Improved TCO materials for the next generation transparent electronics and their complex

investigation by wide range ellipsometry from UV to Mid IR

Institute of Physical Chemistry “Ilie Murgulescu”, Romanian Academy

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Project Director: Dr. Mariuca Gartner

PN II-ID-PCE-IDEI 12/05.10.2011

Transparent conductive oxides (TCO) are materials that exhibit electrical conductivity and high optical transparency together with a wide band-gap. The traditional applications of these materials are flat-panel displays, light-emitting diodes, solar cells, and imaging sensors.

The aim of this project is the preparation by low-cost sol-gel methods of improved TCO (ITO, ZnO) and of new generation of TCO (Nb or V doped TiO2, SrCu2O2) n and p type films with various morphologies on different substrates (silicon, glass and plastics), having a very stable surface.

A complete optical and microstructural characterization of the TCO samples will be performed by ellipsometry in a wide spectral range, from UV to Mid-IR (our IR ellipsometer being the only one available in Romania) and the results will be corroborated with those obtained by complementary methods (UV-VIS, IR and Raman spectroscopy, XRD, XPS, AFM, SEM, TEM, electrical measurements).

A database for optical constants of the TCO investigated materials in the IR range (2-33m), which for the moment is lacking in the literature, will be provided.

In the frame of this project the best films obtained will be used in specific tests for solar-cell application.

Project Summary

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No.Budget category 2011

(lei)2012(lei)

1. Staff expenses 63500.00 333500.00

2. Indirect expenses 16700.00 116700.00

3 Mobilities 0.00 42753.80

4. Logistic costs 20000.00 207246.20

TOTAL 100200.00 700200.00

Budget

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Re

No.Surname and first

name Year of birth

Scientific title Doctorate

1 Zaharescu Maria 1938 Senior Researcher I M.C. Acad, Dr

2 Osiceanu Petre 1949 Senior Researcher I Dr

3 Mihaiu Susana 1952 Senior Researcher II Dr

4 Anastasescu Mihai 1971 Senior Researcher III Dr

5 Predoana Luminita 1973 Senior Researcher III Dr

6 Stoica Mihai 1979 Researcher assistent Dr

7 Stroescu Hermine 1976 Researcher Ph D Student

8 Preda Silviu 1977 Researcher Ph D Student

9 Marin Alexandru 1986 Researcher Ph D Student

10 Penea Cornelia 1962 technician -

Research team

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(2a) Optical and electrical characterization of the ITO films (2b) Stability study of the samples in time and of the optimization routes regarding chemical and physical stabilization of the sample surfaces (2c) Obtaining of n and p-type conduction ITO and ZnO by sol-gel

method

Project objectives in 2011

(1a) Deposition of ITO films by reactive sputtering (1b) Stabilization of the surfaces by thermal treatment of these

samples in N2 atmosphere

Project objectives in 2012

Objectives & activities / Year

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Published papers Influence of the Substrate and Nitrogen Amount on the

Microstructural and Optical Properties of Thin r.f.-Sputtered ZnO Films Treated by Rapid Thermal Annealing, M. Nicolescu, M. Anastasescu, S. Preda, H. Stroescu, M. Stoica, V.S. Teodorescu, E. Aperathitis, M. Modreanu, M. Zaharescu, M. Gartner”, Appl.Surf.Sci., 261 (2012) 815– 823 (FI = 2.103)

Submitted papers Influence of thermal treatment in N2 atmosphere on chemical,

microstructural and optical properties of ITO and ITO:N sputtered thin films, H.Stroescu, M.Anastasescu, S.Preda, M.Nicolescu, M.Stoica, N.Stefan, E. Aperathitis, M.Modreanu, M.Zaharescu, M. Gartner- Thin Solid Films - in print (FI=1.89)

Optical investigations of tin and zinc oxides as TCOs films, Al. Toader, S. Mihaiu, M. Voicescu, M. Anastasescu, H. Stroescu, M. Nicolescu, I. Atkinson, M. Gartner, M. Zaharescu, accepted Proceedings of SPIE, 2012

Scientific contributions based on the results obtained in 2011-2012

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Conferences: oral presentations Influence of thermal treatment in N2 atmosphere on chemical, microstructural and optical properties of ITO

and ITO:N sputtered thin films, H.Stroescu, M.Anastasescu, S.Preda, M.Nicolescu, M.Stoica, N.Stefan, E. Aperathitis, M.Modreanu, M.Zaharescu, M. Gartner- EMRS, Spring Meeting, 13-18 Mai 2012, Strasbourg, Franta

Influence of the Substrate and Nitrogen Amount on the Microstructural and Optical Properties of Thin r.f.-Sputtered ZnO Films Treated by Rapid Thermal Annealing, M.Nicolescu, M. Anastasescu, S.Preda, H.Stroescu, M.Stoica, V.S.Teodorescu, E.Aperathitis, M. Modreanu, M.Zaharescu, M.Gartner”, JVC-14 / EVC-12 / AMDVG-11 / CroSloVM-19 conference, 3-8 Iunie 2012, Dubrovnik, Croatia.

Optical investigations of tin and zinc oxides as TCOs films, Al. Toader, S. Mihaiu, M. Voicescu, M. Anastasescu, H. Stroescu, M. Nicolescu, I. Atkinson, M. Gartner, M. Zaharescu, Atom-2012, 23-26 August, Constanta, Romania

Transparent Conductive Oxides (TCO) - properties and stability studies, M. Anastasescu, M. Nicolescu, S. Preda, H. Stroescu, M. Stoica, E. Aperathitis, V. Kampylafka, M. Modreanu, M. Zaharescu, M.Gartner, ”Current trends and advanced ellipsometry and all X-ray techniques for the characterization of TCO, BIO and other nanostructured materials” workshop, 12-14,Septembrie 2012, Bucuresti, Romania

TCO sol-gel films based on tin and zinc oxides, Al. Toader, S. Mihaiu, M. Voicescu, M. Anastasescu, H. Stroescu, M. Nicolescu, I. Atkinson, M. Gartner and M. Zaharescu, ”Current trends and advanced ellipsometry and all X-ray techniques for the characterization of TCO, BIO and other nanostructured materials” workshop, 12-14,Septembrie 2012, Bucuresti, Romania

Preparation and Characterization of Nanostructured ZnO Thin Films for Solar Cell Application, E. P. Zaretskaya , V.A. Ivanov, V.B. Zalesski, M. Stoica, M. Nicolescu, M. Gartner, International Conference on Modern Applications of Nanotechnology, 27-29 June 2012, Minsk , Belarus

Scientific contributions based on the results obtained in 2011-2012

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Conferences: poster presentations The stability of the ITO sputtering films by thermal treatment in N2 atmosphere, H. Stroescu, E. Aperathitis P.Osiceanu, M.

Anastasescu, A.Marin, M. Modreanu, O. Buiu, M. Gartner, "7th Workshop Ellipsometry", 4-8 Martie, 2012, Leipzig, Germania

Investigation of the surface chemistry of ITO / ITON thin films before and after N2 passivation, A. Marin, E. Aperathitis, P. Osiceanu, S.Preda, M. Modreanu, M. Gartner, M. Zaharescu, EMRS, Spring Meeting, 13-18 Mai 2012, Strasbourg, Franta

Structural Characterization of Different TCO films obtained by various vacuum deposition method, S.Preda, M.Gartner, S.Mihaiu, L. Predoana, M. Zaharescu, JVC-14 / EVC- 12 / AMDVG-11 / CroSloVM-19 conference, 3-8 Iunie 2012, Dubrovnik, Croatia

Structural, morphological and optical properties of SrCu2O2 thin films, M. Stoica, H. Stroescu, M. Anastasescu, M. Modreanu, N. Jamond, G. Garry, M. Gartner, JVC-14 / EVC- 12 / AMDVG-11 / CroSloVM-19 conference, 3-8 Iunie 2012, Dubrovnik, Croatia

Optical investigations of tin and zinc oxides as TCO’s films, Al. Toader, S. Mihaiu, S.Preda, M. Gartner, I. Atkinson and M. Zaharescu, Atom-2012, 23-26 August, Constanta, Romania

Nitrogen evolution during annealing of sputtering Indium Tin Oxide films studied by XPS, A. Marin, P. Osiceanu, E. Aperathitis, A. Szekeres, M. Modreanu, M. Gartner, "17th International School on Condensed Matter Physics", 2-8 Septembrie, Varna, Bulgaria

Optical, structural and chemical study of TCO thin film after chemical and physical treatment, H. Stroescu, M. Nicolescu, M. Anastasescu, M. Stoica, A. Marin, P. Osiceanu, M. Modreanu, E. Aperathitis and M. Gartner, "17th International School on Condensed Matter Physics", 2-8 Septembrie, Varna, Bulgaria

Surface chemistry of RF-sputtering Indium Tin Oxide and Indium Tin Oxynitride thin films, A. Marin, P. Osiceanu, E. Aperathitis, A. Szekeres, M. Modreanu, M. Gartner,”Current trends and advanced ellipsometry and all X-ray techniques for the characterization of TCO, BIO and other nanostructured materials” workshop, 12-14, Septembrie 2012, Bucuresti, Romania

AFM, XPS and ellipsometric observations on ITO thin film versus annealing type, H. Stroescu, M. Nicolescu, M. Anastasescu, M. Stoica, A. Marin, P. Osiceanu, M. Modreanu, E. Aperathitis and M. Gartner, ”Current trends and advanced ellipsometry and all X-ray techniques for the characterization of TCO, BIO and other nanostructured materials” workshop, 12-14, Septembrie 2012, Bucuresti, Romania

Scientific contributions based on the results obtained in 2011-2012

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