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Operation Manual Addendum

Periodic Service Information

____________________

Loomis LSD-155 For Laser Cleaving

Proof Document

LII Controls Configuration

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October 1, 2018

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1. Disclaimers

Trained Personnel Only personnel trained in the safe operation or maintenance of the Loomis scribe and break system should be allowed access to the system. Personnel should have a thorough understanding of the various hazards inherent to the system. When performing any maintenance procedure where the potential for electrical shock exists, a second person should be standing by. This second person should be knowledgeable in safety procedures in the event of an emergency.

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1.1 Policies and Procedures

Loomis Industries Policies and Procedures This section describes the policies Loomis Industries, Inc. has implemented regarding warranty, after-sales service; maintenance, operation and decommissioning of Loomis scribe and break equipment. Legal: The terms of the purchase order shall be governed by California law notwithstanding applicable conflict of laws statutes. Any action arising under the Purchase Order shall be determined in the California Superior Court of Napa County or the United States District Court of Northern California. In the event any action is brought for the enforcement of the purchase order or interpretation with respect thereto, the prevailing party shall be entitled to recovery its reasonable attorneys fees and costs in addition to all other relief granted. Warranty and After-Sale Support:

LIMITED WARRANTY: Loomis Industries warrants parts and workmanship of all equipment and tools for a period of 365 days from the date of shipment. Warranty may be exercised only by original buyer of equipment and tools, and may not be transferred to any other party. Loomis Industries reserves the right to elect to repair or replace, as appropriate. Buyer, at its cost, must ship equipment to Loomis Industries factory for warranty claim. NO OTHER WARRANTIES, EITHER EXPRESSED OR IMPLIED, INCLUDING IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE. LOOMIS INDUSTRIES IS NOT RESPONSIBLE FOR CONSEQUENTIAL DAMAGES ARISING FROM BREACH OF WARRANTY OR PURCHASE ORDER TERMS.

Seller will not support equipment with warranty coverage, parts, or consumables to any owner of the equipment other than the original buyer under purchase order. The new owner may request training, machine inspection, and technology transfer from Loomis Industries, Inc. at the owner’s expense.

Third Party Equipment and Consumables: Loomis Industries, Inc. does not support the use of third-party components or consumables. Product Support:

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Product support is available by contacting Loomis Industries, Inc. or calling one of our field service representatives directly. Onsite repairs, telephone and email solutions may not be possible. Extensive repairs must be performed at the Loomis Industries facility. Please view our website at www.loomisinc.com for a current list of telephone numbers and email addresses for Loomis Industries, Inc. and Loomis representatives. Loomis Industries, Inc. home office can be contacted through the following information: Loomis Industries, Inc. 1204 Church Street St. Helena, CA 94574 USA Telephone 707-963-4111 Fax 707-963-3753 Email info@loomisinc.com

Loomis Industries normal business hours are: Monday through Friday, 7:00 a.m. to 3:30 p.m., Pacific Time

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1.2 Product Liability

Product Liability Loomis Industries, Inc. does not have a policy in place to announce product upgrades or retrofits. If Loomis Industries, Inc. discontinues production of LSD-100, LSD-110, LSD-150, or LSD-155; we will continue to support this equipment with parts and service for a period of 7 years. If a product has been discontinued, Loomis Industries, Inc. will not offer software upgrades/updates past the last-current version of the software. This includes updates to make older software work with any new operating system (OS) that may be introduced in the computer industry. Loomis Industries, Inc. does not support the use of materials, consumables, scribe tools, etc. supplied by third-party vendors. Any damage to the Loomis scriber, to the customer’s products, or expenses incurred by the use of third-party products is strictly the responsibility of the user/owner of the equipment. Should a Loomis scriber need to be transported to Loomis Industries, Inc. for repairs, special shipping containers MUST be acquired from Loomis Industries, Inc., AND a Loomis certified technician must pack the equipment. Failure to properly package a Loomis scriber will result in significant damage to the scriber. Any repairs necessary as a result of improper packing of the scriber will be at the owner’s expense. The equipment user must disclose to Loomis Industries, Inc. the types of materials processed on the scriber, and inform Loomis Industries, Inc. of any possible chemical contamination that may be present on the scriber, prior to Loomis Industries, Inc. dispatching a repair technician to repair or pack the scriber. Failure to disclose a hazard, or provide safety equipment to the Loomis technician, may result in the refusal by the Loomis employee to provide the repair or packing service due to health and safety concerns. Loomis Industries, Inc. may refuse service if the equipment has been exposed to hazardous materials (documented), or contains or is coated with an unknown substance, and the decontamination of the equipment cannot be verified. Loomis Industries, Inc. cannot be held liable for any injuries or downtime due to any customer modifications, or the failure of modified or added equipment to the scribe and break machine. It is the responsibility of any “new owner” (whether purchasing the Loomis scriber from auction or from any other source) to obtain training and technology transfer, and have the equipment inspected and certified, at the owner’s expense, prior to

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using the Loomis scribe and break equipment. Failure to do so could result in injury or loss of product from misuse, or from defective equipment. Any repairs made to a Loomis scribe and break machine by persons other than Loomis Industries, Inc. employees, are performed at the risk of the user; even if the repair parts are purchased through Loomis Industries, Inc. Improperly performed repairs could result in personal injury or loss of product.

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1.3 Contacting Loomis Industries, Inc.

In Case of Emergency In the case of an emergency or machine failure, please contact Loomis Industries, Inc. Our contact information is supplied here. Loomis Industries, Inc.

1204 Church Street

St. Helena, CA 94574

USA

Telephone 707-963-4111

Fax 707-963-3753

Info@loomisinc.com

U.S.- West Technical Assistance Jesus Pareja jesusp@loomisinc.com

General Manager Quotations and Sales Diana Bustamante dianab@loomisinc.com

Technical Assistance Jim Cook jimc@loomisinc.com

Europe and United Kingdom Technical Assistance Ken Springall kens@loomisinc.com

China Technical Assistance James Li jamlch@yahoo.com

China, Taiwan, U.S. West Technical Assistance Steve Zwetsloot stevez@loomisinc.com

Billing and Accounts Patty Gonzalez pattyg@loomisinc.com

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1.4 Product Safety

SAFETY & MAINTENANCE This section identifies safety features and procedures that must be followed in order to prevent injury to personnel or damage to equipment. Definitions Warning labels are used to help prevent injury to personnel or damage to equipment. Potential mishaps are identified so that they can be prevented. Observe all warning labels on the system and in the manual. The types of warnings and their meaning are listed below.

DANGER is used to indicate an imminently hazardous situation, which, if not avoided, will result in death or severe injury. This signal word is limited to the most extreme situations.

WARNING is used to indicate a potentially hazardous situation, which, if not avoided, could result in death or severe injury.

CAUTION is used to indicate a potentially hazardous situation, which, if not avoided, could result in moderate or minor injury.

CAUTION without the hazard alert symbol is used to indicate a potentially hazardous situation, which, if not avoided, could result in property damage.

Emergency Off If for any reason it becomes necessary to immediately cut power to the system, press the red EMO button located on the remote switch box (LSD-100 and LSD-110), located on the theta cover on LSD-150/155. This activates a fail-safe EMO circuit dropping power to much of the system, and activating other system safety features. EMO Description

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The EMO circuit used on the Loomis scribing system is a fail-safe circuit that shuts off all electrical power to the servo motors and puts all valves into safe positions when the EMO button on the system is activated. The EMO button is connected to the Main Control Board via the X-axis board. In order to restart the system, the EMO switch must be manually reset, the system hardware must be power cycled, and the software must be restarted.

Loomis Scribing System Hazards Operations and maintenance personnel should be aware of potential hazards associated with the Loomis system so that they can take proper precautions to avoid injury to personnel and damage to equipment. This section identifies the inherent hazards associated with the Loomis scribing systems. Personnel using the Loomis scriber should familiarize themselves with the content of this section. System drawings are included illustrating the location of hazards, safety interlocks, and EMO button. Study these drawings carefully to educate yourself regarding the safety hazards and features of the Loomis system. Personal Safety Equipment Eye protection should be worn at all times when operating or servicing this equipment.

Ergonomics (Seated station) Height of keyboard, trackball, or mouse Minimum 710 mm (28 in.) Maximum 760 mm (30 in.) Vertical leg clearance Minimum 673 mm (26.5 in.) Horizontal leg clearance; depth at knee level Minimum 508 mm (20 in.) Horizontal leg clearance; depth at foot level Minimum 660 mm (26 in.) depth x 254 mm (10 in.) vertical foot clearance Horizontal leg clearance; width Minimum 610 mm (24 in.) Thickness of work surface Maximum 51 mm (2 in.) Work surface edge radius Minimum 6 mm (0.25 in.) radius

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EMO The EMO, or Emergency Stop Button, is located on the LSD-150/155 Theta cover.

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Pinch Points

The Pinch Point labels are located in various places on the scriber, including on the wafer holding, or theta assembly, x-axis cover, and on the y-axis ram assembly.

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The risk of being pinched is minimal; but most likely to occur during the initialization phase of the machine startup. The x-axis stage translates from its load position to its home position during initialization. It is important to keep hands and fingers away from the scriber during the initialization phase. Lockout/Tagout labels The Lockout/Tagout label is located on the back panel of the LSD-150/155.

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This tag indicates the necessity to disconnect the electrical power, and pneumatic supply to the scriber prior to performing most maintenance. These maintenance items include, but are not limited to the following:

• Fuse changing

• Microscope lamp replacement

• Motor module replacement

• Leadscrew maintenance

• Maintenance or repairs inside of the machine covers Some repairs or maintenance items require the machinery to be in the operational state for completion and testing. Please exercise caution when running the machine during maintenance procedures. Maintenance should only be performed by trained and qualified personnel. Personal injury or equipment damage may occur if the machine is operated with the covers removed.

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Chemical Hazards

The Loomis scribe and break systems use NO chemicals that are corrosive or toxic. However, some of the semiconductor products processed on the Loomis scribe and break system, including Gallium Arsenide (GaAs), are known to be carcinogenic, and are considered to be hazardous materials. Eye protection, and particle masks must be worn at all times while operating this equipment. The dicing films (tapes used to hold wafers during the scribe and break operation) may contain fragments of these semiconductor compounds after processing the wafers. The used film should be considered hazardous material, and needs to be disposed of according to local and regional regulations. Local and regional regulations governing disposal of hazardous materials vary. The customer is responsible for knowing and following applicable local, state or provincial and national regulations regarding disposal. Electrical Hazard

The Loomis scriber requires 115 or 240 VAC to operate, and thus contains hazardous electrical energy. No one but a skilled electrical technician, trained on the Loomis scriber, should work on the electrical circuits. High Pressure Hazards Air Pressure The Loomis LSD-150/155 scriber requires 70 to 85 psig (4.8 to 5.9 BAR) of Clean Dry Air (CDA) or Nitrogen gas. This is high-pressure gas, and is dangerous. If a fitting disconnects, the airline could swing about, which could cause severe personnel harm. If a fitting disconnects or there is a loud noise, the EMO should be activated and operators should clear away from the machine until a skilled maintenance engineer can correct the situation. Manually shutting off the CDA or Nitrogen source is advised before further action. A manual lockable valve should be installed at the CDA (or Nitrogen) source. It is the end-user’s responsibility to furnish this device.

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Lockout/Tagout System Procedures

Purpose This procedure establishes the minimum requirements for the lockout or tagout of energy isolating devices. It shall be used to ensure that the machine or equipment are isolated from all potentially hazardous energy, and locked out or tagged out before maintenance personnel perform any servicing or maintenance activities where the unexpected energizing, start-up or release of stored energy could cause injury. Responsibility All maintenance personnel shall be instructed in the safety significance of the lockout (or tagout) procedure. Each new or transferred affected employee and other employees whose work operations are or may be in the area shall be instructed in the purpose and use of the lockout or tagout procedure.

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Sequence of Lockout/Tagout System Procedure 1. Notify all affected employees that a lockout or tagout system is going to be utilized and the reason therefore. Maintenance personnel shall know the type and magnitude of energy that the machine or equipment utilizes and shall understand the hazards thereof. 2. If the machine or equipment is operating, shut it down by the normal stopping procedure (Exit the software, turn OFF the main power switch.) 3. Operate the circuit breaker, valve, or other energy isolating device(s) so that the equipment is isolated from its energy source(s). Stored energy (such as air, gas, steam, or water pressure, etc.) must be dissipated or restrained by methods such as repositioning, blocking, bleeding down, etc. 4. Lockout and tagout the energy isolating devices with assigned individual lock(s) and tag(s). 5. After ensuring that no personnel are exposed, and as a check on having disconnected the energy sources, operate the push button or other normal operating controls to make certain the equipment will not operate.

CAUTION: Return operating control(s) to “neutral” or “off” position after the test.

6. The equipment is now locked out or tagged out. Restoring Machines or Equipment to Normal Production Operations

1. After the servicing and/or maintenance is complete and equipment is ready for normal production operations, check the area around the machines or equipment to ensure that no one is exposed.

2. After all tools have been removed from the machine or equipment, guards have been reinstalled and employees are in the clear, remove all lockout devices. Operate the energy isolating devices to restore energy to the machine or equipment.

Procedure Involving More Than One Person In the preceding steps, if more than one individual is required to lockout or tagout equipment, each shall place his/her own personal lockout device or tagout device on the energy isolating device(s). When an energy isolating device cannot accept multiple locks or tags, a multiple lockout or tagout device (hasp) may be used. Basic Rules for Using Lockout/Tagout System Procedure All equipment shall be locked out to protect against accidental or inadvertent operation when such operation could cause injury to personnel. Do not attempt to operate any switch, valve, or other energy isolating device that is locked out.

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1.5 Warnings

Warning Labels Hazards related to maintenance exist beyond those during normal operating procedure. Carefully follow all instructions for any maintenance activity. When called for in the instructions be sure to follow lockout/tagout procedures to isolate the system from all potential hazardous energy during maintenance. Lockout/tagout instructions immediately follow the hazard warnings below.

The supplied PC and Monitor are powered independently from the Loomis scriber.

If you power down the Loomis scriber, EMO or Turn Off, this will leave power on to the PC.

If you power down the PC, this will leave power to the Loomis scriber.

THE ELECTRICAL POWER TO THE LOOMIS SCRIBER IS TO BE TURNED OFF AND LOCKED OUT WHEN WORKING ON THE MAIN ELECTRONICS BOARD OR SWITCHING POWER SUPPLIES.

1.6 SCOPE

This specification applies to the Loomis LSD-150/155 scribe and break system.

1.7 OBJECTIVES

This document was designed to aid qualified technicians while performing Loomis scriber preventative maintenance. A moderate level of training and experience is required in order to properly utilize and implement the procedures contained in this document.

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1.8 RESPONSIBILITY

It is the customer's responsibility to perform the preventative maintenance procedures as outlined within this document in order to maintain the Loomis Industries, Inc. product warranty.

1.9 APPLICABLE DOCUMENTATION

A. Loomis LSD-150/155/155 Complete Operations Manual. B. Loomis Technical Manual LSD-150/155/155.

1.10 REQUIREMENTS

7.1 The technician/engineer must be familiar with basic Loomis scriber set-up and operation procedures. 7.2 Provide and keep preventative maintenance records in a log.

1.11 SAFETY

The Loomis scriber uses HAZARDOUS VOLTAGE (115/240 VAC) to supply power to switching power supplies. All other circuitry is LOW VOLTAGE (24 VDC). Power should be DISCONNECTED and locked out when any of the protective covers or interlocks have been removed for preventative maintenance or service.

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1.12 Preventative Maintenance

Series Preventative Maintenance Schedule

FREQUENCY

DESCRIPTION

EST. TIME REQUIRED

DAILY

Check tool angle

5 minutes

Check tool mileage report, service scribe tool if necessary

5 minutes

WEEKLY

Check Gas supply (CDA or nitrogen, vacuum)

2 minutes

Wipe Down Entire Machine including Covers, Mechanism Area, etc.

10 minutes

Wipe Down Y-axis air slide.

10 minutes

MONTHLY

Check Y and X-axis leadscrews for signs of wear and need for Replacement. Clean and lubricate as needed with Rheolube 362HF.

1.5 hours

Disposal of Solid Waste As a result of operation, maintenance and servicing of the Loomis scriber, some items become solid waste. Disposal of these items might be regulated; therefore these items need to be disposed of properly. These items include:

• Contaminated wafer holding film

• Swabs used for cleaning

• Lithium batteries from the PC

• Wipe cloths used for maintenance

• Computer monitors containing lead or mercury

Local and regional regulations governing disposal of hazardous materials vary. The customer knows what chemistries are used in the system and is therefore responsible for knowing and following applicable local, state or provincial and national regulations regarding disposal.

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1.13 Decommissioning

Decontamination and Decommissioning Purpose This chapter defines the requirements for handling used equipment or components that have been exposed to hazardous materials. The purpose of these procedures is to minimize or eliminate:

• Potential exposure to hazardous materials by personnel who are required to handle, modify, retrofit, refurbish, or recondition used equipment and parts,

• Potential environmental liability when authorizing receipt of hazardous materials on site,

• The unintentional release of hazardous waste. Terminology

Decontamination is the removal of risks or hazards to human health or the environment that result from the presence of hazardous materials in or on equipment.

Equipment refers to process tools, chemical (liquid or gas) controls and delivery systems, ancillary support systems, structures, piping, ductwork, parts, and subassemblies (e.g., vacuum pumps, pump packages, effluent/exhaust treatment systems), purchased from SVG.

Free liquids are those that can be poured or drained from equipment when the equipment is held in any orientation. Loomis equipment uses NO liquids.

Hazardous material is any chemical, substance, or compound that is defined or interpreted as posing risks or hazards to human health or the environment according to international, federal, state, or local laws or regulations.

Health hazard is defined as a chemical for which there is statistically significant evidence based on at least one study, conducted in accordance with established scientific principles, that acute or chronic health effects may occur in exposed persons. Health hazards include chemicals that are carcinogens, toxic materials, reproductive toxins, irritants, corrosives, sensitizers, hepatotoxins, neurotoxins, agents that act on the hematopoietic system, and agents that damage the lungs, skin eyes or mucous membranes.

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Physical hazard is defined as a chemical for which there is scientifically valid evidence that it is a combustible liquid, compressed gas, cryogenic, explosive, flammable gas, flammable liquid, flammable solid, organic peroxide, oxidizer, pyrophoric, unstable (reactive), or water-reactive material.

Transferor is the party with physical custody of the equipment and responsibility for transfer.

Transferee is the party who will receive physical custody of the equipment.

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Decommissioning If the need to decommission arises, disassemble all parts and dispose of them as scrap or recyclable materials, according to on-site procedures. The largest percentage of material in the system is metal (aluminum). The wiring can be scrapped and the PCBs can be stripped of the copper. The PC and monitor, if unusable, can be recycled. Check local listings for electronics recycling facilities. Scope and Responsibility These procedures describe minimum requirements for documentation of decontamination, and notification of residual hazards associated with decontamination. Their intent is to make certain that decontamination is completed to the utmost extent prior to transport or disposal of the equipment. They further address decontamination steps required to prepare equipment for end-of-life disposal. It is the responsibility of those transferring the equipment to ensure removal or minimization of all hazardous materials prior to transfer, relocation, or disposal. Hazards may exist that are not addressed in the procedures. In some cases, complete chemical decontamination cannot be achieved without destruction of the equipment. The person or persons transferring the equipment should make sure that any remaining potential hazards are clearly identified. It is the responsibility of those transferring the equipment residues, waste materials, and scrap parts generated as part of the decontamination process or end-of-life disposal to do so according to local, state, federal, and international regulations. If you are uncertain about equipment, contact the on-site EHS officer. Applicable Documents

• SEMI S12-0298, Guidelines for Equipment Decontamination Procedures Personnel Safety Only properly trained and equipped personnel should perform assessment and decontamination procedures.

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To ensure compliance with applicable law, all specific procedures utilized to follow these guidelines should be pre-approved by the site Environmental, Health and Safety organization prior to decontamination activities. Use of appropriate personal protective equipment (PPE) should be addressed for each decontamination activity. Equipment Assessment Prior to Decontamination Assessment of equipment should initially consider history of the equipment and visual inspection. If initial assessment shows a potential for equipment to have contacted hazardous materials during the life of the equipment, further assessment needs to be performed. Decontamination analysis should be performed on all areas of equipment that had potentially contacted hazardous materials during the life of the equipment, unless the areas are determined to be non-hazardous by the criteria set forth in this section. These areas include external surfaces, internal areas that are accessible without disassembly, and areas accessible during normal operations. Normally inaccessible areas should be addressed on a case-by-case basis by the site Environmental, Health and Safety organization. Removable parts may also require cleaning. A visible residue on equipment surfaces, including liquids, powders, flakes, or films, may indicate the presence of hazardous materials. All residues should be assumed to be hazardous unless otherwise determined and documented by appropriate test, analysis, or evaluation. Wipe sampling and chemical testing verifying the absence of physical and health hazards is recommended for all equipment that has been exposed to hazardous materials (regardless of the presence of visible residues). Refer to SEMI S12 or consult the on-site EHS person for wipe sampling procedures. If assessment results indicate that the equipment should be decontaminated prior to transfer, see Requirements for Decontamination. If assessment indicates that the equipment requires decontamination but will not or cannot be decontaminated prior to transfer, see Requirements for Equipment Transfers without Complete Decontamination. Requirements for Decontamination Prior to decontamination, the equipment should be evaluated for abnormalities or non-functionality that may affect the evaluation and decontamination efforts.

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Equipment should be decontaminated before movement. If movement of the equipment is required prior to decontamination, precautions should be taken to remove all potential sources of leakage, spillage, off-gassing or hazardous material emissions through draining, purging and then use appropriate barriers, covers or containment devices. All applicable lockout/tagout procedures must be followed. Equipment parts that are routinely removed from the equipment for cleaning, should be cleaned prior to equipment transfer. Parts that are removed but not replaced should be disposed of per local regulations. All gas lines on the equipment should be appropriately purged, and secured with blanking plugs, caps or similar devices designed to remain in the equipment during handling and transport. Thorough decontamination may not be achieved within component systems or equipment due to inaccessibility (i.e. "dead zone") or to physical characteristics of materials. Equipment with such zones require additional cycle purges and/or disassembly for access and proper cleaning. If complete decontamination cannot be achieved, follow Requirements for Equipment Transfers without Complete Decontamination. Requirements for Equipment Transfers without Complete Decontamination In some cases complete decontamination cannot or will not be desired or achieved for various reasons (e.g. pumps). This section establishes guidelines for the transfer of equipment intended for further productive use, which cannot or will not be completely decontaminated prior to transfer.

• If the contaminated equipment is a sub-component or subassembly of a larger piece of equipment which will not be otherwise decontaminated, the contaminated sub-assembly or component should be removed and transferred separately as specified above.

• Prior to transfer, the transferor must ensure that any remaining potential hazards are clearly identified to persons handling, transporting, and receiving the equipment.

• Obtain prior approval from intended transferee before shipping the equipment.

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• Transportation and transfer of contaminated equipment is the same as transportation of hazardous materials and the process must meet all applicable local, state, national, and international regulations and organization policies.

1.14 Necessary Tools

Necessary Tools Normal Operation The tools necessary to operate the Loomis LSD-150/155 include the following:

Part Number Description

2900-0002, -0005, -0008, -0014 Scribe tool Angle Templates

7050-00?? (by application) Scribe tools

5400-0008 Hex-wrench set, Standard American

Plastic Shim Stock

2500-0661-xxx Break Wheel

2500-0776-x° (short), -0919-x° (short) Support Mandrel

Optional tools that may be necessary for non-normal maintenance include: Digital Multimeter Air pressure gauge Hex-wrench set, Standard American Hex-wrench set, Metric Screw drivers, Standard and Philips Small adjustable wrench Dial indicator Indicator stand Lab-grade granite surface plate Vernier calipers Swabs Cleaning cloth Loomis Industries, Inc. does not supply these tools.

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1.15 Machine Specifications and Service Requirements

LSD-150/155 Specifications and Service Requirements

LSD

Dimensions (h,w,d) (28.0, 39.0, 27.0) in (71.1, 99.0, 68.6) cm

Weight 147.0 lbs 68.2 kg

Controller (specifications may vary) Included With System

Dimensions (h,w,d) (16.5, 7.5, 17.0) in (41.9, 19.1, 43.2,) cm

Weight 30.1 lbs 13.7 kg

Monitor (specifications may vary) Included With System

Dimensions (h,w,d) (17.5, 15.2, 3.5) in (44.5, 38.6, 8.9) cm

Weight 8.5 lbs 3.9 kg

Ergonomics

Seated station Height of keyboard, trackball, or mouse Minimum 710 mm (28 in.) Maximum 760 mm (30 in.) Vertical leg clearance Minimum 673 mm (26.5 in.) Horizontal leg clearance; depth at knee level Minimum 508 mm (20 in.) Horizontal leg clearance; depth at foot level Minimum 660 mm (26 in.) depth x 254 mm (10 in.) vertical foot clearance Horizontal leg clearance; width Minimum 610 mm (24 in.)

Thickness of work surface Maximum 51 mm (2 in.) Work surface edge radius Minimum 6 mm (0.25 in.) radius

Electrical Specifications

Power Requirements 100-240 V, 50/60 Hz

Power Consumption AIC Breaker Requirement

0.67 Amp 10,000 Amp

Pneumatic Specifications

Pressure Requirements 65 to 85 psi 448 to 586 kPa

Vacuum Requirements N/A for normal configuration 25 in Hg (for vacuum plate option)

-84 kPa

Ratings: Inputs and Outputs

Operating Temperature Range Altitude to 2000m, 5 - 40°C

Max and Min humidity at temp. 80% to 31°C, decreasing to 50% at 40°C

Input voltage variance +/- 10% of nominal

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1.16 Consumables List

Consumables List for Loomis Scribe Equipment The following tables contain lists of consumables that are frequently used on Loomis scribe and break equipment. These lists change over time, and may no longer be complete. Also, prices change without notice. Therefore, there are no prices listed with the parts in the tables.

7050-00xx Scribe Tools, by application, please call or email for assistance

Dicing film, customers generally order direct from manufacturer

2500-0722 GRIP RINGS GRP2620-4 YELLOW & GREEN

2500-0827 GRIP RINGS GRP2620-5 BLACK AND WHITE

2500-1006 GRIP RINGS GRP2620-6 BLACK AND WHITE

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2. Overview

This manual provides information for equipment maintenance personnel, covering basic cleaning and lubrication procedures. Some items on the LSD-155 move so little, or so infrequently, that regularly scheduled lubrication is not necessary. These items are: Microscope Lift Assembly (focus mechanism) Toolholder lateral adjust mechanism Toolholder shaft Protractor Pivots The Theta Bearing is not considered user-serviceable, since to properly lubricate the bearing, the theta table must be removed from the scriber and serviced upside down. BEST PRACTICE for lubrication points that are over the wafer: Perform the lubrications at the end of a workday. Place protective cloths or wipes over the theta table. Perform the lubrications and let the machine sit overnight. Look for signs of drips on the cloth or wipe. Look above any drip positions and clean away excess oil.

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3. Cleaning and Inspection Points Machine exterior

• Wipe covers down with IPA and lint-free cleanroom cloth

• Clean and inspect the mandrel and mandrel holder with IPA and lint-free cleanroom cloth

• Check electrical and pneumatic connections

• Inspect computer cables and routing X-Axis

• Wipe covers down with IPA and lint-free cleanroom cloth

• Remove X-Axis covers

• Wipe rails with IPA

• Inspect rails for signs of air pad drag and magnet drag

• Inspect and clean under the X-Axis slide assembly Y-Axis

• Wipe cover down with IPA and lint-free cleanroom cloth

• Remove Y-Axis cover

• Wipe rails with IPA

• Inspect rails for signs of air pad drag and magnet drag Tool Holder

• Tool Height adjustment micrometer o Inspect the micrometer tip o Clean with IPA o Check protractor signal (loss of signal can be from dirty micrometer

tip) o Verify diamond angle per customer specification o Check diamond scribe distance, change point or replace diamond if

indicated by distance meter o Verify diamond and protractor movements

Breakwheel Assembly

• Feel bearing movement for roughness or play

• Lubricate per instructions

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Theta Assembly

• Wipe cover with IPA

• Remove cover

• Check tension of theta endless belt, adjust if needed (usually does not need)

• The theta belt is considered a normal wear item. Average service life is ~5 years. Replace if the belt is near this age.

Machine Interior

• Power OFF the scriber

• Disconnect the power cord

• Check screw connections on all electrical connectors on following circuit boards:

o Main Circuit Board o Y-Axis Circuit Board o Theta Circuit Board

• Inspect Flat Cables

• Inspect pressure tubing o 1/8 inch o ¼ inch

Mandrel Note: the mandrel is very sharp, and very expensive. Use care when handling.

• Wipe the mandrel with a soft cleanroom cloth and IPA

• The mandrel can be removed, and all surfaced can be cleaned o Note the mandrel orientation before removal o The mandrel edges are very sharp, and care must be taken to

ensure the safety of the person performing this service, and to preserve the integrity of the mandrel edges

▪ A damaged mandrel edge can severely impact the quality of the diced or cleaved products.

• Replace the mandrel in the same orientation as is was before removal

• Center the mandrel front-to-back Mandrel Position The mandrel position: height, level, or yaw, should only be adjusted by someone trained by Loomis Industries, and who has the proper tools to complete the job. This positioning is crucial for the success of a process. If the mandrel alignment is not successful, the process could be compromised. Mechanical adjustments of the mandrel are beyond the scope of this document.

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4. Lubrication Procedures

Items Required

• Ball Screw Grease o Rheolube 362HF or 462 (silicone-free, high pressure)

• Oil o NyOil II Synthetic Oil

Regular Lubrication Points:

• X-Axis leadscrew (ball screw grease)

• Y-Axis leadscrew (ball screw grease)

• Shuttle Slide (early systems only) (oil)

• Break Mechanism linear slide (oil) Lubrication Points that should only be serviced by trained personnel.

• Mandrel Lift Assembly (grease)

• Microscope Lift Assembly (focus mechanism), generally requires NO maintenance

• Theta Bearing, generally requires NO maintenance

• Toolholder o Lateral Adjust linear slide (oil) o Protractor Pivots (oil) o Tool shaft (oil)

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Procedures X-Axis Leadscrew

• Remove Ring Adapter

• Remove X-Axis cover

• Remove Mandrel and Saddle, both items are held magnetically, not tools are required for removal.

This exposes the X leadscrew as shown below.

Remove the Y-Axis cover.

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• Turn on the machine power.

• Launch LSD-155 software. The motion controls will be used to rotate the X and Y leadscrews, and to turn on and off air valves to cycle the shuttle, mandrel and breakwheel mechanisms.

• Click Load Wafer, even though there is no wafer on the scriber.

• The LSD-155 will remind you that no wafer is present, click Continue, and Continue again.

• Use the software controls to move the X stage all the way to the left.

• Use a dust-free cloth to wipe the old grease off the leadscrew as you move the X stage to the right via the software controls.

• Move the stage a small distance right while wiping the screw thread clean. Stop and change to a clean area of the cloth, then continue.

• Be careful while changing position with the cloth to not get any of the grease on the silver slide frame surfaces.

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• If you do get grease on the slide frame, clean the surface with isopropanol to completely remove all grease residue. Failure to clean off the grease could result in clogging the air bearing(s), which can cause very expensive damage to the system.

• Move the X stage to the left again and repeat this process until the cloth comes away from the lead screw fairly clean. It does not have to be perfectly clean.

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• Again, move the X stage all the way left.

• Place a small amount of ballscrew grease on a sponge swab or your gloved finger.

• Apply the grease to the screw thread while rotating the screw to the right via the software controls. Move about 25mm, then put more grease on the swab or finger. Continue applying grease until the used length of the leadscrew is coated with a thin layer of grease.

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• Once the grease is applied, as shown above, traverse the X slide left and right to its limits a few times.

As seen above, the grease will be evenly distributed in the area of the thread used by the axis. The unused part of the thread will still have an area of undistributed grease. The unused grease should be wiped off the thread.

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• Check for build-up of excessive grease at the leadscrew nut, shown in the photograph below.

• If there is a build-up, wipe the excess grease away with a sponge swab. Do not rotate the screw while wiping away grease in this area. The swab could get pulled into the nut, which could ruin the screw.

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Y-Axis Leadscrew The Y axis is serviced similarly to the X. The Y screw can be accessed from either the front, under the slide, or from the rear when the Y slide is all the way to the front.

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Shuttle The shuttle has a crossed-roller slide that needs periodic lubrication, even if it is not used as part of the normal processes on the LSD-155. The shuttle movement is slow and delicate. To achieve this movement, the shuttle is operated by low-pressure air. The shuttle bearing is lubricated with a small amount of oil instead of grease, as grease is too thick for this kind of movement. CAUTION: Over oiling of the shuttle bearing can cause excess oil to drip on the wafer holding area. Do not apply oil directly from a container into the bearings. Instead apply a small drop of oil to a sharp probe, then apply the drop to the bearing. See directions below.

• Remove, or unscrew the shuttle micrometer.

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• Use the Control Pack software, or button #1 on the system valve board to actuate the Shuttle air valve.

With the micrometer removed, or adjusted as shown in the preceding photos, the shuttle will be pushed to its maximum forward position, exposing the linear slide bearings enough to allow lubrication of the bearings.

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• Use a sharp plastic probe (clean zip cable tie shown) to place one small drop of oil in the v-groove of each bearing.

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• Cycle the shuttle several times to distribute the oil.

• Replace, or readjust the micrometer to its original position. Break Mechanism Similar to the shuttle mechanism, the break assembly has parallel crossed roller bearings.

• Use the Control Pack software or button #6 to actuate the break valve.

The breaker will move into break position, exposing the bearings, as shown below.

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• Using the same technique as lubricating the shuttle slide, apply one small drop of oil in the groove on both sides of the linear bearing’s center rail.

• As described in Best Practices, drape a wipe or cloth under the break mechanism (over the theta table).

• Actuate the valve several times to distribute the oil.

• Let the system sit so that any excess oil can settle to the bottom of the bearings.

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• Use a swab to clean away any excess oil from the bottom of the bearings.

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Other Lubrication Points There are several other lubrication points on the LSD-155 that should be serviced only by trained Loomis personnel, and will not be covered in this document. These points include: Microscope lift assembly Mandrel lift Theta bearing Tool holder mechanisms Please do not attempt self-service of these items.

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Theta Belt Adjustment The theta turntable is actuated by an endless steel belt. The belt is flat, and is simply a friction drive mechanism. The friction of the belt, pulled slightly tight against the circular/bearing mechanism, allows the belt to rotate the theta ring when the belt is driven by the theta motor. If the belt is too loose, the friction will not be enough for accurate rotation of the theta ring. If the belt is too tight the belt could break. Proper tension is achieved by adjusting a pully and checking the deflection of the belt.

Loomis uses a Wagner Force Dial FDK 32 and a steel ruler to perform this measurement.

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Belt

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• Adjust the tension by loosening the two locking screws on the pully mount, and the locknut (outer nut) on the tensioner block.

• Tension is increased by tightening the inner nut (against the block). This action pulls the pully assembly against the belt, increasing the tension.

• When the proper tension is set, tighten the lock screws, then tighten the locknut.

• Re-check the tension.

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Tool (diamond) Change and Angle Adjustment The angle of the Scribe Tool determines the corner of the faceted scribe point that contacts the wafer. Different combinations of Scribe Tool models and wafer material require different angles (refer to the “Scribe Tool - Material Chart” for details). The height and angle of the Scribe Tool are adjusted independently but are coupled. That is, changing the height also changes the scribe angle and vice versa, but only very slightly. The diamond scribe tools wear out (become dull) with normal use. Different substrates will wear the diamond at a different rate. For example: silicon will wear the diamond faster than Gallium Arsenide or Indium Phosphide.

The LSD-155 has a tool meter that registers the approximate distance scribed on the diamond point during the automatic processing of a wafer. This meter is located in the box on the left side of the display screen.

When the tool meter has reached the set limit, defined in the Recipe tab, the meter background will turn red, and the machine will stop. The dialog box will instruct the operator to change the scribe tool. To change the scribe tool, click the CHANGE TOOL button on the right side of the screen. The software is configured by default to automatically go to the tool change position when the odometer reaches a predetermined distance.

When CHANGE TOOL is clicked, the LSD-155 will move the wafer and scribe tool to a “safe position”. This safe position is at the extreme right side of the

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wafer, and about 1 inch (25mm) back from the front y-axis travel limit. This position places the scribe tool over the film where there is no wafer underneath the scribe tool holder. This allows tool change without the danger of dropping the scribe tool on the wafer. This position also allows test scribing and breakwheel alignment to be performed without endangering the wafer.

A new screen is presented to the operator, with buttons that will allow the operator to lower and raise the scribe tool and breakwheel, make test scribe marks, breaks, move the onscreen reticle, etc.

To install a scribe tool:

• Partially insert the Scribe Tool (point facing down) into Scribe Tool Holder (“Windmill”). In most cases, the Scribe Tool can be positioned so that a “T” is visible from the front or from the side. The “T” should not be engaged with the Windmill.

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• Push the scribe tool into place with the cross member engaging the 45° faces of the toolholder. The magnets will pull the cross member of the scribe tool securing it in place.

It is very common, and recommended, that a mark be placed on the T-bar to indicate the first position of the diamond tool.

The theme is that a 4-pointed diamond starts its job (mark) at 9 o’clock, and works its way through and finishes at 6 o’clock.

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Adjust Scribe Tool Height

The tool height is to be adjusted so that the bottom resting position is slightly below the surface of the wafer. The Change Tool button on the main software screen will move the tool to the correct position for this procedure.

• First place a piece of plastic shim onto the wafer holding film that is the same thickness as the material to be scribed. This should go under the current tool position.

• Press the Tool Down button. This will drop the tool, including the protractor, into scribing position. The height adjust micrometer is located directly behind the tool holder housing. The objective is to find the height where the tool is just barely touching the shim so that a slight turn in either direction will change the status.

• It is recommended to turn the knob an additional ¼ turn (25 microns), or more, counter-clockwise to drop the tool height slightly. This helps ensure that the diamond is low enough to scribe the wafer, even if the wafer has a low spot or is warped.

Hint: Some customers, even if they do not use the peck function for processing the wafer, use the peck length to set the diamond height, as the height setting determines the peck length. This method ensures uniform height.

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Adjust Scribe Tool Angle The tool angle is determined by the sector position in the protractor. Sometimes different materials require different diamond tools, and different tool angles. This procedure needs to be performed if a different tool angle is required, and it should be checked on a regular basis. This procedure requires a 3/32” hex (Allen) wrench, a shim the same thickness as the scribed material, and an angle gauge for the required angle. An angle gauge is a strip of material with one side shaped to the correct angle for the tool. Loomis provides angle gauges for different angles. These gauges have the angle stamped on the side.

Steps:

• Click the Change Tool button

• Check Tool Height and adjust if necessary with the previous procedure

• Drop the scribe tool with the Tool Down button

• Loosen sector lock screw approximately ½ turn

• Rotate the sector until tool is aligned with the angle gauge, see diagram on the next page

• Tighten the sector lock screw

• Check tool height again

• Click the Tool Up button

• Perform test pecks or scribes to check and adjust the diamond’s lateral position.

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Aligning tool with angle gauge:

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Software Calibrations Most software calibrations don’t change unless hardware also changes. For example: If a new electronic pressure regulator for scribe or break is replaced, the software must be calibrated to the new regulator’s output at a given input voltage. Or, if a leadscrew is replaced, the home position and the center of rotation must be calibrated to the new leadscrew. Full calibrations for X, Y, Focus, and Theta Any time a leadscrew is replaced, or disconnected for maintenance, or a limit switch is replaced, a full initialization must be performed to calculate and record the Home and Maximum positions of each axis. The Theta full initialization also calculates the number of encoder counts in the full circle and therefore the average encoder counts per degree of rotation. These calibrations are performed in the Control Pak software, DiagForm window. Best practice is to exit out of the GUI, using Control-Alt-Delete method; or, everything can shut down, then the ControlPak launched as a stand-alone application. The following steps are the same for each axis.

• Make the DiagForm the active window.

• Click on the tab for the axis you need to initialize.

• If the Motor Power button is not bold, indicating that the power is ON, click the button to turn on the power.

• Click the Initialize Full button.

• After the axis has initialized, click the Apply button, then the Config Save button. This save and writes the new information to the motor configuration file.

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Pressure regulators The Control Pak software must be calibrated to accurately use the electronic pressure regulators used for the scribe tool and Breakwheel pressures. The calibration routine is performed by the Control Pak by sending input signals to the regulators, then reading the output pressure (voltage) from the onboard pressure sensor for that regulator. A table of measured values is built, and a best-fit line is calculated through the points. This line is used by the software to calculate the output voltage for the pressure requested by the operator or recipe. At all times, the pressure shown on the GUI is requested pressure, not measured pressure. Measured pressure can be viewed by pressing the large blue button on the main circuit board. Each press of the button will change to a different input: Main, Tool, Break, Aux 1, and Aux 2. Calibration

• Verify that the LSD-155 is switched ON

• Open the Control Pak software as a stand-alone application

• Place a ring on the scriber, with dicing film but NO wafer. The film is there to protect the diamond, Breakwheel, and mandrel/anvil.

o The calibration can be performed with or without a diamond in the toolholder, with or without a Breakwheel installed.

o The valves will cycle for each measurement of the scribe tool or breakwheel, as the pressures are measured in the “tool down” condition, air flowing through the valves, applying pressure on the actuators.

• Click on the LSD-160 VRIC window, which controls and monitors the various Inputs and Outputs of the system.

• Click the Advanced button, located on the right side of the VRIC window o A new window will open, called the Pneumatics Calibration Form

• For both regulators there is a button to Calibrate.

• Click-hold the desired button for 2 seconds to start the calibration routine. o Do NOT check the box next to Use Scribe Tool Force Table.

• Once the calibration routine is finished, click the button labeled Apply & Save Settings.

o This saves the calibration data to a file called LSD160AirCalibration.cfg located in the LSD155_MachineSettings folder.

Once the data is saved, the Control Pak can be closed.

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Center of Rotation The center of rotation is a set of coordinates, the X and Y positions that place the microscope center-of-view directly over the CenterPoint of the theta circle. It is NOT the halfway point between the home position and far limit on either axis. This position is critical for accurate theta calculations. The center of rotation must be calibrated whenever a leadscrew is changed, a motor is changed, a limit switch is replaced, a ring adapter is changed, or the theta plate is repositioned. In some situations the change in position is very small, in some cases it is large enough to cause problems for theta alignment, especially on laser bar arrays. The center of rotation is found visually by first using the Center and Ctr buttons found on the X and Y stage controls on the GUI. These buttons will position the microscope over the last-known center of rotation x,y coordinates. Method

• You must have Maintenance Level access to the LSD-155 GUI

• Load a wafer on the scriber, focus the microscope on the wafer

• Click the Vision Config button, upper left corner of the GUI o If the reticle intersection is close to the center of the video screen,

this is good enough. ▪ If the reticles are offset for some reason, turn ON the Master

Reference by clicking the Master Reference button near the upper right of the video screen. The Master Ref. will be displayed as a X in the middle of the video screen. Use the Master Reference instead of the reticle intersection for the calibration.

• Click Center on the x-axis controls

• Click Ctr on the y-axis controls

• While watching the video screen, right-click (alt-click) one of the manual theta control buttons, green circular arrows near the upper right corner of the live video screen

o Right-clicking these arrows will rotate the theta stage 90 degrees in the direction of the arrow clicked.

o In some configurations the mandrel will drop before the stage rotates, then lift again after the rotation.

• As the wafer rotates 90 degrees, watch for the point on the video screen that is pivoting, as close as possible, around a single point (the mechanical element is not a perfect circle).

o The pivot/single point should be in the center of the video screen. ▪ If the pivot is in the center, nothing needs to be done.

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o If the pivot is NOT centered, use the X or Y controls to move the pivot to the center of the video screen.

o Right-click the other theta control arrow to rotate back 90 degrees, again watching the screen.

o Make adjustments and re-check as necessary until the pivot is at the center of the video screen.

• To save this position, click the Back button in the upper left corner of the GUI.

• Click the Systems Manager button

• Click Setup Menus

• Click Calibrate

• Click Center Position

• Click Set Current Position

• Once set, Back out of the Systems Manager, the calibration is now complete.

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Leadscrew (X or Y) LSD-155 X-Axis Leadscrew Calibration Because of manufacturing tolerances of the leadscrews, the thread pitch may not be exactly the same between screws. Sometimes calibration is required to achieve maximum indexing performance. This calibration would be especially important to those customers who do not use pattern recognition on some products. This same calibration routine would also work on the Y axis. Calibration requires measuring the indexing error across a large distance. One large step/Index is preferred, as this reduces the potential accumulation of errors from tape drag during multiple index starts and stops. Once an index is set and used, and the error is measured, the Motor Counts Per Unit variable can be adjusted, which will calibrate and remove the overall screw pitch error. This variable is found at the top of the X-Axis tab in the ControlPak software, DiagForm page. The default value for X-Axis Mcnts/PUnit is 3333.33333. This the theoretical number of encoder counts per millimeter when using a 3mm leadscrew, when used with the 10,000 count encoder found on the TruTech motor (10,000/3mm).

Note A: If using a 1mm leadscrew with the TruTech motor, the default value will be 10,000 (10,000/1mm).

Note B: If calibrating an older Bearing Engineer motor, where the encoder count is 6,000 per revolution:

The default value with a 1mm screw is 6,000 Mcnts/PUnit (6,000/1mm). If using a 3mm leadscrew it would be 2,000 Mcnts/PUnit (6,000/3mm).

Recommended Method There are a couple of different ways to achieve the same result, but the following seems easiest. Using a theta-aligned reference wafer, Loomis test wafer or customer’s wafer, determine an index value that will move X most of the way across the entire wafer. It is best to NOT go all the way across, as this might land the X axis too

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near the limit switches. The following example was performed using a Loomis test wafer in the non-field direction. Write this large index value on a piece of paper. A Loomis test wafer can be used at 88.9mm (140 x 0.635mm) on the non-field axis. A customer wafer may also be used as long as the index value is known to be correct. Align the wafer so the reticle is on a street edge near one side of the wafer. Use the high magnification option for the Main Viewer, and the micro-indexing buttons for fine adjustment. Index across the wafer. Again, this should be in 1 single large step. Ideally, the wafer should land with the same edge or feature aligned to the reticle. Determine if the Index was too long or too short. Measure the error using the right-click-drag method to measure from the reticle to the edge (or feature). Write this value down, example 0.019mm (19 microns) short.

• If the index was too long, add the measured number to the index value in

a calculator, or write it down and add them together. This is the Distance

Traveled.

• If the index was too short, subtract the measured error from the index

value, write it down. This is the Distance Traveled. In this example 88.9 –

0.019 = 88.881

Divide the Index Value by the Distance Traveled to calculate the Correction Factor.

• If the index was short, the result will be greater than 1. Example

88.9/88.881 = 1.0002138

• If the index was long, the result will be less than 1.

Multiply the current (default in this case) Mcnts/PUnit value by the Correction Factor. Example 3333.33333 x 1.0002138 = 3334.045996 Enter this value into the Mcnts/PUnit field for the X-Axis and click the Apply button. Go back to the GUI and re-test the large index. It should land as expected, right on target.

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Adjust the index value to the normal street-to-street index and test. If the indexing is correct, go back the DiagForm and click Config Save, near the lower right corner of the window. Recap of the example: Example Procedure, using a Loomis test wafer, non-field direction.

1. Set the X Index value in the recipe to 88.9mm (140x 0.635mm)

2. Align theta to reduce any sine error.

3. Set Main Viewer option to “Close 2x Zoom”.

4. Carefully align to street edge near one edge of that wafer.

5. Index once, 88.9mm.

6. Carefully measure the error. Measure 2 or 3 times looking for a repeating

value.

7. For this example, the index landed short. Measured value 19 microns.

8. Subtract 0.019 from 88.9. Result is 88.881mm. This is the distance

traveled when the system was instructed to travel 88.9mm.

9. Divide the Index Value by the true Distance Traveled: 88.9/88.881 =

1.0002138

10. Multiply the current (or default) Mcnts/PUnit value by the Correction

Factor: 3333.33333 x 1.0002138 = 3334.045996

11. Enter 3334.045996 in the Mcnts/PUnit field and click Apply.

In this example, the slightly larger number will cause the x axis motor to rotate more counts per instructed unit, correcting for the thread pitch error in the screw. There is NO NEED to reinitialize the axis after changing this value. Each axis is initialized using true motor counts, then the counts are converted into millimeters using the Mcnts/PUnit that was just changed. The number of motor counts between the limits has not changed. Center of rotation does need recalibration. This value is in millimeters. Since there is now a slight difference in the number of counts per mm, the center will be slightly off.