Linear Gage NewProducts - Mitutoyo · ABS AT300 High Accuracy, High Speed H-14 ABS AT500-S/H High Accuracy, Robust Type H-14 ABS AT1100 Coolant/Dust-proof Type H-15 ABS AT715 Slim

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Linear GageNewProducts

Assembly Type Scale Unit for Absolute SystemsABS AT1100 seriesRefer to page H-15 for details.

Separate Type Scale Unit for Absolute SystemsABS ST1300 seriesRefer to page H-22 for details.

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Digimatic Scale UnitsLinear ScalesH

INDEXABSOLUTE Digimatic Scale UnitsSD Horizontal and Vertical H-3

Linear ScalesLinear Scale System Diagram H-7AT103 Standard Spar Type H-8AT113 Slim Spar Type H-9AT112-F Super Slim Spar Type H-10AT402E General Purpose Type H-11AT203 Standard, 6 m max H-12AT211-A, AT211-B Slim Spar, High Speed H-13ABS AT300 High Accuracy, High Speed H-14ABS AT500-S/H High Accuracy, Robust Type H-14ABS AT1100 Coolant/Dust-proof Type H-15ABS AT715 Slim Spar Type H-16Counter (KA-200, KLD-200) H-17ST36 High Accuracy/Resolution Type H-19ST46-EZA Compact, Glass/Metal-tape Types H-20ABS ST700 Contamination Resistant, 6 m max H-21ABS ST1300 Ultra-high Resolution, 12 m max H-22PSU-200/251/252 Interpolation Units H-23

2D Image Correlation EncoderMICSYS-SA1 Short Range, High Accuracy/Resolution H-24Quick Guide to Precision Measuring Instruments H-25

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Digimatic Scale Units/Linear Scales

2D Image Correlation Encoder

ABSOLUTE Digimatic Scale Units

Linear Scales

MICSYS-SA1

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ABSOLUTE Digimatic Scale UnitsDesigned to accurately capture positional coordinates along an axis

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.

SD ABSOLUTE Digimatic Scale UnitsSERIES 572

Applications

Machine table position Drilling machine stroke position Focus setting on optical instruments

•SD series facilitates mounting on jigs, tools, and small machine tools to enable accurate positioning.

•Built-inabsolutescaleincludingtheABSpoint does not require a zero-set every time the power is turned on.

In addition, reliability has improved thanks to elimination of overspeed errors.

•Horizontalorverticaldisplayaccordingto the scale mounting direction.

•Thedustresistanceandtheenvironmentalresistance of the display has improved. The SD-G series offers dust/water protection level IP66.

•Longbatterylifeforeasiermaintenance.•EC counters are available as external

display units.•Equippedwithanoutputportto

transfer measurement data, allowing implementation in control systems and gaging systems.

Functions•ABS (Absolute) measurement function•INC (Incremental) measurement function•Zero-settingfunction•Presettingfunction(2presetvaluescanbeset.Not

available for SD-G, SD-AX, SD-D, SDV-D)•Doublereadingfunction(AvailableonlyforSD-F or

SDV-F)•Directionswitchfunction (Available only for SD-E, SDV-E)•Holdfunction*•Measurementvaluecompositionerroralarm•Lowbatteryalarm•Outputfunction*ToactivatetheholdfunctionwhenusingSD-AX, SD-D

or SDV-D models, an optional hold unit is required. Simultaneous activation with the output function is not available.

SD-G models are also available to special order.- These units use 1.5V silver oxide cells for the power

supply. Therefore, when the units are directly fixed to the frame of a machine tool that requires a high voltage, malfunctions such as display digit fluctuations and errors may occur. Countermeasure examples are described in the user manuals provided.

Please contact Mitutoyo for special applications.

Detector head mechanism

Special applications

RefertotheABSOLUTEDIGIMATICSCALEUNITSCatalog(No.E4316)formoredetails.

Horizontal single-function type572-202-30 SD-20AX

Horizontal single-function type (Water-proof type)572-602 SD-20G

Horizontal multi-function type572-461 SD-15E

Vertical multi-function type572-561 SDV-15E

Vertical single-function type572-303-10 SDV-30D

As a measurement jig for outdoor use (SD-G)

(Refer to page H-26 for details.)

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[Scale units] [Display units]

System Diagram

Single-function type with high dust/water resistance

Single-function type

Multi-function type

Multi-function type

SD-AX (Horizontal)

SDV-D (Vertical)

SD-G (Horizontal) EC Counter*3

SD-E (Horizontal)

SDV-E (Vertical)

SD-F (Horizontal)

SDV-F (Vertical)

Digimatic mini-processorDP-1VA LOGGER264-505

MultiplexerMUX-10F264-002

Input Tool (USB keyboard signal conversion model)

IT-016U264-016-10

Tolerance judgment output*1

RS-232C output

USB keyboard signal conversion

* Connection to an RS-232C conversion type (IT-007R) input tool is also available.

Connecting cable with the water-proof type output switch*2 1 m : 05CZA624 2 m : 05CZA625

Connecting cable with the output switch 1 m : 959149 2 m : 959150

Connecting cable with the output switch

Connecting cable 1 m : 936937 2 m : 965014

1 m : 905338 2 m : 905409 1 m : 905689 2 m : 905690

1 m : 905691 2 m : 905692 1 m : 905693 2 m : 905694

Refer to page G-15 for details.

Palm-sized printer for printing and statistical analysis

* SD-30D for the measuring range of 300 mm.

Interface unit for the RS-232C conversion and output RS-232C output

USB Interface unit that converts and transfers data into spreadsheets

*2

*3

*3

*3

Measurement Data Wireless Communication SystemU-WAVE USB keyboard

signal conversionThe data output from the SD series can be sent to the computer by wireless communication without using the EC counter. Refer to pages A-17 to A-19 for details.

*1:Selectthetolerancejudgmentoutputordigimaticoutputwhensettingtheparameters.*2:Connectingcablewiththewater-prooftypeoutputswitchcanbeusedonlyforSD-GorWater-proofDigitalCaliper

equipped with the external output function.*3:ConnectingofSDseriesandDP-1VALOGGER/MUX-10F/IT-016UisalsoavailablewithoutpassingthroughtheECcounter.

In this case, connect these units and SD series with the cables used for connection with the EC counter.

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ABSOLUTE Digimatic Scale UnitsDesigned to accurately capture positional coordinates along an axis


ABSOLUTE Digimatic Scale UnitsSERIES 572

SPECIFICATIONSType Unit spec. OrderNo. Model Range Resolution Accuracy Repeatability Battery life

Horizontal single-function type (Water-proof type)

Metric572-600 SD-10G 0-100 mm

0.01 mm 0.03 mm

0.01 mm

Approx. 13000 hours

572-601 SD-15G 0-150 mm572-602 SD-20G 0-200 mm

Metric/ Inch572-613 SD-4" /10G 0-100 mm / 0-4 in

0.0005 in /0.01 mm 0.03 mm / 0.001 in 572-614 SD-6" /15G 0-150 mm / 0-6 in 572-615 SD-8" /20G 0-200 mm / 0-8 in

Horizontal single-function type

Metric

572-200-30 SD-10AX 0-100 mm

0.01 mm 0.03 mm Approx. 18000 hours572-201-30 SD-15AX 0-150 mm572-202-30 SD-20AX 0-200 mm572-203-10 SD-30D 0-300 mm 0.04 mm Approx. 20000 hours

Metric/ Inch

572-210-30 SD-4" AX 0-100 mm / 0-4 in

0.0005 in /0.01 mm 0.03 mm / 0.001 in Approx. 18000 hours572-211-30 SD-6" AX 0-150 mm / 0-6 in 572-212-30 SD-8" AX 0-200 mm / 0-8 in 572-213-10 SD-12" D 0-300 mm / 0-12 in 0.04 mm / 0.002 in Approx. 20000 hours

Horizontal multi-function type

Metric

572-460 SD-10E 0-100 mm

0.01 mm

0.03 mm

Approx. 5000 hours

572-461 SD-15E 0-150 mm572-462 SD-20E 0-200 mm572-463 SD-30E 0-300 mm 0.04 mm572-464 SD-45E 0-450 mm572-465 SD-60E 0-600 mm 0.05 mm572-466 SD-80E 0-800 mm 0.06 mm572-467 SD-100E 0-1000 mm 0.07 mm

Metric/ Inch

572-470 SD-4" E 0-100 mm / 0-4 in

0.0005 in/0.01 mm

0.03 mm / 0.001 in572-471 SD-6" E 0-150 mm / 0-6 in572-472 SD-8" E 0-200 mm / 0-8 in572-473 SD-12" E 0-300 mm / 0-12 in 0.04 mm / 0.002 in572-474 SD-18" E 0-450 mm / 0-18 in572-475 SD-24" E 0-600 mm / 0-24 in 0.05 mm / 0.002 in572-476 SD-32" E 0-800 mm / 0-32 in 0.06 mm / 0.0025 in572-477 SD-40" E 0-1000 mm / 0-40 in 0.07 mm / 0.0025 in

Horizontal multi-function type (equipped with double reading function)

Metric

572-480-10* SD-10F 0-100 mm

0.01 mm

0.03 mm

Approx. 5000 hours

572-481-10* SD-15F 0-150 mm572-482-10* SD-20F 0-200 mm572-483-10* SD-30F 0-300 mm 0.04 mm572-484-10* SD-45F 0-450 mm572-485-10* SD-60F 0-600 mm 0.05 mm572-486-10* SD-80F 0-800 mm 0.06 mm572-487-10* SD-100F 0-1000 mm 0.07 mm

Metric/ Inch

572-490-10* SD-4" F 0-100 mm / 0-4 in

0.0005 in/0.01 mm

0.03 mm / 0.001 in572-491-10* SD-6" F 0-150 mm / 0-6 in572-492-10* SD-8" F 0-200 mm / 0-8 in572-493-10* SD-12" F 0-300 mm / 0-12 in 0.04 mm / 0.002 in572-494-10* SD-18" F 0-450 mm / 0-18 in572-495-10* SD-24" F 0-600 mm / 0-24 in 0.05 mm / 0.002 in572-496-10* SD-32" F 0-800 mm / 0-32 in 0.06 mm / 0.0025 in572-497-10* SD-40" F 0-1000 mm / 0-40 in 0.07 mm / 0.0025 in

Vertical single-function type

Metric

572-300-10 SDV-10D 0-100 mm

0.01 mm 0.03 mm

Approx. 20000 hours

572-301-10 SDV-15D 0-150 mm572-302-10 SDV-20D 0-200 mm572-303-10 SDV-30D 0-300 mm 0.04 mm

Metric/ Inch

572-310-10 SD-4" D 0-100 mm / 0-4 in

0.0005 in/0.01 mm 0.03 mm / 0.001 in572-311-10 SD-6" D 0-150 mm / 0-6 in572-312-10 SD-8" D 0-200 mm / 0-8 in572-313-10 SD-12" D 0-300 mm / 0-12 in 0.04 mm / 0.002 in

Vertical multi-function type

Metric

572-560 SDV-10E 0-100 mm

0.01 mm

0.03 mm

Approx. 5000 hours

572-561 SDV-15E 0-150 mm572-562 SDV-20E 0-200 mm572-563 SDV-30E 0-300 mm 0.04 mm572-564 SDV-45E 0-450 mm572-565 SDV-60E 0-600 mm 0.05 mm572-566 SDV-80E 0-800 mm 0.06 mm572-567 SDV-100E 0-1000 mm 0.07 mm

Metric/ Inch

572-570 SDV-4" E 0-100 mm / 0-4 in

0.0005 in/0.01 mm

0.03 mm / 0.001 in572-571 SDV-6" E 0-150 mm / 0-6 in572-572 SDV-8" E 0-200 mm / 0-8 in572-573 SDV-12" E 0-300 mm / 0-12 in 0.04 mm / 0.002 in572-574 SDV-18" E 0-450 mm / 0-18 in572-575 SDV-24" E 0-600 mm / 0-24 in 0.05 mm / 0.002 in572-576 SDV-32" E 0-800 mm / 0-32 in 0.06 mm / 0.0025 in572-577 SDV-40" E 0-1000 mm / 0-40 in 0.07 mm / 0.0025 in

Vertical multi-function type (equipped with double reading function)

Metric

572-580-10* SDV-10F 0-100 mm

0.01 mm

0.03 mm

Approx. 5000 hours

572-581-10* SDV-15F 0-150 mm572-582-10* SDV-20F 0-200 mm572-583-10* SDV-30F 0-300 mm 0.04 mm572-584-10* SDV-45F 0-450 mm572-585-10* SDV-60F 0-600 mm 0.05 mm572-586-10* SDV-80F 0-800 mm 0.06 mm572-587-10* SDV-100F 0-1000 mm 0.07 mm

Metric/ Inch

572-590-10* SDV-4" F 0-100 mm / 0-4 in

0.0005 in/0.01 mm

0.03 mm / 0.001 in572-591-10* SDV-6" F 0-150 mm / 0-6 in572-592-10* SDV-8" F 0-200 mm / 0-8 in572-593-10* SDV-12" F 0-300 mm / 0-12 in 0.04 mm / 0.002 in572-594-10* SDV-18" F 0-450 mm / 0-18 in572-595-10* SDV-24" F 0-600 mm / 0-24 in 0.05 mm / 0.002 in572-596-10* SDV-32" F 0-800 mm / 0-32 in 0.06 mm / 0.0025 in572-597-10* SDV-40" F 0-1000 mm / 0-40 in 0.07 mm / 0.0025 in

*Availabletospecialorder

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*1:Refertothedimensiontablefordetailsofthedepthincludingthescrewontherearofthedisplay.

Mounting screw hole*1

(Rear side)2×M3×0.5

4.6

31

6.6

624

L2L1

16

40.9

57.5

10 35

8

32.6

13.53.5

2.3 15

7

1.6

12

SD-E (to 300 mm) / SD-F (to 300 mm) SD-E (450 to 1000 mm) / SD-F (450 to 1000 mm)

SDV-E (to 300 mm) / SDV-F (to 300 mm) SDV-E (450 to 1000 mm) / SDV-F (450 to 1000 mm)

SD-D

DIMENSIONS Unit:mm

RefertotheABSOLUTEDIGIMATICSCALEUNITSCatalog(No.E4316)formoredetails.

SD-G

31

6.6

121.

6

7

4.6

6L2L1

22

16 36.58

59.2

3510

29

Mounting screw hole (Rear side)*1

2×M3×0.5

15.6

2.3 3.5

64.6

24

L2L1

71.113.5 40

4×M3×0.5


20 41.3

3612

.41.

6

7

2.5

18.5

3.8

6.6

9 9 204 tG

7

1.6 H

6.6

36


4×M3×0.522 40

84L2

24

64.6

L1

42

64.6

24

L2L1

72.74016.6

4×M3×0.5


20 36 3612

.41.

6

7

2.5

18.1

3.8

6.6

9

64.6

24

L2L1

844022

4×M3×0.5


20 42 361.

6 H

7

4 G t

6.6

9

20 40.7

7

1.6

12.4

4.6613.5 40

70.8

L2L1

6.6

36

24

15.1

2.5

3.8

9

4×M3×0.5Mounting screw hole (Rear side)*1

72.1

L1L2

16.3 40

20 35.4

24

366.

6

4.66

9

2.5

14.6

3.8

7

1.6

12.4

4×M3×0.5Mounting screw hole (Rear side)*1

SD-AX

SDV-D

SPECIFICATIONS Model Range

(mm)Dimensions (mm) Depth including the screw

on the rear of the display Mass (g)L1 L2 t G H

SD-G100 209 185 — — —

Less than 2 mm

390150 259 235 — — — 410200 311 287 — — — 430

SD-AX100 209 185 — — — 235150 259 235 — — — 255200 311 287 — — — 275

SD-30D 300 444 420 — — — 370

SD-ESD-F

100 244 220 — — — 250150 294 270 — — — 280200 344 320 — — — 310300 444 420 — — — 370450 594 570

6 23.2 14.6Less than 3 mm

760600 774 750 900800 974 950

10 27.2 18.61710

1000 1174 1150 2040

SDV-D

100 244 220 — — —

Less than 2 mm

250150 294 270 — — — 280200 344 320 — — — 310300 444 420 — — — 370

SDV-ESDV-F

100 244 220 — — — 250150 294 270 — — — 280200 344 320 — — — 310300 444 420 — — — 370450 594 570

6 23.2 14.6Less than 3 mm

760600 774 750 900800 974 950

10 27.2 18.61710

1000 1174 1150 2040

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Linear ScalesDesigned to accurately capture positional coordinates along an axis


*2: 1Vp-p differential sinusoidal signal output types also available. Please contact us for details

*2: 1Vp-p differential sinusoidal signal output types also available. Please contact us for details

*1: 1Vp-p differential output type

Separate type

With simultaneous square/sinusoidal-wave signal output

High-accuracy type ST36*2

Compact type ST46-EZA

Pulse signalunit

PSU-200

KA-200KLD-200 Counter

KA-200KLD-200 Counter

Assembly type

Incremental system

Absolute system

Separate type

Scale units

With square-wave signal output

Slim and high speed type AT211*2

Standard type AT203

With sinusoidal signal output

Slim type AT113Super slim type AT112-F

General-purpose type AT402E*1

Standard type AT103

Pulse signalunit

PSU-200

Assembly type

ABS AT715Slim type

ABS AT300seriesStandard type

ABS AT500seriesSlim type

ABS ST700 Compact-type series

General-purpose type

ABS ST1300seriesHigh-resolution type Nikki Denso Co.,Ltd. VPH/VCII/VPS series*3

Servoland corporation SVF series*3

PMAC Japan Co., Ltd. Power-UMAC, Power-Clipper, Power-Brick series*3

FANUC CORPORATIONNC control unit*3

Mitsubishi Electric CorporationMITSUBISHI CNC series*3

Mitsubishi Electric CorporationMELSERVO series*3

Panasonic Corporation, Motor Business Unit MINAS series*3

*3: Please contact each manufacturer for details.

YASKAWA Electric Corporation Σ-VII series*3

Siemens AG DRIVE-CLiQ*3

Various NC controllers

ABS AT1100seriesStandard type

Linear Scale System Diagram

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•A wide variety of measuring ranges are available in this standard type scale unit.

•Connectable to the KA-200 counter, KLD-200 counter, or PSU-200.

RefertotheLinearScaleDROSystemsCatalog(No.E13000)formoredetails.

An inspection certificate is supplied as standard. RefertopageXfordetails.

Linear Scales AT103SERIES 539 — Standard Type

SPECIFICATIONSModel AT103Effective range 100 to 6000 mm (42 models)

Accuracy (20 °C) Effective range 100to3000: (5+5L0/1000)µm Effectiverange3250to6000:(5+8L0/1000)µm

Outputsignal Two 90° phase-shifted sinusoidal signalsMaximum response speed 120 m/min (50 m/min when the effective measuring length is 3250 to 6000 mm)Signal output pitch 20 µmScale reference point Outputin50mmpitchOperatingtemperature 0 to 45 °C

Note1:HighprecisionmodelAT103F (JIS Class 0, (3+3L0/1000)µm) is also available to special order for the effective range of 100 to 2000 mm.

Note2: Ultra-high precision model AT103S (2+2L0/1000)µm is also available to special order for the effective range of 100 to 500 mm.Note3:Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)

AT103 Effectiverange*L0 (mm)

Signal cable length(m)OrderNo. Model

539-111-30 AT103-100 100 (4 in)

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539-112-30 AT103-150 150 (6 in)539-113-30 AT103-200 200 (8 in)539-114-30 AT103-250 250 (10 in)539-115-30 AT103-300 300 (12 in)539-116-30 AT103-350 350 (14 in)539-117-30 AT103-400 400 (16 in)539-118-30 AT103-450 450 (18 in)539-119-30 AT103-500 500 (20 in)539-121-30 AT103-600 600 (24 in)539-123-30 AT103-700 700 (28 in)539-124-30 AT103-750 750 (30 in)539-125-30 AT103-800 800 (32 in)539-126-30 AT103-900 900 (36 in)539-127-30 AT103-1000 1000 (40 in)

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539-128-30 AT103-1100 1100 (44 in)539-129-30 AT103-1200 1200 (48 in)539-130-30 AT103-1300 1300 (52 in)539-131-30 AT103-1400 1400 (56 in)539-132-30 AT103-1500 1500 (60 in)539-133-30 AT103-1600 1600 (64 in)539-134-30 AT103-1700 1700 (68 in)539-135-30 AT103-1800 1800 (72 in)539-136-30 AT103-2000 2000 (80 in)539-137-30 AT103-2200 2200 (88 in)539-138-30 AT103-2400 2400 (96 in)

7539-139-30 AT103-2500 2500 (100 in)539-140-30 AT103-2600 2600 (104 in)539-141-30 AT103-2800 2800 (112 in)539-142-30 AT103-3000 3000 (120 in)539-143-30 AT103-3250 3250 (130 in)

10

539-144-30 AT103-3500 3500 (140 in)539-145-30 AT103-3750 3750 (150 in)539-146-30 AT103-4000 4000 (160 in)539-147-30 AT103-4250 4250 (170 in)539-148-30 AT103-4500 4500 (180 in)539-149-30 AT103-4750 4750 (190 in)

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*Modelsfortheeffectiverange3250mmormorearemade-to-order.

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Linear Scales AT113SERIES 539 — Slim Type

SPECIFICATIONSModel AT113Effective range 100 to 1500 mm (20 models)Accuracy (20 °C) (5+5L0/1000)µmOutputsignal Two 90° phase-shifted sinusoidal signalsMaximum response speed 120 m/minSignal output pitch 20 µmScale reference point Outputin50mmpitchOperatingtemperature 0 to 45 °C

Note1:HighprecisionmodelAT113F (JIS Class 0, 3+3L0/1000)µm is also available to special order.Note2:Ultra-high precision model AT113S (2+2L0/1000)µm is also available to special order for the effective range 100 to 500 mm.Note3:Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)

AT113 Effective rangeL0 (mm)


539-201-30 AT113-100 100 (4 in)

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539-202-30 AT113-150 150 (6 in)539-203-30 AT113-200 200 (8 in)539-204-30 AT113-250 250 (10 in)539-205-30 AT113-300 300 (12 in)539-206-30 AT113-350 350 (14 in)539-207-30 AT113-400 400 (16 in)539-208-30 AT113-450 450 (18 in)539-209-30 AT113-500 500 (20 in)539-211-30 AT113-600 600 (24 in)539-213-30 AT113-700 700 (28 in)539-214-30 AT113-750 750 (30 in)539-215-30 AT113-800 800 (32 in)539-216-30 AT113-900 900 (36 in)539-217-30 AT113-1000 1000 (40 in)

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•Slimtypewithunitsectionaldimensionsof 22×35 mm.

•ConnectabletotheKA-200 counter, KLD-200 counter, or PSU-200.

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Linear Scales AT112-FSERIES 539 — Super Slim Type

SPECIFICATIONSModel AT112-FEffective range 50 to 1020 mm (19 models)Accuracy (20 ºC) (3+3L0/1000)µmOutputsignal Two 90° phase-shifted sinusoidal signalsMaximum response speed 50 m/minSignal output pitch 20 µmScale reference point Outputin50mmpitch*1

Operatingtemperature 0 to 45 ºCNote1:Ultra-highprecisionmodelAT112S (2+2L0/1000)µm is also available to special order for the effective range 50 to 320 mm.Note2:Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)*1:Modelswhoseeffectiverangeis50 mm or 70 mm:Centerpoint Models whose effective range is 120 mm or more: 50 mm pitch starting at a point 35 mm from the " " mark on the left seen

from the front.

AT112-F Effective rangeL0 (mm)


539-251-10 AT112-50F 50 (1.5 in)

3

539-252-10 AT112-70F 70 (2.5 in)539-253-10 AT112-120F 120 (4.5 in)539-254-10 AT112-170F 170 (6.5 in)539-255-10 AT112-220F 220 (8.5 in)539-256-10 AT112-270F 270 (10.5 in)539-257-10 AT112-320F 320 (12.5 in)539-258-10 AT112-370F 370 (14.5 in)539-259-10 AT112-420F 420 (16.5 in)539-260-10 AT112-470F 470 (18.5 in)539-261-10 AT112-520F 520 (20 in)539-262-10 AT112-570F 570 (22 in)539-263-10 AT112-620F 620 (24 in)539-264-10 AT112-670F 670 (26 in)539-265-10 AT112-720F 720 (28 in)539-266-10 AT112-770F 770 (30 in)539-267-10 AT112-820F 820 (32 in)539-268-10 AT112-920F 920 (36 in)539-269-10 AT112-1020F 1020 (40 in)

•Superslimtypewithunitsectionaldimensions of 15.4×30 mm.

•ConnectabletotheKA-200 counter, KLD-200 counter, or PSU-200.

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RefertotheNCLinearScaleSystemsCatalog(No.E13005)formoredetails.

Linear Scales AT402ESERIES 539 — General-purpose Type

SPECIFICATIONSModel AT402EEffective range 140 to 3040 mm (24 models)

Accuracy (20 ºC)Effectiverange:140to540mm:±2µmEffectiverange:640to940mm:±3µmEffectiverange:1040to3040mm:±3µm/m

Outputsignal Signal:1Vp-pdifferentialsinusoidalsignalDifferentialreferencepointpulse:Absolute Interval Code compatible

Maximum response speed 120 m/min (With sinusoidal signal amplitude of –3 dB)Signal output pitch 20 µmOperatingtemperature 0 to 45 ºC

Cable configurationTypeA:3mflyingleadcableType B:3mcablewithEuropeanCNCconnectorsType C:3mcablewithFANUCconnectors

AT402E Effective rangeL0 (mm)

Signal cable length(m)OrderNo.* Model

539-371- AT402E-140 140 (5.6 in)

3

539-373- AT402E-240 240 (9.6 in)539-374- AT402E-340 340 (13.6 in)539-375- AT402E-440 440 (17.6 in)539-376- AT402E-540 540 (21.6 in)539-377- AT402E-640 640 (25.6 in)539-378- AT402E-740 740 (29.6 in)539-379- AT402E-840 840 (33.6 in)539-380- AT402E-940 940 (37.6 in)539-381- AT402E-1040 1040 (41.6 in)539-382- AT402E-1140 1140 (45.6 in)539-383- AT402E-1240 1240 (49.6 in)539-384- AT402E-1340 1340 (53.6 in)539-385- AT402E-1440 1440 (57.6 in)539-386- AT402E-1540 1540 (61.6 in)539-387- AT402E-1640 1640 (65.6 in)539-388- AT402E-1740 1740 (69.6 in)539-389- AT402E-1840 1840 (73.6 in)539-390- AT402E-2040 2040 (81.6 in)539-391- AT402E-2240 2240 (89.6 in)539-392- AT402E-2440 2440 (97.6 in)539-393- AT402E-2640 2640 (105.6 in)539-394- AT402E-2840 2840 (113.6 in)539-395- AT402E-3040 3040 (121.6 in)

*Thesuffix" " in the order numbers will be 01 for Type A, 02 for Type B, and 03 for Type C.

•Idealformachinetoolsforheavycuttingas well as linear motors.

•Hasmulti-pointelasticfixingforexcellentvibration resistance (200 m/s2), shock resistance (400 m/s2), and temperature characteristics.

•TheAbsoluteIntervalCodeenablesasimplified, low-cost ABS system.

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Linear Scales AT203SERIES 539 — Standard Type•Thetravellengthofthelinearscale

is output with 2-phase square-wave signals, which can be used as a feedback signalforNCmachinetools.

•Thepulsesignalunit(PSU)isnolongerneeded, and the AT203 can be directly connectedtotheNCmachinetool.

SPECIFICATIONSModel AT203Effective range 100 to 6000 mm (42 models)

Accuracy(20ºC)*Effective range:100to1500mm(3+3L0/1000)µmEffective range:1600to3000mm(5+5L0/1000)µmEffective range:3250to6000mm(5+8L0/1000)µm

Outputsignal Two 90° phase-shifted square-wave signalsMaximum response speed 120 m/min (50 m/min when the effective range is 3250 to 6000 mm)Resolution 0.1/0.5/1 µm (Switchable by the DIP switches)Scale reference point Outputin50mmpitchOperatingtemperature 0 to 45 ºC*Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)



539-411-30 AT203-100 100 (4 in)

5

539-412-30 AT203-150 150 (6 in)539-413-30 AT203-200 200 (8 in)539-414-30 AT203-250 250 (10 in)539-415-30 AT203-300 300 (12 in)539-416-30 AT203-350 350 (14 in)539-417-30 AT203-400 400 (16 in)539-418-30 AT203-450 450 (18 in)539-419-30 AT203-500 500 (20 in)539-421-30 AT203-600 600 (24 in)539-423-30 AT203-700 700 (28 in)539-424-30 AT203-750 750 (30 in)539-425-30 AT203-800 800 (32 in)539-426-30 AT203-900 900 (36 in)539-427-30 AT203-1000 1000 (40 in)539-428-30 AT203-1100 1100 (44 in)539-429-30 AT203-1200 1200 (48 in)539-430-30 AT203-1300 1300 (52 in)539-431-30 AT203-1400 1400 (56 in)539-432-30 AT203-1500 1500 (60 in)539-433-30 AT203-1600 1600 (64 in)539-434-30 AT203-1700 1700 (68 in)539-435-30 AT203-1800 1800 (72 in)539-436-30 AT203-2000 2000 (80 in)539-437-30 AT203-2200 2200 (88 in)539-438-30 AT203-2400 2400 (96 in)539-439-30 AT203-2500 2500 (100 in)539-440-30 AT203-2600 2600 (104 in)539-441-30 AT203-2800 2800 (112 in)539-442-30 AT203-3000 3000 (120 in)539-443-30 AT203-3250 3250 (130 in)539-444-30 AT203-3500 3500 (140 in)539-445-30 AT203-3750 3750 (150 in)539-446-30 AT203-4000 4000 (160 in)539-447-30 AT203-4250 4250 (170 in)539-448-30 AT203-4500 4500 (180 in)539-449-30 AT203-4750 4750 (190 in)539-450-30 AT203-5000 5000 (200 in)539-451-30 AT203-5250 5250 (210 in)539-452-30 AT203-5500 5500 (220 in)539-453-30 AT203-5750 5750 (230 in)539-454-30 AT203-6000 6000 (240 in)

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•Thisisaslim,sealed,2-phase,square-wave scale that can be directly connected to a control unit.

•ScalealarmLEDenableseasymaintenance.

•Awiderangeofspecificationstobestsuit your application.

•SuitableforthecontrolofsemiconductormanufacturingsystemsandNCmachinetools.

Linear Scales AT211-A(Multipoint mounting) AT211-B(Double-end mounting)SERIES 539 — Slim and high speed Type

AT211-A

AT211-B

AT211 - 0100 A 1 S - P 1 - A BEffective range: 100 to 1500 mm

Signal cable: 3 to 7 m / None, 10 types

Mounting method: Multipoint mounting/ Double-end mountingScale reference point: 50 mm/ Center point/ Left edge point/ Right edge point

Indication accuracy:(3+3L0/1000)µm / (2+2L0/1000)µm

Head cable: 0.3 to 9 m, 9 types

Direction: PA/PB phase

Resolution/ Minimum edge-to-edge interval:0.1 to 5 µm / 125 to 1000 ns, 22 types

Meaning of Model No.

Common specificationModel AT211Effectiverange* 100 to 1500 mm (20 models)

Accuracy(20ºC)*(3+3L0/1000)µm L0:effectiverange(mm)

(2+2L0/1000)µm (L0≤500 mm)Outputsignal Two 90° phase-shifted square-wave signalsMaximumresponsespeed* 5.4 to 120 m/min (varies depending on the resolution or minimum edge interval)Resolution* 0.1/ 0.2/ 0.5/ 1.0/ 2.5/ 5.0 µmScalereferencepoint* 50 mm / Center point / Left-edge point / Right-edge pointOperatingtemperature 0 to 45 ºC*Desiredspecificationisselectable.

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•ABSOLUTElinearencoderincorporatesboth our unique electrostatic and photoelectric technology.

Note:RefertopageH-26"QuickGuidetoPrecision Measuring Instruments" for details of the principle of the absolute linear scale.

•Drasticallyreducedpowerconsumptionhence there are no backup batteries.

•Easyoperationbecausenorecalibrationis required at startup or after a power failure.

•Suitableforpositionfeedbackinmachinery requiring high accuracy, high-speed control.

•Improvedenvironmentalresistanceagainst mechanical vibration and noise.

Linear Scales ABS AT300SERIES 539 — Standard Type

SPECIFICATIONSModel ABS AT353 ABS AT343 ABS AT343A ABS AT303 ABS AT303A

Applicable system FANUCCORPORATIONSerial αi Interface

Mitsubishi Electric Corporation

MITSUBISHICNCseries

Mitsubishi Electric Corporation

MELSERVOseries

Amplifiers supporting Mitutoyo ENSISinterface

Resolution 0.05 µmMaximum response speed 120 m/minEffective range 100 to 3000 mmAccuracy(20ºC)* (3+3L0/1000)µm, (5+5L0/1000)µm when the effective range is 1600 mm or more*Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm) A wide variety of special orders are available.



ABS AT500-S ABS AT500-H

•Slimshapeissuitableforspace-savingdesigns.

•ThehighrigidityABS AT500-S series has vibration resistance, shock resistance and temperature control, the ABS AT500-H series offers excellent temperature control and high accuracy.

•ScalealarmLEDenableseasymaintenance.

•Supportstheinterfacesofvariousmanufacturers allowing a variety of system configurations.

Linear Scales ABS AT500-S/HSERIES 539 — Slim Type

ABS AT5Resolution/Applicablesystem

Transmission methodNothing: Full duplex communicationA: Half-duplex communicationAT524/527: DRIVE-CLiQ communication

Resolution7: 0.001 µm*1 only for AT5275: 0.005 µm (20 µm/4096)4: 0.01 µm*1 only for AT524*1: Please contact each manufacturer for details.

Effective range

Reference point of expansion on the scale unit influenced by temperature fluctuation*C: Center of the effective rangeL: "+" side of the absolute valueR: "–" side of the absolute value* "L" or "R" is marked only for the high accuracy type.

Type of the scale unitS: High rigidity typeH: High accuracy typeNote:"Reference point of expansion" The scale unit expands or contracts influenced by temperature fluctuation. The mechanical reference point of expansion is defined as the reference point.

*ABS AT5


Model Applicable systemABS AT553 FANUCCORPORATION

Serial αi InterfaceABS AT555ABS AT543 Mitsubishi Electric Corporation

MITSUBISHICNCseriesABS AT545ABS AT543A Mitsubishi Electric Corporation

MELSERVOseriesABS AT545A

ABS AT573A Panasonic Corporation, Motor Business UnitMINASseries*1

ABS AT503 MitutoyoENSISAmplifierssupportingtheinterface*1

(NikkiDensoCo.,Ltd.,Servolandcorporation,PMAC Japan Co., Ltd.)

ABS AT503AABS AT505ABS AT505AABS AT524 Siemens AG

DRIVE-CLiQABS AT527

SPECIFICATIONSHigh rigidity type High accuracy type

ModelABS AT□□□-SC ABS AT□□□-HC ABS AT□□□-HL/HR

AT5□5/AT5□5A AT524 AT527 AT5□5/AT5□5A AT524 AT527 AT5□5/AT5□5A AT524 AT527

Resolution 0.005 µm(20µm/4096)*1 0.01 µm 0.001 µm 0.005 µm

(20µm/4096)*1 0.01 µm 0.001 µm 0.005 µm(20µm/4096)*1 0.01 µm 0.001 µm

Maximum response speed 150 m/min (2.5 m/s) 72 m/min (1.2 m/s)

Effective range 100 to 2200 mm 100 to 1000 mm 100 to 350 mmAccuracy (20 ºC)*2 (3+3L0/1000)µm (2+2L0/1000)µmReference point of expansion influenced by temperature fluctuations

Center of the effective measuring lengthEdge of the effective measuring length

HL:"+"sideoftheabsolutevalueHR:"–"sideoftheabsolutevalue

*1:Theexactvalueis0.0048828125µmsincethe20µmsignalisdividedby4096.*2:Theindicationaccuracydoesnotincludequantizingerror. L0:Effectiverange(mm)


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Linear Scales ABS AT1100Assembly Type Scale Unit for Absolute Systems

ABS AT1100

Model ABS AT1153

ABS AT1143

ABS AT1123

Applicable systemFANUC CORPORATION

Serial αi InterfaceMitsubishi Electric Corporation

MITSUBISHI CNC seriesSiemens AGDRIVE-CLiQ

Please contact each manufacturer for details of the applicable systems.

ABS AT11□3 - □□□□

Interface specifications Effective range


•A coolant-proof design and dust-resistant rubber material for excluding coolant are newly adopted, and higher reliability optimized for the harsh factory environment is provided.

•The0.4mmairgapbetweenthesensorsis approximately four times wider than the conventional optical or magnetic sensors. Therefore, the chance of foreign objects lodging in this gap is lower. This air gap is the world's largest in this class of scale used on machine tools.

•Thede facto standard multi-point fixing method for the frame is adopted, resulting in high vibration/shock-resistance.

•Anewlydevelopedsmallsensorismountedon the Mitutoyo original electromagnetic induction detection method.

•Duetoanimprovementofsignalprocessing technique of the electromagneticinductionABSOLUTElinear encoder, the repeatability is six times better than our conventional model.

•Beingcompatiblewiththehigh-speedserial interface of each company listed in the table below, a direct connection to the NCcontrollerispossible.

SPECIFICATIONSModel ABS AT11□3Detection method Electromagnetic inductionMounting method Frame multipointEffective range 140 to 3040 mmResolution 0.05 µmMaximum response speed 3 m/sec

Indication accuracy (20 ºC) 3+5L0/1000 (µm) Effective length L0= 140 to 2040mm 5+5L0/1000 (µm) Effective length L0= 2240 to 3040mm

Expansion coefficient ≈8x10 –6/KVibration resistance ≤196 m/s2 (20 G) (55 to 2000 Hz)

Shock resistance 343 m/s2 (35 G) Effective length L0= 140 to 2040mm 294 m/s2 (30 G) (1/2 sin 11 ms) Effective length L0=2240 to 3040mm

Power supply voltage ABSAT1153/1143:DC5V±10%ABSAT1123:DC24V(ConformingtoDRIVE-CLiQ)Maximum current consumption AT1153:300mA(Max)AT1143:290mA(Max)AT1123:140mA(Max)Operationaltemperature/humidityranges 0to50°C/RH20to80%(non-condensing)Storage temperature/humidity ranges –20to70ºC/RH20to80%(non-condensing)

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•Theelectromagneticinductionprincipleadopted means these scales are unaffected by contamination on the sensors.

•Absolutescaleshaveeliminatedtheneedfor origin restoration, also drastically reducing power consumption.

Linear Scales ABS AT715SERIES 539 — Slim Type

SPECIFICATIONSModel ABS AT715Detection method Electromagnetic induction

Minimum resolution 0.001 mm to 0.01 mm(Changeable by parameter on the KA-200/KLD-200 counter)

Effective range 100 to 3000 mm

Accuracy (20 ºC) ±5µm(L0:100to500mm),±7µm(L0:600to1800mm),±10µm(L0:2000to3000mm)L0:Effectiverange (mm)

Maximum response speed 50 m/minProtection level IP67Sliding force 5Norless

Signal cable Standard AccessoriesRefer to the dimension table shown below for the length.

Extension cable (optional)

Length OrderNo.2 m5 m7 m

09AAB674A09AAB674B09AAB674C

Connectable counter KA-200 Counter / KLD-200 Counter



539-801 ABS AT715-100 100 (4 in)

3.5

539-802 ABS AT715-150 150 (6 in)539-803 ABS AT715-200 200 (8 in)539-804 ABS AT715-250 250 (10 in)539-805 ABS AT715-300 300 (12 in)539-806 ABS AT715-350 350 (14 in)539-807 ABS AT715-400 400 (16 in)539-808 ABS AT715-450 450 (18 in)539-809 ABS AT715-500 500 (20 in)539-811 ABS AT715-600 600 (24 in)539-813 ABS AT715-700 700 (28 in)539-814 ABS AT715-750 750 (30 in)539-815 ABS AT715-800 800 (32 in)539-816 ABS AT715-900 900 (36 in)539-817 ABS AT715-1000 1000 (40 in)

5

539-818 ABS AT715-1100 1100 (44 in)539-819 ABS AT715-1200 1200 (48 in)539-820 ABS AT715-1300 1300 (52 in)539-821 ABS AT715-1400 1400 (56 in)539-822 ABS AT715-1500 1500 (60 in)539-823 ABS AT715-1600 1600 (64 in)539-824 ABS AT715-1700 1700 (68 in)539-825 ABS AT715-1800 1800 (72 in)539-860 ABS AT715-2000 2000 (80 in)539-861 ABS AT715-2200 2200 (88 in)539-862 ABS AT715-2400 2400 (96 in)

7*1539-863 ABS AT715-2500 2500 (100 in)539-864 ABS AT715-2600 2600 (104 in)539-865 ABS AT715-2800 2800 (112 in)539-866 ABS AT715-3000 3000 (120 in)

*1:Combinationofa5msignalcableanda2mextensioncableRefertotheLinearScaleDROSystemsCatalog(No.E13000)formoredetails.

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•TheKA-200Counterhasalathefunction as well as standard functions (parameter selection).

•Compact,lightandmultifunctional.•TheRS-232Cinterfaceenables

connection to a PC or printer.

Optional Accessories•Codeoutunit:06AET993


174-183KA-212

174-147KLD-214

KA-200 CounterSERIES 174 — Standard Type

KLD-200 CounterSERIES 174 — Special Purpose Type with Limit Signal Output •Counterdesignedtosignalwhena

linear scale displacement value and a preset limit value coincide.

•Twotypesoflimitsettingsareavailable:2-step (KLD-212) and 4-step (KLD-214).

Optional Accessories•Externalzero-setbox(1axis): 936551•Externalloadbox(1axis,forRS-232Coutput):937326

SPECIFICATIONSOrderNo. 174-183□ 174-185□Model KA-212 KA-213Numberofaxestobedisplayed 2 3

Resolution(Changeable according to the parameter)When AT100isconnected:0.05to0.0001mmWhen AT715isconnected:0.01to0.001mm

Display/digit Maindisplay:9digitsincludingsignSub display:8 digits

Power supply voltage 100 to 240 V AC, 50/60 HzDimensions 300(W)×70(D)×167(H) mmOutput(optional) RS-232CMass 1.25 kg 1.3 kg□:TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:

AforUL/CSA,DforCEE,DCforCCC,EforBS,KforKC,CandNosuffixarerequiredforPSE.

SPECIFICATIONSOrderNo. 174-146□ 174-147□Model KLD-212 KLD-214Numberofaxestobedisplayed 1 Numberoflimitvaluestobeset 2 4

Resolution(Changeable according to the parameter)

When AT100seriesisconnected:0.05to0.0001mmWhen AT715isconnected:0.01to0.001mm

Output RS-232C (provided as standard)Display 7-segment LCD/7digit*1

Power supply voltage 100 V to 240 V AC, 50/60 HzPower consumption 25 VAOperatingtemperature/humidityrange 0 to 45 °C /20to80%Dimensions 332(W)×204(D)×163(H) mmMass 3.0 kg 3.1 kg*1:Countrangewhentheminimumreadingis0.001mm:99999.999to–9999.999Countrangewhentheminimumreadingis0.005mm:99999.995to–9999.995□:TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:

AforUL/CSA,DforCEE,DCforCCC,EforBS,KforKC,CandNosuffixarerequiredforPSE.

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Mitutoyo reserves the right to change any or all aspects of any product specifi cation, including prices, designs and service content, without notice.


Linear scale counter

FUNCTIONSType

Function

High performance

KA-200 Counter

Limit signal output

KLD-200 Counter

Zero-setting ● ●

Preset ● ●

Resolution setting ● ●

Measurement direction setting ● ●

mm/inch conversion ● ●

Diameter display ● ●

Scale reference point setting-1 ● ●

1/2 calculation ● ●

Coordinate system switching ● —

Bolt-hole circle machining ●-2 —

Pitch machining ● —

Zeroapproachmachining(INCmode) ● —

Addition of 2-scale data ●-3 —

Linearity error compensation ● ●

Pitch error compensation ●-1 —

Smoothing ● ●

Memory backup ● ●

Expansion/contraction coeffi cient setting — ●

Lower digit blanking out ● ●

External zero-setting ▲-4

●

RS-232C interface unit ▲-4

●

USB output ▲-5 —

Limit signal output — ●

Error message ● ●

●:Standardfunction,▲:Optionalfunction,—:Notavailable-1:OnlyavailablewhenconnectingwithAT100series.-2:Notavailableinsingle-axisuse-3:Onlyavailablefor3-axismodel(KA-213)-4:Codeoutunit(06AET993) is required. -5:Textcanbeoutputbyinterfaceunitandfootswitch

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•Outputs2-phasesinusoidalwavesignalsat 4 µm pitch.

•Themaximumeffectivemeasuringlength is 3000 mm when the resolution is 0.01/0.02/0.05/0.1 µm (2-phase square-wave is output).

•Compactdetectorheadenablesspacesaving design.

•Alongwiththeoutputspecificationsof2-phase sinusoidal wave and 2-phase square-wave, the output specification of 1Vp-p wave is also available.

•Equippedwiththefunctiontodisplaysignal errors on the LED.


Linear Scales ST36SERIES 579 — High Accuracy Type


SPECIFICATIONSModel ST36Detection method Reflective photoelectric linear encoder

Outputsignal

ST36A:2-phasesinusoidalsignalsST36B :2-phasesquare-wavesignals,AlarmresetinputST36C :2-phasesquare-wavesignals,2-phasesinusoidalsignalsST36D:1Vp-pdifferentialsinusoidalsignals

Main scale grating pitch 8 µmSignal output pitch 4 µmEffective range 10 to 3000 mmAccuracy(20ºC)*1 ±0.5µm,±1µm,±2µm/mMaximumresponsespeed*2 1200 mm/s

Scale reference point Center point (10 to 80 mm)50 mm pitch (100 to 3000 mm)

Power supply voltage DC5V±5%Operatingtemperature/ humidity range 0to40ºC/20to80%(non-condensing)Storage temperature/ humidity range –20to60ºC/20to80%(non-condensing)Head cable length 1 m (high-flex connecting cable)

*1: Effective range Accuracy300 mm or less ±0.5µm500 mm or less ±1µm

1000 mm or less ±2µm3000 mm or less ±2µm/m

*2:Maximum response speed when sinusoidal signals are output

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Mitutoyo reserves the right to change any or all aspects of any product specifi cation, including prices, designs and service content, without notice.


An inspection certifi cate is supplied as standard. RefertopageXfordetails.

•Includesanautomaticadjustingfunctionfor the signal (EZA function) at the push of a button.

•Detectorheadmountingandsignaladjustment possible without oscilloscope or PC.

•Asetupindicatorforcheckingsignalstrength is included.

•I/Fcircuitintegratedinconnectorshellreducesvolumeto60%comparedtoconventional interface.

•Self-diagnosisfunctionwithUSBconnectivity facilitates signal strength checking and parameter setup.

•Glassandmetaltapescalesareavailable.•Thethicknessofthedetectorheadis

only 7.5 mm. The metal tape scale type has a mounting surface area of 12.5 by 9.325 mm, allowing use in applications where a space-saving design is important.

Linear Scales ST46-EZASERIES 579 — Compact Type

SPECIFICATIONS

Glass Scale Type

Metal Tape Scale Type

•Double-endmountingdesign

•Double-sidedtapemountingdesign

Model ST46-EZADetection method Reflective photoelectric linear encoderScale type Glass Metal tapeMain scale grating pitch 20 µm

Outputsignal Type B:2-phasesquare-wavesignals,referencepointpulse,externalresetinput.Type C:2-phasesquare-wavesignals,referencepointpulse,2-phasesinusoidalsignals.

Effective range 10 to 3000 mm

Accuracy (20 ºC)

Effectiverange10to300mm:±1µmEffectiverange350to500mm:±2 µm Effectiverange600to1000mm:±3µmEffective range 1100 to 3000mm: ±3 µm/m

Effectiverange10to1000mm:±5 µm Effectiverange1100to3000mm:±5 µm/m(The above accuracy applies to individual scales. For double-end mounting designs, perform point-to-point correction after ensuring the metal tape is tensioned correctly.)

Maximum response speed 2.6 m/s (at the point where the sinusoidal signal amplitude has decreased by 3 dB)Scale reference point 50mmpitch,10to80mm:CenterpointPower supply voltage 5VDC±5%Operatingtemperature/humidity range 0to40ºC/RH20to80%(non-condensing)Storage temperature/humidity range –20to60ºC/RH20to80%(non-condensing)Head cable length 1m (high-flex connecting cable)

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•Absolutemeasurementwithexposedscales

•Non-contactdetectionisoptimalforhigh speed and high acceleration devices such as linear motors.

•Electromagneticinductionprinciplemeans scales are unaffected by water and oil contamination

•Thedetectorheadisapproximately1/3thepreviousmodelsize:50mm(W)×28 mm (D) × 11 mm (H)

•Cableoutletscanbeinfourdirections,with mounting holes on the top and sides

•Accuracy(5+5L/1000)µm,glassscale:(3+3L/1000)µm(previousmodels:(8+5L/1000)µm)

L:Effectiverange(mm)•Compatiblewithservoamplifiersfrom

a range of companies (high-speed serial interfaces)

Absolute type

Series nameSeparateTypeABSOLUTELinearScaleABS ST700 Compact-type series (Effective range ≤ 3 m)ABS ST700 Compact-type series (3.2 m ≤ Effective range ≤ 6 m)

Linear Scales ABS ST700SERIES 579 — General-purpose Type

Interface specification*0:SupportsMitutoyoENSIShigh-speedinterface ABS ST708A, ST708AL4:Supports Mitsubishi Electric Corporation, high-speed serial interface ABS ST748, ST748AL, ABS ST748, ST748L5:SupportsFANUCCORPORATION,high-speedserialinterface ABS ST758, ST758L7:Supports Panasonic Corporation, Motor Business Unit high-speed serial interface ABS ST778A, ST778AL8:SupportsYASKAWAElectricCorporation,high-speedserialinterface ABS ST788A, ST788AL

ABS ST7 0 8 A L - 100 A - R

Effective range:100to6000mm

A:ScalebasetypeC:Glassscaletype

Head cable outlet directionR :RightsideL :LeftsideU :UppersideD :LowersideNothing:100to3000mm

L:3200to6000mm

Transmission methodA:2-wiresystemNothing:4-wiresystem

Detection head form and resolution8:Form:50(W)×28(D)×11(H)mmResolution:0.1µm9:0.05µmresolution(tospecialorder)


Scale base type

Glass scale type



SPECIFICATIONSModel ABS ST700Scale type Scale base Glass scaleResolution 0.1 µm (0.05 µm to special order)Detection method Electromagnetic induction ABS linear encoderMax. effective range 6000 mm 1100 mmAccuracy (20 °C) 5+(5L/1000)µmL:Effectiverange(mm) 3+(3L/1000)µmL:Effectiverange(mm)Maximum response speed 5 m/s

Linear expansion coefficient (12.0±1.5)×10 -6/K(When the material of the mounting components is steel or equivalent)

Power supply voltage 5V±10% (at the detection head)(Ripple + spike noise component should be less than 100 mV)

Maximum current consumption 220 mA Head cable length 1 m (high-flex connecting cable)Maximum cable length 29 m (including the head cable length)Operatingtemperature/ humidity range 0to50°C/RH20to80%(non-condensing)Storage temperature/ humidity range –20to70°C/RH20to80%(non-condensing)

* Available InterfacesFANUCCORPORATION,FS-iSeries,PowerMateiSeriesMitsubishiElectricCorporation,MELSERVOMR-J4/MR-J3 Series MitsubishiElectricCorporation,CNCSeries,MDS-D/MDS-DH SeriesYASKAWA Electric Corporation, Σ-VII Series PanasonicCorporation,MotorBusinessUnit,MINAS-A5,A5L,A5N,A5NL,MINAS-A4,A4P,A4N,A4NLSeriesMitutoyoENSIS*1

NikkiDensoCo., Ltd. VPH/VC II /VPS series Servoland Corporation SVF Series PMAC Japan Co., Ltd. Power-UMAC, Power-Clipper, Power-Brick series

*1:ENSISisaregisteredtrademarkofMitutoyoCorporation.Note:Besuretocontacteachmanufacturerfordetailsoftheapplicablesystems(availabilityofconnection).


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•Effectivelength:12m,Maximumresponsespeed:8m/s,Resolution:1nm

•Variousinterfacesaresupported.•Anewdetectionmethodhasimproved

robustness in regards to contamination resistance and gap tolerance (in-house testing result).

•Thereisachoiceofmountingmethod:double-sided tape or double-end screw.

•Signalcheckprogramenablesintegritycheck and maintenance.

Linear Scales ABS ST1300SERIES 579

SPECIFICATIONSModel ABS ST1300Scale type Double-end mounting Double-sided tape mountingMax. effective length 500 to 12000 mm 10 to 3000 mmResolution 0.001 µm/0.01 µm (switched at shipment)Detection method OpticalreflectiontypelinearencoderIndication accuracy (20 ºC) ±5µm(1morless),±5µm/m(1.1mormore)Maximum response speed 8 m/s or lessExpansion coefficient 10×10 -6/KPower supply 5VDC±10%Maximum current consumption 270 mA (250 mA for Panasonic Corporation)Cable length 1 m (standard)Maximum cable length 29 m, 250 mA (depends on interface)

Usable temperature/humidity range0to50°C/RH20to80%(non-condensing)

Mountedtosteel:0to50°C/RH20to80%(non-condensing)Mountedtoanothermaterial:10to40°C/RH20to80%(non-condensing)

Storage temperature/humidity range –20to70°C/RH20to80%(non-condensing)

For details on specification, mounting procedure, and adjustments, refer to the corresponding catalog and operation manual.

Absolute type

Series nameSeparateTypeABSOLUTELinearScale

Interface specification*0:SupportsMitutoyoENSIShigh-speedinterface ABS ST130□A4:Supports Mitsubishi Electric Corporation, high-speed serial interface ABS ST134□A5:SupportsFANUCCORPORATION,high-speedserialinterface ABS ST135□7:Supports Panasonic Corporation, Motor Business Unit high-speed serial interface ABS ST137□A8:SupportsYASKAWAElectricCorporation,high-speedserialinterface ABS ST138□A

ABS ST13 4 1 A - 1200 D

Effective range:10to12000mm

Scale mountD:Double-endmountingE :Double-sidedtapemounting

Transmission methodA:When0,4,7,or8isselectedintheinterface

specification listed on the leftNothing:When5isselectedintheinterface

specification listed on the left

Resolution1:Resolution0.01µm2:Resolution0.001µm


Double-end screw-mounting version

Double-sided tape mounting version

* Available InterfacesFANUCCORPORATION,Serialαi InterfaceMitsubishiElectricCorporation,MELSERVOMR-J4/MR-J3 Series YASKAWA Electric Corporation, Σ-VII Series PanasonicCorporation,MotorBusinessUnit,MINASSeriesMitutoyoENSIS*1

*1:ENSISisaregisteredtrademarkofMitutoyoCorporation.Note:Besuretocontacteachmanufacturerfordetailsoftheapplicablesystems(availabilityofconnection).


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Pulse signal interface unit PSU-200SERIES 539 •ThePSU-200 splits the sinusoidal signal

output by Mitutoyo linear scales into a minimum of four and a maximum of 200 divisions, and converts the signal toasquare-wavesignalsothatNCfeedback systems, measurement control devices, etc., can be used with linear scales in order to achieve highly accurate positioning.


Serial signal interface unit PSU-251/252SERIES 539 •PSU251 series is a serial signal interface

unit for incremental linear scales.■ The interface outputs serial data equivalent

to 400 divisions from the sinusoidal signal (according to EIA Standard RS-422-A)

•ThePSU-251canbeconnectedtoMitsubishiElectric Corporation's MR-J4/MR-J3 series servo amplifier.

•Sincethisunitisconnectedtoincrementallinearscales, the reference point should be passed through to determine the absolute position.

SPECIFICATIONSOrderNo. 539-005Model PSU-200Numberofaxes 1

Input InputconnectorDA-15S-N(JAE)orequivalentInputsignal:2-phasesinusoidalandthereferencevoltage,Referencepoint,Scalealarm

Output Outputconnector:MR-20RMA(HONDATSUSHINKOGYOCO.,LTD.)Outputsignal: 2-phase square-wave signals (PA, PB), reference point (PZ), Alarm, Alarm reset, Photo-coupler

Numberofdivisions 4, 8, 10, 20, 40, 80, 100, 200 (Selectable by switch)

Function

Setting the number of divisions, setting the minimum edge interval, and maximum response speed.Detection of broken wires or short circuits and abnormalities (alarm), detection of signal errors (alarm).Power supply voltage low alarm (warning light only), switching between high-impedance mode and alarm signal output mode. Reference position detection light, hysteresis width settings (directly linked toNo.ofdivisions),externalalarmresetinput(photocoupler)

Power supply voltage 5 VDC±5%Current consumption 200 mAStorage temperature range –20 to 70 °COperatingtemperaturerange 0 to 40 °CDimensions 160(W)×100(D)×28(H) mmMass Approx. 620 g

SPECIFICATIONSOrderNo. 539-006 539-007Model PSU-251 PSU-252Numberofaxes 1 1

Input 2-phase sinusoidal signals and standard voltage, reference signal, scale alarm signal.Maximuminputfrequency:500kHz

OutputMitsubishi Electric Corporation

MR-J4/MR-J3 seriesHigh-speedserialdata*

Panasonic Corporation Motor Business UnitMINAS-A5,A5L,A5N,A5NLSeries*MINAS-A4,A4P,A4N,A4NLSeries*

Numberofdivisions 400

FunctionAlarmdetection:Brokenwires,shortcircuitsinthescaleandabnormalities.Alarmoutput:StatusdataisoutputthroughserialcommunicationandthePWRlightblinks.Also, the PWR light turns on.

Power supply voltage

Powersupplyfromtheservoamplifier:5VDC±5%Externalpowersupply:5VDC±5%Power supply is selected with the shorting link for the terminal block used to supply external power. To choose a servo amplifier or external power supply, please refer to the servo amplifier power specifications (in particular, the maximum supplied current) and the power supply specifications of the scale that is used.

Current consumption 150 mA (not including the scale)Storage temperature range –20 ºC to 70 ºCOperatingtemperaturerange 0 ºC to 40 ºC*Pleasecontacteachmanufacturerfordetailsoftheapplicablesystems.

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•Appliestheprincipleofimagecorrelationof a speckle pattern to ultra-precise measurement.

•Simultaneous,non-contactmeasurementofXYposition.

•Nanometer-resolutionmeasurement.•Suitableforspecializedapplications

such as determining stage positioning repeatability.

•Capableofmeasuringverysmalldeformation of parts.

RefertotheMICSYSCatalog(No.E13001)for more details.


2D Image Correlation Encoder MICSYS-SA1SERIES 549

SPECIFICATIONSOrderNo. 549-701Model MICSYS-SA1Detection method Laser speckle image correlationEffective range ±100µm(2D)Resolution 1 nmAccuracy (20 °C) ±100nmData update frequency 20 HzStandard accessories Standardtarget,Samplesoftwarefordatacorrelation(onCD-ROM)

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Linear ScalesQuick Guide to Precision Measuring Instruments

■ Absolute systemA measurement mode in which every point measurement is made relative to a fixed origin point.

■ Incremental systemA measurement mode in which every point measurement is made relative to a certain stored reference point.

■ Origin offsetA function that enables the origin point of a coordinate system to betranslated to another point offset from the fixed origin point. For this function to work, a system needs a permanently stored origin point.

■ Restoring the origin pointA function that stops each axis of a machine accurately in position specific to the machine while slowing it with the aid of integrated limit switches.

■ Sequence controlA type of control that sequentially performs control steps according to a prescribed order.

■ Numerical controlA way of controlling the movements of a machine by encoded commandscreatedandimplementedwiththeaidofacomputer(CNC).A sequence of commands typically forms a ‘part program’ that instructs a machine to perform a complete operation on a workpiece.

■ Binary outputRefers to output of data in binary form (ones and zeros) that represent numbers as integer powers of 2.

■ RS-232CAn interface standard that uses an asynchronous method of serial transmission of data over an unbalanced transmission line for data exchange between transmitters located relatively close to each other. It is a means of communication mainly used for connecting a personal computer with peripherals.

■ Line driver outputThis output features fast operating speeds of several tens to several hundreds of nanoseconds and a relatively long transmission distance of several hundreds of meters. A differential-voltmeter line driver (RS422A compatible)isusedasanI/FtotheNCcontrollerinthelinearscalesystem.

■ BCDA notation of expressing the numerals 0 through 9 for each digit of a decimal number by means of four-bit binary sequence. Data transmission is one-way output by means of TTL or open collector.

■ RS-422An interface standard that uses serial transmission of bits in differential form over a balanced transmission line. RS-422 is superior in its data transmission characteristics and in its capability of operating with only a single power supply of +5 V.

■ AccuracyThe accuracy specification of a scale is given in terms of the maximum error to be expected between the indicated and true positions at any point, within the range of that scale, at a temperature of 20 ºC. Since there is no international standard defined for scale units, each manufacturer has a specific way of specifying accuracy. The accuracy specifications given in our catalog have been determined using laser interferometry.

■ Narrow range accuracyScale gratings on a scale unit normally adopt 20 µm pitch though it varies according to the kind of scale. The narrow range accuracy refers to the accuracy determined by measuring one pitch of each grating at the limit of resolution (1 µm for example).

Glossary

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Upon supply of power to a linear scale, position readings from threecapacitance-typesub-scales(COArse,MEDiumandFINe)andonefromaphotoelectricsub-scale(OPTical)aretaken.These sub-scales use such a combination of pitches, and are so positioned relative to each other, that the readings at any one position form a unique set and allow a microprocessor to calculate the position of the read head on the scale to a resolution of 0.05 µm or 0.005 µm, depending on the interpolation factor.

■ Principle of the Absolute Linear Scale (Example: ABS AT300, 500-S/H)

MADE IN JAPANAT500

3768mm

OPT

COA

MED

FIN

Elect

rosta

tic ca

pacit

ance

type

Phot

o-ele

ctro

nic t

ype

3768 mm

58.88 mm

0.92 mm

20 µm

(512)

(512)

(400) (4096)

0.05 µm0.005 µm

7.36 mm

0.115 mm

(512) Approx. 1.8 µm

ResolutionSignal cycle (interpolation)

Computer Digital counterLaser length measuring machine counter

Laser sourceInterferometer Optical axis of

laser beam

Cube corner

Fixture

Scale unit

Movable table

The accuracy of the scale at each point is defined in terms of an error valuethatiscalculatedusingthefollowingformula:

Error = Value indicated by laser inspection system − Corresponding value indicated by the linear scale

A graph in which the error at each point in the effective positioning range is plotted is called an accuracy diagram.There are two methods used to specify the accuracy of a scale, unbalanced or balanced, described below.

Positional Indication accuracyThe accuracy of a linear scale is determined by comparing the positional value indicated by the linear scale with the corresponding value from a laser length measuring machine at regular intervals using the accuracy inspection system as shown in the figure below. As the temperature of the inspection environment is 20 °C, the accuracy of the scale appliesonlyinanenvironmentatthistemperature.Otherinspectiontemperatures may be used to comply with internal standards.

(1) Unbalanced accuracy specification - maximum minus minimum error

This method simply specifies the maximum error minus the minimum errorfromtheaccuracygraph,asshownbelow.Itisoftheform: E = (α+ βL)µm. L is the effective range (mm), and α and β are factors specified for each model. For example, if a particular type of scale has an accuracy specification of (3 + 3L——————1000 )µm and an effective range of 1000 mm, E is 6 µm.

Scale error at any point in range relative to start of range

0

Error

Effective range X Measuring point

Maximum difference in scale error: E(µm)

(2) Balanced accuracy specification - plus and minus about the mean error

This method specifies the maximum error relative to the mean error from theaccuracygraph.Itisoftheform:e= E ± — 2

(µm). This is mainly used in separate-type (retrofit) scale unit specifications.

0Error

Effective range X Measuring point

Maximum error about mean error E : ±— (µm) 2

Mean error

A linear scale detects displacement based on graduations of constant pitch. Two-phase sinusoidal signals with the same pitch as the graduations are obtained by detecting the graduations. Interpolating these signals in the electrical circuit makes it possible to read a value smaller than the graduations by generating pulse signals that correspond to the desired resolution. For example, if the graduation pitch is 20 µm, interpolated values can generate a resolution of 1 µm. The accuracy of this processing is not error-free and is called interpolation accuracy. The linear scale's overall positional accuracy specification depends both on the pitch error of the graduations and interpolation accuracy.

■ Specifying Linear Scale Accuracy

OverviewofAccuracyInspection System

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Principle of measurementWhen an optically rough surface is irradiated with a laser beam, reflected coherent light scattering from the surface creates visible interferenceintheformofaspecklepattern.AstheobjectmovesintheXYplane,thespecklepatternalsomovesinresponse.Displacement of the object can be calculated by comparing, through image correlation, the speckle images obtained before and after movement, and this is the principle used in the highly accurate MICSYS measuring system.

■ Image correlation and the MICSYS two-dimensional encoder

Applications

1. Evaluation of stages used in manufacturing equipment and inspection systems

2. Highly accurate positioning of workpieces

3. Measurement of minute displacement

a) Evaluation of position repeatability b) Evaluation of standstill stability and drift

Measure displacement caused by temperature, humidity, voltage fluctuation or other factors

Actuator

Setting and removal

Actuator

Measure displacement caused by temperature or humidity fluctuations or other factors and displacement caused during a material attachment process, etc.

a) Measurement of minute displacement of a structure b) Measurement of minute displacement of a workpiece

Structure (beam)

Load

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Documents

Linear Gage NewProducts - Mitutoyo · ABS AT300 High Accuracy, High Speed H-14 ABS AT500-S/H High Accuracy, Robust Type H-14 ABS AT1100 Coolant/Dust-proof Type H-15 ABS AT715 Slim