© 2006 Hewlett-Packard Development Company, L.P.The information contained herein is subject to change without notice

HP Work Area Control (WAC)

50% Increase in Operations ProductivityMatthias MuellerHP IPG-IT Factory Systems Engineering

3 30 May 2007

HP-TDO Business ObjectivesTechnology Development Operations:

Deliver print engine technology platforms for best in class printing solutions

Investigate new imaging systems technology opportunities

Deliver leading technologies to drive growth in new, high-value segments

4 30 May 2007

Fab Information

• Fab 21− 34K Sq. Ft.− Class 1− Open Cassette Processing

• Fab 22− 28K Sq. Ft.− Class 1 − “SMIF” Processing (150mm)

• Fab 23 (Test & Saw)

− 12K Sq. Ft.− Class 10,000 - 100

• Fab 30− 43K Sq. Ft.− Variable Air Handling (Class 100 to 10)

• Totals:− 6218 m2 clean room, 1000 m2 Test

All four fabs support production & development activities

5 30 May 2007

Work Area Control (WAC)Program Objectives• Simplify Semiconductor Mfg Operator interface

− “Quick:” Assess state of entire work-area (e.g. Photo) from unified graphical interface based on attention state (color)

− “Easy:” Navigate & access relevant information for Fab events related to Entities, Lots, and Processes

− “Effective:” Take action to satisfy or resolve standard Fab events or escalations• Resulting in a 1.5x productivity improvement in Photo

Moves/Operator/Shift• Boundary Conditions

− Operators will be “shared” across work areas− GUI will be “standard”, accessible from anywhere− Data will be real-time, event driven− System architecture will be distributed, heterogeneous− Entities will be automated in Systema Architecture (EQC/EQS)

6 30 May 2007

FAB System Architecture

Work Area Environment and Control

Equipment Interface and Data Collection

IW

MES and Operational Parameters

Engineering Data Control

Operational Data Distribution

METRODIE DAD CDE TIJ4

ODD

JMS

TIB-RV

EQS EQC

IWAC GUI

PJSETUPsrv

FVIEWsrvVALIDATIONsrv PJOBsrv

UTILITYsrv

ArchIDManager

SWAMI

DAD/WS Sync Agent

WAC

SPACE

FAB ODS

Recipe / Parameter Management

Execution Logic Setup / Administration

WORK-STREAM

Remotes

WSMsrv

WIT Workstream Database

XWI

CMMSG

COMETS

Modules

RTC EPT

Automation Adapter

WIP, WIPA

Workstream Connection

SQC

MESsrv, MESapi

MESDA

RBR exits

Systema Admin Tool

POST

ELSAdb

ELSA gui

ELSA serverRPM agent

RPM gui

RPM data store

IWACdb

ATTNsrv

WAC Layout Editor

Manual Data EDC

KMS Agent (subset EDC?)

HAWK

HAWK DB

KLARITY

Map Morpher

agent

Non-Secs EDC

FSCE

Weblogic (J2EE)

SLEUTH

IDOC AgentAuthentication Server

RBR Server

RBRdb

Socket Agent

Key

Tib-Rv Connected

J2EE Connected

LAN Connected

Has no description document

Update ServiceSMS

SNS Monitor

Realtime WIP

eTraveler

Dispatcher

Refdocs

MDA

EDCsrv

(Factory Tool)

Future (or substantial changes)

Agent / Service

Registry

RFID db

RFID agent

Ref Data (product)

Agent

Dispatch Agent

Lot Change Agent

Entity Change Agent

PullCard Count Agent

eMail Agent

Scan Agent

SPACE agent

SPACE db

DAD http agent

TIB

CO

EM

S

Rv

Brid

ge

Disposition Server

7 30 May 2007

Work Area Control (WAC) SFC Integration Objectives• Systema based GUI for Area Overview, Q/H/D rack, and

Entity drill-downs− Area Overview

• Quick: Attention state of each object is expressed as a color• Easy: Color indicate 3 states of increasing attention required

− Red: Immediate (alarm)− Yellow: Attention required (Dispatch, lot complete, etc)− Green: No attention required (processing, no action to be taken)− White: Idle− Grey : “Down” state

• Effective: Physical location transparency − Review State Transition reasons from any GUI − Consistent “message”, data navigation, and escalation resolution.

8 30 May 2007

Work Area Control (WAC) SFC Integration Metrics• Increase Operator Productivity

− 50% increase in Operator Productivity• Photo Moves/Operator/Day

− Support reduction in operator staff• Increase use of “temporary” staff• Decrease operator training requirements

− “Off the street to moving WIP in 2 days…”− Support new Operations Model

• Reduce overall staffing in each work area• Operators are trained to support primary and secondary work areas

− HP Cost Benefit Analysis• WAC Program will save HP $30M US/year

9 30 May 2007

WAC Operational Scenario1. Operator reviews current status of work area from the

WAC Area Overview− Example: Shift change w/out status communication

2. Lot scanned into Photo Queue Rack− Queue Rack changes state indicating material is present

3. DNS Nikon determines lot is “dispatchable” and signals operator Attention Requiredà Yellow State− Lot is trackable to this entity− DNS Nikon signals “WIP Event” attention required

4. Lot processing is initiated from the Automation UI− Port Selection and Recipe Validation

5. DNS Nikon determines lot started, and Attention State Transitions to Green

10 30 May 2007

Work Area Control: Initial State

Operator reviews current status of work area from the WAC Area Overview

Example: Shift change w/out status communication

11 30 May 2007

WAC Material Arrives at Q-Rack

•Lots scanned into Photo Queue Rack

−Queue Rack changes state indicating material is present

•DNS Nikon determines lot is “dispatchable” and signals operator Attention Requiredà Yellow State

−Lot on Product Flow this DNS is associated with−Lot is trackable to this entity−DNS Nikon signals “WIP Event” attention required

12 30 May 2007

WAC Dispatch Event Request•Material on Q-Rack can be delivered to the DNS-Nikon constraint tool.

•Attention State Reason Table:•Details why state transition occurred. •Provides detail of action to be taken.

13 30 May 2007

WAC Area Overview•Lot processing is initiated from the Automation UI

−Port Selection and Recipe Validation−P13 Attention State is GreenàTool is Processing WIP

14 30 May 2007

Work Area Control (WAC) Area Overview

•Steady State Area Overview•State of tools updated real-time•Operations business process drive which tool is priority

15 30 May 2007

HP-Systema Collaboration on WAC• Systema co-developed concept & initial

prototypes −Conceptual development, business and software

requirements−Project scoping, estimation, and resource planning

• Initial System Architecture and Design−Systema co-designed application architecture

• Area Overview (GUI)−Heavily leveraged Systema GUI Components−Systema developed the Fab Layout Utility

• Create the Area Overview Objects used to represent physical entities

16 30 May 2007

HP-Systema• Systema provided HP a “Breakthrough Opportunity”

− Systema Framework Toolkit− Visibility to Semiconductor mfg best practices and opportunities

• HP selected and values Systema as a partner:− Technology

• Java, Workstream, & Tibco• Standard components (Systema Framework, GUI, Automation)

− Deep knowledge• Fab Processes, Automation, Integration & Project Execution

− Collaboration:• HP initially relied heavily on Systema collaboration• Systema transferred knowledge to HP resources through structured

training, mentoring, and co-development • HP now has the tools and knowledge to extend and rapidly deliver to

ever-changing business drivers

17 30 May 2007