DrypumpsiH/iL SeriesiH/iL Series

The 1st Choice for vacuum solutions

CORPORATE HEADQUARTERS

BOC Edwards

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Crawley

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SEMI S2

Visit the BOC Edwards website at:www.bocedwards.com

Or email us at:info@bocedwards.com

Visit our other websites at:www.xpertfabservices.comwww.semiserve.com

Visit the BOC Edwards website at:BOC Edwards is a trading name used by affiliate companies of the BOC Group plc.The stripe symbol is a trademark of the BOC Group plc.Publication no:A533-85-895

(505)872-0037idealvac.com

idealvac.com

The 1st Choice for vacuum solutions

SEMI S2

SEMICONDUCTOR INDUSTRY

STANDARDS COMPLIANCE

The iH & iL Series Drypumps comply withinternationally recognised semiconductor industry

standards: SEMI S2-200 (Semiconductor Equipment& Materials International), ETL (Energy Technology

Laboratories), which conforms to UL Standard3101-1, and CE (European Community Mark).

Support

BOC Edwards service operates in every major semiconductor regionworld wide – ensuring you have local support wherever you are.

Building on our product leadership position and our widening base of strategicalliances, we have developed our FABMAX support programme. FABMAXincludes a full range of support services from design and project managementthrough to on and off site material and hardware support.

With over 700 fully qualified service personnel and a site presence at nearly 100 fabsin 12 countries, FABMAX will contribute to your success where ever you may be.

BOC Edwards is a world leader in process-enabling equipment, materials andservices for the semiconductor industry. A truly global business, it operates inevery major semiconductor manufacturing region, employs 5000 people and hasannual sales in excess of $1b.

BOC Edwards is unique in offering a single source of technological expertise,innovative products and services to semiconductor device makers and processtool manufacturers. These include vacuum pumps, exhaust management systems,chemical management systems, bulk and process gases, temperature control units,waste management systems, monitoring and control, design and projectmanagement, on-site services and component cleaning.

iH Series Drypumps provide proven high reliability and low cost of ownership fordifficult processes such as etch, PECVD and LPCVD where particulate,condensable and corrosive by-products are present.

iL Series Drypumps provide very low cost of ownership and high reliability forclean and light duty processes.

iH & iL Benefits

Proven high reliabilityThe iH & iL Series Drypumps have been specificallydesigned to provide reliable operation over a wide range ofapplications.

The unique cantilevered shaft design eliminates bearingsfrom the high vacuum end of the drypump and booster.

In addition to the cantilevered design, a high operatingtemperature and specially profiled rotors make the iH Series ideally suited to tough deposition and etchprocesses.

Low cost of ownershipThe iH & iL Series have been designed to minimise cost ofownership. Power and nitrogen requirements have beensignificantly reduced and cooling water usage has beenminimised.

iH & iL Series require zero maintenance between overhauls,eliminating expensive periodic servicing and downtime.

Small footprintiH & iL Series have been designed to feature a small

footprint, saving valuable fab floor space.

The pumps can be stacked to further minimise floor spacerequirements.

c

iH & iL ApplicationsThe design of iH & iL Series Drypumps has been theculmination of nearly 20 years’ experience in drypumping andfield experience from over 70,000 installed drypumps world-wide. iH & iL Series are now the pumps of choice for theworld’s first 300mm production lines.

iH & iL Series operate under the most arduous conditions inthe world’s top wafer manufacturing plants and have beenproven to require zero periodic maintenance. The iH & iLSeries provide application specific solutions for the full rangeof semiconductor fabrication processes.

iL & iLN SeriesiL Series pumps have been designed for clean applicationssuch as load lock and transfer chambers and feature zeronitrogen consumption.

iLN Series pumps feature shaft seal nitrogen purge capabilityideal for light duty applications such as dielectric etch.

iH SeriesThe iH Series provides vacuum pumping solutions for a widerange of applications including the most difficult processessuch as metal etch, PECVD and LPCVD.

SpecificationsiL70/iL70N iL600/iL600N

50 Hz 60 Hz 50 Hz 60 Hz

• Peak speed m3h-1 70 84 518 600cfm 41 49 305 353l min-1 1166 1400 8635 10000

• Ultimate vacuum mbar 5 x 10-2 3 x 10-2 3 x 10-3 2 x 10-3

torr 3.8 x 10-2 2.3 x 10-2 2.3 x 10-3 1.5 x 10-3

Pa 5 3 0.3 0.2• Typical iL shaft seal nitrogen flow slm 0 0 0 0• Typical iLN shaft seal nitrogen flow slm 4 4 4 4• Inlet connection - ISO63 ISO63 ISO100 ISO100• Outlet connection - NW40 NW40 NW40 NW40• Typical cooling water l h-1 90 90 150 150

flow at 15 psi pressure drop l min-1 1.5 1.5 2.5 2.5• Weight kg 230 230 405 405• Power input at ultimate kW 1.3 1.5 1.8 2.0• Rated motor power kW 1.8 2.2 3.6 4.4• Oil capacity l 0.75 0.75 1.5 1.5

Pumping Speed Curves - iL600/iL600N

____________ 60 Hz _ _ _ _ _ _ _ _ 50 Hz

Pumping Speed Curves - iL70/iL70N

10

210

10

10

mh-1

3

10 1010

0

-4

1

-3

10 3

1010 mbar-2 -1 0 1010 1 2 3

10 -2 1010 -1 10 100 101 10102 3 Pa4 5

spee

d

pressure

10-410

0

10 1

10-13

min

ft

2

10 3

10 -3 10 -2 10 -1 10 0 110 10 102 torr3

spee

d

pressure

____________ 60 Hz _ _ _ _ _ _ _ _ 50 Hz

iL Technical Data

All figures are typical

iL70/iL70N

iL600/iL600N

A

B

iL70/iL70N

iL600/ iL600N

iL Dimensions

1 INLET

2 OUTLET

3 AIR EXTRACTION PORT

A SIDE VIEW

B PLAN VIEW

B

A 916

723

640141

526529

310

661

781

84

195

390

1

2

1 3 2

195

390

1 3 2

925

663

631210

820839

93 661

792

310

1

2

Pumping Speed Curves - iH1000

____________ 60 Hz _ _ _ _ _ _ _ _ 50 Hz ____________ 60 Hz _ _ _ _ _ _ _ _ 50 Hz

iH80 iH600 iH100050 Hz 60 Hz 50 Hz 60 Hz 50 Hz 60 Hz

• Peak Speed m3h-1 86 103 518 600 950 1000

cfm 51 61 305 353 560 589

l min-1 1433 1717 8635 10000 15837 16670

• Ultimate vacuum mbar 3 x 10-2 1 x 10-2 2 x 10-3 7 x 10-4 2 x 10-3 1 x 10-3

(with shaft seal purge only) torr 2.3 x 10-2 7.5 x 10-3 1.5 x 10-3 5.3 x 10-4 1.5 x 10-3 7.5 x 10-4

Pa 3 1 0.2 0.07 0.2 0.1

• Typical shaft seal nitrogen flow slm 4 4 4 4 4 4

• Inlet connection ISO63 ISO63 ISO100 ISO100 ISO100 ISO100

• Outlet connection NW40 NW40 NW40 NW40 NW40 NW40

• Typical cooling water l h-1 120 120 240 240 240 240

flow at 15 psi pressure drop l min-1 2 2 4 4 4 4

• Weight kg 240 240 415 415 430 430

• Power input at ultimate kW 2.4 2.7 3.1 3.4 3.5 3.8

• Rated motor power kW 2.9 3.5 5.1 6.1 5.1 6.1

• Oil capacity l 0.85 0.85 1.65 1.65 1.65 1.65

Pumping Speed Curves - iH600 and iH80

Specifications

iH Technical Data

All figures are typical and without gas ballast

iH80

A

1 INLET

2 OUTLET

3 AIR EXTRACTION PORT

4 INVERTER BOX (iH1000 ONLY)

A SIDE VIEW

B PLAN VIEW

iH600

iH80

iH600/iH1000

iH Dimensions

916

723

640141

526529

310

661

781

84

195

390

1

2

1 3 2

195

390

2

431

93 661

792

925

310

992

839

820

663

631

599

215

210

2

1 4

B

A

B