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Arnaldo Galbiati Influence of Electrical Contacts Influence of Electrical Contacts on the Performance of on the Performance of Diamond Radiation Detectors Diamond Radiation Detectors Arnaldo Galbiati Arnaldo Galbiati

Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

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Page 1: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Influence of Electrical ContactsInfluence of Electrical Contactson the Performance of on the Performance of

Diamond Radiation DetectorsDiamond Radiation Detectors

Arnaldo GalbiatiArnaldo Galbiati

Page 2: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Research, Development and Production:Research, Development and Production:

• High Energy Physics High Energy Physics • Nuclear and Environmental Monitoring Nuclear and Environmental Monitoring

• Radiotherapy Dosimetry Radiotherapy Dosimetry • Deep UV DetectionDeep UV Detection• Space and AstronomySpace and Astronomy

Page 3: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Intrinsic Material PropertiesIntrinsic Material Properties

Page 4: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Diamond tetrahedronDiamond tetrahedron

(from ww.pdymorf.net/matter14.htm)‏

Page 5: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Poly CVD Cross SectionPoly CVD Cross Section

Page 6: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

First Radiation Detectors (1945)First Radiation Detectors (1945)From Natural Diamond‏From Natural Diamond‏

At that time counting properties were found to be uncontrollable, depending upon the crystal and the type of radiation. Furthermore, charge polarization occurred, leading to a progressive reduction in both counting rate and pulse amplitude as a function of the time of irradiation.P.J. VAN HEERDEN, Thesis Utrecht, 1945.R. HOFSTADTER., Phys. Rev. 73 (1948) 631.Since 1970, the attractive properties of diamond for radiation detection were demonstrated by KOZLOV et al. from mono-crystalline diamond stones of extremely high electronic quality.

Page 7: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Alpha Particle Detection History Alpha Particle Detection History in Diamondin Diamond

Bergonzo et al., Diamond and Related Materials, Volume 10, Issues 3-7, March-July (2001), 631-638

Page 8: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Device Fabrication IssuesDevice Fabrication Issues

1.1. Mechanical Adhesion of the ContactMechanical Adhesion of the Contact (the flatter the surface -> less adhesion)‏(the flatter the surface -> less adhesion)‏

2. 2. Good Injecting Contacts, Polarization FreeGood Injecting Contacts, Polarization Free (high work function metals, B doped layer)‏(high work function metals, B doped layer)‏

3. 3. Stability, Reproducibility, DurabilityStability, Reproducibility, Durability

Page 9: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Page 10: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Device FabricationDevice Fabrication One of the problems encountered when manufacturing semiconductor devices in diamond is the fabrication of low resistance ohmic contacts. Historically, there have been three main approaches to solve this problem and lower the resistivity of the contact:

1. Damaging the diamond surface in order to disrupt the 1. Damaging the diamond surface in order to disrupt the spsp33 bonding. bonding.

2. Using carbide forming metals like titanium or chromium, 2. Using carbide forming metals like titanium or chromium, that create an hybrid metal-diamond interface material.that create an hybrid metal-diamond interface material.

3. Doping of diamond during growth or using ion 3. Doping of diamond during growth or using ion implantation.implantation.

Page 11: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Polarization free contactsPolarization free contactsIt has been observed that polarization phenomena occur when electric currents pass through an insulator crystals.

The bandgap of diamond being large, and the resistivity extremely high the same situation occurs here.

If the electrical contact is not able to extract and inject electrons fast enough, then the neutrality of the crystal after the passage of ionizing nuclear radiations is not restored in the time interval between two consecutive events.

As a result, charge accumulation occurs within the crystal. Immobile carriers establish an electric field which acts in a direction opposite to the applied field produced by the external bias voltage V.

Page 12: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues
Page 13: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Influence of Grain BoundariesInfluence of Grain Boundarieson the Performanceon the Performance

of Diamond Detectorsof Diamond Detectors

Page 14: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Page 15: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Poly CVD Cross SectionPoly CVD Cross Sectionwith Interdigitated Contactswith Interdigitated Contacts

Page 16: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Calculated Electric Field ProfileCalculated Electric Field Profile

Sellin et al, IEEE Transactions in Nuclear Science, vol 48/6 (2001)‏

Page 17: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Page 18: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Page 19: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Page 20: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Ion Beam Induced Charge (IBIC)‏Ion Beam Induced Charge (IBIC)‏Single Crystallite SpectrumSingle Crystallite Spectrum

Page 21: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Influence of Metal-DiamondInfluence of Metal-Diamond Interface on the PerformanceInterface on the Performance

of Diamond Detectorsof Diamond Detectors

Page 22: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

The RC time constant associated with contact resistance can limit the frequency response of devices. The establishment of a contact fabrication methodology is a critical part of the technological development of any new semiconductor. Electromigration and delamination at contacts are also a limitation on the lifetime of electronic devices.

Page 23: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Page 24: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Sellin et al, IEEE Transactions in Nuclear Science, vol 48/6 (2001)‏

Page 25: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Cr 4.5 eVTi 4.3 eVAl 4.1 eV

Au 5.1 eV

Diamond4.8-5.8 eV

Page 26: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

T

Diamond Work Function Hydrogen chemisorbed diamond surface showed a minimum work function value of 4.8 eV. Oxygen chemisorbed diamond surface, which showed a maximum work function value of 5.8 eV. The surface potential value, which corresponds to the surface work function value, was strongly influenced by the species of the chemisorption on the diamond surface. The surface work functions were strongly correlated with the surface electronic states. A change of the chemisorbed species on the surface sensitively affected the surface work function.

H Gamo et al., Journal of Physics: Conference Series 61 (2007) 327–331

Page 27: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

When two metals are electrically isolated from each other, an arbitrary potential difference may exist between them. However, when two different metals are brought into contact, electrons will flow from the metal with a lower work function to the metal with the higher work function

If two metals having differing work functions are touched together, one steals electrons from the other, and the opposite net charges grow larger and larger; this is the Volta effect. The process is halted when the voltage between the two metals reaches a particular value (the difference in work function values; usually less than one volt.)‏

If metal touches a semiconductive material, or if two different semiconductors are placed into contact, one becomes charged slightly positive and the other slightly negative. It is found that if this junction between semiconductors is connected to a power supply, and if the power supply is set to a voltage slightly higher than the natural voltage appearing because of contact electrification, then for one polarity of voltage there will be a current between the two semiconductor parts, but if the polarity is reversed, the current stops.

Page 28: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Page 29: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

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Chromium-Au Contacts Chromium-Au Contacts 30 kVp X-ray Response30 kVp X-ray Response

Page 30: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Graphitised-Boron Doped Graphitised-Boron Doped Contacts Contacts

Page 31: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

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Graphitised-Boron Doped Contacts Graphitised-Boron Doped Contacts 30 kVp X-ray Response30 kVp X-ray Response

Page 32: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Graphitised-Boron Doped Contacts Graphitised-Boron Doped Contacts 30 kVp X-ray Response30 kVp X-ray Response

Page 33: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

I-V CharacteristicI-V Characteristic

Page 34: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Response under Sr-90 eResponse under Sr-90 e --

Page 35: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Single Pulse under Am-241Single Pulse under Am-2415.5 MeV5.5 MeV α− α−particlesparticles

In Collaboration with University of Huelva-CNA Sevilla

Page 36: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Response under Am-241Response under Am-2415.5 MeV 5.5 MeV αα-particles-particles

In Collaboration with University of Huelva-CNA Sevilla

Page 37: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

Response under Am-241Response under Am-2415.5 MeV 5.5 MeV αα-particles-particles

In Collaboration with University of Huelva-CNA Sevilla

Page 38: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

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UV ResponseUV Response(Cr/Au contact)(Cr/Au contact)

Page 39: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

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UV ResponseUV Response(Cr/Au contact)(Cr/Au contact)

Page 40: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

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UV ResponseUV Response(TiW contact)(TiW contact)

Page 41: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

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Next positive biases were applied (500V, 250V, 100V, 50V, 10V). For these biases the sampleshowed very good behavior under irradiation. For example, considering a bias of 100V the sampleshows very fast response while the source is switched on/off, absence of priming effect and verylow fluctuation of the signal (that is below 0.5%). The signal to noise ratio is very high and aboutS/N ~ 3.3⋅104.

0 100 200 300 400 500

0,0

5,0x10-9

1,0x10-8

1,5x10-8

2,0x10-8

2,5x10-8

3,0x10-8

Cur

rent

(A)

time(s)

5min irradiation

@100V

0 100 200 300 400 500

0,0

5,0x10-9

1,0x10-8

1,5x10-8

2,0x10-8

2,5x10-8

3,0x10-8

Cu

rre

nt(

A)

time(s)

5min irradiation

@100V

The response velocity of the sample was checked recording the data every 0.2 seconds. It is possibleto see that when the source is switched on the sample reach the stabilization in a time that is lessthen 0.2 seconds.

In Collaboration with Krakow IFJ PAN

DDL Contact DDL Contact Radiotherapy DosimetryRadiotherapy Dosimetry

Co 60 ResponseCo 60 Response

Page 42: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

3 4 5 6 7 8 9 10

0,0

1,0x10-8

2,0x10-8

3,0x10-8

I(A

)

t(s)

100VRaise Time: 0.5s

In Collaboration with Krakow IFJ PAN

DDL Contact DDL Contact Radiotherapy DosimetryRadiotherapy Dosimetry

Co 60 ResponseCo 60 Response

Page 43: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

Arnaldo Galbiati

To check the repeatability of the signal, one measurement was repeated several times at the sameoperating conditions. Each measurement in this case lasts one minute with a break of about 10seconds. Taking the integral of each pulsed irradiation and averaging the values of area a coefficientof repeatability below 0.5% was found.

0 100 200 300 400 500 600 700

0,0

5,0x10-9

1,0x10-8

1,5x10-8

2,0x10-8

2,5x10-8

3,0x10-8

Cu

rre

nt(

A)

time(s)

Repeatability

@100V

In Collaboration with Krakow IFJ PAN

DDL Contact DDL Contact Radiotherapy DosimetryRadiotherapy Dosimetry

Co 60 ResponseCo 60 Response

Page 44: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

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0,0 0,5 1,0 1,5 2,0 2,5 3,0

1,0x10-8

2,0x10-8

3,0x10-8

4,0x10-8

5,0x10-8

6,0x10-8

7,0x10-8

8,0x10-8

Cur

rent

(A

)

Dose Rate (Gy/min)

Dose rate linearity

@100V

In Collaboration with Krakow IFJ PAN

DDL Contact DDL Contact Radiotherapy DosimetryRadiotherapy Dosimetry

Co 60 ResponseCo 60 Response

Page 45: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

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DDL DDL Diamond Phototransistor Diamond Phototransistor

Page 46: Influence of Electrical Contacts on the Performance …Arnaldo Galbiati Alpha Particle Detection History in Diamond Bergonzo et al., Diamond and Related Materials, Volume 10, Issues

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Conclusions:Conclusions:

We have a different device We have a different device according to the according to the

metallization used!metallization used!