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We proudly present the MM-400/800 series created by enhancingevery point of features required in a measuring microscope ofthe next generation—e.g. greater accuracy, digital imaging andvision processing metrology, larger workpiece handling, non-contact Z-height measurement, and coordination with dataprocessing systems.
MM-400/800 SeriesNext-Generation Measuring Microscopes
Toward Digital Imaging & Metrology
3
• The new Nikon measuring microscope equipped with TTL Laser AF.It also boasts a new Focusing Aid mechanism that enables sharpand accurate focusing. High precision Z-axis measurement issimpler than ever.
• Digital image measuring with precise auto edge detection neverrealized before thanks to image capture using a Nikon digital cameraand measurement support software E-MAX series.
• A fully motorized high power microscopy model is also available fordigital imaging.
• An expanded observation range has been achieved by enhancementof various illuminators and light sources. These include a high-intensity white LED illuminator for brightfield observation, a universalepi-illuminator to respond to various observation needs, and a 12V-50W halogen light source.
• A motorized Z-axis movement mechanism (LM type) simplifiesaccurate vertical motion through the use of a dedicated controller.
• Added body strength enables the loading of larger stages, such asthe newly developed 12x8 stage, allowing for larger workpieces.
• Maneuverability has been greatly improved due to various motorizedcontrols and an ergonomic design that includes a dual axiscoarse/fine focus knob and a stage that is easy to manipulatedespite its large size.
• Enhanced interface with newly developed data processor DP-E1 andPC-based measurement support software E-MAX series providesstrong support for management and usage of measurement data.
Function Icons
Autofocus (Universal Type)TTL Laser AF (Autofocus) enablesperfect focusing quickly.
Focusing AidThe Focusing Aid (FA) ensuresaccurate Z-axis focusing.
Universal Epi-illuminatorFocusing AidA universal epi-illuminator withFocusing Aid (FA) mechanism.
Z-axis Motorized MotionA dedicated controller providesaccurate up/down movements withease.
Trinocular Optical HeadIdeal for configuration withphotomicrography equipment.
Monocular Optical HeadFor applications where costperformance is priority.
Universal Epi-illuminatorSupports a wide range ofapplications.
AF
FA
UFA
T
M
U-EPI
LED LED IlluminatorA high-intensity white LED illuminatorfor brightfield use.
4
TTL Laser AF (Universal Type) The first measuring microscope series equipped with TTL Laser AF, 0.75µm(theoretical, at 20x) spot diameter and a 0.5 sec. focusing speed, the new modelsaccomplish focusing quickly with repeatability as high as 0.5µm (when a 20xobjective is used).
Focusing Aid (FA)The newly developed split-prism Focusing Aid (FA) delivers sharp FA patterns toensure accurate focusing during Z-axis measurements. Measurement errors due todifferences in the depth of focus of different objectives are minimized.
Motorized Z-Axis Movement (LM Type)A motorized vertical movement mechanism with a 10mm/sec.speed has been incorporated. Up/down control is accuratelyprovided with a dedicated controller.
A high-intensity white LED illuminator is provided as standard for brightfielduse. This illuminator features quick reaction and constant colortemperature, enabling measurement with high-precision and efficiency. Forthe universal type (except FA), a newly designed 12V-50W halogen light isincluded. Brightness at high magnifications, in particular, has beensubstantially improved.
Built-in Stepless Light ControlA stepless light control is built into the system, enabling light control from the PCwithout touching the dial on the main body. Observation under the sameconditions—an essential requirement in video measurement—is possible.
LED Illuminator This high-intensity illuminator uses 60 white LEDs and comes with a light intensitycontrol to minimize flickering.
8-Segment LED Ring Light CYN-2 This ring light enables illumination control from eight directions, eliminating theneed to pull out and adjust the fiber illuminator each time measurement is made.
Stellar new features enhance Z-axis measurement accuracy
Improved illuminators broaden observation ranges
Split-prism Focusing Aid (FA) Mechanism
Above focus In focus Below focus
Objective FA patterns are clearly visible because they are split vertically.
Laser AF Tracking on FPC
5
In combination with a Nikon digital camera for microscopes and the E-Maxseries of measurement support software, it will streamline your microscopictasks extending from the observation and capture to the storage of high-definition digital images of your workpieces.
Digital Imaging & Vision Processing
Enhanced body solidity through CAE analysis has enabled themounting of a large stage in a small space to accommodate themeasuring of large workpieces. With the MM-800 model, inparticular, it is possible to mount a 300x200mm stroke stage.
New 12x8 Stage for Large Workpieces (MM-800 only)
Illumination, communication, data processingare all controlled by a rear-side controller. Therear-side controller enables future systemupgrades.
Rear-side MM Controller
The design of the MM-400/800 series has been revamped so that users havemore freedom than ever in choosing modules to configure their system. Youcan configure the optimum system according to your needs, including aultrahigh-precision system boasting precision as high as 1.5+L/100µm withcombination correction.Also, since the solidity of the microscope as a whole has been upgraded, thesystem exhibits excellent reliability during measurements with a digital cameraand other accessories loaded.
* For details on system configuration, contact Nikon.
High-Precision Type
-6
-5
-4
-3
-2
-1
0
1
2
3
4
5
6
MM-400/800 Combination Precision
Travel distance (mm)
Without correction: (3+L/50) µm With correction: (1.5+L/100) µm
Data Processor DP-E1 The DP-E1 is compact yet easy to use. You can place the displaynear the eyepiece and the control pad at your fingertips, for quickmeasurement and data processing. With smooth interface with aPC, the DP-E1 performs the job efficiently, from computation to themanagement of measurement results.
3rd-party DRO Connectable (S Type)Also available is the S Type, to which a 3rd-party DRO isconnectable, including the Metronics QuadraChek series.
※ QuadraChek is a trademark of Metronics Inc.
Measurement Support Software E-MAX Series Digital image measuring performance of the E-MAX Series hasbeen upgraded. Combined with Nikon’s digital camera andmeasuring microscope, the system achieves digital imagemeasurements with precision never before possible.
Interface with data processors and software has been greatlyenhanced, enabling comprehensive support for the entiremeasurement process, extending from the measurement, imagecapture and analysis up to data storage.
Improved Interface with Data Processor and Software
DP-E1
6
Type MM-800/LM MM-400/LMZ-axis movement Motorized (max. speed: 10mm/sec)Optical head Trinocular optical head, Trinocular optical head with Focusing AidTilting angle 25°Eyepiece CFWN10x (Field No. 20)Objective Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm)Stage MHS12x8, MHS10x6, MHS8x6, MHS6x4, MHS4x4, O3L, MHS2x2 MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*
Episcopic LED episcopic illuminatorMax. workpiece height 200mm 150mmDimensions (W x D x H)/weight 380 x 735 x 725mm/approx. 65kg 300 x 600 x 638mm/approx. 50kg
3-Axis and Z-Motorized ModelLM Type
The LM type has a built-in motorized Z-axis scale, enabling accurate 3-axismeasurements. In addition, the optional Focusing Aid uses a split prism toensure Z-axis focusing accuracy and minimize measurement errors causedby the difference in the objective’s depth of focus.
MM-800/LM • 10x6 stage • Focusing Aid (FA) mechanism
Applications: Dies & molds, Finely machined parts, Stampedparts, Injection molded parts, Medical devices
FA T
FA T
LED
LED
MM-400/LM • 6x4 stage • Focusing Aid (FA) mechanism
Connector - Housing Inside
PGA - Insertion Pin
Specifications *TE2-PS100W power supply is required
MM-400/L MM-400/SL with 3rd-party DRO
• 4x4 stage • Trinocular optical head
7
3-Axis Measurement Model L/SL Type
Type MM-800/L, MM-800/SL MM-400/L, MM-400/SLZ-axis movement Manual (????coarse/fine knob)Optical head Trinocular optical head, Trinocular optical head with Focusing AidTilting angle 25°Eyepiece CFWN10x (Field No. 20)Objective Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm)Stage MHS12x8, MHS10x6, MHS8x6, MHS6x4, MHS4x4, O3L, MHS2x2 MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*
Episcopic LED episcopic illuminatorMax. workpiece height 200mm 150mmDimensions (W x D x H)/weight 380 x 735 x 725mm/approx. 65kg 300 x 600 x 638mm/approx. 50kg
Specifications *TE2-PS100W power supply is required
With a built-in Z-axis scale, this type is a standard line in Nikon’s measuringmicroscope series. Various models are available—with or without Focusing Aid,monocular or trinocular optical head. You can select the best one according to yourmeasuring range, use and budget. The LS model accepts attachment of DRO madeby other manufacturers.
MM-800/L MM-800/SL with 3rd-party DRO
• 8x6 stage • Focusing Aid (FA) mechanism
Applications: Dies & molds, Finely machined parts, Stampedparts, Injection molded parts, Medical devices
T
FA T LED
LED
Plastic Gear Teeth with Smaller Module
Black Injection Molding Parts - Connector
8
MM-800/400/800S/400S (2-Axis Measurement Model)
Type MM-800 MM-400Z-axis movement Manual (????knob)Optical head Monocular optical headTilting angle 30°Eyepiece Dedicated 10x (Field No. 20)Objective Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm)Stage MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*
Episcopic Monocular LED episcopic illuminatorMax. workpiece height 150mmDimensions (W x D x H)/weight 300 x 600 x 638mm/approx. 50kg
Specifications *TE2-PS100W power supply is required
These are the basic models in the MM-400/800 series. High in cost performance,these models are expressly designed for 2-axis (XY) applications. Various models areavailable—monocular or trinocular optical head, 12x8 large stage or 2x2 small stage,according to application and budget. The S model accepts DRO made by othermanufacturers.
MM-400 • 2x2 stage • Monocular optical head
MM-800 • 8x6 stage• Focusing Aid (FA) mechanism
Applications:Dies & molds, Finely machined parts, Stampedparts, Injection molded parts, Medical devices
M LED
Type MM-800/S MM-400/SZ-axis movement Manual (????knob)Optical head Trinocular optical headTilting angle 25°Eyepiece CFWN10x (Field No. 20)Objective Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm)Stage MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*
Episcopic LED episcopic illuminatorMax. workpiece height 150mmDimensions (W x D x H)/weight 300 x 600 x 638mm/approx. 50kg
Specifications *TE2-PS100W power supply is required
9
MM-400/S• O3L stage • Trinocular optical head
Applications: Stamped parts, Injection molded parts, Medicaldevices, Drills, Micro tooling
MM-800/S• ?????• ?????
T LED
10
High Power Microscopic Model with Universal Epi-Illuminator
Motorized Z-axis & Microscopic Observation Mode Switchover
In addition to brightfield, darkfield, simple polarizing, and DIC, the universal type inthe MM-400/800 series enables epi-fluorescence observation as well. Moreover,important controls in the microscope—e.g. Z-axis movement, focusing andillumination switchover—have been automated or motorized to streamline imagingoperations such as digital image capture, FOV measurement and data storage.
Control of the motorized epi-illuminator and various light sources, universalmotorized nosepiece and aperture diaphragm, DIC changeover, and otherimportant operations can be performed at a single place via the illumination& AF controller.
TTL Laser AFThe first measuring microscope series equipped with TTL Laser AF, these modelsaccomplish focusing quickly with repeatability as high as 0.5µm (when a 20xobjective is used).
Focusing Aid (FA)The newly developed split-prism Focusing Aid (FA) ensures accurate Z-axisfocusing, minimizing measurement errors caused by the difference in the depth offocus of the objective in use.
Universal Motorized NosepieceThe LV-NU5A universal nosepiece simplifies objectives changeover. Programmedmagnification changeover is available via the illumination & FA controller.
Centralized Control via Illumination & FA Controller
Epi-fluorescence DIC
Brightfield Darkfield Brightfield
11
A new lineup of motorized universal illuminators is availablein addition to manual types. A white LED illuminator isavailable for brightfield use. Users can choose either a 12V-50W halogen or a white LED light source according toobservation purpose and workpiece.
LV-UEPI Universal Epi-IlluminatorThis universal epi-illuminator enables brightfield, darkfield, simplepolarizing, and DIC observations. The illuminator automaticallyopens the field and aperture diaphragms when switchingobservation from brightfield to darkfield. When returning tobrightfield, the previous field and aperture conditions areautomatically restored.
LV-UEPI2 Universal Epi-Illuminator In addition to brightfield, darkfield, simple polarizing, and DIC, thisilluminator enables epi-fluorescence observation. The illuminatorautomatically sets optimum illumination through linkage to theshutter and field and aperture diaphragms. This minimizes thecomplexity of operating a measuring microscope, allowing the userto concentrate on observation.
LV-UEPI2A Motorized Epi-Illuminator With the LV-UEPI2A, the illumination changeover turret, theaperture diaphragm and the illumination voltage control have beenmotorized, allowing optimum image capture conditions. Theaperture diaphragm is automatically optimized through linkage withobjective and observation. Also, illumination parameters can bearbitrarily changed according to observation purpose andworkpiece. When loaded on the LM type measuring microscope,the illuminator can be controlled from the microscope operationpanel or a connected PC. When the illumination & AF controller isused, the microscope can be controlled externally from a PC.
LV-UEPI FA Universal Epi-Illuminator Focusing Aid This universal epi-illuminator is equipped with a Focusing Aid (FA)mechanism to provide greater accuracy in Z-axis measurements.
LV-EPILED White LED Illuminator The LV-EPILED is a light, compact white LED illuminatorexclusively designed for brightfield use. The white LED maintainsconstant color temperature to prevent any adverse effects onmeasurement. External control is possible either with the attachedpower supply controller or the illumination & AF controller.
The microscope comes with a motorizedfocusing module, enabling Z-axis movementwith a dedicated controller.
A Wide Choice of Illuminators
Motorized Z-axis Movement
Although the MM-LH50PC Precentered Lamphouse is12V-50W, the brightness is equivalent to or higherthan that of 12V-100W. The low power-consumptionhalogen light source contributes to the compactdesign of the microscope while also being friendly tothe environment.Defocus induced by heat is substantially reduced.
High-Intensity 12V-50W Halogen Light Source:MM-LH50PC Precentered Lamphouse
12
MM-800/LMU• 12x8 stage• TTL Laser AF• LV-UEPI2A motorized universal epi-illuminator
Applications:Semiconductor packages, Bonding placement,Loop height, FPD panel (LCM), MEMS, Wafer levelCSP, HDD slider
MM-400/LMU• 6x4 stage• TTL Laser AF• LV-UEPI2A motorized universal epi-illuminator
The motorized system satisfies digital image capture and data storage requirements. Incombination with the motorized universal epi-illuminator, it is possible to set and reproduceillumination optimized for a selected observation method and/or objective lens. Focusing andobjective changeover can be electrically performed with the illumination & AF controller.
High Power Magnification 3-Axis Measurement with Z-Motorized ModelLMU Type
Type MM-800/LMU MM-400/LMUZ-axis movement Motorized (max. speed: 10mm/sec)Optical head Y-TB binocular tube, LV-TI3 trinocular eyepiece tube, LV-TT2 tilting trinocular eyepiece tube (with built-in reticle)Eyepiece CFI10x (Field No. 22), CFI10x CM (Field No. 22)Objective CFI60 LU Plan Fluor EPI series, CFI60 LU Plan Fluor BD series, CFI60 L Plan EPI CR seriesStage MHS12x8, MHS10x6, MHS8x6, MHS6x4, MHS4x4, O3L, MHS2x2 MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*
Episcopic White LED illuminator LV-EPILED, Motorized universal epi-illuminator LV-UEPI2A*, Universal epi-illuminator LV-UEPI2*,Universal epi-illuminator U-EPI*, Universal epi-illuminator with Focusing Aid LV-UEPI FA
Max. workpiece height 200mm 150mmDimensions (W x D x H)/weight 380 x 735 x 725mm/approx. 65kg 300 x 600 x 638mm/approx. 50kg
Specifications *TE2-PS100W power supply is required
AF T U-EPI
AF T U-EPI
LED
LED
CCD
Metallized Patterns of FPC
13
3-Axis Measurement High Power Magnification ModelLU/LSU Type
Type MM-800/LU MM-400/LUZ-axis movement Manual (????coarse/fine knob)Optical head Y-TB binocular tube, LV-TI3 trinocular eyepiece tube, LV-TT2 tilting trinocular eyepiece tube (with built-in reticle)Eyepiece CFI10x (Field No. 22), CFI10x CM (Field No. 22)Objective CFI60 LU Plan Fluor EPI series, CFI60 LU Plan Fluor BD series, CFI60 L Plan EPI CR seriesStage MHS12x8, MHS10x6, MHS8x6, MHS6x4, MHS4x4, O3L, MHS2x2 MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*
Episcopic White LED illuminator LV-EPILED, Motorized universal epi-illuminator LV-UEPI2A*, Universal epi-illuminator LV-UEPI2*, Universal epi-illuminator U-EPI*, Universal epi-illuminator with Focusing Aid LV-UEPI FA
Max. workpiece height 200mm 150mmDimensions (W x D x H)/weight 380 x 735 x 725mm/approx. 65kg 300 x 600 x 638mm/approx. 50kg
Specifications *TE2-PS100W power supply is required
FPD-Cell Process
Color Filter
MM-800/LU• 12x8 stage• LV-UEPI2 universal epi-illuminator• Dedicated erect image Focusing Aid optical head• Manual nosepiece
Applications:Semiconductor packages, Bonding placement,Loop height, FPD panel (LCM), MEMS, Wafer levelCSP, HDD slider
The system is equipped with a universal epi-illuminator that responds to various observation needs suchas brightfield, darkfield, simple polarizing and DIC, as well as epi-fluorescence. A bright 12V-50W halogenlight source and a white LED light source are available depending on the workpiece or observationpurpose. The 12V-50W halogen light source provides image brightness equivalent to or higher than thatof 12V-100W. LSU type is also available for connection to a 3rd-party DRO.
FA TU-EPI
MM-400/LU• 6x4 stage• LV-UEPI FA universal epi-illuminator with
Focusing Aid• Dedicated erect image trinocular optical head• Manual nosepiece
UFA T U-EPI LED
MM-400/U• 6x4 stage• Manual nosepiece• LV-UEPI universal epi-illuminator• Dedicated erect image Focusing Aid optical head
Applications:Semiconductor packages, Bonding placement,FPD panel (LCM), MEMS, HDD slider
This model is designed exclusively for 2-axis high magnification measurementof fine geometries. It is equipped with a universal epi-illuminator that allowsobservations such as brightfield, darkfield, simple polarizing and DIC. A bright12V-50W halogen light source and a white LED light source are availabledepending on the workpiece or observation purpose. The 12V-50W halogenlight source provides image brightness equivalent to or higher than that of12V-100W.
14
2-Axis High Power Magnification ModelU/S-U Type
Type MM-400/UZ-axis movement Manual (????knob)Optical head Y-TB binocular tube, LV-TI3 trinocular eyepiece tube, LV-TT2 tilting trinocular eyepiece tube (with built-in reticle)Eyepiece CFI10x (Field No. 22), CFI10x CM (Field No. 22)Objective CFI60 LU Plan Fluor EPI series, CFI60 LU Plan Fluor BD series, CFI60 L Plan EPI CR seriesStage MHS6x4, MHS4x4, O3L, MHS2x2Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen lamphouse (option)*
Episcopic White LED illuminator LV-EPILED, Motorized universal epi-illuminator LV-UEPI2A*, Universal epi-illuminator LV-UEPI2*, Universal epi-illuminator U-EPI*, Universal epi-illuminator with Focusing Aid LV-UEPI FA
Max. workpiece height 150mmDimensions (W x D x H)/weight 300 x 600 x 638mm/approx. 50kg
Specifications *TE2-PS100W power supply is required
FA TU-EPI LED
15
Dimensional diagram
MM-800/LMStage type MHS12x8
MM-800/LStage type MHS12x8
MM-400/LStage type MHS6x4
MM-400/M???Stage type MHS2x2
380
735
260
725
260.7
474.
3
151
204578
151
380
735
260
725
260.7
474.
3
204578
638
225
300600
442
151
453~
603
128.3
600
260.7
439.
3
151
442
638
225
300
MM-800/LMUStage type MHS12x8
MM-800/LUStage type MHS12x8
MM-400/LUStage type MHS6x4
735380
725
260
264.6
531.
7~73
1.7
380
725
260
735
264.6
588.
7
300 600
225
638
515.
6~66
5.6
191.5
151
Note: Dimensions will vary, depending on which stage and eyepiece tube are used. Unit: mm
16
Objective lenses with correction ringCFI L Plan EPI CR Series
The CFI60 series now includes the CFI L Plan EPI CR series to cope with thethinner coverglass used in liquid crystal displays, and highly integrated, and densedevices. Coverglass correction can be continuously made from 0 mm up to 1.2mm(0-0.7mm and 0.6-1.3mm for 100x) with the correction ring. The 100x objectivelens offers 0.85 high NA, while enabling high-contrast imaging of cells and patternswithout being affected by the coverglass.
Standard objective lens with improved transmission rate for UVwavelengthCFI LU Plan Fluor Series
The transmission rate in the UV wavelength range has been improved for the newCFI LU Plan Fluor series. These objective lenses are suitable for various research,analysis and examination needs, while maintaining Nikon’s commitment to high NAand long working distance. Only one kind of objective lens is needed for brightfield,darkfield, simple polarizing, DIC and UV epi-fluorescence observations. Theseobjective lenses offer high resolution and ease of use.
Type Magnification NA W.D. (mm) Glass thickness correction range (mm)CFI L Plan EPI CR 20x 0.45 10.9-10.0 0-1.2CFI L Plan EPI CR 50x 0.7 3.9-3.0 0-1.2CFI L Plan EPI CRA 100x 0.85 1.2-0.85 0-0.7CFI L Plan EPI CRB 100x 0.85 1.3-0.95 0.6-1.3
Type Magnification NA W.D. (mm)CFI L Plan EPI 2.5x 0.075 8.8CFI LU Plan Fluor EPI 5x 0.15 23.5
10x 0.30 17.520x 0.45 4.550x 0.80 1.0
100x 0.90 1.0CFI LU Plan EPI ELWD 20xA 0.40 13.0
50x 0.55 10.1100xA 0.80 3.5
CFI L Plan EPI SLWD 20x 0.35 24.050x 0.45 17.0
100x 0.70 6.5CFI LU Plan Apo EPI 100x 0.95 0.4
150x 0.95 0.3CFI L Plan Apo EPI WI 150x 1.25 0.25
Type Magnification NA W.D. (mm)CFI LU Plan Fluor BD 5x 0.15 18.0
10x 0.30 15.020x 0.45 4.550x 0.80 1.0
100x 0.90 1.0CFI LU Plan BD ELWD 20x 0.40 13.0
50x 0.55 9.8100x 0.80 3.5
CFI LU Plan Apo BD 100x 0.90 0.51150x 0.90 0.4
CFI60 LU Plan Fluor EPI series
CFI60 LU Plan Fluor BD series
Brightfield
CFI60 Series Objectives
With correction mechanism
Brightfield/Darkfield
CFI60 L Plan EPI CR series of objective lenses with correction ring
With correction at 0.7mm (50x)Without correction (50x)
New series of high-performance objectivelenses enhances optical performance
17
Newly developed tilting trinocular eyepiece tubeLV-TT2 Tilting Trinocular Eyepiece Tube
The newly developed LV-TT2 tilting trinocular eyepiece tube (erect image) withbuilt-in reticle offers comfort to all users, regardless of their stature or viewingpositions. The optical path changeover of 100:0/20:80 allows simultaneous use ofmonitor.
Selectable nosepiecesHighly Durable Motorized Universal Nosepieces LV-NU5A/U5AC
Two types of motorized universal quintuple nosepieces are available. TheLV-NU5A boasts greater durability thanks to a new click mechanism andcontrol system. Programmed magnification change with a controller ispossible. The LV-NU5AC comes with a centering mechanism thatsuppresses image drift during objective changeover.
Manual NosepiecesA variety of manual control nosepieces are available to suit all needs.
Illumination & FA Controller
This controller makes it possible to control the light source, motorizedilluminator, nosepiece, Z-movement and TTL Laser AF. By connectingE-MAX software, auto switching is also possible.
Connectable units• Motorized universal epi-illuminator LV-UEPI2A• Halogen lamphouse MM-LH50PC (TE2-PS100W power supply isrequired)• PC-control type high-intensity mercury fiber light source• White LED illuminator LV-EPILED• Motorized universal nosepiece LV-NU5A, LV-NU5AC (with centering
mechanism) • TTL Laser AF (U-AF)• Diascopic/episcopic illumination
LV-NU5A nosepiece LV-NU5AC nosepiece
C-N6 nosepiece (brightfield) L-NBD5 nosepiece (bright/darkfield) L-NU5 nosepiece (universal) XXXXXXXXXXXXXXX
Accessories
18
Nikon offers a broad range of stages to choose from including the new MHS12x8 stage. All modelsexcept the O3L boast an outstanding accuracy of 3+L/50µm (L=measurement length).
Stage typeMHS12x8
Stage typeMHS10x6
Stage typeMHS8x6*
Stage typeMHS6x4
Stage typeMHS4x4
Stage typeO3L
Stage typeMHS2x2
416
58 8400374
30 060
280 5
60 220
60 60
360
(mm)
412
312
285
192
38.1
(mm)
286
255195
192 90φ107
φ174φ150
(mm)
438285250
60
354
60
240
190
60
90
(mm)
508350
354
25060 60 60
240
180
60
90
(mm)
9012
0
126
(mm)
(mm)
521.5
60 60 60 60 6036045 0
286
464.
5
30 5
190
6060
240
Cable length: approx. 2,000mm
Cable length: approx. 2,000mm
Cable length: approx. 2,000mm
Cable length: approx. 2,000mm
Cable length: approx. 2,000mm
Cable length: approx. 2,000mm
Cable length: approx. 2,000mm
192
245
145
204
145
170
120
170
92 90
307.5
500
678.5
464 35
0
120
135
60 380 60100
60 60 60 60 60100
6060
60
230
60
330 85
60
85
3528
035
6055
55
100.578
100.
514
18-M6 depth 10 tool installation screw hole
16-M6 depth 10 tool installation screw hole
22-M6 depth 10 tool installation screw hole
12-M6 depth 10 tool installation screw hole
10-M6 depth 10 tool installation screw hole
6-M6 depth 7
Stages
Stages forMM-800series
Stages forMM-400series
*Stage adapter is required.
Accessories
19
Accessories
Stage specifications
Stage AdapterThis adapter is used to mount MHS8x6, MHS6x4, MHS4x4, O3L, or MHS2x2 stage to the MM-800.
Stage Accessories
Tilting center fixture A configured withgoniometer type 2
Rotating TablesUsed to rotate the workpiece and align it in the direction to which the stage moves.
Tilting Center Fixture AUsed to hold machined workpieces.
Rotating table specifications
1.6
6.2
10.2
13.5
11.7
60°
8
24
225
134
200
300
T groove: Rotating table A2 Dovetail: O3L• Stages other than O3L and rotating table C/D require M6 depth 10 tool installation screw holes.• T grooves may be specially ordered for MHS2x2 rotating boards.
Tool installation groove dimensions (mm) Tool installation screw positions (mm)
T groove Dovetail
25
120
230
170 φ1
07
130
210
(mm)
286
3030
30
340360390
φ262
φ271
230 30
282250 (installation screw)
6-M6 depth 10 tool installation screw hole
φ174φ204
25
Tool installation screw holes (6-M6 depth 9) are located at six equidistant positions around the circumference.
Rotating Table Type 3For MHS6x4, MHS4x4
Rotating Table Type 4For MHS10x6, MHS8x6
Goniometer Type 2For O3L
MHS12x8MHS10x6 450 x 286 305 x 190 250 x 150 Linear encoder 0.0001 Discretionary — M6 (screw) 20 Approx. 50MHS8x6 400 x 280 245 x 192 200 x 150 Linear encoder 0.0001 Discretionary — M6 (screw) 15 Approx. 36MHS6x4 350 x 240 204 x 145 150 x 100 Linear encoder 0.0001 Discretionary — M6 (screw) 10 Approx. 27MHS4x4 285 x 240 170 x 145 100 x 100 Linear encoder 0.0001 Discretionary — M6 (screw) 6 Approx. 23O3L 285 x 192 170 x 120 100 x 50 Linear encoder 0.0001 Discretionary — Dovetail 5 Approx. 15MHS2x2 195 x 192 107 in diameter 50 x 50 Linear encoder 0.0001 Discretionary 360° rotatable M6 (screw) 5 Approx. 13
For MM-800
Roting table type 3 204mm 165mm 360° (uncalibrated) Screw hole 6-M6 Approx. 5kgRoting table type 4 282mm 262mm 360° (uncalibrated) Screw hole 6-M6 Approx. 8kgGoniometer type 2 160mm 107mm 360° (2' reading) T groove/Screw hole 2-M6 Approx. 4kg
Table diameter Glass insert diameter Rotation range Tool installation Weight
Type Surface area Stage glass Crosswide Reading method Min. Zero position adjustment Stage top Tool Loading Weight(mm) dimensions travel reading (mm) installation capacity (kg)
(mm) (mm) (mm) (kg)
A ø68 x 120mm 45mm 10° (in 1° increment) Approx. 2.2kg
Max. workpiece diameter and Center height Tilting angle Weightlength when held level
Accessories
20
FOV Measurement with Advanced Digital Imaging Processing Technology
E-Max SeriesIn combination with Nikon’s digital still camera DS-2Mv, the new E-MAX seriesprovides state-of-the-art image processing technology. Automated edgedetection with sub-pixel processing enables more precise and repeatablemeasurement. Effectively used in combination with a measuring microscope/profile projector, the new E-MAX series provides the user with various advancedmeasurement and processing functions from two-dimensional data processingand image measurement to data storage.
Finer video images and fast image transfer withNikon’s original image processing technologies
SVGA (800 x 600) video images transferred directly to PC via USB2.0can be proceeded for ?????? Automated Video Edge Detection byNikon’s newly developed image processing algorithm. The new E-MAX DS-V set provides FOV measurement without a dedicatedimage processing board. Thus, it can even be installed in highperformance laptop PCs, greatly saving working-space.
Navigation function
The graphic window displays the next measurement position inbrown, preventing errors and allowing speedy measurement (duringreplay). The current position is displayed in pink.
Chart measurement
Chart measurement can be made easily in the video window.
Accessories
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Accessories
Functions provided by each set
V set D setData processing ✽ ✽
Navigation during replay ✽ ✽
Live video monitoring ✽ –Chart measurement ✽ –Automated video edge detection ✽ –
Compatible measuring instruments
V set D set
Nikon profile projector ✽ ✽
Nikon measuring microscope ✽ * ✽
*Trinocular eyepiece tube type, TV eyepiece tube type
Larger icons support touch screen operationenvironment
Larger Icon Mode is selectable for a touch screen operationenvironment. The mouseless operation enables operators toconcentrate on measurements.
Illumination controls and motorized nosepiece,universal epi-illuminator, TTL Laser AF controls
White LED illumination control is possible from E-MAX software. Withmotorized nosepiece, universal epi-illuminator and/or TTL Laser AF,E-MAX controls magnification switchover, microscopic methods,aperture setting, and Laser AF, etc.
Interactive operation wizards
Depending on measurement requirements, operators can select“Quick Measure,” “Teaching Measure” or “Run Teaching File” modewith wizards.
Accessories
22
Data Processor with improved accuracy and ease of use
DP-E1
Counter display
File control key
Numeric key
Function key
Measurement code key
MACRO key
Coordinate reset key
座標表示部
リスト表示部
データ入力キー
コメント、測定結果表示部
New DP-E1 data processor has been developed to improve accuracy andefficiency as a measuring system as a whole. A 0.1µm-reading counter display isbuilt into the compact body. The 320 x 240-pixel LCD greatly improves ease ofuse. Effectively used in combination with a measuring microscope/profileprojector, it realizes quick calculation and processing of measurement data.
Simple & interactive operation
Feature Construction Oriented Operation of the DP-E1 allows theuser to conduct measurement by following the graphics, providing aseamless measuring environment when used in combination with theNEXIV VMR/E-MAX series. Measurement results are automaticallymemorized as teaching steps and can be easily used as ameasurement routine.
GD&T compliance
Geometric Dimensioning & Tolerancing defined by the ANSI Y 14.5MSpecification is supported. In addition to Location Tolerancing suchas True Position, MMC and LMC, determination of Form, Orientationand Runout can be conducted interactively.
Multi-language support
English, German, Japanese and various other Asian and Europeanlanguages are supported.
Digital Printer DPU-414 (option)
Prints out measurement results.
Data storage & softwareupgrades via USB disk
A USB disk can be used for storingmeasurement results andupgrading new functions.
Control panel
Accessories
23
Accessories
処理単位 mm/inch 表示桁数:mm時、小数点以下3、4、5を選択可能。inch時、小数点以下4、5、6を選択可能。角 度 度分秒/Deg/Rad
キースイッチ 55個
ファンクションキー 4個
カウンタ表示部 DPシステム接続によりDPシステムのカウンタ値表示
外部プリンタ RS-232C接続により測定結果出力
外部メモリ USBメモリ、USBインターフェースを持つFloppyDiskDrive
液晶画面 Q_VGA(320×240)Monochrome LCD、バックライト色:青、ノンインターレス、画面サイズ:5.7型
電源 DC12V(リプル300mV以下)、4A以下(専用ACアダプタ使用)、リアルタイムクロック用バックアップ電池 CR2032×2個
使用環境、設置環境 使用環境:温度0~40℃、湿度70%(但し結露なきこと)、高度2000m以下保管環境:温度-20~60℃、湿度90%(但し結露なきこと)汚 染 度:2
寸法(本体) 300(W)×99(H、足を畳んだ状態)x240(D)mm
重量 2.5kg
Specifications
Retrofit Unit
To use the DP-E1 in combination with the conventional measuring microscopeMM-40/60, Profile Projector V-24B, V-12BD and V-12BS, the Retrofit Unit isnecessary.
Cord
Accessories
24
Inputting data to inspection sheets manually is not necessary any longer. The MacroScript Program enables you to transfer data from Nikon counters and/or dataprocessors directly to Excel sheets via RS-232C interface. Simple to use, yet greatlyenhances productivity.
Using a DDE Link function, measured data can be immediately transferred tospreadsheets such as Microsoft Excel®, SPC-PC IV, SPC-PC IV Excel, and others,making real-time SPC analysis possible.
Note: SPC-PC IV and SPC-PC IV Excel are products of Quality America Inc.
This software enables the quick generation of inspection results sheets in variousreport forms including user-designed forms. Users can even customize the programfor their own easier use by making macro scripts.
Application Software for Measurement Support/Data Processing SystemCustom Fit QC
Direct link to Excel sheet programs—DirecSheet IIFor DP-E1, SC-212 and E-Max
Real-time SPC via DDE (Dynamic Data Exchange)
Report generating program: VMR Report Generator
Required software: Microsoft Excel2000/XPRequired memory: 128MB or moreManufacturer: Pronics Co., Ltd.
Operating environment:Microsoft Excel 2000/XPMemory space: 128MB or more An example of macro scripts
written by users: In order to inputmanually the data measured byother instruments and compilethem into one complete report, themacro automatically makes cellblanks and display them in skyblue and a message promptsmanual inputs.
Accessories
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Accessories
Various measuring tools are available• Scale and grid line display, two-point distance
measurement, and other measuring tools areavailable as standard.
• Convenient tools such as text input, line and graphicdrawing, and super-impose are supported.
• Measurement results can be stored as CSV file foreasy report generation with other PC software.
Large, high-definition display for immediatemicroscopic observation• Standalone camera control unit DS-L2 has 8.4-inch LCD
monitor (XGA)• DS-Fi1 camera head with 5.0-megapixel CCD provides
high frame rate of 12fps and allows smooth focusing onmonitor.
Imaging mode provides optimal photographywith single mouse-click• Optimal imaging parameters are preset for different
sample types and observation methods includingbrightfield and darkfield to enable fast and easyphotography with a single mouse-click.
The all-in-one digital camera for microscopes enables display,measurement, image capture and storage with a simple mouse-clickwithout PC connection.
For measuring on a TV monitor by eye, the TV reticle offers sharplines displaying reticles as optical images on the TV monitor. Itenables measurements on a TV monitor, with identical precision tothat through eyepiece lenses, while reducing user eyestrain.
Used to install a C-mount NTSC CCTV camera on the microscope. Touse, replace the straight tube in a trinocular tube with this adapter.
Note: LV-TV TV tube is required.
These compact objectives feature long working distances and excellent resolution.All have almost the same parfocal distances, come with lens adapter and can beused with MM-400/800 microscopes.
The 3x objective is standard with the microscope.*Adapter
Magnification 1xA 3xA 5xA 10xA 20xA 50xA 100xA
W.D. (mm) 79 75 64 49 20 15 4
Digital Sight DS Fi1-L2 Digital Camera for Microscopes
Objectives 1xA, 3xA, 5xA, 10xA, 20xA, 50xA, 100xA
TV Reticle Adapter Direct C-mount Adapter
Wafer IC-chip Circuit Board Metal Ceramic
Imaging mode for industrial sample
DS Fi1-L2 configured with Eclipse 100D industrial microscope
Accessories
26
1-Minute Reading EyepieceThe viewfield includes crosshairs and 60º lines, and angle indexes areread by appropriate microscopes. The measuring range is 360º.
10-Minute Reading EyepieceThe viewfield includes crosshairs and angle indexes, and when theknurled ring at the lower section of the eyepiece tube is turned, thecrosshairs and the vernier both rotate up to 180º.
LED Ring IlluminatorA high-luminance type that uses 60 white LEDs, this illuminator isprovided with intensity control and features minimum flickers. The LEDhas a long service life of approximately 20,000 hours.
LED transformer: 66 (W) x 115 (D) x 55 (H)mm
Cannot be used with metallurgical microscope objectives.
Cannot be mounted when 20xA, 50xA and 100xA measuring microscope objectives are used.
Fiber-optics Bifurcated and Ring IlluminatorsSince a 15V-150W halogen lamp with reflective mirror is used, a brightlight source is obtained and the brightness is adjustable. The ring fiberilluminator produces cone-shaped illumination, minimizing shadowscaused by any unevenness on the workpiece surface. The bifurcatedfiber enables flexible illumination from two directions.
Fiber transformer: sequential adjustment of brightness from 7 to 14 volts.
Cannot be used with metallurgical microscope objectives.
8-Segment LED Ring Illuminator CYN-2As CYN-2 enables flexible illumination from eight directions, it is notnecessary to adjust the position of illumination fibers by hand at eachmeasurement and/or observation. An LED light source with brightnesscontrol is used for objectives 1xA, 3xA, 5xA and 10xA. The workingdistance is 60mm.
Can be used with measuringmicroscope MM-400/800.
Can be used with E-maxseries software.
The RS-232C cable is stan-dard with the illuminator.
Note: Monocular adapter (standard equipment) is required when using these eyepieces with trinocular tubes.
Fluorescent Lamp IlluminatorThe ring fluorescent tube provides smooth, uniform illumination withoutshadows over the entire field. The fluorescent tube has a service life ofapproximately 2,000 hours and is easy to replace.
Fluorescent lamp transformer: 120 (W) x150 (D) x 70 (H)mm
Cannot be used with metallurgical micro-scope objectives.
Cannot be mounted when 20xA, 50xAand 100xA measuring microscope objec-tives are used.
External Illuminator AdapterCommonly used to mount ring fiberilluminator, fluorescent lamp illuminatorand LED ring illuminator.
Protractor Eyepieces (For all measuring microscopes except those with universal illumination.)
Illuminators
Prints out counter values once connected to rear control box ofmeasuring microscope MM-400/800.
Used to send load command to DP-E1 and DPU-414. Frees bothhands to enhance measurement efficiency.
Gauges stage travel accuracy up to 300mm. Both 10mm-intervalsensor patterns and calibrations are provided. Made of low heat-expansion glass, for minimizing heat influence.
Accuracy: Within 1µm against compensation values.
The following dedicated templates are available to facilitate profilecomparison and measurements.• Standard angle templates (standard equipment)• No. 1 Metric screw thread; pitch 0.2-2• No. 4 Involute gear (20º); module 0.2-2• No. 6 Concentric; diameter 0.2-4.6
Note: Designed for 3x objectives.Microscopes other than MM-xx/xx can use No. 6.
3-Axis/2-Axis Counter2-axis and 3-axis counters are available. The separate display unit canbe mounted on the measuring microscope. Counters can beconnected with data processors and digital printers via the RS-232Cport.
Remote SwitchEnables reset and SEND remote control of counter.
3-axis counter 2-axis counter
Y-axis X-axis
27
Counter
Digital Printer DPU-414 Foot Switch
Standard 300mm Scale Templates
AccessoriesAccessories
Binocular Tube
Monocular Eyepiece Tube Adapter
MM Eyepiece Lens 10x
LV-TV TV Tube
C-mount CCTV Camera
ME CFWN 10x
Power Supply (for Z-movement) (??)
Motorized Z-movement Console (??)
4x4 Stage
O3L
2x2 Stage
Goniometer Type 2
Rotating Table Type 3
Tilting Center Fixture A
6x4 Stage
8x6 Stage
10x6 Stage
Rotating Table Type 4
MM Stage Adapter MM800 (8x6 or smaller)
LED Epi Illuminator
Trinocular Optical Head for Single Objective Lens
Trinocular Optical FA Head for Single Objective Lens
12x8 Stage
MM-400 Stand MM-400/L Stand MM-400/LM Stand
MM-800 Stand MM-800/LM Stand
2-Axis Digital Counter SC2-E1
3-Axis Digital Counter SC3-E1
Data Processor Console DP-E1
Measuring Microscope Objective Adapter
Eyecup
External Illuminator Adapter 3
Monocular Optical Head
Epi-illumi for MM400/800 Mono Opti Head
C-mount Direct CCTV Adapter
TM Objective Lens 1x-100x
Fiber-optics Bifurcated Illuminator
8-Segment LED Ring Light CYN-2 (??)
LED Transformer
Fluorescent Lamp
Illuminator
Fluorescent Lamp
Transformer (??)
Ring Fiber Illuminator
Fiber Transformer
LED Diascopic Illuminator
MM AC Adapter
Power Cable (??)
Halogen Lamphouse MM-LH50PC
LV-HL50W 12V-50W-LL Halogen Lamp
12V-50W LampTE2-PS100W Power Supply
Halogen Light Intensity Control Cable
Foot Switch 4 DRO Reset Switch
A
C
C C
D
E
H
H
K
K
E
D
F
C
D
H
A A
B B
A
A
A
B
B
A
B
J
N
N
H
L
M
L
M
FEF
EF
EF
EF
N
N
P
Q
Q
Q
JPP
JP
S
R R R
R
S S S
S
S
S
S
MM Protractor 1' ReadingMM Protractor 10' Reading
Data Processing System E-MAX
Digital Cameras for MicroscopesDigital Sight Series
LED Illuminator SM-LW-61 JI (??)
T
T
S
Remote SwitchS
S
T T T
T
MM-800/L Stand
B
EF
P
S
T T
MM-400/800 System Diagram (MM Type)
28
System diagram
Power Supply (for Z-movement) (??)
Motorized Z-movement Console (??)
4x4 Stage
2x2 Stage
Goniometer Type 2
Tilting Center Fixture A
6x4 Stage
8x6 Stage
10x6 Stage
Rotating Table Type 4
12x8 Stage
Rotating Table Type 3
LED Diascopic Illuminator
LV-HL50W 12V-50W-LL Halogen Lamp
12V-50W Lamp TE2-PS100W Power Supply
Halogen Light Intensity Control Cable
E
F
A
A
A
B
B
AB
J
G
P
Q Q
O3L
MM-400 Stand MM-400/L Stand MM-400/LM Stand
MM-800 Stand MM-800/LM Stand
A
T T T
TT
E
A A
B B
FEF
EF
EF
EF
JPP
JP
S S S
SS
MM-800/L Stand
T
B
EF
P
S
2-Axis Digital Counter SC2-E1
3-Axis Digital Counter SC3-E1
Data Processor Console DP-E1
S
Foot Switch 4 DRO Reset Switch
S
S
Remote SwitchS
S
Data Processing System E-MAX
LV-UEPI Universal Epi-Illuminator
LV-UEPI2 Universal Epi-Illuminator
LV-UEPI2A Motorized Epi-Illuminator
LV-TI3 Trinocular Eyepiece Tube
U-AF Controller (??)
LV-UEPI FA Universal Epi-Illuminator Focusing Aid
LV-TT2 Tilting Trinocular Eyepiece Tube (with built-in reticle)
Bracket LV (??)
Motorized UEPI Driver
Motorized Illumination & AF Console (??)
LV-EPILED White LED Illuminator
Y-TB Binocular Tube
K
F EFFG
P
LV-TV TV Tube
C-mount CCTV Camera
C-mount Direct CCTV Adapter
K
Digital Cameras for MicroscopesDigital Sight Series
LU Objective Adapter
LU Plan Fluor BD Series Objective
LU Plan Fluor EPI/L Plan EPI CR Series Objective
Motorized Universal Nosepieces LV-NU5A/U5AC
L-NU5 Nosepiece
L-NBD5 Nosepiece
C-N6 Nosepiece
MM Stage Adapter MM800 (8x6 or smaller)
Halogen Lamphouse MM-LH50PC
T
T
CFI10x CM Eyepiece
CFI10x Eyepiece
N
N
UU
V
MM AC Adapter
Power Cable (??)
Eyecup
N
U
V
VV
Q
S
29
MM-400/800 System Diagram (Universal Type)
30
Measuring Microscope Accessory Compatibility Chart
Model MM-400/S MM-400 MM-400 MM-400/L MM-400/SL MM-400/L MM-400/LM MM-800/S MM-800 MM-800/SL MM-800/L MM-800/LM
Z-axis motion Manual Manual Manual Manual Manual Manual Motorized Manual Manual Manual Manual Motorized
Z-axis scale No No No Yes Yes Yes Yes No No Yes Yes Yes
Controller W/O Yes No Yes No Yes Yes No Yes Yes Yes Yes
Stage 4x4 2x2 4x4 6x4 6x4 6x4 6x4 10x6 10x6 10x6 12x8 12x8
Head Trinocular Monocular Trinocular Trinocular Trinocular FA Trinocular Trinocular Trinocular FA Trinocular FA
Illuminator — — LED ring Fiber ring —8-seg. 8-seg.
—White
—8-seg. 8-seg.
LED ring LED ring LED ring LED ring LED ring
Data processor No — DP-E1 DP-E1 — E-MAX V E-MAX V — DP-E1 — E-MAX V E-MAX V
Microscopy
Standard eyepiece MM eyepiece lens 10x ✓
ME CFWN 10x (x2) ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Optical head & Monocular optical head ✓eyepiece tube/ Trinocular optical head
✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓lenses for single objective lens
Trinocular optical FA ✓ ✓ ✓head for single objective lens
Binocular tube ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Monocular eyepiece tube adapter
MM protractor 10' reading
MM protractor 1' reading
Objective TM objective lens 3x ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
TM objective lens 10x ✓ ✓ ✓
TM objective lens 1x, 5x, 20x, 50x, 100x
Measuring microscope ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
objective adapter
Stage 2x2 stage ✓
4x4 stage ✓ ✓
6x4 stage ✓ ✓ ✓ ✓
8x6 stage
10x6 stage ✓ ✓ ✓
12x8 stage ✓ ✓
Stage adapter MM stage adapter MM800 (8x6 or smaller)
Rotating table type 3 ✓
Rotating table type 4
DRO/data Retrofit counter/DP unitprocessing unit/ 2-axis digital counter SC2-E1 ✓printer
3-axis digital counter SC3-E1 ✓ ✓ ✓ ✓
Data processor console DP-E1 ✓ ✓ ✓
SC-213 Z-signal cable
DRO reset switch ✓
Foot switch 4 ✓ ✓ ✓ ✓
Digital thermal printer model ✓ ✓ ✓DPU-414
DPU-414 AC adapter ✓ ✓ ✓
Printer paper for SC-7P/DPU-414✓ ✓ ✓
(1 roll)
9-9 pins RS-232C normal cable (2m) ✓ ✓ ✓
Data processing Data processing software E-MAXE-MAX V set ver. 5.0, E-MAX calibration plate,
DS-2Mv color camera head, ✓ ✓ ✓ ✓DS-U2 CCU, L-TI3 TV adapter, C-mount adapter system
DS-2M 0.55x relay lens
Standard LED dia-illuminator ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓illuminators LED epi-illuminator ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Epi-illumi for MM400/800 mono ✓
opti head
MM adapter for EX ILLUM ✓ ✓
C-FIR ring fiber light guide
C-FI230 fiber illuminator with power cord
Halogen lamp 12V-100W for fiber illuminator
LED ring illuminator ✓ ✓
(100-240V) (ESD type only)
Optional illuminators 8-segment LED ring lightCYN-1 (100-240V)
8-segment LED ring light✓ ✓
CYN-2 (100-240V) with power cable
MM AC adapter ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Power cable ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Measuring microscope
31
Model MM-400/U MM-400/LU MM-400/LMU MM-800/SU MM-800/LU MM-800/SLU MM-800/LMU MM-800/LMU MM-800/SLU
Z-axis motion Manual Manual Motorized Manual Manual Manual Motorized Motorized Manual
Z-axis scale No Yes Yes No Yes Yes Yes Yes No
Controller Yes Yes Yes No Yes No Yes Yes No
Stage 4x4 4x4 6x4 8x6 12x8 10x6 12x8 12x8 10x6
Head Y-TB TT2 with reticle TI3 TI3 TT2 with reticle TT2 with reticle TT2 with reticle TT2 with reticle TI3
Illuminator LV-EPI LED LV-UEpi FA LV-UEPI2 LV-UEPI LV-Uepi FA LV-Uepi FA LV-UEPI FA LV-UEPI2A +
LV-UEPI FALAF
Data processor — E-MAX V E-MAX V E-MAX V — E-MAX V E-MAX V
Microscopy BF BD-DIC BD-DIC-FL BD BD-DIC BD BD-DIC BD-DIC-FL BF
Standard eyepiece CFI 10x ✓ ✓ ✓ ✓
CFIUW 10x (x2) ✓ ✓ ✓ ✓ ✓
CFI 10x CM crossline reticle with ✓ ✓
diopter adjust
Optical head & Y-TB binocular tube ✓eyepiece tube/lenses L-TI3 ESD ✓ ✓
LV-TT2 TT2 trinocular tube with ✓ ✓ ✓ ✓ ✓
built-in reticle
Objective LU objective lens adapter M32-25 (x5)
LU PLANFLUOR EPI 5x, 10x, 20x, 50x ✓ ✓ ✓
LU PLAN EPI ELWD 100x ✓
LU PLAN BD ELWD 5x, 10x, 20x, 50x, 100x ✓ ✓ ✓ ✓ ✓ ✓
Stage 2x2 stage
4x4 stage ✓ ✓
6x4 stage ✓
8x6 stage ✓
10x6 stage ✓ ✓
12x8 stage ✓ ✓ ✓
Stage adapter MM stage adapter MM800 (8x6 or smaller) ✓
Rotating table type 3 ✓
Rotating table type 4
DRO/data processing Retrofit counter/DP unitunit/printer 2-axis digital counter SC2-E1 ✓
3-axis digital counter SC3-E1 ✓ ✓ ✓ ✓ ✓
Data processor console DP-E1
SC-213 Z-signal cable
DRO reset switch
Foot switch 4
Digital thermal printer model DPU-414
DPU-414 AC adapter
Printer paper for SC-7P/DPU-414 (1 roll)
9-9 pins RS-232C normal cable (2m)
Data processing Data processing software E-MAX ver. 5.0,system E-MAX V set E-MAX calibration plate, DS-2Mv color
✓ ✓ ✓ ✓ ✓camera head, DS-U2 CCU, L-TI3 TV adapter, C-mount adapter
DS-2M 0.55x relay lens
Standard illuminators LED dia-illuminator ✓ ✓ *2 ✓ ✓ ✓ ✓ ✓ *2 ✓ ✓ *2
Revolving LV-NU5A U5A nosepiecenosepieces L-NU5 U5 nosepiece ESD ✓ ✓ ✓
L-NBD5 BD5 nosepiece ✓
C-N6 nosepiece ✓ ✓ ✓
Manual control LV-EPILED ✓U-epi illuminator LV-UEPI (BF, DF, DIC) ✓
LV-UEPI FA ✓ ✓ ✓ ✓
LV-UEPI2 (BF, DF, DIC, FL) ✓ ✓
High power microscopy ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
system U bracket mount LV
Motorized control Motorized UEPI driver ✓U-epi/LAF system MM400/800U-AF controller ✓
LV-UEPI2A (BF, DF, DIC, FL) ✓
U-AF ✓
Filters & halogen YM-NCB 25 NCB11 ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓light source YM-ND 25 ND4/ND16 ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
LV-HL50W 12V50W-LL halogen lamp ✓ ✓ ✓ ✓
TE-PS 100W power supply (100-240V) ✓ ✓ ✓
MM-U epi-lamphouse LV ✓ ✓ ✓ ✓
Halogen light intensity control cable ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Accessories BD/DIC/ L2-DIC DIC prism for Eclipse microscopes ✓ ✓ ✓ ✓ ✓
FL objective lenses L-DIHC DIC prism HC for Eclipsemicroscopes
YM-PO polarizer for LV-U EPI (MBE60200) ✓ ✓ ✓ ✓ ✓
L-AN analyzer for LV-U EPI (MBE60200) ✓ ✓ ✓ ✓ ✓
C-FL Epi-Fl filter block N B-2A ✓ ✓
MM AC adapter ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
Power cable ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓
High power measuring microscope
EnThis brochure is printed on recycled paper made from 40% used material.
WARNINGTO ENSURE CORRECT USAGE, READ THE COR-RESPONDING MANUALS CAREFULLY BEFOREUSING YOUR EQUIPMENT.
Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. July 2006.©2006 NIKON CORPORATION
Printed in Japan (0607-05)T Code No. 2CE-KXVH-7
NIKON CORPORATIONParale Mitsui Bldg.,8, Higashida-cho, Kawasaki-ku,Kawasaki, Kanagawa 210-0005, Japanphone: +81-44-223-2175 fax: +81-44-223-2182 www.nikon-instruments.jp/eng/
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NIKON INSTRUMENTS (SHANGHAI) CO., LTD.CHINA phone: +86-21-5836-0050 fax: +86-21-5836-0030(Beijing office) phone: +86-10-5869-2255 fax: +86-10-5869-2277(Guangzhou office) phone: +86-20-3882-0552 fax: +86-20-3882-0580
NIKON SINGAPORE PTE LTDSINGAPORE phone: +65-6559-3618 fax: +65-6559-3668
NIKON MALAYSIA SDN. BHD.MALAYSIA phone: +60-3-78763887 fax: +60-3-78763387
NIKON INSTRUMENTS KOREA CO., LTD.KOREA phone: +82-2-2186-8410 fax: +82-2-555-4415
NIKON INSTRUMENTS EUROPE B.V.P.O. Box 222, 1170 AE Badhoevedorp, The Netherlandsphone: +31-20-44-96-222 fax: +31-20-44-96-298www.nikon-instruments.com/
NIKON FRANCE S.A.S.FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-00-33NIKON GMBHGERMANY phone: +49-211-9414-0 fax: +49-211-9414-322NIKON INSTRUMENTS S.p.A.ITALY phone: + 39-55-3009601 fax: + 39-55-300993NIKON AGSWITZERLAND phone: +41-43-277-2860 fax: +41-43-277-2861NIKON UK LTD. UNITED KINGDOM phone: +44-20-8541-4440 fax: +44-20-8541-4584
NIKON INSTRUMENTS INC.1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A.phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A.only) fax: +1-631-547-0306www.nikonusa.com/
NIKON CANADA INC.CANADA phone: +1-905-625-9910 fax: +1-905-625-0103