Diamond Electronics— Fundamentals to Applicationsassets.cambridge.org/97811074/08807/frontmatter/9781107408807... · Edited by Philippe Bergonzo, Roy Gat, Richard B. Jackman and

Diamond Electronics—Fundamentals to Applications

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Cambridge University Press978-1-107-40880-7 - Diamond Electronics—Fundamentals to Applications: Symposium held November 27-30, 2006, Boston, Massachusetts, U.S.A.Edited by Philippe Bergonzo, Roy Gat, Richard B. Jackman and Christoph E. NebelFrontmatterMore information

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MATERIALS RESEARCH SOCIETYSYMPOSIUM PROCEEDINGS VOLUME 956

Diamond Electronics—Fundamentals to Applications

Symposium held November 27-30, 2006, Boston, Massachusetts, U.S.A.

EDITORS:

Philippe BergonzoCEA, LIST

Centre d'Etudes de SaclayGif-sur-Yvette, France

Roy GatCoating Technology Solutions Inc.Somerville, Massachusetts, U.S.A.

Richard B. JackmanLondon Centre for Nanotechnology

University College LondonLondon, United Kingdom

Christoph E. NebelDiamond Research Center, AIST

Tsukuba, Japan

IMIRIS1Materials Research Society

Warrendale, Pennsylvania






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CONTENTS

Preface xi

Materials Research Society Symposium Proceedings xii

** Thinking About Diamond 1A. Marshall Stoneham

** Assembling the Building Blocks for Diamond Electronics 11William Joseph Yost

** Lift-Off Process to Get Free-Standing High-QualitySingle Crystal Diamond Films and Suspended SingleCrystal Diamond Devices 25

Jie Yang, C.F. Wang, E.L. Hu, and James E. Butler

* Color Centers in Diamond as Practical Single-PhotonSource to Illustrate Quantum Complementarity 31

Vincent Jacques, Steven Regnnie, Dominique Chauvat,and Jean-Francois Roch

* Electronic Structures of Heavily Boron-Doped SuperconductingDiamond Films 39

Takayoshi Yokoya, Hiroyuki Okazaki, Tetsuya Nakamura,Tomohiro Matsushita, Takayuki Muro, Eiji Ikenaga,Masaaki Kobata, Keisuke Kobayashi, Akihisa Takeuchi,Akihiro Awaji, Yoshihiko Takano, Masanori Nagao,Tomohiro Takenouchi, Hiroshi Kawarada, and Tamio Oguchi

* Electrical Transport in Heavily B-Doped Epitaxial DiamondandNCD 47

Milos Nesladek, Philippe Bergonzo, Jiri Mares, andPavel Hubik

* n-Type Doping of Diamond 55Satoshi Koizumi

Electron-Beam-Induced Dissociation of Boron-DeuteriumPairs in Diamond 61

Julien Barjon, Jacques Chevallier, Francois Jomard,Celine Baron, and Alain Deneuville

**Keynote Paper

* Invited Paper

v









Attempts to p-Dope Ultrananocrystalline Diamond Filmsin a Hot Filament Reactor... 67

Paul William May and Matthew Hannaway

Energetics, Electronic Properties, and Geometries ofB-Doped Diamond: A First-Principles Study 75

Susumu Saito, Tomohisa Maeda, and Takashi Miyake

Surface Bio-Functionalization of Boron Doped Diamond 81Mathias Bonnauron, Charles Agnes, Pascal Mailley,Jean-Charles Arnault, Jacques de Sanoit, Christine Mer,Licinio Rocha, Philippe Bergonzo, Milos Nesladek,Frank Omnes, and Omar Elmazria

* Electrochemical Charge Transfer to Diamond 89Vidhya Chakrapani, John C. Angus, Alfred B. Anderson,and Gamini U. Sumanasekera

* Surface and Electrochemical Studies of Thin Film Diamond 97John Foord and David Opperman

Simple and Effective Way to Improve the Stability ofTitanium Based Boron Doped Diamond Film Electrode 105

Liang Guo and Guohua Chen

DNA Bonding to CVD Diamond Probed by ScanningElectron-, Fluorescence-, and Atomic Force-Microscopy 113

Christoph E. Nebel, Hiroshi Uetsuka, Buhuslav Rezek,Dongchan Shin, Norio Tokuda, and Takako Nakamura

* Biological Applications of Nanocrystalline Diamond 121Oliver A. Williams, Michael Daenen, and Ken Haenen

The Mechanism for Ultrananocrystalline Diamond Growth:Experimental and Theoretical Studies 127

Paul William May and Yuri A. Mankelevich

* Enhancing Semiconductors With Diamond 135Jerry W. Zimmer

Synthesis of Sub-Micron Diamond Films on Si(100) forThermal Applications by BEN-MPCVD 143

Samuel Saada, Jean-Charles Arnault, Licinio Rocha,and Philippe Bergonzo

*Invited Paper

VI









The Effects of Methane Concentration on DiamondNucleation and Growth During Bias Enhanced Nucleationon 3C-SiC(100) Surfaces 151

Jean-Charles Arnault, Samuel Saada, Luciana Intiso, andPhilippe Bergonzo

Electrical Transport and Defect Spectroscopy of FreeStanding Single Crystal CVD Diamond Prepared FromMethane Rich Mixtures 157

Andrey Bogdan, Ganna Bogdan, Ward De Ceuninck,Ken Haenen, and Milos Nesladek

Nano Crystalline Diamond Synthesized by Hot FilamentChemical Vapor Deposition 165

Takayuki Hirai, Yoshinori Kanno, and Yoshiki Takagi

Highly Oriented Diamond Films Grown at High GrowthRate 171

Xianglin Li, Ramon Collazo, and Zlatko Sitar

Single Crystal CVD Diamond Growth and Characterizations 177Nicolas Olivier Tranchant, Dominique Tromson,Zdenek Remes, Licinio Rocha, Milos Nesladek, andPhilippe Bergonzo

Improving Diamond Device Performances for Pulsed ModeDetection 183

Hassen Hamrita, Dominique Tromson, Caroline Descamps,Christine Mer, Milos Nesladek, and Philippe Bergonzo

Synthetic Diamond Devices for Radiotherapy Applications:Passive and Active Dosimetry 189

Caroline Descamps, Dominique Tromson, Christine Mer,Milos Nesladek, and Philippe Bergonzo

High Efficiency Heat Sinks From Polycrystalline DiamondGrown by CVD Method 195

Oleg A. Voronov, Gary S. Tompa, and Veronika Veress

Diamond Surface Modifications With Diazonium Salt 201Hiroshi Uetsuka, Dongchan Shin, Norio Tokuda,Kazuhiko Saeki, and Christoph E. Nebel

vn









Photoelectron Emission Mechanism From HydrogenTerminated Nano-Crystalline Diamond 209

Daisuke Takeuchi, Kazuhiko Saeki, Christoph Erwin Nebel,Satoshi Yamasaki, and Oliver Aneurin Williams

Electron Emission Mechanism of Doped CVD DiamondCharacterized Using Combined XPS/UPS/FES System 215

Hisato Yamaguchi, Ichitaro Saito, Yuki Kudo,Tomoaki Masuzawa, Takatoshi Yamada,Masato Kudo, Yuji Takakuwa, and Ken Okano

Diamond Based Ion-Sensitive Field Effect Transistors forCellular Biosensing 221

Andrew Bennett, Olivier Gaudin, Oliver A. Williams,John S. Foord, and Richard B. Jackman

DNA-ISFETs From Single Crystalline Diamond 229Christoph E. Nebel, Dongchan Shin,Tomoko Yamamoto, and Takako Nakamura

Irradiation-Induced Structural Modifications inMultifunctional Nanocarbons 235

Sanju Gupta

Nanofabrication of Diamond-Like Carbon Templatesfor Nanoimprint Lithography 243

L. Tao, S. Ramachandran, C.T. Nelson, LJ. Overzet,MJ. Goeckner, G.S. Lee, and W. Hu

Diamond-Like Carbon Film Deposition on an ArtificialHeart Blood Pump Using a Flexible Type Electrode Withr.f. Plasma CVD Processing 249

Kazuya Kanasugi, Yasuharu Ohgoe, Katsuya Tsuchimoto,Keisuke Sato, Kenji K. Hirakuri, Osamu Miyashita,Akio Funakubo, and Yasuhiro Fukui

Comparing the Young's Modulus of Near-FrictionlessCarbon Films Obtained From Different Methods 255

Bo Zhou, Barton C. Prorok, AH Erdemir, andO. Eryilmaz

Low Threshold Field Emission From Amorphous CarbonFilms Grown by Electrochemical Deposition 261

Hideo Kiyota, Mikiteru Higashi, Tateki Kurosu, andMasamori Iida

Vlll









Effects of High d.c. Bias Voltage on the Properties ofDiamond-Like Carbon Films 267

Boqian Yang, Hongxin Zhang, Xinpeng Wang, andXianping Feng

Device Simulation and Design Optimization for DiamondBased Insulated-Gate Bipolar Transistors 275

Haitao Ye, Niall Tumilty, David Garner, andRichard B. Jackman

Author Index 281

Subject Index 283

IX

















PREFACE

It has been many years since MRS has held a symposium explicitly looking into the materialsscience of diamond, and yet there have always been many diamond papers to be found within thePrograms of both the MRS Spring and Fall Meetings. Moreover, there have been some impressivedevelopments in the diamond field over the last few years, especially in the potential for diamondas a useful electronic material. It was on this basis that Symposium J, "Diamond Electronics—Fundamentals to Applications" was held November 27-30 at the 2006 MRS Fall Meeting inBoston, Massachusetts.

The symposium was a great success with over 100 papers being presented in topics spanningthe fundamentals of the growth and characterization of diamond, nanocrystalline diamond anddiamond-like carbon, how we can dope the various forms of diamond to make them n-type, p-typeor even superconduct, the type of surface chemistry displayed by diamond in both gaseous andliquid environments, the types of defect centers that form in diamond and how we might controlspin states within diamond. At the more applied end of this field, papers addressing the formationof chemical and biochemical sensors were presented, alongside those discussing diamond diodes,transistors, radiation detectors and photodetectors. A particular highlight was a session dedicated tothe use of diamond within quantum information processing, both for computing applications andothers such as cryptography. It was also refreshing to see how industrial companies were nowtaking diamond electronics seriously, with, for example, the announcement during the Meeting ofthe formation of one such company specifically for the commercialization of diamond microwavedevices. Of course, there was much more besides all this... indeed this proceedings volume containsalmost half of the presented papers, and gives a good overview of the topics covered.

The organizers would like to thank the staff and officers of MRS for their very efficienthandling of all aspects of the symposium, which made our job so easy. We would also like to thankthe authors within this volume for their timely submission of some very interesting papers. Thesymposium benefited enormously from the generosity of our sponsors:

Apollo DiamondCEA-LISTHarris InternationalSeki Technotron USASp3 Diamond Technologies

all who are gratefully acknowledged.

"Diamond Electronics—Fundamentals to Applications II" will be held as Symposium P duringthe 2007 MRS Fall Meeting. We hope to see you there.

Philippe BergonzoRoy GatRichard B. JackmanChristoph E. Nebel

March 2007

XI









MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 947E—Responsive Soft Matter—Chemistry and Physics for Assemblages, Films and Forms,R.A. Vaia, J. Genzer, G.H. McKinley, N. Tabiryan, 2007, ISBN 978-1-55899-904-6

Volume 948E—Structure, Processing and Properties of Polymer Nanofibers for Emerging Technologies,2007, ISBN 978-1-55899-905-3

Volume 949E— Smart Dielectric Polymer Properties, Characterization and Their Devices, V. Bharti, Z. Cheng,Q.M. Zhang, Y. Bar-Cohen, G.M. Sessler, 2007, ISBN 978-1-55899-906-0

Volume 950E—Biosurfaces and Biointerfaces, 2007, ISBN 978-1-55899-907-7Volume 95IE—Nanofunctional Materials, Nanostructures and Novel Devices for Biological and Chemical

Detection, A. Zribi, C. Li, L. Nagahara, M. Willander, 2007, ISBN 978-1-55899-908-4Volume 952E—Integrated Nanosensors, B. Ash, 2007, ISBN 978-1-55899-909-1Volume 953E—Fibrillar Aggregates as Materials—Assembly, Properties and Applications, M. Upmanyu,

L. Mahadevan, C. MacPhee, J.V. Selinger, 2007, ISBN 978-1-55899-910-7Volume 954E—Biofilm-Material Interactions—New Tools, Technologies and Opportunities, M. Libera,

T. Camesano, B. Kreiswirth, P. Li, R.G. Richards, 2007, ISBN 978-1-55899-911-4Volume 955E—Advances in III-V Nitride Semiconductor Materials and Devices, C.R. Abernathy, H. Jiang,

J.M. Zavada, 2007, ISBN 978-1-55899-912-1Volume 956— Diamond Electronics—Fundamentals to Applications, P. Bergonzo, R. Gat, R.B. Jackman,

C.E. Nebel, 2007, ISBN 978-1-55899-913-8Volume 957— Zinc Oxide and Related Materials, J. Christen, C. Jagadish, D.C. Look, T. Yao, F. Bertram,

2007, ISBN 978-1-55899-914-5Volume 958— Group IV Semiconductor Nanostructures—2006, L. Tsybeskov, DJ. Lockwood, C. Delerue,

M. Ichikawa, A.W. van Buuren, 2007, ISBN 978-1-55899-915-2Volume 959E—Quantum Dots—Growth, Behavior and Applications, E.A. Stach, C.R. Taylor, Z.M. Wang,

Q-K. Xue, 2007, ISBN 978-1-55899-916-9Volume 960E— Self Assembly of Nanostructures Aided by Ion- or Photon-Beam Irradiation—Fundamentals

and Applications, R. Kalyanaraman, U. Valbusa, Z. Zhang, 2007, ISBN 978-1-55899-917-6Volume 96IE—Nanostructured and Patterned Materials for Information Storage, Z.Z. Bandic, M. Rooks,

R. Berger, T. Ando, 2007, ISBN 978-1-55899-918-3Volume 962E—Nanoscale Magnets—Synthesis, Self-Assembly, Properties and Applications, J. Fassbender,

J. Chapman, C.A. Ross, 2007, ISBN 978-1-55899-919-0Volume 963E—Nanowires and Carbon Nanotubes—Science and Applications, P. Bandaru, M. Endo,

LA. Kinloch, A.M. Rao, 2007, ISBN 978-1-55899-920-6Volume 964E—Meta-Materials at the Milli-, Micro- and Nanoscale, R. Ramprasad, J. Page, P. Renaud,

P. Mangat, 2007, ISBN 978-1-55899-921-3Volume 965E—Organic Electronics—Materials, Devices and Applications, F. So, G.B. Blanchet, Y. Ohmori,

2007, ISBN 978-1-55899-922-0Volume 966E—Ferroelectrics and Multiferroics, V. Gopalan, J-P. Maria, M. Fiebig, C-W. Nan, 2007,

ISBN 978-1-55899-923-7Volume 967E—Advances in In Situ Characterization of Film Growth and Interface Processes, V. Matias,

R. Hammond, G. Rijnders, D. Schlom, 2007, ISBN 978-1-55899-924-4Volume 968— Advanced Electronic Packaging, V.P. Atluri, S. Sharan, C.P. Wong, D. Frear, 2007,

ISBN 978-1-55899-925-1









MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 969— Heterogeneous Integration of Materials for Passive Components and Smart Systems, 2007,ISBN 978-1-55899-926-8

Volume 970— Enabling Technologies for 3-D Integration, C.A. Bower, P.E. Garrou, P. Ramm, K. Takahashi,2007, ISBN 978-1-55899-927-5

Volume 97IE—Hydrogen Storage Technologies, J-C. Zhao, I.M. Robertson, S-I. Orimo, 2007,ISBN 978-1-55899-928-2

Volume 972— Solid-State Ionics—E. Traversa, T.R. Armstrong, C. Masquelier, Y. Sadaoka, 2007,ISBN 978-1-55899-929-9

Volume 973E—Mobile Energy, A. Nathan, G. Amaratunga, M. Nookala, L.G. Scanlon, E. Morinobu, 2007,ISBN 978-1-55899-930-5

Volume 974E—Solar Energy Conversion, M. Beard, 2007, ISBN 978-1-55899-931-2Volume 975E—Mechanics of Biological and Bio-Inspired Materials, K. Katti, C. Hellmich, C. Viney,

U. Wegst, 2007, ISBN 978-1-55899-932-9Volume 976E—Size Effects in the Deformation of Materials—Experiments and Modeling, E. Lilleodden,

P. Besser, L. Levine, A. Needleman, 2007, ISBN 978-1-55899-933-6Volume 977E—Processing-Structure-Mechanical Property Relations in Composite Materials, L. Thilly,

N.R. Moody, A. Misra, P.M. Anderson, M. Kumar, 2007, ISBN 978-1-55899-934-3Volume 978E—Multiscale Modeling of Materials, R. Devanathan, M.J. Caturla, A. Kubota, A. Chartier,

S. Phillpot, 2007, ISBN 978-1-55899-935-0Volume 979E—Thermodynamics and Kinetics of Phase Transformations in Inorganic Materials, C. Ambromeit,

P. Bellon, J-L. Bocquet, D.N. Seidman, 2007, ISBN 978-1-55899-936-7Volume 980— Advanced Intermetallic-Based Alloys, J. Wiezorek, C.L. Fu, M. Takeyama, D. Morris,

H. Clemens, 2007, ISBN 978-1-55899-937-4Volume 98IE— Structural and Refractory Materials for Fusion and Fission Technologies, J. Aktaa, M. Samaras,

M. Serrano de Caro, M. Victoria, B. Wirth, 2007, ISBN 978-1-55899-938-1Volume 982E—Electron Microscopy Across Hard and Soft Materials, T.J. Balk, A. Minor, A. Porter, J. Plitzko,

2007, ISBN 978-1-55899-939-8Volume 983E—Focused Ion Beams for Analysis and Processing, W. MoberlyChan, H. Colijn, R. Langford,

A. Marshall, 2007, ISBN 978-1-55899-940-4Volume 984E—Magnetic Resonance in Material Science, J. Herberg, Y. Wu, P. Grandinetti, S. Hayes, I. Farnan,

2007, ISBN 978-1-55899-941-1Volume 985— Scientific Basis for Nuclear Waste Management XXX, D.S. Dunn, C. Poinssot, B. Begg, 2007,

ISBN 978-1-55899-942-8Volume 986— Actinides 2006—Basic Science, Applications and Technology, K.J.M. Blobaum, E.A. Chandler,

L. Havela, M.B. Maple, M.P. Neu, 2007, ISBN 978-1-55899-943-5Volume 987— Materials Research at High Pressure, M.R. Manaa, A.F. Goncharov, R. J. Hemley, R. Bini,

2007, ISBN 978-1-55899-944-2Volume 988E—Solid-State Chemistry of Inorganic Materials VI, R. Seshadri, J.W. Kolis, D.B. Mitzi,

M.J. Rosseinsky, 2007, ISBN 978-1-55899-945-9

Prior Materials Research Society Symposium Proceedings available by contacting Materials Research Society









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Diamond Electronics— Fundamentals to Applicationsassets.cambridge.org/97811074/08807/frontmatter/9781107408807... · Edited by Philippe Bergonzo, Roy Gat, Richard B. Jackman and