSB Free Electron Laser at 40-80 cm-1

Sample in a Helium Flow Cryostat, T=20-100K

Current amplifierSources and measures channel

oscilloscope

0 V

Gate Voltage

0

5

10

15

-5 0 5 10 15

Signal /mV

Time/ microseconds

5s, 1mW

0

10

20

30

40

50

-5 0 5 10 15

Signal /mV

Time/ microseconds

Page 36: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Response to fast THz pulses

1.5 ns 3.5 ns

Page 37: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Tunability with gate voltage

300

400

500

600

700

800

900

1000

0.25

0.26

0.27

0.28

0.29

0.3

0.31

0.32

0.33-1 -0.5 0 0.5 1 1.5

signal/ nanoAmps

signal/milliVolts

front gate - back gate Voltage

Sample ATb=100KTe~120Kf=1.53 THzFEL

Sample BTb=77KTe~100Kf=1.6 THzMoleculargas laser

Pho

tocu

rren

t (n

A)

Photovoltage (m

V)

Charge density held constant.

Page 38: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Origin of “double peak”

2000 2100 2200 2300 2400 2500-50

0

50

100

150

200

250

300field = -0.2 mV/Angstrom

Energy / meV

2000 2100 2200 2300 2400 2500

field = 0.2 mV/Angstrom

1.4

1.5

1.6

1.7

1.8

1.9

2

2.1

45

50

55

60

65

70

Intersubband Resonance

Frequency /THz

Intersubband Resonance

Frequency /cm

-1

-0.2 -0.1 0 0.1 0.2

Electric field (mV/Angstrom)

Inte

rsub

band

ab

sorp

tion

fre

quen

cy (

TH

z)

Page 39: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

New design*

• Easier fabrication• Eliminate some parasitics• Can rapidly iterate to optimize

Inspired by Chris McKenney’s thesis, Cleland group.

Page 40: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

TACIT mixer development strategy

• Microwave engineering• MBE growth of wafers with high mobility,

narrow intersubband linewidth.• Develop fabrication process• Test and iterate

40

Page 41: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

TACIT specs to enable new missions

• High-temperature operation• Wide bandwidth• High frequency• Low noise

41

Page 42: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Herschel cryogenics

• Herschel– Large dewar drives up mission costs– Duration limited to 3.5 years

42

Page 43: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Long-duration mission with cryocooler

• Atmospheric Infrared Sounder (AIRS)– Detectors @ 58K– Long-lifetime cryocooler– Launched 2002

43

Page 44: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Potential platforms for TACIT mixers

• Explorer-class missions– Astrophysics– Planetary science

• Long-duration ballooning• SOFIA

44

Page 45: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Summary and conclusions

• THz heterodyne spectroscopy: important science• TACIT mixers offer improvements over state of art

• Timely to develop TACIT mixers in concert with new mission concepts

45

Superconducting HEB actual

TACIT mixer theory

Operating temp. 2K 30-100K

Bandwidth 4 GHz >15 GHz

Noise temperature @ 2.5 THz

1000K 200K

Page 46: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Acknowledgments

• W. R. McGrath (JPL): Antenna design• P. Focardi (JPL): Antenna impedance, mode matching

theory• G. B. Serapiglia (UCSB->law school): processing,

characterization, experiments• Sangwoo Kim (UCSB-> Tanner Research Labs): room-

temperature devices.• M. Hanson (UCSB): sample growth• A. C. Gossard (UCSB): sample growthFunding: NASA, NSF

46

Page 47: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Insertion losses for this device and experiment

• Matching antenna pattern– Only 4% coupled into antenna mode*– Device fried before could be improved– Mode matching can be increased to >90%+

Antennapattern

Illumination pattern

*Computed following Goldsmith, “Quasioptical systems”

+Focardi, McGrath and Neto, IEEE MTT 2004.

Zload=(1.7-i39)

Pin

PLoad

PIn

=1−ZS − ZL

*

ZS + ZL

2Zsource=(20-i40)

• Matching antenna and load impedances- Only 2.5% coupled from antenna into load

Page 48: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Responsivity at Tbath=80K

• Roptical=V/Pin=0.1 V/W

• Rinternal=Roptical/(total insertion loss)=107±75 V/W

• Relectrical

• Theory: Rinternal =(1100±400) V/W€

Relectrical =

V

I−

dV

dI

⎝ ⎜

⎠ ⎟

2V= (400 ±150)V /W

Page 49: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Electrical transport data

This sample

106 mobility2-DEG

Page 50: Quantum engineered field-effect transistors for warm, wide-bandwidth, near quantum-limited Terahertz heterodyne receivers Mark Sherwin UCSB Physics Department

Electrical transport data