PPS-20 - MICRONIX USA - Precision Motion Control Manual R… · PPS-20 Piezo Positioner Stage 1 Rev: 3.10 MICRONIX USA,LLC Irvine, California Reference Manual Contents 1. Introduction

S e r i e s

Reference ManualPrecision Piezo Stage

(Open and Closed Loop Versions)

PPS-20

PPS-20 Piezo Positioner Stage

Reference Manual Rev 3.10

MICRONIX USA, LLC

15375 Barranca Parkway, E-106

Irvine, CA 92618

Tel: 949-480-0538

Fax: 949-480-0538

Email: [email protected]

http://micronixusa.com

mailto:[email protected]

http://micronixusa.com/


1

Rev: 3.10

MICRONIX USA,LLC Irvine, California

www.micronixsusa.com

Reference Manual

Contents 1. Introduction 2

1.1 Product Description ....................................................................................................................................................................................... 2 1.2 Recommended Controllers ............................................................................................................................................................................ 3 1.3 Technical Data ............................................................................................................................................................................................... 3 1.4 Load Characteristics ...................................................................................................................................................................................... 3

2. Model Configurations 4 2.1 PPS-20 Order Numbers ................................................................................................................................................................................. 4

3. Preparing to Install the PPS-20 5 3.1 Installation Preparation ................................................................................................................................................................................. 5 3.2 Package Contents .......................................................................................................................................................................................... 5

4. Installing the PPS-20 6 4.1 PPS-20 Installation ......................................................................................................................................................................................... 6

4.1.1 General Mounting ................................................................................................................................................................................ 6 4.1.2 X-Y Mounting ....................................................................................................................................................................................... 7

5. Connecting the PPS-20 7 5.1 Atmospheric Environments ........................................................................................................................................................................... 7

5.1.1 Open Loop Installation & Wiring Diagram ........................................................................................................................................... 7 5.1.2 Closed Loop/Encoder Installation & Wiring Diagram .......................................................................................................................... 8

5.2 Vacuum Environments .................................................................................................................................................................................. 9 5.2.1 Handling and Preparation .................................................................................................................................................................... 9 5.2.2 Open loop Installation & Wiring Diagram ............................................................................................................................................ 9 5.2.3 Closed Loop/Encoder Installation & Wiring Diagram .......................................................................................................................... 9

6. Dimensions 11 6.1 PPS-20 with Digital Encoder ........................................................................................................................................................................ 11 6.2 PPS-20 with Analog Encoder ....................................................................................................................................................................... 11

7. Stacking Configurations 13 7.1 Configurations Examples ............................................................................................................................................................................. 13

8. Supplementary Information 14 8.1 Maintenance ............................................................................................................................................................................................... 14 8.2 Units and Conventions ................................................................................................................................................................................ 14

A. Appendix 15 A.1 DB-9 Standard Male Motor Connector........................................................................................................................................................ 15 A.2 2 Phase Piezo Motor Wiring Diagram .......................................................................................................................................................... 15 A.3 Open Loop Vacuum Wiring Diagram ........................................................................................................................................................... 16

A.3.1 Straight Through 9-Pin Feed Through ................................................................................................................................................ 16 A.4 Using the Digital Encoder Module ............................................................................................................................................................... 17

A.4.1 Encoder Module Pin-out .................................................................................................................................................................... 17 A.4.2 Operating and Electrical Specifications.............................................................................................................................................. 18 A.4.3 Output Signals & Signal Termination for A quad B, Index and limits ................................................................................................. 18 A.4.4 Resolution .......................................................................................................................................................................................... 18 A.4.5 Digital Encoder Wiring Diagram ......................................................................................................................................................... 19 A.4.6 Straight Through 25-Pin Feed Through .............................................................................................................................................. 19

A.5 Using an Analog Encoder ............................................................................................................................................................................. 20 A.5.1 Analog Encoder Overview .................................................................................................................................................................. 20 A.5.2 Encoder Pin-out ................................................................................................................................................................................. 20 A.5.3 Operating and Electrical Specifications.............................................................................................................................................. 20 A.5.4 Analog Output (Pins 1,2,6, and 7) ...................................................................................................................................................... 20 A.5.5 Index Window (Pins 3) ....................................................................................................................................................................... 20 A.5.6 Resolution .......................................................................................................................................................................................... 21 A.5.7 Analog Encoder Wiring Diagram ........................................................................................................................................................ 21 A.5.8 Straight Through 15-Pin Feed Through .............................................................................................................................................. 21


2

Rev: 3.10



Reference Manual

1. 0BIntroduction

1.1 Product Description

The PPS-20 is a high-precision, long travel linear piezo stage. Miniature cross-roller

bearings assure high stiffness and guiding accuracy for loads up to 20N

(Horizontal orientation). It utilizes our patent-pending multi-phase piezo motor

resulting in high speed (>2mm/s) and high blocking force (>2N). The PPS-20 is

available in travel lengths of up to 50mm, and an optional linear encoder

provides nanometer repeatability. Vacuum, Ultra High Vacuum (10-9 torr) and/or

Cryo (<4 Kelvin) compatible versions are available.

Features:

Travel ranges of 11mm, 18mm, 26mm, 38mm, and 51mm

Load capacity up to 2kg

Optional linear encoder

Bearings

PPS-20 20mm Open Loop

(Shown in center position)

Carriage

Base

Encoder Bracket

Scale Bracket

Encoder Head

Encoder Bracket

Scale Bracket

Encoder Head

PPS-20 20mm Closed Loop

with 2nm digital encoder


PPS-20 20mm Closed Loop

with 10nm Analog encoder



3

Rev: 3.10



Reference Manual

1.2 Recommended Controllers

The following controllers are available from MICRONIX USA for piezo stages:

MMC-100

MMC-110

1.3 Technical Data

Motor PM-002

Speed Max. (mm/sec) 2 (MMC-100), 10(MMC-110)

Resolution Typical (nm) <1 (open loop), 2 (digital encoder),

10 (analog encoder)

Bi-directional Repeatability (nm) N/A (open loop), ± 20 (digital encoder),

±50 (analog encoder)

Uni-directional Repeatability (nm) N/A (open loop), 20 (digital encoder),

50 (analog encoder)

Accuracy (µm) +/- 3 (+/- 1 on request)

1.4 Load Characteristics

Load Characteristics Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm)

PM-002 2 20 20 0.7 0.7 0.7


4

Rev: 3.10



Reference Manual

2. 1BModel Configurations

2.1 13BPPS-20 Order Numbers

Contact MICRONIX USA for custom applications and stacking configurations.

Order No. PPS-20- 1 0

Piezo Motor PM-002 1

12mm Travel 1

18mm Travel 2

26mm Travel 3

51mm Travel 5

Open Loop 0

Analog (1Vpp), 10nm 2

Digital Encoder, 2nm 3

No Limit Switch 0

Non-vacuum 0

Vacuum prepared, 10-6 mbar 6

Vacuum prepared, 10-9 mbar 9


5

Rev: 3.10



Reference Manual

3. 2BPreparing to Install the PPS-20

3.1 14BInstallation Preparation

When mounting the stage it is important to consider the flatness of the mounting

surface, as the stage will conform to the shape of that mounting surface. A

surface that is not flat can adversely affect the performance and structural

integrity of the stage.

The stage is calibrated and guaranteed to be within specification at 20°C ±5°C

unless otherwise specified. Be sure to use the stage under the following

conditions:

Mount to a clean and flat surface which is free of debris, burrs or dings

An indoor atmosphere free of corrosive gases, excessive dust, and

condensation

Temperature range of 0-40°C

Relative humidity between 20-80%

Locate away from water, heat, and electrical noise

3.2 15BPackage Contents

If product is damaged or there are missing components, contact MICRONIX USA

immediately. Do not discard product packaging in case of return shipment.

Package Should Contain:

PPS-20 Linear Stage

Reference Manual

Any other previously agreed upon components such as a controller


6

Rev: 3.10



Reference Manual

4. 3BInstalling the PPS-20

All mounting patterns require M2 screws for mounting and M1.5 x 5mm dowel

pins for precision alignment. Additional brackets and screws may be needed for

custom applications.

4.1 16BPPS-20 Installation

4.1.1 28BGeneral Mounting

For general mounting configurations, mount the base to the mounting surface.

Align carriage with clearance holes to access base mounting pattern. (Please

note, it is possible to move the carriage manually without damaging the stage)

Travel A B

12mm 20 16

18mm 30 16

26mm 40 36

51mm 80 50

Requires:

2x M1.5 x 5mm Dowel Pins

2x M2 x 5mm Socket Head Cap Screws

(optional) 2x M2 x 5mm Socket Head Cap

Screw for ear mounts

2. Align carriage with a

clearance hole and install an

M2 Socket Head Cap Screw

Direction

of Travel

Clearance Hole

Optional Side

Mounting screws

Customer Supplied

Base Plate or

Mounting Surface

1. Align carriage with remaining

clearance hole and install

second M2 Socket Head Cap

Screw

Optional Ear

Mount Screws


7

Rev: 3.10



Reference Manual

4.1.2 29BX-Y Mounting

For X-Y mounting, follow the instructions for mounting the X-axis stage, outlined in

section 4.1.1 General Mounting, then proceed to mount the Y-axis stage, as

shown below(Please note, It is possible to move the carriage manually without

damaging the stage):

Note: For stages assembled in an XY configuration in factory do not require disassembly for

base mounting

5. 4BConnecting the PPS-20

5.1 17BAtmospheric Environments For controller information refer to the appropriate MMC controller manual.

5.1.1 30BOpen Loop Installation & Wiring Diagram

Connecting the PPS-20 in an open loop configuration only requires that the D-

sub 9 Pin male Motor Cable be connected to a compatible controller. No other

cables or components are needed.

Requires:

2x M1.5 x 4mm Dowel Pins

4x M2 x 4mm Socket Head Cap Screws

2. Align Carriage with remaining

clearance hole and install second

M2 Socket Head Cap Screw

1. Align Y- Axis Stage Carriage with

Clearance Hole. Install M2 Socket

Head Cap Screw

Direction

of Travel

Y-Axis Stage


8

Rev: 3.10



Reference Manual

5.1.2 31BClosed Loop/Encoder Installation & Wiring Diagram

Using the PPS-20 stage with an encoder requires a closed loop compatible

controller (MMC-100 or MMC-110) that recognizes encoder feedback. Connect

the stage as shown below.

5.1.2.1 Analog Encoder Wiring Diagram

5.1.2.2 Digital Encoder Wiring Diagram

For a PPS-20 with a digital encoder, connect the stage as shown below

using the supplied 15 to 9 pin cable to connect the Encoder Module to

the Controller.


9

Rev: 3.10



Reference Manual

5.2 18BVacuum Environments

5.2.1 32BHandling and Preparation

When preparing the stage for vacuum environments, take the necessary

precautions (such as wearing gloves, clean room clothing, etc.) when handling

the stage as to avoid any contaminants. Maximum Bake-out temperature is

100°C. MICRONIX USA supplies the stage with vacuum compatible connectors:

9-pin female PEEK connectors for open loop, 15-Pin female PEEK connector for

closed loop with analog encoder, 25-pin female PEEK connector for closed loop

with digital encoder.

5.2.2 33BOpen loop Installation & Wiring Diagram

Connecting an open loop PPS-20 in a vacuum chamber requires the use of a

feed through connector at the vacuum chamber wall. The vacuum compatible

PPS-20 will be supplied with wiring for a straight through feed through not a cross

over gender changer. MICRONIX USA supplies test connectors that simulate the

vacuum feed through to allow functionality test prior to installation in a vacuum

chamber. For details regarding the pin-out and feed through specifications see

the Appendix A.3.

5.2.3 34BClosed Loop/Encoder Installation & Wiring Diagram

Closed loop installation of the PPS-20 stage in vacuum environments requires an

intermediate feed through connector at the vacuum chamber wall that can

accommodate both the motor cable, and the encoder cable.

The vacuum compatible PPS-20 will be supplied with wiring for a straight through

feed through not a cross over gender bender. MICRONIX USA supplies test

connectors that simulate the vacuum feed through to allow functionality test

prior to installation in a vacuum chamber. For details regarding the pin-out and

feed through specifications see the Appendix A.4.5, A.5.5.


10

Rev: 3.10



Reference Manual

5.2.3.1 Analog Encoder Wiring Diagram

5.2.3.2 Digital Encoder Wiring Diagram


11

Rev: 3.10



Reference Manual

6. 5BDimensions

6.1 19BPPS-20 with Digital Encoder

L Travel A B C D E

20 12mm 6 1 2 15 16

30 18mm 6 1 2 25 16

40 26mm 10 3 6 35 36

80 51mm 18 7 14 75 36

* Grey parts for external closed loop

only


12

Rev: 3.10



Reference Manual

6.2 20BPPS-20 with Analog Encoder

7.

L Travel A B C D E

20 12mm 6 1 2 15 16

30 18mm 6 1 2 25 16

40 26mm 10 3 6 35 36

80 51mm 18 7 14 75 36

* Grey parts for external closed loop

only


13

Rev: 3.10



Reference Manual

6BStacking Configurations

7.1 Configurations Examples (Additional Configurations available upon request)

Using Z-Adapter (P/N: 430509)

X-Y X-Y

No carriage X-Y

Back to back

X-Y

18mm-12mm

X-Y

18mm (no carriage) -12mm

X-Y (back to back)

38mm (X-Axis) – 26mm (Y-Axis)

X-Y

PPS-28

PPS-20 XYZ

X-38mm, Y-18mm, Z-26mm X-Y-Z X-Y-Z


14

Rev: 3.10



Reference Manual

8. 7BSupplementary Information

8.1 21BMaintenance

The PPS-20 series of linear piezo stages utilizes a maintenance free design. Do not

modify the stage or perform any maintenance unless specifically instructed to do

so by MICRONIX USA personal. If the stage is not performing up to the original

specifications, please contact MICRONIX USA.

The PPS-20 linear piezo stage is a precision mechanical device and

should be handled with care. Do not drop or mishandle the stage.

Do not touch the bearings, as this will contaminate the lubrication and jeopardize

the longevity of the stage.

Follow the Installation Preparation requirements and use proper cable

management to ensure a clean and safe operating environment.

8.2 22BUnits and Conventions

All measurements in this document are in the metric system of units.

Metric Unit English Unit

1 millimeter 0.0394 inches

1 micron 0.0000394 inches

1 Newton 0.2248 lbs

1 Newton-meter 8.85 in-lbs


15

Rev: 3.10



Reference Manual

A. 8BAppendix

A.1 DB-9 Standard Male Motor Connector

A.2 24B2 Phase Piezo Motor Wiring Diagram

Pin Description Color

1 Phase 1 Red

2 Phase 2 Yellow

3 N/C N/C

4 Not In Use N/C

5 Ground Black& Green

6 N/C N/C

7 N/C N/C

8 N/C N/C

9 Ground N/C

X-Y-Z

PP-22


16

Rev: 3.10



Reference Manual

A.3 25BOpen Loop Vacuum Wiring Diagram

A.3.1 35BStraight Through 9-Pin Feed Through


17

Rev: 3.10



Reference Manual

A.4 26BUsing the Digital Encoder

Module

When using the digital external encoder

configuration, the Encoder Module

should display two green LED’s

indicating a power source and proper

encoder alignment. A Red or Yellow

Signal Level LED indicates misalignment

of the Encoder Head, if this occurs

contact MICRONIX USA. Do not adjust

the Encoder Head or scale. For more

information refer to MicroE Systems

Mercury Encoders.

A.4.1 36BEncoder Module Pin-out

*-Limits must be specified at the time of order, and

calibrated at the factory.

Note: Tri-state alarm: A and B are tri-stated if the encoder

signal becomes too low for reliable operation.

Pin Description Pin Description

1 *Right Limit+ 9 Ground

2 Ground 10 *Left Limit+

3 *Right Limit- 11 *Left Limit-

4 Index- 12 Index+

5 B- 13 B+

6 A- 14 A+

7 +5V 15 (not used)

8 +5V


18

Rev: 3.10



Reference Manual

A.4.2 37BOperating and Electrical Specifications

A.4.3 38BOutput Signals & Signal Termination for A quad B, Index and limits

*Output signals are differential. Inverse signals are not shown for clarity.

**Note: At some interpolations values the index pulse may be aligned with other states of A or B

than the ones shown.

***Above are with reference to the sensor’s optical centerline

A.4.4 39BResolution

All closed loop stages are supplied with 20µm scales. The digital encoder

module interpolates to a higher resolution as specified in the order. With a

digital encoder the MMC-100 has an achievable resolution of 2nm.

Power Supply 5VDC ±5% @ 140mA (No outputs terminated)

@ 180mA (A, B, I, and both limits

terminated); 50mA at the sensor

Operating Temperature 0 to 70°C

Humidity 10 - 90% RH non-condensing


19

Rev: 3.10



Reference Manual

A.4.5 Digital Encoder Wiring Diagram


A

C

D

E

BJ1

J2 J3J4

J5 J6

J7 J8

Standard Cable Descriptions:A. PPS-20 Motor Cable - Vacuum Side (Female Dsub 25 Pin Peek Connector, 1.5m, Silver Braided Cable)

B. PPS-20 Encoder Cable - Vacuum Side (Female Dsub 25 Pin Peek Connector, 1.5m, Silver Braided Cable)C. Encoder Module Breakout Cable (Female Dsub 25 Pin to MII 6000 Interpolator Module, 1m, Black Cable)D. Motor Breakout Cable (Female Dsub 25 Pin to Male Dsub 9 Pin, 1.5m, W hite Cable)E. Encoder Module Adapter Cable (Female Dsub 15 Pin to Female Dsub 9 Pin, .5m, W hite Cable)

Description: Color J1 J2 J3 Color J4 J7

Phase 1 Red 1 1 13 Red 13 1Phase 2 Yellow 2 2 12 W hit e (Green TP) 12 2Ground Black/Green 14 14 25 Black/Green 25 5

Shield - 15 15 24 - 24 Cas ing

+ 5VDC Red 4 4 10 Red 10

GND Black 17 17 22 Black 22DCLK - Gray 5 5 9 Gray 9

DCLK + W hit e (Gray TP) 18 18 21 W hit e (Gray TP) 21M I SO - Violet 6 6 8 Violet 8M I SO + W hit e (Violet TP) 19 19 20 W hit e (Violet TP) 20

M OSI - Blue 7 7 7 Blue 7M OSI + W hit e (Blue TP) 20 20 19 W hit e (Blue TP) 19

nSS - Green 8 8 6 Green 6nSS + W hit e (Green TP) 21 21 18 W hit e (Green TP) 18CLK - Brow n 9 9 5 Brow n 5

CLK + W hit e (Brow n TP) 22 22 17 W hit e (Brow n TP) 17Shield - 16 16 23 - NC

Female PEEK Dsub25 Connect or - Rear View

131211109

25242322

87654

2120191817161514

321

Wiring Diagram:

Description: J5 Color J6 J8I ndex - 4 W hit e (Purple TP) 4 8B - 5 W hit e (Yellow TP)5 7

A - 6 W hit e (Brow n TP) 6 6+ 5VDC 7 Red 7 5

Ground 2 Black 2 4I ndex + 12 Purple 12 3B + 13 Yellow 13 2

A + 14 Brow n 14 1

12345

6789

Male Dsub9 Connect or - Rear View

54321

9876

Female Dsub9 Connect or - Rear View


20

Rev: 3.10



Reference Manual

A.5 27BUsing an Analog Encoder

A.5.1 42BAnalog Encoder Overview

A PPS-20 with Analog encoder will need to be paired with an appropriate controller.

The MMC-100 has an Analog option. The PPS-20 with an analog encoder will be

supplied with a 15 pin connector that incorporates both motor and encoder signals.

A.5.2 43BEncoder Pin-out

Pin Color Description

1 Brown Cos+

2 Yellow Sin+

3 Violet Index +

4 Black Ground

5 Red +5V

6 Orange Cos-

7 Green Sin-

8 Blue Index -

9 Not in Use Not In Use

A.5.3 Operating and Electrical Specifications

A.5.4 Analog Output (Pins 1,2,6, and 7)

A.5.5 Index Window (Pins 3)

Power Supply 5VDC ±5% @ 330mA (60mA for sensor)

Operating Temperature 0 to 70°C

Humidity 10 - 90% RH non-condensing


21

Rev: 3.10



Reference Manual

A.5.6 47BResolution

All closed loop stages are supplied with 20µm scales. The interpolation is done

in the MMC-100 to a higher resolution as specified in the order. With an

analog encoder the MMC-100 has an achievable resolution of 10nm.

A.5.7 Analog Encoder Wiring Diagram


Wiring Diagram:

AC

DB

J1J2 J3

J4

J6J5

Description: Color J1 J2 J3 Color J4 J5 J6Phase 1 Red 1 1 8 Red 8 1

Phase 2 Yellow 2 2 7 W hit e (Green TP) 7 2Ground Black/Green 9 9 15 Black/Green 15 5Shield - 10 10 14 - 14 Cas ing

GND Black 8 8 1 Black 1 4Cos+ Brow n 7 7 2 Brow n 2 1

+ 5V Red 6 6 3 Red 3 5Cos- Orange 5 5 4 W hit e (Brow n TP) 4 6

Sin+ Yellow 4 4 5 Yellow 5 2Sin- Green 12 12 12 W hit e (Yellow TP)12 7I ndex- Blue 13 13 11 Violet (W hit e TP) 11 8

I ndex+ Violet 14 14 10 Violet 10 3Shield - 15 15 9 - 9 Cas ing

Cable Descriptions:A. PPS-20 Encoder Cable - Vacuum Side (Female Dsub 15 Pin Peek Connector, 1.5m, Silver Braided Copper Cable)B. PPS-20 Motor Cable - Vacuum Side (Female Dsub 15 Pin Peek Connector, 1.5m, Silver Braided Copper Cable)C. Encoder Cable (Female Dsub 15 Pin to Female Dsub 9 Pin, 1.5m, White Teflon Cable)D. Motor Cable (Female Dsub 15 Pin to Male Dsub 9 Pin, 1.5m, W hite Teflon Cable)

Female PEEK Dsub15 Connect or - Rear View

87654

151413121110

321

Documents

PPS-20 - MICRONIX USA - Precision Motion Control Manual R… · PPS-20 Piezo Positioner Stage 1 Rev: 3.10 MICRONIX USA,LLC Irvine, California Reference Manual Contents 1. Introduction