Printed Sensors Technology: Design, Manufacturing Process ...€¦ · Design, Manufacturing Process and Applications ... technologies Automation ... Printed Sensors Technology: Design,

Printed Sensors Technology:Design, Manufacturing Process and Applications

Dr. S. Fricke

Singapore, 27.07.2017

Copyright 2017 CSEM | AMF’17 | Dr. S. Fricke | Page 1

Content

• Introduction CSEM

• Motivation

• Introduction and sensing principles

• Sensor developments and implementations based on printing

• Summary


Our mission

Development and transfer of microtechnologies to the industrial sector – in

Switzerland, as a priority – in order to reinforce its competitive advantage.

Cooperation agreements with established companies

Creation of start-ups


Technology platforms to foster innovation

Integration & packaging

Printableelectronics

Bio-surface engineering

Design & process

Nano-surface engineering

Scientific instrumentation

Medicaltechnologies

Automation

Energysystems

Emerging & thin-film PV

PV cells& Modules

Vision systems

System-on-chip

Wireless


Printed Sensors… Why?!

• Increasing number of sensors in our world.

Main contributor: The Smartphone

• What is missing for the next big thing? IoT-Sensors?

• Low cost, mass manufacturable sensors with

communication interface and large area

manufacturability.

• Printed sensors are complementary, they will not replace

MEMS sensors in a smartphone


Printing Technologies and Materials

• Non-contact printing technologies e.g.

• Ink-jet printing

• Aerosoljet printing

• Screen-printing

• Slot-die Coating

• Contact printing technologies e.g.

• Gravure printing

• Flexography printing

• Nano-imprinting

• Conductors

• Metals (Ag, Cu, Au, Pt,..)

• Semiconductors

• Organic, Inorganic (PEDOT,

P3HT, Si,…)

• Dielectrics

• Organic, Inorganic (PS, PMMA,

BCB, Oxides…)



Printed memory based on ferroelectric capacitors

• In 2011, Thinfilm together with PARC

announced a working prototype of the world's

first printed non-volatile memory device

addressed with complementary organic circuits,

the organic equivalent of CMOS circuitry

R. C. G. Naber, K. Asadi, P. W. M.

Blom, D. M. de Leeuw, “Organic Non-

volatile Memory Devices Based on

Ferroelectricity,” Adv. Mater. 2010, 22,

933–945.


Components, devices,… realized by printing

• Electric discrete components:

• Wirings, bus bars, electrodes• Resistors• Inductors• Antennas• Capacitors

• Active electronic devices:

• (Photo-)Diodes• Transistors• OLEDs• Solar cells.

• Memory devices

• Ferroelectric capacitors

• Energy storage

• Batteries

• Sensors

• Physical, chemical

• Flexible Hybrid Systems

• Printing + SMD


…also printed Sensors build on known sensing principles

• Capacitive

• Resistive

• Inductive

• Amperometric

• Voltametric

• Impedance

• Thermoelectric

• Piezoresistive

• Piezoelectric

• Photoelectric

• Pyroelectric

• Resonant

• Optical


Physical: Printed Temperature Sensors

• Inkjet printed Ag RTD on PET (PTC)

• TCR: 6.52·10-4 °C-1

• Screen-printed Wheatstone Bridge of NTC (ATO) and

PTC materials on PEN

• 0.54 V/°C @ 48Vin

• Screen-printed Si nanoparticles (NTC) and Ag electrodes

printed on e.g. paper (PST Sensors Ltd.)

• logarithmic temperature coefficient 2000 ± 100K

(T: 20 – 60°C)

F. Molina-Lopez et al.

A. Aliane et al.

D.T. Britton et al.


Physical: Printed Pressure Sensors

• Capacitive: CNT-doped PDMS

electrodes on PDMS, by soft-litho-

graphy and blade coating

• Piezoresistive: Screen-printing of Ag electrodes and

Carbon ink as piezoresistive layer on PU.

Woo et al.


Physical: Printed Pressure Sensors cont.

• Piezoelectric: PVDF:TrFE, Carbon,

Ag and PEDOT:PSS electrodes

screen-printed on PET.

• OTFTs: Inkjet-printed Ag on PET,

vapor-phase coating of Parylene,

TIPS pentacene drop-casted

M. Zirkl et al.

P. Cosseddu et al.


Physical: Printed Strain Sensors

• Resistive: Ag on structural Al parts by aerosoljet

printing

• Piezoresistive: Aerosoljet printed PEDOT:PSS on

Kapton substrate

• Gauge factor 0.53

I. Wirth et al.

B. Thompson et al.


Physical: Printed Strain Sensors cont.

• Piezoresistive: Screen-printing of

CNT-AgNP paste on silicone

• Ratio of CNT in the paste tunes strain

sensitivity and temperature insensitivity

• Sensitivity ∼59%/Pa in linear regime

S. Harada et al.


Physical: Printed Photodetectors

• Photodiodes: Fully inkjet printed Ag,

PEDOT:PSS, P3HT:PCBM

• Passive Matrix Imager: inkjet printed

P3HT:PCBM. 128dpi demonstrated, 512dpi

under development

• Active Matrix Imager: ISORG building manufacturing site

in Limoges (France)

G. Azzellino et al.

ISORG


Chemical: Electrochemical Sensors

• Electrical Read-out:Voltametry, Amperometry or

Impedance-Spectrocsopy

• Principal: Functionalization with Antibodies

• Sensing: glucose, pH, lactate, cancer biomarkers..

• screen-printed sensors with Ag, C, AgCl, Au,

electrodes have reached mass-production

G.C. Jensen et al.


Chemical: Electrochemical Sensors cont.

• Inkjet printed Au NP electrodes on Kapton

• cancer biomarker interleukin-6 (IL-6) in serum

• Gravure-printed Ag NP electrodes on PET

• mercury sulfide (HgS), lead sulfide

(PbS), D-proline and sarcosine

B.B. Narakathu et al.

G.C. Jensen et al.


Chemical: Printed Ion Sensors

• Ion Selective Electrode (ISE): Screen-printing of ion-

selective membrane (and Ag epoxy)

• Fully screenprinted Ag, Au, graphite on polyester

• Lead detection by stripping voltametry down to

2 µg/l

H.D. Goldberg et al.

S. Laschi et al.


Chemical: Printed Ion Sensors cont.

a) OFET: Semiconductor exposed OFET

b) Ion-sensitive OFET (ISOFET): Insulator exposed OFET

c) Organic electrochemical transistor (OECT): Insulator

dielectric replaced by electrolyte

• OECT humidity sensor on PE

coated paper using PEDOT:PSS as

organic semiconductor and Nafion

as electrolyte

J.T. Mabeck et al.D. Nilson et al.


Chemical: Printed Gas Sensors

• Au and Pd decorated carbon-nanofibres on

Kapton. Inkjet printed Ag electrodes and heater.

• Ammonia and NO2 sensor

S. Claramunt et al.


Printed Sensors vs. MEMS Sensors

• Rigid package, silicone glue, rigid die

with SiN membrane and glass socket

• Cross-sensitivities minimized by

thermo-mechnical decoupling

• Mounting SMD

• Local measurement

• PU foil bendable, stetchable

• Cross-sensitive to bending,

stretching, Temperature

• Mounting on surfaces

• Mapping

BOSCH Automotive


Printed Sensors vs. MEMS Sensors

• Rigid package, silicone glue, rigid die

with SiN membrane and glass socket

• Cross-sensitivities minimized by

thermo-mechnical decoupling

• Mounting SMD

• Local measurement

• PU foil bendable, stetchable

• Cross-sensitive to bending,

stretching, Temperature

• Mounting on surfaces

• Mapping

BOSCH Automotive


Summary

• Printed Sensors have been demonstrated with many sensing principles

• Very different levels of maturity, some are commercialized, some are lab prototypes

• Shelf and operating lifetime strongly depends the materials used.

• Strong potential in chemical and biological sensors for point-of-care diagnostics and

disposable sensors

• The integration into systems and making use of the unique properties of the sensors

is key to success.


Outlook

• Flexible Hybrid (Opto-)Electronics in health, consumer, automotive,... markets

• Edge processing will be included in a hybrid approach

• Large area sensing on walls, floors, roofs

• Disposable patches for surveillance

• Flexible smart patches to monitor health parameters

• Implantable flexible sensors and electrodes

Thank you for your attention!

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Printed Sensors Technology: Design, Manufacturing Process ...€¦ · Design, Manufacturing Process and Applications ... technologies Automation ... Printed Sensors Technology: Design,