Upload
others
View
0
Download
0
Embed Size (px)
Citation preview
MEMS for Medical Applications Alissa M. Fitzgerald, Ph.D. | 20 March 2013
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 2
Outline
• About AMFitzgerald • Why MEMS are exciting for medical applications • Research applications • Diagnostic applications • Medical devices • Packaging challenges
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 3
Mission: Your Partner in MEMS Product Development
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 4
A complete solution from concept to production
• Project management • Multi-disciplinary engineering team • In-house prototype fabrication (150 mm wafers) by our
engineers, not operators • Smooth transition to production partners • Leverage our supplier ecosystem
Technology Strategy
Foundry Production
AMFitzgerald in-house Strategic partners
Design Simulation
Prototyping Low Volume Production
Package & Test
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 5
Why MEMS are exciting for medical applications
• Cell-compatible size scales • 2-100 micron-sized features are easy to make
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 6
Why MEMS are exciting for medical applications
• Many materials used in MEMS are biocompatible: – Silicon (under study) – Silicon dioxide (glass, fused silica, quartz) – Precious metals: Gold, titanium – Polymers: Polydimethylsiloxane (PDMS), Parylene, etc. – Bio-degradeable materials
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 7
• Ease of electronics integration enables sophisticated capabilities in small form factor: – Signal processing and analysis – Wireless capability
Battery-less operation (power/read)
Telemetry for medical sensor network (with cell phone)
Why MEMS are exciting for medical applications
Integrated Pressure Sensor
Source: IMD
MEMS sensor
Stacked MEMS and
ASIC chips, wirebonded
Source: Chipworks/Kionix
Research Applications
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 9
Microfluidics
• Laboratory tools: genomics, proteomics, drug discovery
• Microfluidics enable: – Reduction of fluid sample size – Arrayed test sites – up to thousands of tests
per chip
Caliper LifeSciences Affymetrix
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 10
Cell Manipulation
• Flow cytometers and cell sorters • Patch clamps for cell electrophysiology • Cell scaffolds for artificial organs and tissue
engineering – Liver, kidney – Working on biodegradable scaffolds
Dr. Joseph Vacanti, Harvard Medical School
Jeffrey Borenstein, Draper Laboratory
Diagnostic Applications
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 12
MEMS Pressure Sensors
• Used in non-invasive medical equipment since 1980’s – Respiratory equipment – Blood pressure cuffs
• Invasive uses increasing – Catheter tip sensors
• Many manufacturers: – GE Sensors – Measurement Specialties – Silicon Microstructures – ISSYS
Source: GE
Source: ISSYS
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 13
i-STAT/Abbott sensor arrays
• Sample interacts with membranes and films containing reagents.
• Biosensor chip measures reaction output via: – Ion-selective electrode
potentiometry: Na, K, Cl, Ca, pH
– Current measurements: Glucose, oxygen
– Conductivity: Hematocrit
Source: i-STAT/Abbott
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 14
Microneedles
• Pain-free blood sampling and drug delivery
Source: Silex Microsystems
Source: Debiotech SA
Medical Devices
St. Jude Medical: CardioMEMS Pressure Sensor
• FDA-approved – Aorta stent graft
monitoring – Pulmonary artery
pressure measurement – Mean pressure, systolic
pressure, diastolic pressure, heart rate and cardiac output
• Capacitive pressure sensor with wireless readout, catheter deployed
• Readout at doctor’s office
© AMFitzgerald 2013
Page 16
Source: CardioMEMS
Fused silica (glass) capacitive pressure sensor
Nitinol wire basket
Inductor coil
30 x 5 x 1.5 mm
Proteus Biomedical: Patient pill compliance system
• Edible chips • Powered patch
transmits data via Bluetooth to mobile device
• FDA approved www.proteusdigitalhealth.com
© AMFitzgerald 2013
Page 17
Receiver patch contains: battery, temp sensor, MEMS accelerometer, Bluetooth transmitter
1 x 1 mm silicon chip with Mg and Cu electrodes
Second Sight: Argus II Retinal Prosthesis
• FDA approved • Electrical stimulation
of retina for macular degeneration
• MEMS microneedle electrodes
• www.2-sight.com
© AMFitzgerald 2013
Page 18
Source: Second Sight
Source: NYTimes
Sensimed Triggerfish IOP monitor
• Continuous intraocular pressure (IOP) measurement for glaucoma diagnosis
• Disposable lens • Strain gage with wireless telemetry • Under evaluation in Europe
• www.sensimed.ch
© AMFitzgerald 2013
Page 19
Recorder syncs with doctor’s computer via Bluetooth
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 20
Debiotech: Insulin Micropumps
• Volumetric pump for insulin delivery
• www.debiotech.com
Source: Debiotech SA
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 21
Challenges in MEMS for Medical Applications
• Packaging, packaging, packaging – MEMS chip often needs ASIC – Electrical interconnect – Mechanical stress management – Small form factor – Hermeticity (for both MEMS function and biocompatibility)
• Sterilization – Gamma, e-beam (damaging to electronics and some plastics) – Ethylene oxide (can be absorbed by plastics) – Steam 121-134C (creates problems with material CTE
mismatch, glass transition temperature)
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 22
Summary
• MEMS is a growing suite of manufacturing tools and techniques – Newest frontier: flexible (and biodegradable) materials
• Huge opportunity in medical and biotech applications – Compatible materials and sizes – Electronics integration
• Challenges remain in packaging – Hermeticity – Sterilization
GSA Meeting, March 2013 © AMFitzgerald 2013
Page 23
Contact
• Alissa Fitzgerald: [email protected] • 650 347 MEMS x101