Embed Size (px)
DESCRIPTION
New Photo-mask before bonding. Overlap region can be seen with even eyes Good for Si piece alignment while bonding . Center was over exposed with 15nA writing. Si was firmly bonded. Metal stacking for PL pattern: Ti/Ni=80nm/400nm - PowerPoint PPT Presentation
Citation preview
1
New Photo-mask before bonding
• Center was over exposed with 15nA writing• Overlap region can be seen with even eyes• Good for Si piece alignment while bonding
2
Si was firmly bonded
• Metal stacking for PL pattern: Ti/Ni=80nm/400nm• Metal stacking for EBL pattern: Ti/Ni/Ti/Ni=30nm/300nm/50nm/100nm (blocking
total consumption of Ni)
3
Si Removed
4
Si Removed
![· Web viewKorean mask-dance plays have an all-male cast as is common in such plays throughout the world. [page53] The First Monk’s Dance (Bongsan Mask-dance Drama) Photo by D.H](https://img.pdfslide.us/doc/110x75/5f044aa77e708231d40d40c8/web-view-korean-mask-dance-plays-have-an-all-male-cast-as-is-common-in-such-plays.jpg)
