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Lecture 1: MEMS Motivation
Prasanna S. GandhiAssistant Professor,Department of Mechanical Engineering,Indian Institute of Technology, Bombay,
Today’s Class
What are MEMS? ImportanceSense of scaleDay-to-day use airbag/dj printersSensors of various kindsIndustrial and research products
Contents of the courseFabrication: VLSI-based, nonconventional laserDesign and analysisCharacterization
What are MEMS?
MEMS refer to miniature mechatronicsystems bulk fabricated using VLSI technologyTechniques and processes to design and create miniature systemsMiniature embedded systems
Motivation
Why study MEMS??MEMS benefits
Micro size sensors and actuators: Integration with electronics on single chip (system or lab on chip)Decreased cost of production: bulk processingMany new features and products previously unthought can be possible.Combination of MEMS with other branches: Example optical MEMS, Bio-MEMS futuristic devices
MEMS in SensorsAccelerometers and Gyroscopes
-In day to day use: Automobile accelerometers (air bag)
ADXL202 dual axis accelerometer
Copyright 1995- 2003 Analog Devices, Inc.
MEMS in SensorsAutonomous airplane
On-boardMicro-controller
GPS
Control surface actuators
Heading sensor
Other sensors
MEMS in AcuatorsDeskjet printer
In day to day use: - Deskjet printer Two possible ways
-Inkjet-Bubble jet
Nozzle on printer cartridge
MEMS in AcuatorsOptical switch
Micro-Optical Components at Bell Labs
MEMS in AcuatorsActuated mirrors
Micro-optical elements: (reflective)
–Micro-mirrors for fiber-to-fiber switching
Bell Lab single-color Mirror Bell Lab cross-color Mirrors
MEMS in AcuatorsActuated mirrors
Fiber, Lenses and Mirrors 4 x 4 Optical Switch
MEMS in AcuatorsActuated mirrorsDLP Technology
Array of micromirrors on chipApplications: projection TV etc.
http://www.dlp.com/dlp_technology/dlp_technology_overview.asp
MEMS in ActuatorMicromotor
Application: cooling of ICsA micro-motor
First one was made by
Mehergany at MIT
MEMS SystemMillibot
Millibots (CMU) Millibot fleet
Gyrover: Single wheeled robot uses gyroscope for stabilization
MEMS SystemCapsule camera
240o viewing angleImages at rate of 2 per secondUnit on belt to receive images2-6 hr journey through intesting0.4 X 1 in sizeFDA approved
MEMS System
Application: cooling of ICs
Micro-actuators
Comb Drive
Micro-actuators
Comb Drive
Micro-actuators
Comb drive operating gears
Bio-MEMS Sensor
Cantilever basedConcept: cantilever structure with antigenEffects:
Change in massDeflection due to repulsive forces
Detection of bacteria by OpticalCapacitiveOther techniques like resonance freq.
Walking Micro-Robots
Silicon microrobotHigh load capacityHeatuatorPrinciple of operationArrayingSteering concept
More MEMS devices
Other micro-sensors:Pressure sensorVibrating gyroscopeBio-MEMS sensors: DNA chips, “lab on chip”
Micro actuatorsComb actuators, micro-motorsThermal actuatorsPiezo-actuators
Micro-gears, micro-enginesMicro-fluidic systems: drug delivery: smart pillGrating light valve (GLV display)Digital optical switches
And many moreYet to come…
Course outline
Course Contents
Introduction to MEMS: Motivation, history and current statusMEMS: Fabrication
Conventional MEMS fabrication using VLSI technologyNonconventional fabrication
Course outline
Materials for MEMS
Other materialsPolycrystalline silicon (polysilicon)Silicon dioxide (SiO2)Silicon nitride (Si3N4)Aluminum (thin film)Gold (thin film)Many more including polymers now a days
Doping of silicon
Course outline
Conventional (VLSI) Fabrication processes
Lithography: patterningChemical etching
IsotropicAnisotropic
Plasma etching: RIEOxidationSputteringChemical vapor deposition (CVD)ElectroplatingSurface micromachiningLIGA
Materialremoval
Materialdeposition
Course outline
NonconventionalMicrofabrication
Laser micromachining and welding, processing of metals and nonmetals with laserElectro Discharge and Electro Chemical micromachining (EDM and ECM)Microstereolithography: scanning process, dynamic mask process Electronic packaging
Course outline
MEMS: Design and Analysis
Basic concepts of design of MEMS devices and processes.Design for fabrication, other design considerations MEM systems theoretic analysisAnalysis of MEMS devices: FEM and Multiphysicsanalysis in continuum domain, Modeling and simulationStatistical methodsMolecular dynamics
Course outline
MEMS: Characterization
Technologies for MEMS characterization: Scanning Probe Microscopy (SPM)
Atomic Force Microscopy (AFM)Scanning Tunneling microscopy (STM) Magnetic Force Microscopy (MFM)
Scanning Electron Microscope (SEM)Laser Doppler VibrometerElectronic Speckle Interference Pattern technology (ESPI)
Course outline
Text & References
Nadim Maluf, “An Introduction to Microelectromechanical Systems Engineering,” Artech House, Boston, 2000.Stephen D. Senturia, “Microsystems Design,” Kluwer Academic Publishers, New York, November 2000S. M. Sze, “VLSI Technology,” McGraw-Hill International Editions, Singapore, 1988.M.Elwenspoek and H. Jansen, “Silicon Micromachining,” Cambridge University Press, Cambridge, UK, 1998.Norio Taniguchi, editor “Nanotechnology,” Oxford University Press, Oxford, UK, 2003. Joseph McGeough, editor “Micromachining of Engineering Materials,” Marcel Dekker, Inc., New York, 2002.Marc Madou, “Fundamentals of Microfabrication: The science of miniaturization,” CRC Press, LLC, 2002.
Demonstration of Practical Samples
Deskjet printer cartridgeAccelerometer chipsMicrocantileversCD ROM technology
Materials for MEMS
SiliconStronger than steelLight as AluminumCan be coated with varieties of materials
Available in form of wafers 2”, 4”, 8”, 12” diaOther materials
<100>
<010>
<001>
<111>
Silicon crystal orientation
MEMS in SensorsEncoders
81,000 grating lines36-mm grating discDiffraction of lightInterference to produce detection signal