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MEMS BASEDSENSORS
PARTHA PRATIM PATHAKMONISH KUMAR CHOUDHURYLAKHYA JYOTI PHUKONRAJDEEP CHOUDHURY
ANKUR SHARMA
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Introduction
MEMS deals with process based technologies used to fabricatetiny integrated devices and systems that integratefunctionalities from different physical domains into one device.
MEMS applications include systems ranging from consumerelectronics, automative, medical, communication, defense
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SENSORS
A device used to measure a physical quantity such astemperature and convert it into an electrical signal ofsome kind (e.g. a voltage), without modifying theenvironment ..
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What can be sensed?
Almost Everything!!!Commonly sensed parameters are :
Pressure Temperature Flow rate Radiation Chemicals
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What is Mems?
MEMS is the acronym for Micro Electro Mechanical System
MEMS is a technique of combining Electrical andMechanical components together on a chip, toproduce a system of miniature dimensions..
By miniature, we mean dimensions less than thethickness of human hair !!!!
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Why MEMS for sensors?
Have lower power consumption
More sensitive to input variations
Cheaper due to mass production
Less invasive than larger devices
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Comparison between conventional and MEMSbased inertial sensors
Parameters Conventional MEMS based
MASS 1587.5g 10g
SIZE 15X8X5cm 2X2X0.5cm
POWER 35W 1mW
COST Rs11,60,000 Rs29,000
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APPLICATIONS OF MEMS AS SENSORS
ACCELEROMETERPRESSURE SENSORTEMPERATURE SENSORBIOLOGICAL SENSORS
SOUND SENSOR(MICROPHONE)
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ACCELEROMETER
A device that detects acceleration and tilt. Accelerometers detect impact and deployautomobile airbags t using MEMS technology.
Digital cameras employ them in their imagestabilization circuits.
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MEMS Bio Sensors
MEMS based array that may be insertedin the retina of a blind person to providepartial sight.
Electronic tongue can sense a variety ofliquids.
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MEMS PRESSURE SENSORS
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MEMS temperature Sensors
Waterproof
Contact free (wireless)
Find use in household appliances (iron)
Can be used in tight ends
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Focus: MEMS in Mobile Devices
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Automotive MEMS Summary
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Mems in oil exploration and relatedapplications
To find potential oil reserves To detect oil leakage from pipelines In cases of unfortunate oil spills
MEMS sensors can help to senseinformation about the oceancurrents.
Using this it is possible to predict
how far the oil slick will betransported.This information can aid in clean
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Finding potential oil and gas reserves
MEMS geophones and accelerometers can sense the vibrationssent up from the earths belly.
An array of MEMS geophones are planted over a wide area onthe seabed.
Vibrations are intentionally produced on the ground surfaceusing some techniques.
The MEMS devices measure the reflection of these waves fromdifferent layers in the earths belly.
These readings are then used to create a geological map, whichindicates the size and location of the oil/gas reservoir.
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MEMS in marine military operations
An array of MEMS sensors spread on the ocean floorcould detect the presence of enemy submarines.
MEMS sensors pressure sensors, accelerometers etc.)are being used in anti-torpedo weapons on submarinesand ships.
MEMS sensors in torpedoes are responsible for Detonating the torpedo at the right time Hitting the target in a crowded environment Prevent any premature explosion
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FUTURE PROSPECT
It leads to the need for more sensors in cars, industrialequipment and installation and, more sensors for ourambient intelligence.
Increase in medical and pharmaceutical infrastructure indeveloping countries leads to affordable devices fordiagnostics.
It has the potential to change our daily life as much ascomputer.
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MEMS Expansion in Recent Years
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Conclusion
The medical, wireless technology and biotechnologycomputer automotive and aerospace industries are onlya few that will benefit greatly from mems.
The enabling technology promises to create a newcategories of product
Mems will be the indispensable factor advancingtechnology in the 21 st century .