Proposal for Research Collaboration betweenElectrical Engineering Division, CU Engineering Department

and Zeiss SMT

View of Electrical Engineering Division

Centre for Advanced Photonics and Electronics

David Holburn, Bernie Breton, Nicholas Caldwell

What is CAPE?The Centre for Advanced Photonics and Electronics

(CAPE) –

---- is an exciting new venture based around world-leading facilities and expertise at the University of Cambridge.

Supported and guided by a small number of strategic industrial investors, representing the global supply chain in this sector, the centre will lead to a new

form of joint university-industry research that is leading edge, vertically integrated and commercially relevant.

In January 2006 the Electrical Engineering Division moved into the new CAPE Building

Centre for Advanced Photonics and Electronics

CAPE

(Electrical Engineering)

Electronics & PhotonicsResearch within the

Engineering Department

The CAPE Project

CAPE Chairman Professor Bill Crossland

Cambridge University Engineering Department

CAPE Director Professor Bill MilneHead of Electrical Engineering

How is the vision to be achieved?• A small number of strategic partners, reflecting the supply

chain in the sector, are investors in CAPE. Others may join later

• Steering committee involving strategic partners and key academics will set the research agenda for CAPE

• Direct day-to-day collaboration through embedded researchers and exchange of personnel

• Expertise of strategic partners to support commercial exploitation

• Creation of facilities to support technology to proof of concept devices

• Creation of valuable IP for the benefit of all strategic partners

• Leverage involvement to secure significant government (UK and EU) support

Present CAPE Strategic Partners

CUEDSolid State Electronics& Nano-scale Science

Photonics Sensors& Opto-Electronics

CAPEDow Corning

The Vision

Alps Electric In

dustries

Marconi plc

Others

Electronics, Power& Energy Conversion

Photonic Crystals

MEMS

PlanarLight-wave

Circuits

Displays

Nano-scale Technology

Wafer Processing

LCOS

LC Cell &Flat Panel

Core Competencies Product Technologies

Liquid Crystals

Silicon/IIIV-based materials

Materials

AdaptiveOptics

Carbon-based materials

Design &Modelling

Si/IIIV micro-& opto-

electronics Packaging

CAPE Mission

To invent and develop, through

multidisciplinary research, materials,

processes, components and systems; define the

future strategy and market implementation; and

set the industry agendas for the convergence

of photonic and electronic technology

platforms

CAPE will:

• emphasise rapid application of breakthrough research by placing issues of industrial importance at the top of the research agenda;

• provide a focal point for contributing companies to form strategic relationships at an early stage involving directed R&D; and

• provide a focus for multidisciplinary research involving engineers, but also chemists, physicists, materials scientists and bioscientists.

Proposal

for

Research Collaboration

betweenElectrical Engineering Division,

CU Engineering Department and

Zeiss SMT

David Holburn, Bernie Breton, Nicholas Caldwell

Zeiss SMT

• The major player in the market

• Enhance products through innovation

• Cost of research

• Collaboration with academia

• A cost-effective mechanism

Track Record

• Department achieved highest possible 5*A rating(international and national excellence in all areas of research).

• Research on SEM dates back to 1948• Continuous activity during intervening period• “50 years of SEM” in December 2004• Many developments in last ten years

Track Record (2)

• Web-based technologies, providing new opportunities in remote diagnosis – NETSEM

• SEM fault diagnosis – First A.I.D. expert system• SEM ease of use – XpertEze expert system • Electron source management

– Automated filament saturation (AutoSat), Filament lifetime monitoring

• Beam profile determination • Software algorithms:

– gun alignment, focusing, dynamic noise reduction, astigmatism

• Neural networks for particle analysis of wear debris

Other activities

• Academic publications• International conferences

– MSA, Scanning, EUREM

• RMS Micro• Computers in Microscopy, CAMSEM• Advanced Image Processing• Advances in Imaging and Electron Physics

– Sir Charles Oatley and the Scanning Electron Microscope", Breton, B.C., McMullan, D., & Smith, K.C.A., Volume 133, Elsevier Academic Press, 2004

• 50 years of SEM

Research Proposals

• Intelligent Microscopes • Service Support Tools for SEM and TEM • Improvements in Electron-Optics Control • Novel Stereo Techniques & Intelligent Stereo • JITS (“Just In Time Scanning”) Microscopy • Manipulation of Nanoscale Objects in the SEM• Extension of image processing capabilities

Intelligent Microscopes

• Extend XpertEze to Zeiss instruments• Knowledge bases for special applications• Case-based/knowledge database• Embedded implementation

– E.g. XML, callable from VB, VC.

Service Support

• Deployment of service support tools• On-line searchable database• Further development of First A.I.D. expert system• Software extensions for newer Zeiss microscopes• Direct savings in technical support • Improved service through better fault diagnosis

Control of Electron-Optics

• Novel algorithms and advanced auto-functions for SEM electron-optics

• In LaB6 guns, control of:– Focus– Astigmatism– Saturation

• Extend to wider range of sources

Intelligent Stereo Techniques

• Stereo – still relatively unexploited in the SEM• Visually attractive images • Valuable specimen depth information • Current implementations limited to specific columns• Difficult user interface• Restricted uptake of the technique.

• Propose: – new techniques for use with conventional, VP & FE instruments– intelligent software ‘wizards’ - eliminate black art nature of stereometry

‘Just In Time Scanning’ Microscopy• Biological applications • Uncoated and fragile samples • Operator has limited time-frame • Otherwise

– charging – beam damage becomes excessive.

• Propose: “just-in-time scanning” techniques – to reduce damage– extend the operator’s window of opportunity.

Manipulate Nanoscale Objects in SEM

• Nano-assembly/manipulation increasingly important– characterisation of objects– building prototype devices

• Picking up small objects:– organic nanowires, – cells, – laminar slices

Manipulate Nanoscale Objects (2)• Place on electrodes/grids for characterisation.

• Objective: control object movement in SEM– demonstrate nanomanipulation – measurement of material characteristics

Manipulate Nanoscale Objects (3)• Three strands

• Hardware development– 3D nanomanipulator

• Visualisation of the environment– 3D model of manipulator and target

• Software development – Sense manipulator coordinates using stereometry and autofocusing– Communication– Calibration– Automated manipulator control

Extended image processing capability• Need for efficient real time image processing • Traditional architecture

– Single CPU – Responsible for control of the instrument – Monitoring activities – User interface.

• Multi-processor PC architectures• Potential to optimise time-consuming tasks

– Fourier transforms, – spatial filters, – deconvolution, – correlation, – neural nets

Other Research Applications of SEM• Immense importance to Electrical Division• Need to compete for instruments elsewhere• Ongoing projects

– Inspection of carbon fibres – Examination of ink/bubble jet print heads and media– Quality control of lithographic processing– Examination of semiconductor devices

• smart power, high voltage– Inspection and operation of

• micromachined cantilevers, • accelerometers and • other transducers and assemblies

– Inspection of optical devices, fibres and couplers– Development of lithography based on contamination – QC for fabrication of carbon nanotube materials & structures

Teaching Applications of SEM

• Need for instrument to serve teaching needs

4B7 VLSI Design, Technology and CAD (20)– Practical SEM sessions: approx 2 hours in groups of 3-5

4B6 Solid State Devices (20)– Elucidation of device structures

3B2 Integrated Digital Electronics (80)– SEM micrographs to indicate IC structures

Part IA Linear Circuits and Devices (300)– provision of SEM micrographs to illustrate device structures;

IP and Confidentiality• Contracts negotiated with

– Sponsors– Principal Investigator– CAPE Steering Committee

• Strategic Partnership Agreement (SPA) – signed by the University and the Strategic Partners

• Terms govern handling of IP arising from the Project– licensed, exclusively or non-exclusively, to Sponsor– assigned to the Sponsor, (revenue-sharing agreement)– placed in the public domain

• Employment contracts bind:– University Members– Strategic partner employees

• Students sign confidentiality document

Project Review• Regular reports to Sponsor on project progress

– Typically, brief 6-monthly written reports– Final written report within 3 months of expiry/termination

• Probability of patentable/exploitable innovations– emphasis on accurate record-keeping– numbered laboratory notebooks

• Opportunities to showcase premier products – Integral to collaboration under CAPE.

• Regular visits by CUED personnel to Zeiss – review and discussion– technical assistance.

• Invitations to Zeiss personnel to visit CUED – collaborative planning sessions and interaction with projects

Project Team– David Holburn – PI

Subject to availability of supporting funding:

– Bernie Breton – experienced advice/support (part-time)– Nicholas Caldwell – key software developments (part-time)

– Research Students will undertake projects under• CAPE contracts, • EPSRC studentships, • other awards

– Projects offered to fourth-year M.Eng students

Thank you for your attention

View of Electrical Engineering Division

Centre for Advanced Photonics and Electronics

David Holburn, Bernie Breton, Nicholas Caldwell

Engineering & Technology in Cambridge

Centre for Advanced Photonics & Electronics (CAPE)

Electrical Engineering Division

Prof.W.I.Milne

Grouped into 3 main Areas

Solid State Electronics and

Nanoscale Science

Electronics Power and Energy Conversion

Photonics , Systems and

Optoelectronics

Prof W.I.Milne Prof P.Migliorato Prof J.Robertson Prof M.J.Kelly Dr D.F.Moore Dr D.M.Holburn Dr A. Flewitt Nano IRC Prof. M.E.Welland Dr. C.Durkan

Prof G.A.J.Amaratunga Dr T.A.Coombs Dr T.J Flack Dr R.A.McMahon Dr R.Metaxas Dr P.Palmer Dr F.Udrea

Prof W.A.Crossland Prof I.H.White Prof H. Coles Prof R.V.Penty Dr P.A.Robertson Dr A.L Travis Dr T.D.Wilkinson