Upload
others
View
2
Download
0
Embed Size (px)
Citation preview
www.DRAFT.ugent.be
In search for the ultimate model parameters of reactive magnetron
sputtering
K. Strijckmans, W.P. Leroy & D. DeplaResearch Group DRAFT, Ghent University
ww
w.d
raft
.ug
en
t.b
e
2
Outline
1. Introduction
� Reactive Magnetron Sputtering
� Modeling the technique
2. RSD2009 model
� Input
� Output
3. Hysteresis experiments
� Experimental setup
� Aluminium & Yttrium
4. Finding the unknows
� Fit procedure
� Scan algorithm
5. Results
� Setting
� Correlations
� Understanding: a simplification
6. Summary
ww
w.d
raft
.ug
en
t.b
e
3
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
SummaryWidely applied technique BUT flawed by hysteresis effect:
• discharge voltage
• deposition rate
• partial pressure of reactive gas (e.g. O2)
Reactive Magnetron Sputter Deposition (RSD)
Magnetron: enhancing sputtering by magnetic confining electrons around the targetReactive: adding reactive gas(es) to form a compound
ww
w.d
raft
.ug
en
t.b
e
4
Modeling: the approach which meets your needs
e.g. magnetron discharge
Modeling the technique
Technique: dividable in different processes/aspects
• magnetic field
• magnetron discharge (plasma)
• particle-target interaction
• transport in gas phase
• film growth
Our model RSD2009
• an analytical surface
model, originated out of
the Berg model
• describes (steady-state)
hysteresis
• ‘Engine’
� balance equations
� 2nd order reactions
Berg, Thin Solid Films 476 (2005) 215
Depla, J.Phys. D: Appl. Phys.40 (2007) 1957
download RSD2009 free www.draft.ugent.be
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
5
Input of the RSD2009 model
• RSD model describes three parts:
� vacuum chamber by the gas flow balance� target composition� substrate composition
• RSD model parameters
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
6
Input: Experimental determined
• Sputter yield of the metal Ym (EAr(V))
weighting method
• Sticking coefficient αs of O2 on the
substrate
αs =amount of O in deposited layer
amount of arriving O
Saraiva, J.Appl.Phys.107 (2010) 034902
Leroy, Thin Solid Films 518 (2009) 1527
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
7
Input: MC simulations
SRIM models
particle-target interaction
SIMTRA models
metal transport
Ziegler, Nucl. Instr. and Meth. in Phys.
Res. B 219–220 (2004) 1027
Van Aeken, J. Phys D: Appl. Phys.41
(2008) 205307Skew Gaussian fit of implantation profile, counting in:
• incident energy• target composition
∆
−+
∆
−−
∆=
p
p
p
p
p R
Rxerf
R
Rx
Rxp
21
2exp
2
1)( α
π
Multi-cell approach of substrate
download SIMTRA free www.draft.ugent.be
download SRIM free www.srim.org
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
8
Problem: left with 3 unknown parameters
Reason:
• experimental hard to retrieve (k,αt) or big uncertainty (Yc)
• simulated (SRIM) value questionable (Yc)
� although some experimental attempts (αt)
Goal: examine freedom and material dependency of these parameters
Solution: fitting RSD2009 output to experiments
Assumption: no significant dependency on working conditions
Input: Unknowns
Kuschel, J. Appl. Phys. 107 (2010) 103302
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
9
Ouput of the RSD2009 model
� Substrate� Target � Gas flow
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
RSD model gives:
� surface composition of target and substrate� reactive flow consumptions
not easily measurable
ww
w.d
raft
.ug
en
t.b
e
10
Ouput of the RSD2009 model
� Substrate
� Target
� Gas flow
� Pressure
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
RSD model gives:
� surface composition of target and substrate� reactive flow consumptions
� reactive gas pressure
easily measurable
ww
w.d
raft
.ug
en
t.b
e
11
Experimental setup
Sputter conditions:
• Target Al or Y (D = 5.08 cm)
• Process gas Ar
• Reactive gas O2
• S = 55 L/s or 112 L/s
• Pbase = ~10-4 Pa
• PAr = 0.45 Pa or 0.37 Pa
• I = 0.4 A, 0.5 A or 0.6 A
Hysteresis experiment = stepwise in/decreasing the O2 flow while collecting:
• discharge voltage V and current I
• total pressure Ptot = PAr + PO2
steady state values !
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
12
Hysteresis measurements: Al and Y
Aluminium Yttrium
• choice working conditions well-defined critical points
• 3 measurements at fixed currents I=0.4 A, 0.5 A and 0.6 A
• critical points with resolution of 0.1 sccm
• pumping speed S as slope of measurement
S S
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
13
Fitting procedure: how check a set of parameters?
1
2
3 4 5 6
Fit :
• criteria = the 6 critical O2 flow values
• goodness of the fit = worst match out of 6
• fits are ‘good’ if critical points fall within acceptance tolerance
Simulation :
• includes
� measured V and I variation Ym and Iion
� changing target oxidation oxygen implantation profile
Iion (by SEEY)
• limited to experimental measured part
• cuts off at turning point = critical point
(= experimental resolution)
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
14
Scan algorithm: how it works?
Goal: finding all (xi,yi) combinations that pass the fit criteria
Ingredients :
• starting point (Start) found by slightly modified version
• step size (∆x, ∆y)
• parameter boundaries
• fit procedure + acceptance tolerance
• three lists: rejected, accepted and unfinished
Limitation : only for a connected region
Serialimplementation
illustrated for a 2-D
parameter space
(X,Y)
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
15
Results: setting
5 fit parameters :
Scan algorithm :
• 5-D parameter space (Ym, αs, Yc, αt, k)
• parallel implementation one master + many calculation slaves
• acceptance tolerance = 1.5 × experimental resolution (0.1 sccm)
•Parameter Bounds Al Bounds Y Step size
Ym ±10% 5×10-3
αs 0.075 – 0.139 0.187 – 0.273 5×10-3
Yc 0 – 0.1 5×10-4
αt 0 - 1 5×10-3
k 0 - 2×10-22 5×10-25
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
16
Results: correlations
Reaction rate coefficient k – sputter yield oxide Yc
2-D projections (Yc, k) of 5-D
parameter sets (Ym, αs, Yc, αt, k)
acceptance tolerance =
optimal choice of the remaining
parameters (Ym, αs, αt)
• limited (Yc, k) combinations fit
• sputter yield of Y2O3 lower then of Al2O3
• strong relation between Yc and k
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
17
• more freedom in αt
• sticking coefficient αt of Y2O3 higherthen of Al2O3
• no clear relation between k and αt
• lower k higher αt
Reaction rate coefficient k – sticking coefficient αt
Sputter yield oxide Yc - sticking coefficient αt
same structure of acceptance region
because of
k-Yc relation =
higher k higher Yc
What is the nature of this?
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
18
Understanding: a simplification
( ) )(2),(),(),(
),(),(),(
xpIfItxntxkznt
txn
txntxknt
txn
cMOO
MOM
βθ++−=∂
∂
−=∂
∂
RSD2009 – 2nd order reaction
simplification
implantation profile(skewed Gaussian)
Oxygen implantation profile:
• RSD2009 skewed Gaussian
• simplification local uniform
decouple implantation from reaction
Solution:
• RSD2009 numeric
• simplification analytical
( )
S
scsrb
ste
rb
rbs
rbs
rbsrb
Y
Y
Cknf
zYf
zYf
Y
D
IIfF
θθθ
θ
θ
θ
θθ
=
==
−
−
−=
)(
)1(2
)(2ln
)(2
)(),,( 2
0
2
ste
s CIfF =′ ),,( θ
Depla, Springer Series in Material Science 109 (2008) p.193
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
19
Results: comparison RSD2009 and simplification
2
0),,( knIfF s =′ θAluminium Yttrium
23104 −×=k125.0
048.0
1003.6 22
0
=
=
×=
t
cY
n
α 525.0
019.0
1067.3 22
0
=
=
×=
t
cY
n
α
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
20
Results: k – Yc relation?
( )2
2
01ln2
1
c
sY
kn
fD
I=−− θ
00 )(2 znYfn ss >>θ
css YY ≈)(θ
Simplification describes well poissoned mode:
),,( IfF sθ′
Conclusion : k-Yc relation is embedded in RSD2009 model
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
e
21
1. The steady-state RSD2009 model describes accurately
the pressure-flow hysteresis of Al and Y in oxygen
2. The parameters k and Yc are closely correlated which
finds its origin in the model itself
3. The remaining fit freedom is marked out
4. The target sticking coefficient of oxygen on Y showed
to be higher then on Al
5. The sputter yield of Y2O3 showed to be lower then of
Al2O3
Summary:Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary
ww
w.d
raft
.ug
en
t.b
eAcknowledgements
22
DRAFT – colleagues:
Introduction
RSD model
Hysteresisexperiments
Finding the unknows
Results
Summary