Low Temperature Physics Measurement Systems · Low Temperature Physics Measurement Systems ... or a dilution refrigerator unit, ... > high-end SPM controller ASC500 or confocal microscopy

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attocube systemsexplore your nanoworld

Low Temperature Physics Measurement SystemsAccelerate your Semiconductor Research & Developments towards Nanoscale Products.

Experience your new working horse in the emerging field of semicon-ductor research for the nanoscale age. attocube systems presents its product line of low temperature physics measurement systems. Perform your experiments time efficiently resulting in your company‘s future na-noscale products.

With this novel ultra-modular system a variety of scanning probe microscopy (SPM) techniques as well as a probing station at low tempe-ratures down to the mK regime can be covered within one single device. This is realized by a modular basic system in combination with flexible, high end control electronics supporting your individual research task. For this system, a variety of microscopy inserts are available which are tailored for your individual measurement tasks and can simply be ex-panded for future projects. For details on the different microscopy and probe station inserts, please refer to the ‘nanoSCOPY‘ and ‘nanoTOO-LING‘ sections in this catalog.

Lattice of lateral InAs quantum dot molecules.

Atomic Force Microscopy

Atomic resolution image of an HOPG surface recorded at 300 mK.

Spectral lines of one single quantum dot.

Confocal Microscopy

SNOM images of Vana-dium rhomb structures in reflection (4 K, 8 T).

CCD image of an HF probe touching the contact pads.

MFM image of a hard disk.

Magnetic Force Microscopy

Scanning Tunneling Microscopy

Scanning Near-Field Optical Microscopy

Cryogenic Probe Station

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nanoPOSITIONINGUltra Compact Positioners for Extreme Environments

INTRODUCTION

LTSYS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 the new line of low temperature physics measurement systems

LIQUID HELIUM SYSTEMS

LTSYS-He . . . . . . . . . . . . . . . . . . . . . . . . . . 10ultra-stable low temperature physics measurement systems

CRYOGEN-FREE SYSTEMS

LTSYS-Cc . . . . . . . . . . . . . . . . . . . . . . . . . . 18cryogen-free low temperature physics measurement systems



LTSYS Low Temperature Physics Measurement Systems

attocube systems offers various versions of the two basic systems:

LTSYS-He ultra-stable low temperature physics measurement systems

The basic LTSYS-He4 systems are based on a liquid Helium bath cryostat and optimized for highest stability of your measurements. Options as a variable temperature insert (VTI), a He3 insert, or a dilution refrigerator unit, enable to cover a large temperature range down to the mK regime.Superconducting magnets up to 15 T are compatible with the system. The compatible microscopy inserts range from Confocal Microscopy (CFM) and Scanning Nearfield Optical Microscopy (SNOM) to Atomic Force Microscopy (AFM) and related techniques (Magnetic Force Microscopy (MFM) and Electric Force Microscopy (EFM), as well as Scanning Tunneling Microscopy (STM) for measurements with atomic resolution. Furthermore, probe station modules for cryogenic probing of your NEMS/MEMS samples are available.

LTSYS-Cccryogen-free low temperature physics measurement systems

This cooling system includes a cryogen-free closed-cycle cryostat for applications where liquid Helium is not available or desired. Expensive running costs and security issues can be avoided. An optional Adiabatic De-magnetization Refrigerator (ADR), or dilution refrigerator unit enables ultra-low temperature setups. The automation level allows for ‘set and forget‘ operation for non-expert users. For these systems, a variety of Confocal Microscopy (CFM) inserts, the Atomic Force Microscopy (AFM) insert with MFM and EFM functionality, as well as the probe station inserts are available.


LTSYSLow Temperature Physics Measurement Systems

Configure your Low Temperature Physics Measurement System

Cryostat▪ liquid He bath cryostat with optional VTI, He3, or dilution

refrigerator insert.▪ pulse tube cooler with optional ADR or dilution refrigerator

insert.

Magnets with variable field strengths (e.g. 5, 7, 8, 9, 10, 12 or 15 Tesla). Microscope Inserts▪ Confocal Microscopy (CFM)▪ Atomic Force Microscopy (AFM)▪ Scanning Near-Field Optical Microscopy (SNOM)▪ Scanning Tunneling Microscopy (STM)▪ Cryogenic Probe Station (CPS)

vibration isolation system

superconducting magnet

microscope insert

cryostat

electronic controller

Isolation Systemeach LTSYS is equipped with an accoustic and mechanic dam-ping and vibration isolation system to minimize noise levels enabling atomic resolution imaging.

Electronics▪ Scanning Probe Microscopy Controller (ASC500)▪ Scanning Confocal Microscopy Controller (ASC400)▪ Piezo Motion Controller (ANC350)▪ Piezo Step Controller (ANC150)▪ Piezo Scan Controller (ANC200)▪ Position Readout Controller (ARC200)▪ Laser Detection Module (LDM 600, ...)

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LTSYS-Heultra-stable low temperature physics measurement systems

:.................................................This system is based on a liquid Helium bath cryostat and has been optimized for highest stability. This system enables e.g. ultra high resolution imaging using Scanning Tunneling Microscopy (STM) or long-term investigations of single quantum dots over several weeks. A large variety of microscopy and probing heads cover a broad spectrum of measurement tasks. Superconducting magnets up to 15 T are availa-ble with this system.

Three LTSYS-He systems are available:

LTSYS-He�: Dependent on the pumping sys-tem, temperatures down to 1.5 K can be achie-ved. With an additional heating stage the tem-perature of the sample can be swept up to 70 K. A Variable Temperature Insert (VTI, optional) enables sweeping the temperature between 1.8 and 300 K.

LTSYS-He�: Operating down to 300 mK, this state of the art system features integrated designs for the He3 insert with the high effici-ency He bath cryostat. Reduction of the vapor pressure is achieved by an internal sorption pump (charcoal cooling) optimized for lowest vibrations.

LTSYS-DIL: Operating down to 20 mK, this state of the art system features lowest base temperatures for combination with e.g. the confocal microscopy insert attoCFM II.

The basic system includes the following components:> liquid Helium bath cryostat with a 2“ insert fitting all attocube micros-

cope and probing inserts> vibration and acoustic noise damping system attoDAMP™ enabling high

resolution imaging> high-end SPM controller ASC500 or confocal microscopy controller

ASC400 for intuitive controlling of the microcope modules> Piezo Scan Controller for fine scanning of the sample> Piezo Step Controller for sample coarse positioning> workstation PC with TFT-monitor

Options:> sample heating stage for temperature control from 1.5 to 70 K> Variable Temperature Insert (VTI) for temperature control from 1.8 to 300 K> He3 insert for base temperatures down to 300 mK> superconducting magnets up to 12 T by default (15 T on request)

EXAMPLE APPLICATIONS> ultra high resolution imaging in STM or AFM on semiconductor

structures> solid state physics and quantum dot optics (CFM)> materials science research on ceramics, polymers, additives, alloys, ..> quantitative surface characterization in the sub-micron range

PRODUCT KEY FEATURES> ultra high stability> highest flexibility> base temperature: down to 300 mK with He3 insert,

down to 20 mK with dilution refrigerator insert> compatible with superconducting magnets up to 15 T





Specifications LTSYS-He�. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

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Specifications LTSYS-He�. . . . . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .





Specifications LTSYS-HeDIL. . . . . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .





LTSYS-Cc cryogen-free low temperature physics measurement system

:...............................................This measurement system relies on a pul-se tube based closed cycle cryostat allowing measurements at low temperatures down to 4 K and high magnetic fields up to 9 T (optional) without the need of liquid coolants. Expensive running costs for the purchase, transport, and storage of liquid Helium as well as security trai-ning for users can be avoided. With the optional Adiabatic Demagnetization Refrigerator (ADR) temperatures of < 100 mK can be achieved. The lowest base temperature of 20 mK is now available in combination with the dilution re-frigerator unit. For this system, a variety of SPM inserts as well as the probe station inserts are available covering a large variety of semicon-ductor applications.

Three LTSYS-Cc systems are available:

LTSYS-Cc: Temperatures down to 4 K can be reached with the standard closed-cycle system. Optional, superconducting magnets up to 9 T are available. The inserts are cooled by a con-trolled exchange gas atmosphere.

LTSYS-CcADR: This system allows plug-and-play cryogenic measurements at temperatures as low as 100 mK. The automation level facili-tates an operation for non-expert users.

LTSYS-CcDIL: The lowest base temperature of 20 mK can be achieved with this system.

EXAMPLE APPLICATIONS> Confocal microscopy (CFM)> Atomic Force Microscopy (AFM)> solid state physics and quantum dot optics> materials science research on ceramics, polymers, additives, alloys, ..> semiconductor device characterization

PRODUCT KEY FEATURES> cryogen-free> very easy to use, set and forget operation> base temperature: 4 K, with ADR 100 mK, with dilution

refrigerator 20 mK

The basic system includes the following components:

> closed-cycle cryostat with a 2“ insert fitting attocube microscope and probing inserts

> patented vibration and acoustic noise damping system attoDAMP™ > high-end SPM controller ASC500 or confocal microscopy controller

ASC400 for intuitive controlling of the microcope modules> Piezo Scan Controller for fine scanning of the sample> Piezo Step Controller for sample coarse positioning> laser / detector module for sensing and adjusting> workstation PC with TFT-monitor

Options:

> ADR insert for base temperatures down to 100 mK> dilution refrigerator insert for base temperatures down to 20 mK> superconducting magnets up 9 T





Specifications LTSYS-Cc . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .



� Kelvin Closed-Cycle CoolerCross-Section



Specifications LTSYS-CcADR. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .



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Specifications LTSYS-CcDIL. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .





Confocal Microscopes Scanning Near-Field Optical Microscopes Atomic Force Microscopes Scanning Tunneling Microscope

Probe Station

attoCFM I attoCFM II attoCFM III attoSNOM I attoSNOM II attoSNOM III attoAFM I attoAFM II attoAFM III attoSTM attCPS

LTSYS-He� yes yes yes yes yes yes yes yes yes yes yes

LTSYS-He� no yes yes no on request yes yes no yes yes no

LTSYS-HeDIL no yes on request no no on request on request no on request no no

LTSYS-Cc on request yes yes on request on request on request yes on request on request no yes

LTSYS-CcADR no yes yes no no on request yes no on request no no

LTSYS-CcDIL no yes yes no no on request yes no on request no no

Description low temperature scan-ning confocal micro-scope, highly modular and flexible

low temperature scan-ning confocal micro-scope, highly stable and compact

low temperature scanning confocal mi-croscope, optimized for transmission measure-ments

cantilever based, low temperature scanning near-field optical micro-scope, interferometric sensor

fiber based low tem-perature, scanning near-field optical microscope,interferometric sensor

fiber based, low temperature scanning near-field optical microscope,tuning fork sensor

low temperature atomic force microscope, inter-ferometric sensor

low temperature atomic force microscope, modular and flexible, interferometric sensor

low temperature atomic force microscope, tun-ing fork sensor

low temperature scan-ning tunneling micro-scope, highly compact and stable

cryogenic probe station with four ultra stable nano-manipulation stages

Overview on available microscope and probing inserts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .



Confocal Microscopes Scanning Near-Field Optical Microscopes Atomic Force Microscopes Scanning Tunneling Microscope

Probe Station

attoCFM I attoCFM II attoCFM III attoSNOM I attoSNOM II attoSNOM III attoAFM I attoAFM II attoAFM III attoSTM attCPS

LTSYS-He� yes yes yes yes yes yes yes yes yes yes yes

LTSYS-He� no yes yes no on request yes yes no yes yes no

LTSYS-HeDIL no yes on request no no on request on request no on request no no

LTSYS-Cc on request yes yes on request on request on request yes on request on request no yes

LTSYS-CcADR no yes yes no no on request yes no on request no no

LTSYS-CcDIL no yes yes no no on request yes no on request no no

Description low temperature scan-ning confocal micro-scope, highly modular and flexible

low temperature scan-ning confocal micro-scope, highly stable and compact

low temperature scanning confocal mi-croscope, optimized for transmission measure-ments

cantilever based, low temperature scanning near-field optical micro-scope, interferometric sensor

fiber based low tem-perature, scanning near-field optical microscope,interferometric sensor

fiber based, low temperature scanning near-field optical microscope,tuning fork sensor

low temperature atomic force microscope, inter-ferometric sensor

low temperature atomic force microscope, modular and flexible, interferometric sensor

low temperature atomic force microscope, tun-ing fork sensor

low temperature scan-ning tunneling micro-scope, highly compact and stable

cryogenic probe station with four ultra stable nano-manipulation stages

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Documents

Low Temperature Physics Measurement Systems · Low Temperature Physics Measurement Systems ... or a dilution refrigerator unit, ... > high-end SPM controller ASC500 or confocal microscopy