33
2

NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

  • Upload
    others

  • View
    1

  • Download
    0

Embed Size (px)

Citation preview

Page 1: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

2En

Page 2: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

En

Page 3: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

2

We proudly present the MM-400/800 series created by enhancingevery point of features required in a measuring microscope ofthe next generation—e.g. greater accuracy, digital imaging andvision processing metrology, larger workpiece handling, non-contact Z-height measurement, and coordination with dataprocessing systems.

MM-400/800 SeriesNext-Generation Measuring Microscopes

Toward Digital Imaging & Metrology

Page 4: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

3

• The new Nikon measuring microscope equipped with TTL Laser AF.It also boasts a new Focusing Aid mechanism that enables sharpand accurate focusing. High precision Z-axis measurement issimpler than ever.

• Digital image measuring with precise auto edge detection neverrealized before thanks to image capture using a Nikon digital cameraand measurement support software E-MAX series.

• A fully motorized high power microscopy model is also available fordigital imaging.

• An expanded observation range has been achieved by enhancementof various illuminators and light sources. These include a high-intensity white LED illuminator for brightfield observation, a universalepi-illuminator to respond to various observation needs, and a 12V-50W halogen light source.

• A motorized Z-axis movement mechanism (LM type) simplifiesaccurate vertical motion through the use of a dedicated controller.

• Added body strength enables the loading of larger stages, such asthe newly developed 12x8 stage, allowing for larger workpieces.

• Maneuverability has been greatly improved due to various motorizedcontrols and an ergonomic design that includes a dual axiscoarse/fine focus knob and a stage that is easy to manipulatedespite its large size.

• Enhanced interface with newly developed data processor DP-E1 andPC-based measurement support software E-MAX series providesstrong support for management and usage of measurement data.

Function Icons

Autofocus (Universal Type)TTL Laser AF (Autofocus) enablesperfect focusing quickly.

Focusing AidThe Focusing Aid (FA) ensuresaccurate Z-axis focusing.

Universal Epi-illuminatorFocusing AidA universal epi-illuminator withFocusing Aid (FA) mechanism.

Z-axis Motorized MotionA dedicated controller providesaccurate up/down movements withease.

Trinocular Optical HeadIdeal for configuration withphotomicrography equipment.

Monocular Optical HeadFor applications where costperformance is priority.

Universal Epi-illuminatorSupports a wide range ofapplications.

AF

FA

UFA

T

M

U-EPI

LED LED IlluminatorA high-intensity white LED illuminatorfor brightfield use.

Page 5: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

4

TTL Laser AF (Universal Type) The first measuring microscope series equipped with TTL Laser AF, 0.75µm(theoretical, at 20x) spot diameter and a 0.5 sec. focusing speed, the new modelsaccomplish focusing quickly with repeatability as high as 0.5µm (when a 20xobjective is used).

Focusing Aid (FA)The newly developed split-prism Focusing Aid (FA) delivers sharp FA patterns toensure accurate focusing during Z-axis measurements. Measurement errors due todifferences in the depth of focus of different objectives are minimized.

Motorized Z-Axis Movement (LM Type)A motorized vertical movement mechanism with a 10mm/sec.speed has been incorporated. Up/down control is accuratelyprovided with a dedicated controller.

A high-intensity white LED illuminator is provided as standard for brightfielduse. This illuminator features quick reaction and constant colortemperature, enabling measurement with high-precision and efficiency. Forthe universal type (except FA), a newly designed 12V-50W halogen light isincluded. Brightness at high magnifications, in particular, has beensubstantially improved.

Built-in Stepless Light ControlA stepless light control is built into the system, enabling light control from the PCwithout touching the dial on the main body. Observation under the sameconditions—an essential requirement in video measurement—is possible.

LED Illuminator This high-intensity illuminator uses 60 white LEDs and comes with a light intensitycontrol to minimize flickering.

8-Segment LED Ring Light CYN-2 This ring light enables illumination control from eight directions, eliminating theneed to pull out and adjust the fiber illuminator each time measurement is made.

Stellar new features enhance Z-axis measurement accuracy

Improved illuminators broaden observation ranges

Split-prism Focusing Aid (FA) Mechanism

Above focus In focus Below focus

Objective FA patterns are clearly visible because they are split vertically.

Laser AF Tracking on FPC

Page 6: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

5

In combination with a Nikon digital camera for microscopes and the E-Maxseries of measurement support software, it will streamline your microscopictasks extending from the observation and capture to the storage of high-definition digital images of your workpieces.

Digital Imaging & Vision Processing

Enhanced body solidity through CAE analysis has enabled themounting of a large stage in a small space to accommodate themeasuring of large workpieces. With the MM-800 model, inparticular, it is possible to mount a 300x200mm stroke stage.

New 12x8 Stage for Large Workpieces (MM-800 only)

Illumination, communication, data processingare all controlled by a rear-side controller. Therear-side controller enables future systemupgrades.

Rear-side MM Controller

The design of the MM-400/800 series has been revamped so that users havemore freedom than ever in choosing modules to configure their system. Youcan configure the optimum system according to your needs, including aultrahigh-precision system boasting precision as high as 1.5+L/100µm withcombination correction.Also, since the solidity of the microscope as a whole has been upgraded, thesystem exhibits excellent reliability during measurements with a digital cameraand other accessories loaded.

* For details on system configuration, contact Nikon.

High-Precision Type

-6

-5

-4

-3

-2

-1

0

1

2

3

4

5

6

MM-400/800 Combination Precision

Travel distance (mm)

Without correction: (3+L/50) µm With correction: (1.5+L/100) µm

Data Processor DP-E1 The DP-E1 is compact yet easy to use. You can place the displaynear the eyepiece and the control pad at your fingertips, for quickmeasurement and data processing. With smooth interface with aPC, the DP-E1 performs the job efficiently, from computation to themanagement of measurement results.

3rd-party DRO Connectable (S Type)Also available is the S Type, to which a 3rd-party DRO isconnectable, including the Metronics QuadraChek series.

※ QuadraChek is a trademark of Metronics Inc.

Measurement Support Software E-MAX Series Digital image measuring performance of the E-MAX Series hasbeen upgraded. Combined with Nikon’s digital camera andmeasuring microscope, the system achieves digital imagemeasurements with precision never before possible.

Interface with data processors and software has been greatlyenhanced, enabling comprehensive support for the entiremeasurement process, extending from the measurement, imagecapture and analysis up to data storage.

Improved Interface with Data Processor and Software

DP-E1

Page 7: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

6

Type MM-800/LM MM-400/LMZ-axis movement Motorized (max. speed: 10mm/sec)Optical head Trinocular optical head, Trinocular optical head with Focusing AidTilting angle 25°Eyepiece CFWN10x (Field No. 20)Objective Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm)Stage MHS12x8, MHS10x6, MHS8x6, MHS6x4, MHS4x4, O3L, MHS2x2 MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*

Episcopic LED episcopic illuminatorMax. workpiece height 200mm 150mmDimensions (W x D x H)/weight 380 x 735 x 725mm/approx. 65kg 300 x 600 x 638mm/approx. 50kg

3-Axis and Z-Motorized ModelLM Type

The LM type has a built-in motorized Z-axis scale, enabling accurate 3-axismeasurements. In addition, the optional Focusing Aid uses a split prism toensure Z-axis focusing accuracy and minimize measurement errors causedby the difference in the objective’s depth of focus.

MM-800/LM • 10x6 stage • Focusing Aid (FA) mechanism

Applications: Dies & molds, Finely machined parts, Stampedparts, Injection molded parts, Medical devices

FA T

FA T

LED

LED

MM-400/LM • 6x4 stage • Focusing Aid (FA) mechanism

Connector - Housing Inside

PGA - Insertion Pin

Specifications *TE2-PS100W power supply is required

Page 8: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

MM-400/L MM-400/SL with 3rd-party DRO

• 4x4 stage • Trinocular optical head

7

3-Axis Measurement Model L/SL Type

Type MM-800/L, MM-800/SL MM-400/L, MM-400/SLZ-axis movement Manual (????coarse/fine knob)Optical head Trinocular optical head, Trinocular optical head with Focusing AidTilting angle 25°Eyepiece CFWN10x (Field No. 20)Objective Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm)Stage MHS12x8, MHS10x6, MHS8x6, MHS6x4, MHS4x4, O3L, MHS2x2 MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*

Episcopic LED episcopic illuminatorMax. workpiece height 200mm 150mmDimensions (W x D x H)/weight 380 x 735 x 725mm/approx. 65kg 300 x 600 x 638mm/approx. 50kg

Specifications *TE2-PS100W power supply is required

With a built-in Z-axis scale, this type is a standard line in Nikon’s measuringmicroscope series. Various models are available—with or without Focusing Aid,monocular or trinocular optical head. You can select the best one according to yourmeasuring range, use and budget. The LS model accepts attachment of DRO madeby other manufacturers.

MM-800/L MM-800/SL with 3rd-party DRO

• 8x6 stage • Focusing Aid (FA) mechanism

Applications: Dies & molds, Finely machined parts, Stampedparts, Injection molded parts, Medical devices

T

FA T LED

LED

Plastic Gear Teeth with Smaller Module

Black Injection Molding Parts - Connector

Page 9: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

8

MM-800/400/800S/400S (2-Axis Measurement Model)

Type MM-800 MM-400Z-axis movement Manual (????knob)Optical head Monocular optical headTilting angle 30°Eyepiece Dedicated 10x (Field No. 20)Objective Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm)Stage MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*

Episcopic Monocular LED episcopic illuminatorMax. workpiece height 150mmDimensions (W x D x H)/weight 300 x 600 x 638mm/approx. 50kg

Specifications *TE2-PS100W power supply is required

These are the basic models in the MM-400/800 series. High in cost performance,these models are expressly designed for 2-axis (XY) applications. Various models areavailable—monocular or trinocular optical head, 12x8 large stage or 2x2 small stage,according to application and budget. The S model accepts DRO made by othermanufacturers.

MM-400 • 2x2 stage • Monocular optical head

MM-800 • 8x6 stage• Focusing Aid (FA) mechanism

Applications:Dies & molds, Finely machined parts, Stampedparts, Injection molded parts, Medical devices

M LED

Page 10: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Type MM-800/S MM-400/SZ-axis movement Manual (????knob)Optical head Trinocular optical headTilting angle 25°Eyepiece CFWN10x (Field No. 20)Objective Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm)Stage MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*

Episcopic LED episcopic illuminatorMax. workpiece height 150mmDimensions (W x D x H)/weight 300 x 600 x 638mm/approx. 50kg

Specifications *TE2-PS100W power supply is required

9

MM-400/S• O3L stage • Trinocular optical head

Applications: Stamped parts, Injection molded parts, Medicaldevices, Drills, Micro tooling

MM-800/S• ?????• ?????

T LED

Page 11: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

10

High Power Microscopic Model with Universal Epi-Illuminator

Motorized Z-axis & Microscopic Observation Mode Switchover

In addition to brightfield, darkfield, simple polarizing, and DIC, the universal type inthe MM-400/800 series enables epi-fluorescence observation as well. Moreover,important controls in the microscope—e.g. Z-axis movement, focusing andillumination switchover—have been automated or motorized to streamline imagingoperations such as digital image capture, FOV measurement and data storage.

Control of the motorized epi-illuminator and various light sources, universalmotorized nosepiece and aperture diaphragm, DIC changeover, and otherimportant operations can be performed at a single place via the illumination& AF controller.

TTL Laser AFThe first measuring microscope series equipped with TTL Laser AF, these modelsaccomplish focusing quickly with repeatability as high as 0.5µm (when a 20xobjective is used).

Focusing Aid (FA)The newly developed split-prism Focusing Aid (FA) ensures accurate Z-axisfocusing, minimizing measurement errors caused by the difference in the depth offocus of the objective in use.

Universal Motorized NosepieceThe LV-NU5A universal nosepiece simplifies objectives changeover. Programmedmagnification changeover is available via the illumination & FA controller.

Centralized Control via Illumination & FA Controller

Epi-fluorescence DIC

Brightfield Darkfield Brightfield

Page 12: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

11

A new lineup of motorized universal illuminators is availablein addition to manual types. A white LED illuminator isavailable for brightfield use. Users can choose either a 12V-50W halogen or a white LED light source according toobservation purpose and workpiece.

LV-UEPI Universal Epi-IlluminatorThis universal epi-illuminator enables brightfield, darkfield, simplepolarizing, and DIC observations. The illuminator automaticallyopens the field and aperture diaphragms when switchingobservation from brightfield to darkfield. When returning tobrightfield, the previous field and aperture conditions areautomatically restored.

LV-UEPI2 Universal Epi-Illuminator In addition to brightfield, darkfield, simple polarizing, and DIC, thisilluminator enables epi-fluorescence observation. The illuminatorautomatically sets optimum illumination through linkage to theshutter and field and aperture diaphragms. This minimizes thecomplexity of operating a measuring microscope, allowing the userto concentrate on observation.

LV-UEPI2A Motorized Epi-Illuminator With the LV-UEPI2A, the illumination changeover turret, theaperture diaphragm and the illumination voltage control have beenmotorized, allowing optimum image capture conditions. Theaperture diaphragm is automatically optimized through linkage withobjective and observation. Also, illumination parameters can bearbitrarily changed according to observation purpose andworkpiece. When loaded on the LM type measuring microscope,the illuminator can be controlled from the microscope operationpanel or a connected PC. When the illumination & AF controller isused, the microscope can be controlled externally from a PC.

LV-UEPI FA Universal Epi-Illuminator Focusing Aid This universal epi-illuminator is equipped with a Focusing Aid (FA)mechanism to provide greater accuracy in Z-axis measurements.

LV-EPILED White LED Illuminator The LV-EPILED is a light, compact white LED illuminatorexclusively designed for brightfield use. The white LED maintainsconstant color temperature to prevent any adverse effects onmeasurement. External control is possible either with the attachedpower supply controller or the illumination & AF controller.

The microscope comes with a motorizedfocusing module, enabling Z-axis movementwith a dedicated controller.

A Wide Choice of Illuminators

Motorized Z-axis Movement

Although the MM-LH50PC Precentered Lamphouse is12V-50W, the brightness is equivalent to or higherthan that of 12V-100W. The low power-consumptionhalogen light source contributes to the compactdesign of the microscope while also being friendly tothe environment.Defocus induced by heat is substantially reduced.

High-Intensity 12V-50W Halogen Light Source:MM-LH50PC Precentered Lamphouse

Page 13: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

12

MM-800/LMU• 12x8 stage• TTL Laser AF• LV-UEPI2A motorized universal epi-illuminator

Applications:Semiconductor packages, Bonding placement,Loop height, FPD panel (LCM), MEMS, Wafer levelCSP, HDD slider

MM-400/LMU• 6x4 stage• TTL Laser AF• LV-UEPI2A motorized universal epi-illuminator

The motorized system satisfies digital image capture and data storage requirements. Incombination with the motorized universal epi-illuminator, it is possible to set and reproduceillumination optimized for a selected observation method and/or objective lens. Focusing andobjective changeover can be electrically performed with the illumination & AF controller.

High Power Magnification 3-Axis Measurement with Z-Motorized ModelLMU Type

Type MM-800/LMU MM-400/LMUZ-axis movement Motorized (max. speed: 10mm/sec)Optical head Y-TB binocular tube, LV-TI3 trinocular eyepiece tube, LV-TT2 tilting trinocular eyepiece tube (with built-in reticle)Eyepiece CFI10x (Field No. 22), CFI10x CM (Field No. 22)Objective CFI60 LU Plan Fluor EPI series, CFI60 LU Plan Fluor BD series, CFI60 L Plan EPI CR seriesStage MHS12x8, MHS10x6, MHS8x6, MHS6x4, MHS4x4, O3L, MHS2x2 MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*

Episcopic White LED illuminator LV-EPILED, Motorized universal epi-illuminator LV-UEPI2A*, Universal epi-illuminator LV-UEPI2*,Universal epi-illuminator U-EPI*, Universal epi-illuminator with Focusing Aid LV-UEPI FA

Max. workpiece height 200mm 150mmDimensions (W x D x H)/weight 380 x 735 x 725mm/approx. 65kg 300 x 600 x 638mm/approx. 50kg

Specifications *TE2-PS100W power supply is required

AF T U-EPI

AF T U-EPI

LED

LED

CCD

Metallized Patterns of FPC

Page 14: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

13

3-Axis Measurement High Power Magnification ModelLU/LSU Type

Type MM-800/LU MM-400/LUZ-axis movement Manual (????coarse/fine knob)Optical head Y-TB binocular tube, LV-TI3 trinocular eyepiece tube, LV-TT2 tilting trinocular eyepiece tube (with built-in reticle)Eyepiece CFI10x (Field No. 22), CFI10x CM (Field No. 22)Objective CFI60 LU Plan Fluor EPI series, CFI60 LU Plan Fluor BD series, CFI60 L Plan EPI CR seriesStage MHS12x8, MHS10x6, MHS8x6, MHS6x4, MHS4x4, O3L, MHS2x2 MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*

Episcopic White LED illuminator LV-EPILED, Motorized universal epi-illuminator LV-UEPI2A*, Universal epi-illuminator LV-UEPI2*, Universal epi-illuminator U-EPI*, Universal epi-illuminator with Focusing Aid LV-UEPI FA

Max. workpiece height 200mm 150mmDimensions (W x D x H)/weight 380 x 735 x 725mm/approx. 65kg 300 x 600 x 638mm/approx. 50kg

Specifications *TE2-PS100W power supply is required

FPD-Cell Process

Color Filter

MM-800/LU• 12x8 stage• LV-UEPI2 universal epi-illuminator• Dedicated erect image Focusing Aid optical head• Manual nosepiece

Applications:Semiconductor packages, Bonding placement,Loop height, FPD panel (LCM), MEMS, Wafer levelCSP, HDD slider

The system is equipped with a universal epi-illuminator that responds to various observation needs suchas brightfield, darkfield, simple polarizing and DIC, as well as epi-fluorescence. A bright 12V-50W halogenlight source and a white LED light source are available depending on the workpiece or observationpurpose. The 12V-50W halogen light source provides image brightness equivalent to or higher than thatof 12V-100W. LSU type is also available for connection to a 3rd-party DRO.

FA TU-EPI

MM-400/LU• 6x4 stage• LV-UEPI FA universal epi-illuminator with

Focusing Aid• Dedicated erect image trinocular optical head• Manual nosepiece

UFA T U-EPI LED

Page 15: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

MM-400/U• 6x4 stage• Manual nosepiece• LV-UEPI universal epi-illuminator• Dedicated erect image Focusing Aid optical head

Applications:Semiconductor packages, Bonding placement,FPD panel (LCM), MEMS, HDD slider

This model is designed exclusively for 2-axis high magnification measurementof fine geometries. It is equipped with a universal epi-illuminator that allowsobservations such as brightfield, darkfield, simple polarizing and DIC. A bright12V-50W halogen light source and a white LED light source are availabledepending on the workpiece or observation purpose. The 12V-50W halogenlight source provides image brightness equivalent to or higher than that of12V-100W.

14

2-Axis High Power Magnification ModelU/S-U Type

Type MM-400/UZ-axis movement Manual (????knob)Optical head Y-TB binocular tube, LV-TI3 trinocular eyepiece tube, LV-TT2 tilting trinocular eyepiece tube (with built-in reticle)Eyepiece CFI10x (Field No. 22), CFI10x CM (Field No. 22)Objective CFI60 LU Plan Fluor EPI series, CFI60 LU Plan Fluor BD series, CFI60 L Plan EPI CR seriesStage MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*

Episcopic White LED illuminator LV-EPILED, Motorized universal epi-illuminator LV-UEPI2A*, Universal epi-illuminator LV-UEPI2*, Universal epi-illuminator U-EPI*, Universal epi-illuminator with Focusing Aid LV-UEPI FA

Max. workpiece height 150mmDimensions (W x D x H)/weight 300 x 600 x 638mm/approx. 50kg

Specifications *TE2-PS100W power supply is required

FA TU-EPI LED

Page 16: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

15

Dimensional diagram

MM-800/LMStage type MHS12x8

MM-800/LStage type MHS12x8

MM-400/LStage type MHS6x4

MM-400/M???Stage type MHS2x2

380

735

260

725

260.7

474.

3

151

204578

151

380

735

260

725

260.7

474.

3

204578

638

225

300600

442

151

453~

603

128.3

600

260.7

439.

3

151

442

638

225

300

MM-800/LMUStage type MHS12x8

MM-800/LUStage type MHS12x8

MM-400/LUStage type MHS6x4

735380

725

260

264.6

531.

7~73

1.7

380

725

260

735

264.6

588.

7

300 600

225

638

515.

6~66

5.6

191.5

151

Note: Dimensions will vary, depending on which stage and eyepiece tube are used. Unit: mm

Page 17: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

16

Objective lenses with correction ringCFI L Plan EPI CR Series

The CFI60 series now includes the CFI L Plan EPI CR series to cope with thethinner coverglass used in liquid crystal displays, and highly integrated, and densedevices. Coverglass correction can be continuously made from 0 mm up to 1.2mm(0-0.7mm and 0.6-1.3mm for 100x) with the correction ring. The 100x objectivelens offers 0.85 high NA, while enabling high-contrast imaging of cells and patternswithout being affected by the coverglass.

Standard objective lens with improved transmission rate for UVwavelengthCFI LU Plan Fluor Series

The transmission rate in the UV wavelength range has been improved for the newCFI LU Plan Fluor series. These objective lenses are suitable for various research,analysis and examination needs, while maintaining Nikon’s commitment to high NAand long working distance. Only one kind of objective lens is needed for brightfield,darkfield, simple polarizing, DIC and UV epi-fluorescence observations. Theseobjective lenses offer high resolution and ease of use.

Type Magnification NA W.D. (mm) Glass thickness correction range (mm)CFI L Plan EPI CR 20x 0.45 10.9-10.0 0-1.2CFI L Plan EPI CR 50x 0.7 3.9-3.0 0-1.2CFI L Plan EPI CRA 100x 0.85 1.2-0.85 0-0.7CFI L Plan EPI CRB 100x 0.85 1.3-0.95 0.6-1.3

Type Magnification NA W.D. (mm)CFI L Plan EPI 2.5x 0.075 8.8CFI LU Plan Fluor EPI 5x 0.15 23.5

10x 0.30 17.520x 0.45 4.550x 0.80 1.0

100x 0.90 1.0CFI LU Plan EPI ELWD 20xA 0.40 13.0

50x 0.55 10.1100xA 0.80 3.5

CFI L Plan EPI SLWD 20x 0.35 24.050x 0.45 17.0

100x 0.70 6.5CFI LU Plan Apo EPI 100x 0.95 0.4

150x 0.95 0.3CFI L Plan Apo EPI WI 150x 1.25 0.25

Type Magnification NA W.D. (mm)CFI LU Plan Fluor BD 5x 0.15 18.0

10x 0.30 15.020x 0.45 4.550x 0.80 1.0

100x 0.90 1.0CFI LU Plan BD ELWD 20x 0.40 13.0

50x 0.55 9.8100x 0.80 3.5

CFI LU Plan Apo BD 100x 0.90 0.51150x 0.90 0.4

CFI60 LU Plan Fluor EPI series

CFI60 LU Plan Fluor BD series

Brightfield

CFI60 Series Objectives

With correction mechanism

Brightfield/Darkfield

CFI60 L Plan EPI CR series of objective lenses with correction ring

With correction at 0.7mm (50x)Without correction (50x)

New series of high-performance objectivelenses enhances optical performance

Page 18: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

17

Newly developed tilting trinocular eyepiece tubeLV-TT2 Tilting Trinocular Eyepiece Tube

The newly developed LV-TT2 tilting trinocular eyepiece tube (erect image) withbuilt-in reticle offers comfort to all users, regardless of their stature or viewingpositions. The optical path changeover of 100:0/20:80 allows simultaneous use ofmonitor.

Selectable nosepiecesHighly Durable Motorized Universal Nosepieces LV-NU5A/U5AC

Two types of motorized universal quintuple nosepieces are available. TheLV-NU5A boasts greater durability thanks to a new click mechanism andcontrol system. Programmed magnification change with a controller ispossible. The LV-NU5AC comes with a centering mechanism thatsuppresses image drift during objective changeover.

Manual NosepiecesA variety of manual control nosepieces are available to suit all needs.

Illumination & FA Controller

This controller makes it possible to control the light source, motorizedilluminator, nosepiece, Z-movement and TTL Laser AF. By connectingE-MAX software, auto switching is also possible.

Connectable units• Motorized universal epi-illuminator LV-UEPI2A• Halogen lamphouse MM-LH50PC (TE2-PS100W power supply isrequired)• PC-control type high-intensity mercury fiber light source• White LED illuminator LV-EPILED• Motorized universal nosepiece LV-NU5A, LV-NU5AC (with centering

mechanism) • TTL Laser AF (U-AF)• Diascopic/episcopic illumination

LV-NU5A nosepiece LV-NU5AC nosepiece

C-N6 nosepiece (brightfield) L-NBD5 nosepiece (bright/darkfield) L-NU5 nosepiece (universal) XXXXXXXXXXXXXXX

Page 19: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Accessories

18

Nikon offers a broad range of stages to choose from including the new MHS12x8 stage. All modelsexcept the O3L boast an outstanding accuracy of 3+L/50µm (L=measurement length).

Stage typeMHS12x8

Stage typeMHS10x6

Stage typeMHS8x6*

Stage typeMHS6x4

Stage typeMHS4x4

Stage typeO3L

Stage typeMHS2x2

416

58 8400374

30 060

280 5

60 220

60 60

360

(mm)

412

312

285

192

38.1

(mm)

286

255195

192 90φ107

φ174φ150

(mm)

438285250

60

354

60

240

190

60

90

(mm)

508350

354

25060 60 60

240

180

60

90

(mm)

9012

0

126

(mm)

(mm)

521.5

60 60 60 60 6036045 0

286

464.

5

30 5

190

6060

240

Cable length: approx. 2,000mm

Cable length: approx. 2,000mm

Cable length: approx. 2,000mm

Cable length: approx. 2,000mm

Cable length: approx. 2,000mm

Cable length: approx. 2,000mm

Cable length: approx. 2,000mm

192

245

145

204

145

170

120

170

92 90

307.5

500

678.5

464 35

0

120

135

60 380 60100

60 60 60 60 60100

6060

60

230

60

330 85

60

85

3528

035

6055

55

100.578

100.

514

18-M6 depth 10 tool installation screw hole

16-M6 depth 10 tool installation screw hole

22-M6 depth 10 tool installation screw hole

12-M6 depth 10 tool installation screw hole

10-M6 depth 10 tool installation screw hole

6-M6 depth 7

Stages

Stages forMM-800series

Stages forMM-400series

*Stage adapter is required.

Page 20: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Accessories

19

Accessories

Stage specifications

Stage AdapterThis adapter is used to mount MHS8x6, MHS6x4, MHS4x4, O3L, or MHS2x2 stage to the MM-800.

Stage Accessories

Tilting center fixture A configured withgoniometer type 2

Rotating TablesUsed to rotate the workpiece and align it in the direction to which the stage moves.

Tilting Center Fixture AUsed to hold machined workpieces.

Rotating table specifications

1.6

6.2

10.2

13.5

11.7

60°

8

24

225

134

200

300

T groove: Rotating table A2 Dovetail: O3L• Stages other than O3L and rotating table C/D require M6 depth 10 tool installation screw holes.• T grooves may be specially ordered for MHS2x2 rotating boards.

Tool installation groove dimensions (mm) Tool installation screw positions (mm)

T groove Dovetail

25

120

230

170 φ1

07

130

210

(mm)

286

3030

30

340360390

φ262

φ271

230 30

282250 (installation screw)

6-M6 depth 10 tool installation screw hole

φ174φ204

25

Tool installation screw holes (6-M6 depth 9) are located at six equidistant positions around the circumference.

Rotating Table Type 3For MHS6x4, MHS4x4

Rotating Table Type 4For MHS10x6, MHS8x6

Goniometer Type 2For O3L

MHS12x8MHS10x6 450 x 286 305 x 190 250 x 150 Linear encoder 0.0001 Discretionary — M6 (screw) 20 Approx. 50MHS8x6 400 x 280 245 x 192 200 x 150 Linear encoder 0.0001 Discretionary — M6 (screw) 15 Approx. 36MHS6x4 350 x 240 204 x 145 150 x 100 Linear encoder 0.0001 Discretionary — M6 (screw) 10 Approx. 27MHS4x4 285 x 240 170 x 145 100 x 100 Linear encoder 0.0001 Discretionary — M6 (screw) 6 Approx. 23O3L 285 x 192 170 x 120 100 x 50 Linear encoder 0.0001 Discretionary — Dovetail 5 Approx. 15MHS2x2 195 x 192 107 in diameter 50 x 50 Linear encoder 0.0001 Discretionary 360° rotatable M6 (screw) 5 Approx. 13

For MM-800

Roting table type 3 204mm 165mm 360° (uncalibrated) Screw hole 6-M6 Approx. 5kgRoting table type 4 282mm 262mm 360° (uncalibrated) Screw hole 6-M6 Approx. 8kgGoniometer type 2 160mm 107mm 360° (2' reading) T groove/Screw hole 2-M6 Approx. 4kg

Table diameter Glass insert diameter Rotation range Tool installation Weight

Type Surface area Stage glass Crosswide Reading method Min. Zero position adjustment Stage top Tool Loading Weight(mm) dimensions travel reading (mm) installation capacity (kg)

(mm) (mm) (mm) (kg)

A ø68 x 120mm 45mm 10° (in 1° increment) Approx. 2.2kg

Max. workpiece diameter and Center height Tilting angle Weightlength when held level

Page 21: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Accessories

20

FOV Measurement with Advanced Digital Imaging Processing Technology

E-Max SeriesIn combination with Nikon’s digital still camera DS-2Mv, the new E-MAX seriesprovides state-of-the-art image processing technology. Automated edgedetection with sub-pixel processing enables more precise and repeatablemeasurement. Effectively used in combination with a measuring microscope/profile projector, the new E-MAX series provides the user with various advancedmeasurement and processing functions from two-dimensional data processingand image measurement to data storage.

Finer video images and fast image transfer withNikon’s original image processing technologies

SVGA (800 x 600) video images transferred directly to PC via USB2.0can be proceeded for ?????? Automated Video Edge Detection byNikon’s newly developed image processing algorithm. The new E-MAX DS-V set provides FOV measurement without a dedicatedimage processing board. Thus, it can even be installed in highperformance laptop PCs, greatly saving working-space.

Navigation function

The graphic window displays the next measurement position inbrown, preventing errors and allowing speedy measurement (duringreplay). The current position is displayed in pink.

Chart measurement

Chart measurement can be made easily in the video window.

Page 22: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Accessories

21

Accessories

Functions provided by each set

V set D setData processing ✽ ✽

Navigation during replay ✽ ✽

Live video monitoring ✽ –Chart measurement ✽ –Automated video edge detection ✽ –

Compatible measuring instruments

V set D set

Nikon profile projector ✽ ✽

Nikon measuring microscope ✽ * ✽

*Trinocular eyepiece tube type, TV eyepiece tube type

Larger icons support touch screen operationenvironment

Larger Icon Mode is selectable for a touch screen operationenvironment. The mouseless operation enables operators toconcentrate on measurements.

Illumination controls and motorized nosepiece,universal epi-illuminator, TTL Laser AF controls

White LED illumination control is possible from E-MAX software. Withmotorized nosepiece, universal epi-illuminator and/or TTL Laser AF,E-MAX controls magnification switchover, microscopic methods,aperture setting, and Laser AF, etc.

Interactive operation wizards

Depending on measurement requirements, operators can select“Quick Measure,” “Teaching Measure” or “Run Teaching File” modewith wizards.

Page 23: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Accessories

22

Data Processor with improved accuracy and ease of use

DP-E1

Counter display

File control key

Numeric key

Function key

Measurement code key

MACRO key

Coordinate reset key

座標表示部

リスト表示部

データ入力キー

コメント、測定結果表示部

New DP-E1 data processor has been developed to improve accuracy andefficiency as a measuring system as a whole. A 0.1µm-reading counter display isbuilt into the compact body. The 320 x 240-pixel LCD greatly improves ease ofuse. Effectively used in combination with a measuring microscope/profileprojector, it realizes quick calculation and processing of measurement data.

Simple & interactive operation

Feature Construction Oriented Operation of the DP-E1 allows theuser to conduct measurement by following the graphics, providing aseamless measuring environment when used in combination with theNEXIV VMR/E-MAX series. Measurement results are automaticallymemorized as teaching steps and can be easily used as ameasurement routine.

GD&T compliance

Geometric Dimensioning & Tolerancing defined by the ANSI Y 14.5MSpecification is supported. In addition to Location Tolerancing suchas True Position, MMC and LMC, determination of Form, Orientationand Runout can be conducted interactively.

Multi-language support

English, German, Japanese and various other Asian and Europeanlanguages are supported.

Digital Printer DPU-414 (option)

Prints out measurement results.

Data storage & softwareupgrades via USB disk

A USB disk can be used for storingmeasurement results andupgrading new functions.

Control panel

Page 24: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Accessories

23

Accessories

処理単位 mm/inch 表示桁数:mm時、小数点以下3、4、5を選択可能。inch時、小数点以下4、5、6を選択可能。角  度 度分秒/Deg/Rad

キースイッチ 55個

ファンクションキー 4個

カウンタ表示部 DPシステム接続によりDPシステムのカウンタ値表示

外部プリンタ RS-232C接続により測定結果出力

外部メモリ USBメモリ、USBインターフェースを持つFloppyDiskDrive

液晶画面 Q_VGA(320×240)Monochrome LCD、バックライト色:青、ノンインターレス、画面サイズ:5.7型

電源 DC12V(リプル300mV以下)、4A以下(専用ACアダプタ使用)、リアルタイムクロック用バックアップ電池 CR2032×2個

使用環境、設置環境 使用環境:温度0~40℃、湿度70%(但し結露なきこと)、高度2000m以下保管環境:温度-20~60℃、湿度90%(但し結露なきこと)汚 染 度:2

寸法(本体) 300(W)×99(H、足を畳んだ状態)x240(D)mm

重量 2.5kg

Specifications

Retrofit Unit

To use the DP-E1 in combination with the conventional measuring microscopeMM-40/60, Profile Projector V-24B, V-12BD and V-12BS, the Retrofit Unit isnecessary.

Cord

Page 25: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Accessories

24

Inputting data to inspection sheets manually is not necessary any longer. The MacroScript Program enables you to transfer data from Nikon counters and/or dataprocessors directly to Excel sheets via RS-232C interface. Simple to use, yet greatlyenhances productivity.

Using a DDE Link function, measured data can be immediately transferred tospreadsheets such as Microsoft Excel®, SPC-PC IV, SPC-PC IV Excel, and others,making real-time SPC analysis possible.

Note: SPC-PC IV and SPC-PC IV Excel are products of Quality America Inc.

This software enables the quick generation of inspection results sheets in variousreport forms including user-designed forms. Users can even customize the programfor their own easier use by making macro scripts.

Application Software for Measurement Support/Data Processing SystemCustom Fit QC

Direct link to Excel sheet programs—DirecSheet IIFor DP-E1, SC-212 and E-Max

Real-time SPC via DDE (Dynamic Data Exchange)

Report generating program: VMR Report Generator

Required software: Microsoft Excel2000/XPRequired memory: 128MB or moreManufacturer: Pronics Co., Ltd.

Operating environment:Microsoft Excel 2000/XPMemory space: 128MB or more An example of macro scripts

written by users: In order to inputmanually the data measured byother instruments and compilethem into one complete report, themacro automatically makes cellblanks and display them in skyblue and a message promptsmanual inputs.

Page 26: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Accessories

25

Accessories

Various measuring tools are available• Scale and grid line display, two-point distance

measurement, and other measuring tools areavailable as standard.

• Convenient tools such as text input, line and graphicdrawing, and super-impose are supported.

• Measurement results can be stored as CSV file foreasy report generation with other PC software.

Large, high-definition display for immediatemicroscopic observation• Standalone camera control unit DS-L2 has 8.4-inch LCD

monitor (XGA)• DS-Fi1 camera head with 5.0-megapixel CCD provides

high frame rate of 12fps and allows smooth focusing onmonitor.

Imaging mode provides optimal photographywith single mouse-click• Optimal imaging parameters are preset for different

sample types and observation methods includingbrightfield and darkfield to enable fast and easyphotography with a single mouse-click.

The all-in-one digital camera for microscopes enables display,measurement, image capture and storage with a simple mouse-clickwithout PC connection.

For measuring on a TV monitor by eye, the TV reticle offers sharplines displaying reticles as optical images on the TV monitor. Itenables measurements on a TV monitor, with identical precision tothat through eyepiece lenses, while reducing user eyestrain.

Used to install a C-mount NTSC CCTV camera on the microscope. Touse, replace the straight tube in a trinocular tube with this adapter.

Note: LV-TV TV tube is required.

These compact objectives feature long working distances and excellent resolution.All have almost the same parfocal distances, come with lens adapter and can beused with MM-400/800 microscopes.

The 3x objective is standard with the microscope.*Adapter

Magnification 1xA 3xA 5xA 10xA 20xA 50xA 100xA

W.D. (mm) 79 75 64 49 20 15 4

Digital Sight DS Fi1-L2 Digital Camera for Microscopes

Objectives 1xA, 3xA, 5xA, 10xA, 20xA, 50xA, 100xA

TV Reticle Adapter Direct C-mount Adapter

Wafer IC-chip Circuit Board Metal Ceramic

Imaging mode for industrial sample

DS Fi1-L2 configured with Eclipse 100D industrial microscope

Page 27: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Accessories

26

1-Minute Reading EyepieceThe viewfield includes crosshairs and 60º lines, and angle indexes areread by appropriate microscopes. The measuring range is 360º.

10-Minute Reading EyepieceThe viewfield includes crosshairs and angle indexes, and when theknurled ring at the lower section of the eyepiece tube is turned, thecrosshairs and the vernier both rotate up to 180º.

LED Ring IlluminatorA high-luminance type that uses 60 white LEDs, this illuminator isprovided with intensity control and features minimum flickers. The LEDhas a long service life of approximately 20,000 hours.

LED transformer: 66 (W) x 115 (D) x 55 (H)mm

Cannot be used with metallurgical microscope objectives.

Cannot be mounted when 20xA, 50xA and 100xA measuring microscope objectives are used.

Fiber-optics Bifurcated and Ring IlluminatorsSince a 15V-150W halogen lamp with reflective mirror is used, a brightlight source is obtained and the brightness is adjustable. The ring fiberilluminator produces cone-shaped illumination, minimizing shadowscaused by any unevenness on the workpiece surface. The bifurcatedfiber enables flexible illumination from two directions.

Fiber transformer: sequential adjustment of brightness from 7 to 14 volts.

Cannot be used with metallurgical microscope objectives.

8-Segment LED Ring Illuminator CYN-2As CYN-2 enables flexible illumination from eight directions, it is notnecessary to adjust the position of illumination fibers by hand at eachmeasurement and/or observation. An LED light source with brightnesscontrol is used for objectives 1xA, 3xA, 5xA and 10xA. The workingdistance is 60mm.

Can be used with measuringmicroscope MM-400/800.

Can be used with E-maxseries software.

The RS-232C cable is stan-dard with the illuminator.

Note: Monocular adapter (standard equipment) is required when using these eyepieces with trinocular tubes.

Fluorescent Lamp IlluminatorThe ring fluorescent tube provides smooth, uniform illumination withoutshadows over the entire field. The fluorescent tube has a service life ofapproximately 2,000 hours and is easy to replace.

Fluorescent lamp transformer: 120 (W) x150 (D) x 70 (H)mm

Cannot be used with metallurgical micro-scope objectives.

Cannot be mounted when 20xA, 50xAand 100xA measuring microscope objec-tives are used.

External Illuminator AdapterCommonly used to mount ring fiberilluminator, fluorescent lamp illuminatorand LED ring illuminator.

Protractor Eyepieces (For all measuring microscopes except those with universal illumination.)

Illuminators

Page 28: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Prints out counter values once connected to rear control box ofmeasuring microscope MM-400/800.

Used to send load command to DP-E1 and DPU-414. Frees bothhands to enhance measurement efficiency.

Gauges stage travel accuracy up to 300mm. Both 10mm-intervalsensor patterns and calibrations are provided. Made of low heat-expansion glass, for minimizing heat influence.

Accuracy: Within 1µm against compensation values.

The following dedicated templates are available to facilitate profilecomparison and measurements.• Standard angle templates (standard equipment)• No. 1 Metric screw thread; pitch 0.2-2• No. 4 Involute gear (20º); module 0.2-2• No. 6 Concentric; diameter 0.2-4.6

Note: Designed for 3x objectives.Microscopes other than MM-xx/xx can use No. 6.

3-Axis/2-Axis Counter2-axis and 3-axis counters are available. The separate display unit canbe mounted on the measuring microscope. Counters can beconnected with data processors and digital printers via the RS-232Cport.

Remote SwitchEnables reset and SEND remote control of counter.

3-axis counter 2-axis counter

Y-axis X-axis

27

Counter

Digital Printer DPU-414 Foot Switch

Standard 300mm Scale Templates

AccessoriesAccessories

Page 29: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Binocular Tube

Monocular Eyepiece Tube Adapter

MM Eyepiece Lens 10x

LV-TV TV Tube

C-mount CCTV Camera

ME CFWN 10x

Power Supply (for Z-movement) (??)

Motorized Z-movement Console (??)

4x4 Stage

O3L

2x2 Stage

Goniometer Type 2

Rotating Table Type 3

Tilting Center Fixture A

6x4 Stage

8x6 Stage

10x6 Stage

Rotating Table Type 4

MM Stage Adapter MM800 (8x6 or smaller)

LED Epi Illuminator

Trinocular Optical Head for Single Objective Lens

Trinocular Optical FA Head for Single Objective Lens

12x8 Stage

MM-400 Stand MM-400/L Stand MM-400/LM Stand

MM-800 Stand MM-800/LM Stand

2-Axis Digital Counter SC2-E1

3-Axis Digital Counter SC3-E1

Data Processor Console DP-E1

Measuring Microscope Objective Adapter

Eyecup

External Illuminator Adapter 3

Monocular Optical Head

Epi-illumi for MM400/800 Mono Opti Head

C-mount Direct CCTV Adapter

TM Objective Lens 1x-100x

Fiber-optics Bifurcated Illuminator

8-Segment LED Ring Light CYN-2 (??)

LED Transformer

Fluorescent Lamp

Illuminator

Fluorescent Lamp

Transformer (??)

Ring Fiber Illuminator

Fiber Transformer

LED Diascopic Illuminator

MM AC Adapter

Power Cable (??)

Halogen Lamphouse MM-LH50PC

LV-HL50W 12V-50W-LL Halogen Lamp

12V-50W LampTE2-PS100W Power Supply

Halogen Light Intensity Control Cable

Foot Switch 4 DRO Reset Switch

A

C

C C

D

E

H

H

K

K

E

D

F

C

D

H

A A

B B

A

A

A

B

B

A

B

J

N

N

H

L

M

L

M

FEF

EF

EF

EF

N

N

P

Q

Q

Q

JPP

JP

S

R R R

R

S S S

S

S

S

S

MM Protractor 1' ReadingMM Protractor 10' Reading

Data Processing System E-MAX

Digital Cameras for MicroscopesDigital Sight Series

LED Illuminator SM-LW-61 JI (??)

T

T

S

Remote SwitchS

S

T T T

T

MM-800/L Stand

B

EF

P

S

T T

MM-400/800 System Diagram (MM Type)

28

System diagram

Page 30: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

Power Supply (for Z-movement) (??)

Motorized Z-movement Console (??)

4x4 Stage

2x2 Stage

Goniometer Type 2

Tilting Center Fixture A

6x4 Stage

8x6 Stage

10x6 Stage

Rotating Table Type 4

12x8 Stage

Rotating Table Type 3

LED Diascopic Illuminator

LV-HL50W 12V-50W-LL Halogen Lamp

12V-50W Lamp TE2-PS100W Power Supply

Halogen Light Intensity Control Cable

E

F

A

A

A

B

B

AB

J

G

P

Q Q

O3L

MM-400 Stand MM-400/L Stand MM-400/LM Stand

MM-800 Stand MM-800/LM Stand

A

T T T

TT

E

A A

B B

FEF

EF

EF

EF

JPP

JP

S S S

SS

MM-800/L Stand

T

B

EF

P

S

2-Axis Digital Counter SC2-E1

3-Axis Digital Counter SC3-E1

Data Processor Console DP-E1

S

Foot Switch 4 DRO Reset Switch

S

S

Remote SwitchS

S

Data Processing System E-MAX

LV-UEPI Universal Epi-Illuminator

LV-UEPI2 Universal Epi-Illuminator

LV-UEPI2A Motorized Epi-Illuminator

LV-TI3 Trinocular Eyepiece Tube

U-AF Controller (??)

LV-UEPI FA Universal Epi-Illuminator Focusing Aid

LV-TT2 Tilting Trinocular Eyepiece Tube (with built-in reticle)

Bracket LV (??)

Motorized UEPI Driver

Motorized Illumination & AF Console (??)

LV-EPILED White LED Illuminator

Y-TB Binocular Tube

K

F EFFG

P

LV-TV TV Tube

C-mount CCTV Camera

C-mount Direct CCTV Adapter

K

Digital Cameras for MicroscopesDigital Sight Series

LU Objective Adapter

LU Plan Fluor BD Series Objective

LU Plan Fluor EPI/L Plan EPI CR Series Objective

Motorized Universal Nosepieces LV-NU5A/U5AC

L-NU5 Nosepiece

L-NBD5 Nosepiece

C-N6 Nosepiece

MM Stage Adapter MM800 (8x6 or smaller)

Halogen Lamphouse MM-LH50PC

T

T

CFI10x CM Eyepiece

CFI10x Eyepiece

N

N

UU

V

MM AC Adapter

Power Cable (??)

Eyecup

N

U

V

VV

Q

S

29

MM-400/800 System Diagram (Universal Type)

Page 31: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

30

Measuring Microscope Accessory Compatibility Chart

Model MM-400/S MM-400 MM-400 MM-400/L MM-400/SL MM-400/L MM-400/LM MM-800/S MM-800 MM-800/SL MM-800/L MM-800/LM

Z-axis motion Manual Manual Manual Manual Manual Manual Motorized Manual Manual Manual Manual Motorized

Z-axis scale No No No Yes Yes Yes Yes No No Yes Yes Yes

Controller W/O Yes No Yes No Yes Yes No Yes Yes Yes Yes

Stage 4x4 2x2 4x4 6x4 6x4 6x4 6x4 10x6 10x6 10x6 12x8 12x8

Head Trinocular Monocular Trinocular Trinocular Trinocular FA Trinocular Trinocular Trinocular FA Trinocular FA

Illuminator — — LED ring Fiber ring —8-seg. 8-seg.

—White

—8-seg. 8-seg.

LED ring LED ring LED ring LED ring LED ring

Data processor No — DP-E1 DP-E1 — E-MAX V E-MAX V — DP-E1 — E-MAX V E-MAX V

Microscopy

Standard eyepiece MM eyepiece lens 10x ✓

ME CFWN 10x (x2) ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

Optical head & Monocular optical head ✓eyepiece tube/ Trinocular optical head

✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓lenses for single objective lens

Trinocular optical FA ✓ ✓ ✓head for single objective lens

Binocular tube ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

Monocular eyepiece tube adapter

MM protractor 10' reading

MM protractor 1' reading

Objective TM objective lens 3x ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

TM objective lens 10x ✓ ✓ ✓

TM objective lens 1x, 5x, 20x, 50x, 100x

Measuring microscope ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

objective adapter

Stage 2x2 stage ✓

4x4 stage ✓ ✓

6x4 stage ✓ ✓ ✓ ✓

8x6 stage

10x6 stage ✓ ✓ ✓

12x8 stage ✓ ✓

Stage adapter MM stage adapter MM800 (8x6 or smaller)

Rotating table type 3 ✓

Rotating table type 4

DRO/data Retrofit counter/DP unitprocessing unit/ 2-axis digital counter SC2-E1 ✓printer

3-axis digital counter SC3-E1 ✓ ✓ ✓ ✓

Data processor console DP-E1 ✓ ✓ ✓

SC-213 Z-signal cable

DRO reset switch ✓

Foot switch 4 ✓ ✓ ✓ ✓

Digital thermal printer model ✓ ✓ ✓DPU-414

DPU-414 AC adapter ✓ ✓ ✓

Printer paper for SC-7P/DPU-414✓ ✓ ✓

(1 roll)

9-9 pins RS-232C normal cable (2m) ✓ ✓ ✓

Data processing Data processing software E-MAXE-MAX V set ver. 5.0, E-MAX calibration plate,

DS-2Mv color camera head, ✓ ✓ ✓ ✓DS-U2 CCU, L-TI3 TV adapter, C-mount adapter system

DS-2M 0.55x relay lens

Standard LED dia-illuminator ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓illuminators LED epi-illuminator ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

Epi-illumi for MM400/800 mono ✓

opti head

MM adapter for EX ILLUM ✓ ✓

C-FIR ring fiber light guide

C-FI230 fiber illuminator with power cord

Halogen lamp 12V-100W for fiber illuminator

LED ring illuminator ✓ ✓

(100-240V) (ESD type only)

Optional illuminators 8-segment LED ring lightCYN-1 (100-240V)

8-segment LED ring light✓ ✓

CYN-2 (100-240V) with power cable

MM AC adapter ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

Power cable ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

Measuring microscope

Page 32: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

31

Model MM-400/U MM-400/LU MM-400/LMU MM-800/SU MM-800/LU MM-800/SLU MM-800/LMU MM-800/LMU MM-800/SLU

Z-axis motion Manual Manual Motorized Manual Manual Manual Motorized Motorized Manual

Z-axis scale No Yes Yes No Yes Yes Yes Yes No

Controller Yes Yes Yes No Yes No Yes Yes No

Stage 4x4 4x4 6x4 8x6 12x8 10x6 12x8 12x8 10x6

Head Y-TB TT2 with reticle TI3 TI3 TT2 with reticle TT2 with reticle TT2 with reticle TT2 with reticle TI3

Illuminator LV-EPI LED LV-UEpi FA LV-UEPI2 LV-UEPI LV-Uepi FA LV-Uepi FA LV-UEPI FA LV-UEPI2A +

LV-UEPI FALAF

Data processor — E-MAX V E-MAX V E-MAX V — E-MAX V E-MAX V

Microscopy BF BD-DIC BD-DIC-FL BD BD-DIC BD BD-DIC BD-DIC-FL BF

Standard eyepiece CFI 10x ✓ ✓ ✓ ✓

CFIUW 10x (x2) ✓ ✓ ✓ ✓ ✓

CFI 10x CM crossline reticle with ✓ ✓

diopter adjust

Optical head & Y-TB binocular tube ✓eyepiece tube/lenses L-TI3 ESD ✓ ✓

LV-TT2 TT2 trinocular tube with ✓ ✓ ✓ ✓ ✓

built-in reticle

Objective LU objective lens adapter M32-25 (x5)

LU PLANFLUOR EPI 5x, 10x, 20x, 50x ✓ ✓ ✓

LU PLAN EPI ELWD 100x ✓

LU PLAN BD ELWD 5x, 10x, 20x, 50x, 100x ✓ ✓ ✓ ✓ ✓ ✓

Stage 2x2 stage

4x4 stage ✓ ✓

6x4 stage ✓

8x6 stage ✓

10x6 stage ✓ ✓

12x8 stage ✓ ✓ ✓

Stage adapter MM stage adapter MM800 (8x6 or smaller) ✓

Rotating table type 3 ✓

Rotating table type 4

DRO/data processing Retrofit counter/DP unitunit/printer 2-axis digital counter SC2-E1 ✓

3-axis digital counter SC3-E1 ✓ ✓ ✓ ✓ ✓

Data processor console DP-E1

SC-213 Z-signal cable

DRO reset switch

Foot switch 4

Digital thermal printer model DPU-414

DPU-414 AC adapter

Printer paper for SC-7P/DPU-414 (1 roll)

9-9 pins RS-232C normal cable (2m)

Data processing Data processing software E-MAX ver. 5.0,system E-MAX V set E-MAX calibration plate, DS-2Mv color

✓ ✓ ✓ ✓ ✓camera head, DS-U2 CCU, L-TI3 TV adapter, C-mount adapter

DS-2M 0.55x relay lens

Standard illuminators LED dia-illuminator ✓ ✓ *2 ✓ ✓ ✓ ✓ ✓ *2 ✓ ✓ *2

Revolving LV-NU5A U5A nosepiecenosepieces L-NU5 U5 nosepiece ESD ✓ ✓ ✓

L-NBD5 BD5 nosepiece ✓

C-N6 nosepiece ✓ ✓ ✓

Manual control LV-EPILED ✓U-epi illuminator LV-UEPI (BF, DF, DIC) ✓

LV-UEPI FA ✓ ✓ ✓ ✓

LV-UEPI2 (BF, DF, DIC, FL) ✓ ✓

High power microscopy ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

system U bracket mount LV

Motorized control Motorized UEPI driver ✓U-epi/LAF system MM400/800U-AF controller ✓

LV-UEPI2A (BF, DF, DIC, FL) ✓

U-AF ✓

Filters & halogen YM-NCB 25 NCB11 ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓light source YM-ND 25 ND4/ND16 ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

LV-HL50W 12V50W-LL halogen lamp ✓ ✓ ✓ ✓

TE-PS 100W power supply (100-240V) ✓ ✓ ✓

MM-U epi-lamphouse LV ✓ ✓ ✓ ✓

Halogen light intensity control cable ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

Accessories BD/DIC/ L2-DIC DIC prism for Eclipse microscopes ✓ ✓ ✓ ✓ ✓

FL objective lenses L-DIHC DIC prism HC for Eclipsemicroscopes

YM-PO polarizer for LV-U EPI (MBE60200) ✓ ✓ ✓ ✓ ✓

L-AN analyzer for LV-U EPI (MBE60200) ✓ ✓ ✓ ✓ ✓

C-FL Epi-Fl filter block N B-2A ✓ ✓

MM AC adapter ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

Power cable ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

High power measuring microscope

Page 33: NIT MM400/800 cat e2nd · Enhanced body solidity through CAE analysis has enabled the mounting of a large stage in a small space to accommodate the measuring of large workpieces

EnThis brochure is printed on recycled paper made from 40% used material.

WARNINGTO ENSURE CORRECT USAGE, READ THE COR-RESPONDING MANUALS CAREFULLY BEFOREUSING YOUR EQUIPMENT.

Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. July 2006.©2006 NIKON CORPORATION

Printed in Japan (0607-05)T Code No. 2CE-KXVH-7

NIKON CORPORATIONParale Mitsui Bldg.,8, Higashida-cho, Kawasaki-ku,Kawasaki, Kanagawa 210-0005, Japanphone: +81-44-223-2175 fax: +81-44-223-2182 www.nikon-instruments.jp/eng/

Nikon promotes the use of eco-glassthat is free of toxic materials such aslead and arsenic.

NIKON INSTRUMENTS (SHANGHAI) CO., LTD.CHINA phone: +86-21-5836-0050 fax: +86-21-5836-0030(Beijing office) phone: +86-10-5869-2255 fax: +86-10-5869-2277(Guangzhou office) phone: +86-20-3882-0552 fax: +86-20-3882-0580

NIKON SINGAPORE PTE LTDSINGAPORE phone: +65-6559-3618 fax: +65-6559-3668

NIKON MALAYSIA SDN. BHD.MALAYSIA phone: +60-3-78763887 fax: +60-3-78763387

NIKON INSTRUMENTS KOREA CO., LTD.KOREA phone: +82-2-2186-8410 fax: +82-2-555-4415

NIKON INSTRUMENTS EUROPE B.V.P.O. Box 222, 1170 AE Badhoevedorp, The Netherlandsphone: +31-20-44-96-222 fax: +31-20-44-96-298www.nikon-instruments.com/

NIKON FRANCE S.A.S.FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-00-33NIKON GMBHGERMANY phone: +49-211-9414-0 fax: +49-211-9414-322NIKON INSTRUMENTS S.p.A.ITALY phone: + 39-55-3009601 fax: + 39-55-300993NIKON AGSWITZERLAND phone: +41-43-277-2860 fax: +41-43-277-2861NIKON UK LTD. UNITED KINGDOM phone: +44-20-8541-4440 fax: +44-20-8541-4584

NIKON INSTRUMENTS INC.1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A.phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A.only) fax: +1-631-547-0306www.nikonusa.com/

NIKON CANADA INC.CANADA phone: +1-905-625-9910 fax: +1-905-625-0103