Precision Cleaning Path To Premier Presentation

Precision Cleaning – Path to Premier

22 October, 2008

Scott E. MacklerSupervisor, Contamination Control

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Precision Cleaning - Path to Premier 22 October, 2008 2

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Improved / Optimized Precision Cleaning Operation

– Issue: Existing facility was located offsite in leased space, material handling involved multiple transfers, process equipment was outdated and lacked state-of-the art analytical control.

– Action: ITT funded the design and build of a new leading-edge facility around an optimized lean process flow, including all new critical cleaning process technology (equipment and instrumentation).

– Benefits: New facility utilizes ITT-owned space and is aligned with the Footprint Optimization Project for Space Systems Division. The new facility footprint is approximately half the size of the former leased operation and provides double the amount of throughput.

– Process improvements and new cleaning equipment are projected to increase first pass yield from 78% to 98% avoiding $300K+/yr in rework costs

– Cost avoidance of $350K/yr will result from elimination of rent, IT services, transportation, and decreased utility costs

– Savings due to reduced staff expected to net $4-500K/yr

– Improved personnel and hardware safety



Leaning it Out – 3P Process

Decreased walking and parts transport distance– Walking distance for small parts decreased by 21%– Small parts transport distance decreased by 13%

Added a second verification line to assist in meeting customer demand based on 2005 throughputImproved employee working environment by minimizing the small parts going through large car wash by adding a small parts washerEliminated need for clean room to dry parts by aligning the aqueous line and dryer with the dog house directly into verification lab Developed more robust wet benches to improve manual pre-clean processSmall Parts Process now requires one operator and two CC techs

– Decrease by three operators– Increase one CC tech to meet customer demand– Net decrease two FTEs (does not account for Large Parts Process)



Meeting Customer Expectations / 3P Takt Time

Cleaned 160,000 parts in 2005, and 60,000 were common parts vault start-up inventory

Basis 100,000 parts (4,375 jobs) and 80% of jobs are “small parts”, then expect 3,500 jobs/yr

Basis 230 work days/year, expect ~ 15 jobs per day

20,400 secs available work/day

Takt Time = 20,400 / 15 = approx. 22 minutes per job













Cleanroom Specifications

Ceiling Height

(feet)

Total Area

(Square Feet)

Dimension (feet)Classification

8343 16 x 22 Class 100CC Verification

8182 14 x 13 Class 100Bag and Tag

8176 8 x 22 Class 10,000Gowning

91184 32 x 37ControlledPre Clean 1534

922812 x 19 ControlledFrock

Small Parts Processing ( < 24”L x 16” W x 21” T )

1248422 x 22Class 100 – 100,000HLF 1531

1221015 x 14Class 10,000Car Wash 1517

Ceiling Height

(feet)

Total Area

(Square Feet)

Dimension (feet)Classification

Large Parts Processing ( > 24”L x 16” W x 21” T )



Process Equipment by RoomCar Wash 1517

Class 10K cleanroomTemperature and Humidity controlled environment100% exhausted air flow0.2 micron filtered CDA (Clean Dry Air)Research Grade Nitrogen (99.9996% pure)Heated RO/DI 1200 PSI pressure washer systemCO2 snow cleaning using Ultrapure Liquid CO2Millipore Solvent Pressure spray systemPrecision Steam cleaning with RO/DI waterVacuum cleaning2 ton mobile Gantry CraneReal Time Airborne Particulate Monitoring

HLF 153 (Horizontal Laminar Flow)Class 100 – Class 100K cleanroom (filter wall to rear of room)10 ft tall by 20 ft wide HEPA filtered Horizontal Laminar Flow moduleTemperature and Humidity controlled environment0.2 micron filtered CDA (Clean Dry Air)Vacuum cleaningPrecision Cleaning of large parts/assemblies2 ton mobile Gantry CraneReal Time Airborne Particulate and Molecular Contamination Monitoring



Car Wash



Horizontal Laminar Flow





Process Equipment by Room (cont’)

Pre Clean 1534

Controlled Not Classified Temperature and Humidity controlled environment0.2 micron filtered CDA (Clean Dry Air)Vacuum cleaning99.99% HEPA filtered, 100% exhausted solvent fume hood cleaning station, grounded & alarmed carboy liquid collection system.100% exhausted Precision Steam Cleaner with RO/DI water stationHeated RO/DI 40PSI Blackstone parts washer system

– 35 gallon heated (1400F) RO/DI capacity– Stainless Steel 3600 rotating parts holder– PLC programmable control system– Pneumatically controlled safety lock out– Air Knife part drying @ 45psi via filtered CDA– Particulate and Oil (coalescing) process filtration



Process Equipment by Room (cont’)Pre Clean 1534 (cont’)

Blackstone Aqueous Ultrasonic cleaning system– Four station Ultrasonic Cleaning system

– Wash – Rinse 1 – Rinse 2, resisitivity controlled auto fill– HEPA Drying 1,200 watts

– Three programmable cleaning frequencies 40, 72, or 140 kHz– Programmable frequency power settings max 1,800 Watts– Transducers are multiSONIK™ synchronized amplitude modulation with high frequency sweep– Weir and surface spargers remove floating particulates prior to removing cleaned parts.– Material Handling System Robot has a 200 pound capacity with speeds adjustable up to 20 feet per minute in

both horizontal and vertical travel. The Robotic arm is PLC controlled with multi-program capability– Controls include an Allen-Bradley PLC and touch-screen operator interface with programmable menu control

to match the part to the process.Blackstone Explosion Proof Solvent Ultrasonic cleaning system

– Approved for “Class I, Division I Group D, T3” locations per the National Electric Code– Working Tank Dimensions 20” x 11 “ x 11”– 480 Watts power, 40 kHz with Pulse and Sweep– Programmable Operator interface– Particulate filtration via 10µm filter cartridge, circulation by pneumatic diaphragm pump.

Real Time Airborne Particulate and Molecular Contamination Monitoring







Pre-Clean









Process Equipment by Room (cont’)

Bag and Tag 24 inch Bag Stainless steel sealer

– Programmable logic control system – Vacuum pressure Nitrogen purged capability– 25” hg vacuum pressure


CC VerificationWhite light and UV light visual (qualitative) inspectionQuantitative particulate and NVR verification per IEST 1246 DTwo complete optical microscope set-ups

– Olympus SZX7 stereo Microscopes– Standard magnification Range 10X– 120X– Reflective, Transmission and Dark field illumination capabilities– Digital Video capability– 8 Mega pixel digital camera



Process Equipment by Room (cont’)CC Verification (cont’)

Two complete vacuum oven set-ups w/cold plates and vented vacuum pumps for solvent boil-off (gravimetric) verification

– Hazardous Location Rating: Class I, Division 2, Group C & D

– Temperature capability of 500° F (260° C)

– Constructed to withstand full vacuum and are leak tested to 150-mtorr.

RotoVap set-up for large volume liquid boil-offs

Lancer Laboratory Glassware Washer/Dryer

– Fully automatic RO/DI cleanroom glass washer

– Programmable logic control with 6 stored cycle programs and 26 user defined options

– HEPA filtered drying and cooling

– On-board chemical storage with liquid level sensors and Automatic dosing via peristaltic pump

DI water sink

100% exhausted solvent sink w/fully instrumented, grounded & alarmed carboy liquid collection system




Bag and Tag



Hardware and Facilities Cleanliness Verification Capabilities

Monitors condensibles in clean areas. Alarm ranges can be set with automatic page/email notification.Facility Monitoring

AiM unit (SAW). Network Drops. Real-time compiling

software.Airborne Molecular

Monitors airborne particulate counts in clean areas. Alarm ranges can be set with automatic page/email notification.Facility Monitoring

Lasair II or equivalent. Network Drops. Real-time compiling

software.Particle Counters

Solvent wipe that is gravimetrically analyzed. Direct sampling of a surface. Accuracy a function of the balance (usually +/- 0.01mg/ft2). Solvent dependent.NVRMicro-Balance. Hot Plate /

RotoVap / Vac OvenExtracted Wipe

Solvent flush that is gravimetrically analyzed. Accuracy a function of the balance (usually +/- 0.01mg/ft2). Solvent dependent.NVRMicro-Balance. Hot Plate /

RotoVap / Vac OvenStainless Steel Plates

Measures thickness of molecular layer on Silicon Wafers. Measures down to A/100.NVREllipsometerSilicon Wafers

Automated system to measure particles between 5um - 100um. Completeness of the data allows curve fitting and % obscuration calculations.Optical FalloutOptical Scanning MicroscopeOptical Coupons

Manually counted. Direct sample from hardware.Particle Fallout200x Optical Microscope. Gridded Oculars.Tape Lift/Direct Inspection

Uses reflection or dark field. Automated system to measure particles between 5um -100um. Can be complimentary with SAS instrument giving a particle measuring

range 0.3um - 100um.Particle FalloutScanning Optical Microscope

(200x)Silicon Wafers/Optical Coupons

Automated instrument to measure particles between 0.3um - 25um. Counts the entire wafer.Particle FalloutSurface Analysis System (SAS)Silicon Wafers

COMMENTSAPPLICATIONEQUIPMENTMETHOD



Verification Lab



Additional Process Support Services

RO / DI WATER SYSTEM – Type E-1 process water basis ASTM D 5127-99 water – Single Digit Total Organic Carbon (TOC), 18 Megohm Resistivity– System make-up flow rate 2 GPM

CENTRAL VAC SYSTEM – Spencer Turbine SB-715B, 300 SCFM– Vacuum pressure 8” hg– Central Vacuum ports available in all rooms of the facility

N2 - Research grade Nitrogen, 99.9996% pure plumbed through stainless steel tubing CO2 - Research grade liquid CO2 , 99.99999% pure plumbed through stainless steel tubing (CO2 Sno cleaning)CDA – Clean, dry air filtered thru 5.0 / 0.5 µm particulate, 0.5µm coalescing, 0.3 µm carbon filtration, per ISO 8573-1:2001







RO/DI Water System



Required Airborne Testing

Cleanroom OnlyAll ClassesAir Pressure Difference

Cleanroom & Clean TentAll except Class 100Airflow Volume / Average Velocity

Cleanroom & Clean TentClass 100 Unidirectional OnlyVelocity Uniformity

Cleanroom & Clean TentClass 100 Unidirectional OnlyAirflow Parallelism

Cleanroom & Clean TentAll ClassesParticle Count Test

Cleanroom & Clean TentAll ClassesInstalled Filter Leakage

TypeClassTest Parameter



Optional Airborne testing

Cleanroom & Clean TentAll ClassesNoise Level

Cleanroom & Clean TentAll ClassesLight Level and Uniformity

Primarily Cleanroom OnlyAll ClassesTemperature & Relative Humidity

Cleanroom & Clean TentPrimarily Class 100Airflow Visualization

TypeClassTest Parameter



















Summary

While Process Development and characterization of new processes continues, we have achieved better than 97% first pass yield on over approximately 400 verifications to-date.

The facility is running one full shift and we have capacity for two additional shifts as demand requires. ITT can provide cleaning, verification, and perform thermal vacuum bake-out services for additional internal and external customers who require predictable, reliable data-driven precision cleaning process solutions.

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Precision Cleaning Path To Premier Presentation