08/2

012

Met

aCom

- P

rint

ed in

Ger

man

y -

Tech

nica

l alt

erat

ions

res

erve

d

PRODUCTION EQUIPMENT

for Thin-Film Solar Cells

02

Thin-Film SolarSINGULUS offers modern Production Systems for CIS/CIGS & CdTe Thin-Film Solar Panels made of Glass and flexible Substrates

03

SINGULUS TECHNOLOGIES Developer, Enabler and Supplier for the PV Market

SINGULUS TECHNOLOGIES is a supplier of manufacturing solutions and production equipment for the Markets Optical Disc, Semiconductor and Solar. With new machine concepts and manufacturing processes in the crystalline and thin-film solar technology SINGULUS TECHNOLOGIES establishes itself as development partner and equipment supplier for investments in new high-performance solar cell concepts. As market leader for Optical Disc production systems we have gained extensive know-how in vacuum coating, automation and process integration.

SINGULUS TECHNOLOGIES continues to expand its activities in the Solar segment. We cooperate with cell manufacturers worldwide and develop processes, which improve the efficiency of solar cells and at the same time reduce production costs. In addition, SINGULUS TECHNOLOGIES has set up development partnerships with universities, institutes and leading solar companies to establish a proprietary technology as standard for the development of the new cell concepts.

Thin-film solar panels offer specific advantages compared to the silicon solar technology. Amongst these is the fact that efficiency is retained during periods of weak sun intensity, and that they are easily integrated into architectural design elements. SINGULUS is the market leader for the wet- chemical cleaning applying CIS and CdTe processes. New plant concepts expand the value-added chain of the company in the area of thin-film solar technology. The company‘s target is to position itself at the forefront for the introduction of new technologies with respect to silicon as well as thin-film solar technology.

SINGULUS offers modern production systems for CIS/CIGS & CdTe thin-film solar panels made of glass and flexible substrates:

→ Selenisation furnace for an optimized CIGS absorber formation

→ R & D tools for CIGS development → Wet-chemical systems → Systems for the manufacturing of cadmium-

free buffer layers → Equipment employing spray ion layer gas

reaction processes → Metal free glass washing machines → Cleaning- and etching machines → Sputtering & Evaporation machines

Thin Film

PV Technology

Crystalline Silicon (c-Si)

Concentrator, Organic

Multi crystalline

Mono crystalline

A-Si Amorphous

a-Si/µ-Si Micromorph

CdTe Cadmium-Telluride

CIGS Copper-Indium-Gallium-Sulfur-

Selenide

04

VITRUM IIInline Wet Process Equipment, Etching, Cleaning & Single Side Coating

As part of the product family VITRUM the new processing machine, VITRUM II Cover is dedicated to cleaning wrap around coatings at rear sides and edges of thin-film solar cells in a single working step. While the edges and the rear side are cleaned with brushes and chemicals the active layer is protected by means of a process hood. Therefore the VITRUM II Cover is best suited for cleaning after oven processes as well as the etching of undesirable coatings on rear side and edges, for example CdTe or CdS.

VITRUM II CoverInline Etching Equipment

VITRUM II CoatInline Wet Deposition of Thin Salt Films by Means of a Soft Roller (right)

05

The modular design of the VITRUM II allows the easy integration of different process steps according to the requirements of CIS, a-Si or CdTe technology (etching, rear side and substrate edge etching, cleaning and single side coating).

Main Features

→ Modular design → Up to 30 % cost reduction → Better accessibility → Smaller footprint → Low cost of ownership → High throughput → High availability (uptime > 99 %*) → Standard and customer specific substrate

sizes up to 2,600 mm → Parallel carrier transport for higher

throughput → Reproducible process results

*depends on application

The VITRUM II provides the platform for wet chemical inline process steps: In a CdTe manufacturing line it performs several process steps, starting with glass washing, removal of rear side coating, CdCl2 deposition using a roller, CdCl2 salt removal as well as chemical removal of photoresist.

When producing a thin-film silicon or CIS/CIGS cell, VITRUM is capable of glass washing as well as TCO etching, KCN etching or NH3 treatment respectively. In addition, it also provides NP, DAE and EDTA etching for substrate sizes up to 2,200 mm. With our newly developed and unique soft shower process, an homogeneous, reliable and reproducible etching comparable to batch dipping processes is now a reality. Furthermore, it features several advantages compared with inline dipping baths such as reduced process volume, saving energy and chemicals as well as a higher process speed of up to 5 m/min with minimized carryover.

The design of the VITRUM II features similar piping for all liquid circuits and generously dimensioned installation compartments for optimized maintenance work. lt offers a high cycle rate and due to the modular concept it is easy to integrate into existing production lines. With the new VITRUM II process cost can be reduced substantially.

VITRUM II Clean → Inline cleaning equipment (2200/1400/600) → Pre-rinse and single side brush off (acid/caustic) → Inline final rinse (cascade cleaner), metal free → Inline standard cleaning, polishing and

brushing machine (glass corrosion) → Ultrasonic and megasonic support

(particle removal)

VITRUM II Etch → Inline etching equipment (2200/1400/600) → Inline TCO etcher (HCl/HF) → Inline KCN etcher → Inline NP etcher → Inline CuCl2 etcher → Inline developer for photoresist → Inline CdCl2 salt removal

VITRUM II Cover → Inline etching equipment → Removal of wrap around coating on edges

and rear side → Active layer protection (neither liquids nor

vapors attack the active layer)

VITRUM II Coat → Inline wet deposition of thin salt films by means

of a soft roller (e.g. CdCl2, CuCl2 or NaCl) → Automated process control → Single side coating → Very high material usage

Facility Management SINGULUS STANGL SOLAR also supplies:

→ Chemical supply and mixing systems → Waste water treatment → Exhaust scrubber → DI-water make up

06

TENUIS IIProcess System for the Application of Buffer Layer

SINGULUS TECHNOLOGIES presents a new development on the way to the efficient wet- chemical coating of thin-film solar modules made of copper-indium-gallium-diselenide (CIGS) on glass: the second generation of the TENUIS production line has a modular cluster build basis and enables both significant savings in terms of required floor space and the simultaneous one-side coating of two substrates.

The TENUIS II also provides advantages upon commissioning and in the ramp-up stage. Because of the new cluster design the commissioning can commence modularly after a short installation time and the first substrates can be coated. The following cluster can be assembled simultaneously or consecutively. Correspondingly, the TENUIS II meets the ever increasing demands of the market with respect to the reduction of the commissioning and ramp-up times.

SINGULUS offers wet processing systems from R&D over pilot use to full production range 60, 120, 180 and more MW. Due to new and unique concepts in terms of dosing and temperature control, the developers at the subsidiary SINGULUS STANGL SOLAR were successful in reducing the process time by up to 20 %, which has a positive effect and a considerably higher output in production.

The new TENUIS generation offers substantial cost advantages in the production of high performance CIS/CIGS thin-film solar cells. Furthermore, the costs are significantly reduced by temperature profiles adjusted to the process and by very efficient use of process chemicals, so that the new system consistently exploits the savings potential in the manufacturing of thin-film solar cells.

Compared with its predecessor the TENUIS IIversion not only reduces the production time but also the required floor space by 30 % and saves footprint and maintenance costs accordingly. Due to the space-saving design the new system is easily integrated into existing production lines. For a higher throughput several production machines can be combined to a large production complex.

Advantages

→ Standard proven process: low risk → High solar cell efficiencies → More than 150 process modules in production

(world leader) → Lowest possible chemical consumption → Completely automated inline system → Single side deposition incl. protection against

backside contamination → Modular system (easy upgrade for higher

throughput) → Reproducible process results → Automatic dosage and mixing system → In-situ cleaning of the absorber surface during

deposition process

1 2

07

1. Manual Experimental Setup for Process Evaluation and R&D

→ Substrate size for foil and glass: → 300 x 300 mm² up to 500 x 400 mm² → Manual loading → Automatic heating (fluid heating) → Automatic wobbling (movement) → Manual dosing → Process transfer to production line 1:1 possible → Option for fume hood and automatic dosing

modus possible

2. Semi-automated Experimental Setup for Process Evaluation

→ Substrate size for foil and glass: 600 x 900 mm² up to 1400 x 1100 mm²

→ Manual loading → Automatic heating → Automatic wobbling (movement) → Automatic dosage

3. Fully-automated Experimental Setup for a Semi Commercial Line

→ Substrate size for foil and glass: 600 x 900 mm² up to 1400 x 1100 mm²

→ Automatic loading → Automatic heating → Automatic wobbling (movement) → Automatic dosage → Automatic buffer system → Automatic dosage

4. Modular Production System for Capacities up to 60, 120, 220 and 720 MW

→ Modular system → Reduced footprint of up to 30 % → Reduced maintenance costs → New processes of alternative buffer (ZnS) → Aggressive uniform temperature ramps

(even shorter process time) → New software surface and applications for

more flexibility

10 MW 720 MW

3 4

4 4

4

08

CISARISSelenisation Furnace for an Optimized CIGS Absorber Formation

The CISARIS oven is an inline rapid thermal processing equipment, designed for the CIGSSe absorber formation on large area glass substrates. CISARIS consists of a handling station, a vacuum tight process section and a return conveyor and is optimized for the mass production of CIS solar modules.

The main features of the CISARIS include a high uptime and mechanical yield, as well as a fast cycle time, which, in combination with the robust selenisation process, lead to a production capacity of over 25 MWp per year.

Main Features

→ Second generation inline selenisation furnace with optimized cycle time

→ Rapid heating (up to ~ 4 °C/s) of large glass substrates with metal precursor coating (CIG)

→ Homogeneous gas distribution and low gas consumption through optimized inlet system

→ Introduction of H2S (H2Se) gas at various stages of the process possible

→ Uniform heating of large substrates up to 550 °C by using optimized IR radiators for achieving the required crystal quality

→ Uniform cooling of the substrate to avoid glass warpage

→ Excellent temperature control (mean variation < 5 °C) at all process stages

→ Process at atmospheric pressure → Oxygen and water vapor free process

atmosphere guaranteed through pump/ purge cycles

→ Excellent maintenance concept with maximum accessibility of all machine components

→ Proven safety system based on a solid risk management and safety engineering

09

CISARIS is a proven innovative and reliable equipment, which has been newly developed at SINGULUS based on the previous generation of selenisation ovens.

CISARIS can safely handle the thermal processing of large glass substrates of over 1 sqm at

temperatures up to 600 °C under a toxic and corrosive gas atmosphere. High heating and cooling rates, combined with an excellent temperature homogeneity during all process stages are the key factors, which allow the formation of an optimal CIGSSe absorber, required for the production of high efficiency solar modules.

CISARIS

Selenisation Furnace for an Optimized CIGS Absorber Formation

10

PVD Sputtering MachinesPVD Sputtering Machines for Thin-Film Solar

PVD Sputtering Machines for Thin-Film Solar

SINGULUS TECHNOLOGIES is offering processing system for vacuum-coating CIGS/CIS thin-film solar cells. The new systems respond to demand in the photovoltaic industry for development and production tools that enhance the efficiency of thin-film solar cells, while cutting production costs by using the state of the art technologies.

For photovoltaic technology, SINGULUS develops and manufactures coating systems, which can apply special layers and layer systems on different materials. Inline sputter systems are important in today’s thin-film solar cell production.

PVD Sputtering Machines

PVD Sputtering Machines for Thin-Film Solar

Examples are transparent front or metallic back contact layers as well multilayered precursors with a broad range of divers materials. The main advantage of the new system is that it can be used for vertical vacuum based coating of glass substrates. This gives SINGULUS access to operations in the high-growth market for thin- film photovoltaic and adds another production stage to its range of processing systems for the manufacture of CIGS/CIS cells.

11

Machine Type Orientation Target Length

Cathode in Process Chamber

Transport Mode

V 600 Fully Vertical 600 mm Single Sided Batch Osczilation

V 900 Fully Vertical 900 mm Single Sided Batch Osczilation and Inline

V 1600 Fully Vertical 1600 mm Double Sided Inline

Main Features

→ Pre-heating of substrate in air/dry → Fully vertical transport orientation → Rotatable cathode for all typical target

materials → Magnetron sputtern in divers mode like DC,

Pulse DC, Bipolar and RF available → Dry primary vacuum pumps and full magnetic

5-axis turbo pumps → Meissner trap and polycold → Heating option for all process and buffer

chambers → Transport system outside the vacuum → Modular process chamber configuration → Double side coating (back to back) for the

production machine → Close loop carrier return system

12

CIGS R&D PlatformThe new CIGS R&D Platform is a Development Tool for the Production and Thermal Treatment for Photovoltaic Applications

R&D Tool for CIGS Development

The new CIGS R&D Platform is a development tool for the production and thermal treatment of semiconductor layers based e. g. on copper, indium and gallium for photovoltaic applications. With the CIGS R&D Platform economic research of new manufacturing processes for CIS-CIGS semiconductor films can be realized. In this way, the highest level of efficiency of thin-film solar modules compared to existing concepts can be achieved. With the process results on the basis of the findings from the demonstration plant, industrial manufacturing processes can be developed and optimized, enabling higher cell performances as well as a significant reduction of manufacturing costs for thin-film photovoltaic modules per watt peak.

The CIGS R&D Platform contains a central transportation station and several process stations. In the process stations the thermal treatment as well as deposition of the complete layer stack can be conducted.

The system is designed for glass substrates up to 300 mm x 300 mm and can be setup in the following configuration:

→ Central handling → Loading/unloading station → Sputtering unit Mo (Step 1) –

Cu, In, Ga (Step 3) – iZnO, AZO (Step 8) → Selenium deposition (Step 4) → Thermal treatment & selenization,

sulphurization (Step 5) → Laser scribing (Step 2, 7 and 9) → Buffer layer module (Step 6)

Step 1, 3, 8

Step 6

Step 4, 5

13

Evaporation SystemProcessing Systems for Evaporation of CIGS/CIS Thin-Film Solar Cells

Evaporation System for Thin-Film Solar

The inline co-evaporation tool is based on the thermal evaporation of all CIGS-related precursor materials. It is dedicated to the deposition of copper-indium-gallium-selenium layers for the purpose to form optimum precursor layers in the application of CIGS-thin-film solar cells.The evaporation system consists of a handling station, multiple heating/cooling stations and deposition-chambers.

The inline evaporation system is offering proven thermal deposition technology, that delivers a high material utilization and excellent layer uniformity.In combination with a high uptime and mechanical yield, the system leads to a highly optimized and flexible production platform.

Main Features

→ Inline evaporation tool with high throughput capability

→ Modular chamber design supports a flexible layout conception to meet the production requests of the customer

→ Optimized evaporation source utilization through unique chamber design (minimized wall deposition)

→ High deposition speed and repeatability → Excellent flux uniformity → Easy and fast source refilling/replacement

due to user friendly source positioning → Optimized maintenance concept for maximum

machine availability/uptime → High deposition speed → Excellent temperature uniformity during

process sequence → Substrate Pre-Heating → In-situ monitoring of flux and temperature → Proven safety concept based on solid risk

management and safety engineering

14

IMPEDIORoll-to-Roll Wet Process Equipment for Flexible Materials

Thin-film solar cells on flexible materials are gaining ground due to their potential applications regarding low weight, high flexibility and low cost of manufacturing compared to silicon based solar cells.

SINGULUS STANGL SOLAR offers roll-to-roll production systems of the type IMPEDIO for the wet-chemical coating of solar cells based on CIS/CIGS technology.

Roll-to-Roll – IMPEDIO product portfolio for thin-film technology on foils (metal/plastic):

→ Roll-to-Roll Chemical Bath Deposition (CBD) of CdS/alternative buffer layers for CIS, CIGS, CIGSSe technologies

→ Roll-to-Roll Inline Cleaning (DI-Water, tensides)

→ Roll-to-Roll Inline Etching (KCN, HCl, H3PO4)

SINGULUS STANGL SOLAR also supplies the following facility management systems for example chemical supply systems, chemical mixing systems and waste water treatment.

1 2 3 4

1 Input Web2 Process Module3 Rinsing and Drying Module4 Output Web

1 IMPEDIO for Roll-to-Roll 2 Flexible Material

21

Main Features

→ Low cost of ownership → Low process temperatures → High availability (uptime > 98 %) → Lowest possible chemical consumption → Single-side coating of CdS or alternative

buffer layers → Both side etching with spray or dipping

processes → Both side cleaning with spray process → Reproducible process results → Automatic dosage and mixing systems → Lowest possible DI water consumption → Uniform spot-free foil drying (dry-in/dry-out) → Waste and exhaust management system → Networked communication supported

3

15

SOLUTUSBuffer Layer Technology for Thin-Film Applications

The standard buffer layer in a chalcopyrite thin-film solar cell is made by chemical bath deposition (CBD). This is a reliable and commercially accepted method. However it also has a number of disadvantages such as: long process times, large amounts of liquid waste, critical process parameters, which are inherent batch type features and difficulties with very large substrates. As the size of the substrates used in thin-film production increases and the tact time decreases there is a request for new methods considering for example the buffer layer deposition.

In a collaboration between Helmholtz-Zentrum Berlin für Materialien und Energie (HZB), formerly the Hahn-Meitner-Institut (HMI), and SINGULUS an alternative buffer layer deposition technique is developed for thin-film solar cell fabrication. The so-called Ion Layer Gas Reaction (ILGAR®) process offers a cost-efficient, chemical method to manufacture a thin homogeneous In2S3 layer (20 nm), as an alternative to the common CdS-buffers.

The spray ILGAR® deposited indium sulfide buffer layers are capable to replace the cadmium sulfide buffers used in chalcopyrite cells in order to avoid the toxic cadmium. First 30x30 mini-modules on a Pilotline Cu(In,Ga)(S,Se)2 absorbers achieved an efficiency of 13.7 %. The nature of the spray technique ensures that the ILGAR® process is reproducible, fast, cheap and suitable for scaling up into an inline process on large area substrates.

Main Features

→ AACVD atmospheric process (aerosol assisted chemical vapor deposition)

→ No vacuum required → Quasi-dry process → In2S3-deposition technique → Cadmium free → High-efficiency cells produced with potential

for further improvement (certified efficiency of 16.1 % measured at ISE Freiburg)

→ Machine cycle 60 s → Continuous substrate flow → Design for variable size of production

substrates: substrate width up to 1,200 mm (larger substrate size can be processed on request!)

→ Inline, fast-production speeds → Flexible method: bilayers and mixed

compositions possible

4

Buffer Layer for CIS-Cells

→ CIS cells are normally arranged in a ”substrate configuration“

→ The layer stack is deposited on a glass substrate → The cell structure starts with sputtering on the

metal back contact (Mo)

ZnO:Al (1 μm)

i-ZnO:Al (0,05 μm)

CdS (50 nm)

Cu(In, Ga)Se2 (2 μm)

Metal back contact (5 μm)

Glass

Transparent front contact

Buffer layer

Absorber

Back contact

Wet chemical bath deposition “Most commonly“or In2S3 – ILGAR® process

Buffer Layer for CdTe-Cells

→ CdTe cells are normally arranged in a ”superstrate configuration“

→ The layer stack is deposited on a glass substrate → The cell structure starts with sputtering on the

front contact (TCO)

Glass

ITO (200 - 500 nm)

CdS (80 - 200 nm)

CdTe (5-8 μm)

Te (50 nm)

Metal back contact (250 nm)

Transparent front contact

Window layer

Primary back contactSecondary back contact

Wet chemical bath deposition “Most commonly“or In2S3 – ILGAR® process

Absorber

3 SOLUTUS Design Study Inline System 4 R&D System

SINGULUS TECHNOLOGIES AGHanauer Landstrasse 103D - 63796 Kahl, GermanyTel. +49 6188 440-0Fax +49 6188 440-110sales@singulus.dewww.singulus.de

ChinaSINGULUS MANUFACTURINGGUANGZHOU LTD.Tel. +86-20-34885010frank@singulus.com.cn

FranceSINGULUS TECHNOLOGIESFRANCE S.A.R.L.Tel. +33 3 893111-29singulus@club-internet.fr

GermanySINGULUS STANGL SOLAR GMBH Tel. +49 8141 3600-0stangl@singulus.de

Great BritainSINGULUS TECHNOLOGIES UK LTD. Tel. +44 1793 7842-00brian.walsh@singulusuk.com

ItalySINGULUS TECHNOLOGIESITALIA S.R.L.Tel. +39 071 79303-12info@singulus.it

Latin AmericaSINGULUS TECHNOLOGIESLATIN AMERICA LTDA.Tel. +55 1121 6524-10rodolfo.mignone@singulus.com.br

NetherlandsSINGULUS TECHNOLOGIES AG Branch Office SINGULUS MASTERING Tel. +31 40 7501-400mastering@singulus.de

SingaporeSINGULUS TECHNOLOGIESASIA PACIFIC PTE LTD. Tel. +65 674 119-12sales@singulus.com.sg

SpainSINGULUS TECHNOLOGIES IBERICA S.L. Tel. +34 936 7500-25servicio@singulusib.com

TaiwanSINGULUS TECHNOLOGIES TAIWAN LTD. Tel. +886 2 2748-3366 sales@singulus.com.tw

United States and CanadaSINGULUS TECHNOLOGIES INC. Tel. +1 860 68380-00sales@singulus.com

Headquarters

SubsidiariesOffices

←

←

08/2

012

Met

aCom

- P

rint

ed in

Ger

man

y -

Tech

nica

l alt

erat

ions

res

erve

d