NXQ8000 Brief Summary_Dec 2016

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Neutronix-Quintel385 Woodview Ave.Morgan Hill, CA 90537

Phone: (408) 776-5190Web: www.neutronixinc.com

NXQ8000 Series

NXQ4000 Series

Manual Load – Contact printersManual AlignUp to 200mm Wafers

Manual or Auto LoadContact or ProximityManual Align or Auto AlignUp to 300mm Wafers

NXQ Mask AlignersNXQ Mask Aligners

Neutronix-Quintel Confidential -

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New! NXQ8012 Manual LoadAutoLoad Model Available April 2016

The NXQ Mask AlignersThe NXQ Mask Aligners

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Flexible PlatformThe NQX8000 has the capability of processing substrate pieces/squares up to 8 inch diameter wafers.

Modular PlatformAuto Load, DUV exposure optics and Backside Alignment can added in the field without expensive platform changes!

Scalable PlatformThe NXQ8000 provides the capability to go from R&D to pilot production to fully automated HVM on the same platform!

Flexible, Modular, Scalable!

NXQ Competitive AdvantagesNXQ Competitive Advantages


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X, Y and Theta Electromagnetic Linear Motors that are virtually Maintenance free!100nm Encoders mounted directly on stage for actual position feedback to vision system! 20nm Capable!Sub 0.5 um 3 sigma overlay achieved with 5x Objectives providing excellent DOF and FOV!Faster, more accurate and much more reliable than Servo motors.Stage Auto Re-centers after exposure.

New! Electromagnetic Linear Motors on Align Stage



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AutoAlign - Front and Backside Alignment

Feature:LED thru objective Illumination with Recipe Stored Intensity and contrast settings, Single Field and Spiral search for alignment marks that don’t land in the field of viewOptimized load offset (OLOA)Recipe Set Field of View –Vision system runs calibration to calculate pixels per micron (New!)

The Benefits

Ultimate Flexibility in control of illumination for reliable AutoAlign pattern recognition

Shorter Align Time no Operator Assistance

Added capability for hard to find alignment targets

Great for compensation for different size alignment marks and getting best possible alignment accuracy

NXQ Auto AlignNXQ Auto Align


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C1 C2 C3 C4 C5 C6 C7

R1 X 0.0843

R1 Y 0.0228 Mean X 0.03819

R2 X 0.0319 0.1372 0.008 Range X 0.21430

R2 Y -0.0621 -0.1993 -0.1993 Max X 0.16790

R3 X -0.0373 0.0224 0.0224 Min X -0.04640

R3 Y -0.0585 -0.0836 0.0681

R4 X 0.11 0.0231 -0.0186 0.1226 Mean Y -0.05211

R4 Y 0.0406 -0.022 -0.0973 0.018 Range Y 0.26740

R5 X -0.0046 0.1679 0.0133 Max Y 0.06810

R5 Y 0.0028 -0.0052 -0.0231 Min Y -0.19930

R6 X nr 0.0538 -0.0464,

R6 Y nr -0.0368 -0.1883

R7 X -0.0408

R7 Y -0.1707

25 Wafer Lot Patterned Resist to Resist overlay data, 30um Align Gap, 10um Print Gap, 7.5x Objectives - Measured with IVS Overlay Measurement System.

0.25 um 3-Sigma Overlay Data0.25 um 3-Sigma Overlay Data


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NXQ sets the industry standard for Air bearing leveling which provides the most control and lowest force leveling for fragile and ultra thin wafers and high value product wafers!Low friction ball seat provides an excellent seal when vacuum is applied to perform precise wedge error compensationThe “air bearing” floats the chuck for precise leveling.Flexures prevent Z-axis shiftingThe lock ring holds the piston tightly after leveling.The Electro Magnetic Linear Motor (Maintenance Free!) with linear encoder for highly accurate position (+/- 1um) accuracy..

New! Z-Axis Guide Set SystemNXQ – Z AxisNXQ – Z Axis


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Leveling System and Alignment Stage

The BenefitsPrecise leveling and alignmentsVoice Coil Motors – No bearings, gears or lead screws to wear out or service!Air bearing Z- Axis Guideset -No shiftingPrecise alignmentsLow contact force allows the user to work with very fragile materials

Minimal maintenanceNo worn parts!No adjustments!No daily calibrations!Reliable!Accurate!

NXQ – WEC (Leveling)NXQ – WEC (Leveling)


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BSA - Integrated IR – Select Method (IR or Optical) in Recipe.No Hardware conversion required!Dual functionality as a Metrology Tool! – Inspect BSA Wafers - Post Develop – With IR Viewing.High Definition GigE Cameras for unsurpassed image clarity!

No one else offers this unique capability in the industry!

Integrated OBS and IR Backside Alignment (BSA)

Focus Motors

HD Cameras

LeftX Motor

Y Motor RightX Motor

IR Illumination

NXQ - BSANXQ - BSA

Neutronix-Quintel Confidential - NXQ - Table of Contents

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This wafer is an IR image of a wafer that was aligned, exposed and developed using the Optical Backside Method (OBS) recipe.

Post Development IR MeasurementPost Development IR Measurement


• Two High Definition GigE Cameras Per Objective for unsurpassed image clarity!• Switch between Wide Field of View and High Magnification at the touch of a button,

Without Refocusing! Great when searching for alignment marks or scanning mask or substrate

• Set custom Field of view in Recipe! (New!)

• Independent X-Y movement with Right and Left Auto Focus (New!)

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Quadcam MicroscopeTwo CCD Cameras per Objective!!



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Manual Tray Load Even on Auto Load Systems!



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NXQ 8000 Sample PrintingNXQ 8000 Sample Printing


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NXQ 8000 Sample PrintingNXQ 8000 Sample Printing

Neutronix-Quintel Confidential - NXQ - Table of Contents

• Lowest Cost of Ownership in the Market!• Maintenance Free Z Axis

• Frictionless Air Bearing, Requires No Lubrication

• Maintenance Free WEC• Precise, Air Bearing Ball Seat Design

• Maintenance Free Align Stage!• Reliability and Uptime

• Unsurpassed with Uptimes > 98%!

• Milara-Logosol Robot• 60,000 Hrs MTBF –Years of trouble free cycles!

For More information:• www.neutronixinc.com• Or email: [email protected]• Phone:408-776-5190

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NXQ 8000 COONXQ 8000 COO


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NXQ8000 Brief Summary_Dec 2016