Handbook of Thin-Film Deposition Processes and Techniques - Principles, Methods, Equipment and App

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Deposition Technologiesand Applications:Introduction andOverview

Werner Kern and Klaus K. Schuegraf

1.0 OBJECTIVE AND SCOPE OF THIS BOOK

The aim of this book is to provide a concise reference and descrip-tion of the processes, methods, and equipment for depositing technologi-cally important materials. Emphasis is placed on the most recently devel-oped processes and techniques of film deposition for applications in hightechnology, in particular, advanced microelectronic device fabricationthat requires the most sophisticated and demanding approaches. Thevolume is intended to serve as a handbook and guide for the practitioner inthe field, as a review and overview of this rapidly evolving technology forthe engineer and scientist, and as an introduction to the student in severalbranches of science and engineering.

12 Thin-Film Deposition Processes and Technologies

The discussions of the principles of operation of deposition equipmentand its suitability, performance, control, capabilities, and limitations forproduction applications are intended to provide the reader with a basicunderstanding and appreciation of these systems. Key properties and areasof application of industrially important materials created by thin-filmdeposition processes are described. Extensive use of references, reviews,and bibliographies is made to provide source material for specific use andmore detailed study.

The chapter topics have been carefully selected to include primarilyadvanced and emerging deposition technologies in this rapidly evolvingfield. Many other important deposition technologies have not been in-cluded if adequate recent reviews are already available, or if the technolo-gies are primarily intended for forming thick films or coatings that gener-ally exceed a thickness of about ten micrometers, but the importance ofthese technologies is nevertheless recognized. Finally, an attempt has beenmade to compare competing technologies and to project a scenario for themost likely developments in the future.

2.0 IMPORTANCE OF DEPOSITION TECHNOLOGY INMODERN FABRICATION PROCESSES

Deposition technology can well be regarded as the major key to thecreation of devices such as computers, since microelectronic solid-statedevices are all based on material structures created by thin-film deposi-tion. Electronic engineers have continuously demanded films of improvedquality and sophistication for solid-state devices, requiring a rapid evolu-tion of deposition technology. Equipment manufacturers have made suc-cessful efforts to meet the requirements for improved and more economi-cal deposition systems and for in situ process monitors and controls formeasuring film parameters. Another important reason for the rapid growthof deposition technology is the improved understanding of the physics andchemistry of films, surfaces, interfaces, and microstructures made pos-sible by the remarkable advances in analytical instrumentation during thepast twenty years. A better fundamental understanding of materials leadsto expanded applications and new designs of devices that incorporatethese materials.

Chapter 1: Deposition Technologies and Applications 13

A good example of the crucial importance of deposition technology isthe fabrication of semiconductor devices, an industry that is totally depen-dent on the formation of thin solid films of a variety of materials bydeposition from the gas, vapor, liquid, or solid phase. The starting materials,epitaxial films of semiconductors, are usually grown from the gas phase.Chemical vapor deposition of a single-crystal silicon film on a single-crystalsilicon substrate of the same crystallographic orientation, a process knownas homoepitaxy, is accomplished by hydrogen reduction of dichlorosilanevapor. If a single-crystal film of silicon is deposited on a non-silicon crystalsubstrate, the process is termed heteroepitaxy. Layers of single-crystalcompound semiconductors are created to a thickness of a few atom layersby molecular beam epitaxy.

Subsequent steps in the fabrication process create electrical struc-tures that require the deposition of an insulating or dielectric layer, such asan oxide, glass, or nitride, by one of several types of chemical vapordeposition (CVD) processes, by plasma-enhanced chemical vapor deposi-tion (PECVD), or by any one of a number of sputtering depositionmethods. The deposition of conductor films for contact formation andinterconnections can be accomplished by vacuum evaporation or sputter-ing. CVD processes are especially suitable if polysilicon, polycides, orrefractory metals are to be deposited.

The deposition of subsequent levels of insulator is repeated to buildmultilevel structures. Deposition may be complemented by spin-on tech-niques of organic polymeric materials, such as a polyimide, or of organo-metallic-based glass-forming solutions. Spin-on deposition is especiallyuseful if planarization of the device topography is required, as in the caseof most high-density, multilevel conductor, VLSI circuits. The sequenceof alternate film deposition of metals and insulators may be repeatedseveral more times, with repetitive spin-on deposition of photopolymermasking solution for the delineation of contact openings, grid lines, andother pattern features by etching operations and lift-off techniques. Filmformation by methods other than deposition are used in a few steps of thefabrication sequence; these include thermal oxidation of the substrate, ionimplantation, nitridation, silicide formation, electrolytic and electrolessmetal deposition, and spray deposition (e.g., of organometallic solutionsfor forming antireflection coatings). These examples attest to the fact thatthe vast majority of material formation processes in semiconductor devicetechnology (and in other areas of electronic device fabrication) are cruciallydependent on film deposition technology.


3.0 CLASSIFICATION OF DEPOSITION TECHNOLOGIES

There are many dozens of deposition technologies for material forma-tion.[1]–[4] Since the concern here is with thin-film deposition methods forforming layers in the thickness range of a few nanometers to about tenmicrometers, the task of classifying the technologies is made simpler bylimiting the number of technologies to be considered.

Basically, thin-film deposition technologies are either purely physi-cal, such as evaporative methods, or purely chemical, such as gas- andliquid-phase chemical processes. A considerable number of processes thatare based on glow discharges and reactive sputtering combine both physi-cal and chemical reactions; these overlapping processes can be catego-rized as physical-chemical methods.

A classification scheme is presented in Table 1 where we havegrouped thin-film deposition technologies according to evaporative glow-discharge, gas-phase chemical, and liquid-phase chemical processes. Therespective pertinent chapter numbers in this book have also been indi-cated. Certain film formation processes such as oxidation, which, strictlyspeaking, are not deposition processes, have been included because oftheir great importance in solid-state technology.

4.0 OVERVIEW OF VARIOUS THIN-FILM DEPOSITIONTECHNOLOGIES

The following is a brief description of the principles, salient fea-tures, applications, and selected literature references of the more impor-tant technologies for thin-film deposition and formation categorized inTable 1. Technologies that are not covered in the chapters of this bookhave also been included in this discussion to present a more comprehen-sive overview of the entire field.

4.1 Evaporative Technologies

Although one of the oldest techniques used for depositing thin films,thermal evaporation or vacuum evaporation,[5]–[7] is still widely used in thelaboratory and in industry for depositing metal and metal alloys. Thefollowing sequential basic steps take place: (i) a vapor is generated byboiling or subliming a source material, (ii) the vapor is transported from thesource to the substrate, and (iii) the vapor is condensed to a solid film on the


Table 1. Survey and Classification of Thin-Film Depositon Technologies

EVAPORATIVE METHODS

• Vacuum Evaporation

Conventional vacuum evaporation Molecular-beam epitaxy (MBE)

Electron-beam evaporation Reactive evaporation

GLOW-DISCHARGE PROCESSES

• Sputtering • Plasma Processes

Diode sputtering Plasma-enhanced CVD

Reactive sputtering Plasma oxidation

Bias sputtering (ion plating) Plasma anodization

Magnetron sputtering Plasma polymerization

Ion beam deposition Plasma nitridation

Ion beam sputter deposition Plasma reduction

Reactive ion plating Microwave ECR plasma CVD

Cluster beam deposition (CBD) Cathodic arc deposition

GAS-PHASE CHEMICAL PROCESSES

• Chemical Vapor Deposition (CVD) • Thermal Forming Processes

CVD epitaxy Thermal oxidation

Atmospheric-pressure CVD (APCVD) Thermal nitridation

Low-pressure CVD (LPCVD) Thermal polymerization

Metalorgainc CVD (MOCVD)

Photo-enhanced CVD (PHCVD)

Laser-induced CVD (PCVD)

Electron-enhanced CVD Ion implantation

LIQUID-PHASE CHEMICAL TECHNIQUES

• Electro Processes • Mechanical Techniques

Electroplating Spary pyrolysis

Electroless plating Spray-on techniques

Electrolytic anodization Spin-on techniques

Chemical reduction plating

Chemical displacement plating

Electrophoretic deposition Liquid phase epitaxy


substrate surface. Although deceptively simple in principle, the skilledpractitioner must be well versed in vacuum physics, material science,mechanical and electrical engineering, as well as in elements of ther-modynamics, kinetic theory of gases, surface mobility, and condensationphenomena.

Evaporants cover an extraordinary range of varying chemical reac-tivity and vapor pressures. This variety leads to a large diversity of sourcecomponents including resistance-heated filaments, electron beams; cru-cibles heated by conduction, radiation, or rf-induction; arcs, explodingwires, and lasers. Additional complications include source-container in-teractions, requirements for high vacuum, precise substrate motion (toensure uniformity) and the need for process monitoring and control.

Molecular Beam Epitaxy. MBE[8]–[16] is a sophisticated, finelycontrolled method for growing single-crystal epitaxial films in a highvacuum (10-11 torr). The films are formed on single-crystal substrates byslowly evaporating the elemental or molecular constituents of the filmfrom separate Knudsen effusion source cells (deep crucibles in furnaceswith cooled shrouds) onto substrates held at a temperature appropriate forchemical reaction, epitaxy, and re-evaporation of excess reactants. Thefurnaces produce atomic or molecular beams of relatively small diameter,which are directed at the heated substrate, usually silicon or galliumarsenide. Fast shutters are interposed between the sources and the sub-strates. By controlling these shutters, one can grow superlattices withprecisely controlled uniformity, lattice match, composition, dopant con-centrations, thicknesses, and interfaces down to the level of atomic layers.

The most widely studied materials are epitaxial layers of III-Vsemiconductor compounds, but silicon, metals, silicides, and insulatorscan also be deposited as single-crystal films by this versatile and uniquelyprecise method. Complex layer structures and superlattices for fabricatinggallium arsenide heterojunction solid-state lasers, discrete microwavedevices, optoelectronic devices, waveguides, monolithic integrated opticcircuits, and totally new devices, have been created. An additional impor-tant advantage of MBE is the low temperature requirement for epitaxy,which for silicon is in the range of 400°C to 800°C,[15] and for galliumarsenide, 500°C to 600°C.[9] Several production systems with associatedanalytic equipment are now available.[16] The extremely limited productthroughput, the complex operation, and the expensive equipment are, atpresent, the major limitations of this promising deposition technology forproduction applications.


4.2 Glow-Discharge Technologies

The electrode and gas-phase phenomena in various kinds of glowdischarges (especially rf discharges) represent a rich source of processesused to deposit and etch thin films. Creative exploitation of these phenom-ena has resulted in the development of many useful processes for filmdeposition (as well as etching), as listed in Table 1.

Sputtering. The most basic and well-known of these processes issputtering,[17]–[25] the ejection of surface atoms from an electrode surfaceby momentum transfer from bombarding ions to surface atoms. From thisdefinition, sputtering is clearly an etching process, and is, in fact, used assuch for surface cleaning and for pattern delineation. Since sputteringproduces a vapor of electrode material, it is also (and more frequently)used as a method of film deposition similar to evaporative deposition.Sputter deposition has become a generic name for a variety of processes.

Diode Sputtering. Diode sputtering uses a plate of the material to bedeposited as the cathode (or rf-powered) electrode (target) in a glowdischarge. Material can thus be transported from the target to a substrate toform a film. Films of pure metals or alloys can be deposited when usingnoble gas discharges (typically Ar) with metal targets.

Reactive Sputtering. Compounds can be synthesized by reactivesputtering, that is, sputtering elemental or alloy targets in reactive gases;alternatively, they can be deposited directly from compound targets.

Bias Sputtering. Bias sputtering or ion-plating[25] is a variant ofdiode sputtering in which the substrates are ion bombarded during deposi-tion and prior to film deposition to clean them. Ion bombardment duringfilm deposition can produce one or more desirable effects, such as re-sputtering of loosely-bonded film material, low-energy ion implantation,desorption of gases, conformal coverage of contoured surface, or modifi-cation of a large number of film properties. The source material need notoriginate from a sputtering target, but can be an evaporation source, areactive gas with condensable constituents, or a mixture of reactive gaseswith condensable constituents and other gases that react with the con-densed constituents to form compounds.

It should be noted that all glow discharge processes involve sputter-ing in one form or another, since it is impossible to sustain a glowdischarge without an electrode at which these processes occur. In“electrodeless” discharges, rf power is capacitively coupled through theinsulating wall of a tubular reactor. In this case, the inside wall of the tube


is the main electrode of the discharge. However, sputtering can also lead toundesirable artifacts in this and other glow-discharge processes.

Magnetron Sputtering. Another variant in sputtering sources usesmagnetic fields transverse to the electric fields at sputtering-target sur-faces. This class of processes is known as magnetron sputtering.[20]–[22]

Sputtering with a transverse magnetic field produces several importantmodifications of the basic processes. Target-generated secondary elec-trons do not bombard substrates because they are trapped in cycloidaltrajectories near the target, and thus do not contribute to increased sub-strate temperature and radiation damage. This allows the use of substratesthat are temperature-sensitive (for example, plastic materials) and surface-sensitive (for example, metal-oxides-semiconductor devices) with mini-mal adverse effects. In addition, this class of sputtering sources produceshigher deposition rates than conventional sources and lends itself toeconomic, large-area industrial application. There are cylindrical, conical,and planar magnetron sources, all with particular advantages and disad-vantages for specific applications. As with other forms of sputtering,magnetron sources can be used in a reactive sputtering mode. Alterna-tively, one can forego the low-temperature and low radiation-damagefeatures and utilize magnetron sources as high-rate sources by operatingthem in a bias-sputtering mode.

Ion-Beam Sputtering. Ion beams, produced in and extracted fromglow discharges in a differentially pumped system, are important toscientific investigations of sputtering, and are proving to be useful aspractical film-deposition systems for special materials on relatively smallsubstrate areas. There are several advantages of ion-beam sputteringdeposition.[23] The target and substrate are situated in a high-vacuumenvironment rather than in a high-pressure glow discharge. Glowdischarge artifacts are thereby avoided, and higher-purity films usuallyresult. Reactive sputtering and bias sputtering with a separate ion gun canbe used.

Plasma Processes. The fact that some chemical reactions are accel-erated at a given temperature in the presence of energetic reactive-ionbombardment is the basis of processes for surface treatments such asplasma oxidation, plasma nitriding, and plasma carburizing.[26]–[28] Ametal to be oxidized, nitrided or carburized is made the cathode of a glowdischarge and is simultaneously heated by radiant or rf-induction means.The discharge gas is either O2, N2 plus H2, or CH4. Very thick (0.1–2 mm)


protective coatings on a variety of metals can be produced in this way torender surfaces hard and/or corrosion resistant.

Anodization. Plasma anodization[26][28][29] is a technique for produc-ing thin oxide films (less than 100 nm) on metals such as aluminum,tantalum, titanium, and zirconium, collectively referred as valve metals. Inthis case, a dc discharge is set up in an oxygen atmosphere and thesubstrates (shielded from the cathode to avoid sputter deposition) arebiased positively with respect to the anode. This bias extracts negativeoxygen ions from the discharge to the surface, which is also bombardedwith electrons that assist the reaction. The process produces very dense,defect-free, amorphous oxide films that are of interest as gate material inIII-V compound semiconductor devices such as in microwave field-effecttransistors.

Deposition of Inorganic/Organic Films. Plasma deposition of inor-ganic films[27][29]–[37] and plasma polymerization of organic reactants toproduce films of organic polymers[38] involve the introduction of a volatilereactant into a glow discharge which is usually generated by an rf force.The reactant gases or vapors are decomposed by the glow dischargemainly at surfaces (substrate, electrodes, walls), leaving the desired reac-tion product as a thin solid film. Plasma deposition is a combination of aglow-discharge process and low-pressure chemical vapor deposition, andcan be classified in either category. Since the plasma assists or enhancesthe chemical vapor deposition reaction, the process is usually denoted asPACVD or PECVD. The possibilities for producing films of variousmaterials and for tailoring their properties by judicious manipulation ofreactant gases or vapors and glow-discharge parameters are very exten-sive. Plasma deposition processes are used widely to produce films atlower substrate temperatures and in more energy-efficient fashion thancan be produced by other techniques. For example, they are widely used toform secondary-passivation films of plasma silicon nitride on semicon-ductor devices, and to deposit hydrogenated, amorphous silicon layers forthin-film solar cells.

Microwave Electron Cyclotron Resonance Deposition. ECR plasmadeposition[39][40] employs an electron cyclotron resonance (ECR) ion sourceto create a high-density plasma. The plasma is generated by resonance ofmicrowaves and electrons through a microwave discharge across a mag-netic field. The main feature of this recently introduced process is the highrate of deposition obtained at a low temperature of deposition.


Cluster Beam Deposition. Ionized cluster beam deposition (ICB)or cluster beam deposition[41]–[45] is one of the most recent emerging technolo-gies for the deposition of thin films with growth-control capabilities notattainable by other processes. ICB deposition is one of several techniquesclassified as ion-assisted thin-film formation. The material to be depositedemerges and expands into a vacuum environment from a small nozzle of aheated confinement crucible, usually constructed of high-purity graphite.The vapor pressure within the crucible is several orders of magnitude higherthan the pressure of the vacuum chamber so that the expanding vaporsupercools. Homogeneous nucleation results in the generation of atomicaggregates or clusters of up to a few thousand atoms held together by weakinteratomic forces. The clusters passing through the vacuum towards thesubstrate can, in part, be positively charged by impact ionization withelectron beam irradiation. Closely controlled accelerating voltages add en-ergy to the ionized clusters which then impinge on the substrate, diffuse ormigrate along the plane of the surface, and finally form a thin film ofexceptional purity. The complete and detailed process is extremely complexbut offers unprecedented possibilities of film formation once the fundamen-tals and engineering technology are fully understood and exploited. Plasmadeposition (and plasma etching) processes represent cases in which technol-ogy is leading science. The detailed interactions of plasma chemistry, plasmaphysics, and possible synergistic effects are still largely unexplained. Inview of the technological importance of these processes, much moreresearch and process modeling is required to obtain an adequate understand-ing of these deposition mechanisms.

4.3 Gas-Phase Chemical Processes

Methods of film formation by purely chemical processes in the gasor vapor phases include chemical vapor deposition and thermal oxidation.Chemical vapor deposition (CVD)[26][33[46]–[55] is a materials synthesisprocess whereby constituents of the vapor phase react chemically near oron a substrate surface to form a solid product. The deposition technologyhas become one of the most important means for creating thin films andcoatings of a very large variety of materials essential to advancedtechnology, particularly solid-state electronics where some of the mostsophisticated purity and composition requirements must be met. The mainfeature of CVD is its versatility for synthesizing both simple and complexcompounds with relative ease at generally low temperatures. Both chemical


composition and physical structure can be tailored by control of the reactionchemistry and deposition conditions. Fundamental principles of CVD en-compass an interdisciplinary range of gas-phase reaction chemistry, thermo-dynamics, kinetics, transport mechanisms, film growth phenomena, andreactor engineering.

Chemical reaction types basic to CVD include pyrolysis (thermaldecomposition), oxidation, reduction, hydrolysis, nitride and carbide for-mation, synthesis reactions, disproportionation, and chemical transport. Asequence of several reaction types may be involved in more complexsituations to create a particular end product. Deposition variables such astemperature, pressure, input concentrations, gas flow rates and reactorgeometry and operating principle determine the deposition rate and theproperties of the film deposit. Most CVD processes are chosen to beheterogeneous reactions. That is, they take place at the substrate surfacerather than in the gas phase. Undesirable homogeneous reactions in the gasphase nucleate particles that may form powdery deposits and lead toparticle contamination instead of clean and uniform coatings. The reactionfeasibility (other than reaction rate) of a CVD process under specifiedconditions can be predicted by thermodynamic calculations, providedreliable thermodynamic data (especially the free energy of formation)are available. Kinetics control the rate of reactions and depend ontemperature and factors such as substrate orientation. Considerationsrelating to heat, mass, and momentum transport phenomena are especiallyimportant in designing CVD reactors of maximum efficiency. Since im-portant physical properties of a given film material are critically influ-enced by the structure (such as crystallinity), control of the factors govern-ing the nucleation and structure of a growing film is necessary.

Thin-film materials that can be prepared by CVD cover a tremen-dous range of elements and compounds. Inorganic, organometallic, andorganic reactants are used as starting materials. Gases are preferred be-cause they can be readily metered and distributed to the reactor. Liquidand solid reactants must be vaporized without decomposition at suitabletemperatures and transported with a carrier gas through heated tubes to thereaction chamber, which complicates processing, especially in the case ofreduced-pressure systems. Materials deposited at low temperatures (e.g.,below 600°C for silicon) are generally amorphous. Higher temperaturestend to lead to polycrystalline phases. Very high temperatures (typically900°C to 1100°C in the case of silicon) are necessary for growing single-crystal films. These films are oriented according to the structure of the


substrate crystal; this phenomenon, known as epitaxy, is of crucial practi-cal importance in solid-state device technology.

CVD has become an important process technology in several indus-trial fields. As noted, applications in solid-state microelectronics are ofprime importance. Thin CVD films of insulators, dielectrics (oxides,silicates, nitrides), elemental and compound semiconductors (silicon, gal-lium arsenide, etc.), and conductors (tungsten, molybdenum, aluminum,refractory metal silicides) are extensively utilized in the fabrication ofsolid-state devices. Hard and wear-resistant coatings of materials such asboron, diamond-like carbon, borides, carbides and nitrides have foundimportant applications in tool technology. Corrosion resistant coatings,especially oxides and nitrides, are used for metal protection in metallurgi-cal applications. Numerous other types of materials, including vitreousgraphite and refractory metals, have been deposited mainly in bulk form oras thick coatings. Many of these CVD reactions have long been used forcoating of substrates at reduced pressure, often at high temperatures.

Reactors. The reactor system (comprising the reaction chamber andall associated equipment) for carrying out CVD processes must provideseveral basic functions common to all types of systems. It must allowtransport of the reactant and diluent gases to the reaction site, provideactivation energy to the reactants (heat, radiation, plasma), maintain aspecific system pressure and temperature, allow the chemical processesfor film deposition to proceed optimally, and remove the by-product gasesand vapors. These functions must be implemented with adequate control,maximal effectiveness, and complete safety.

The most sophisticated CVD reactors are those used for the deposi-tion of electronic materials. Low-temperature (below 600°C) productionreactors for normal- or atmospheric-pressure CVD (APCVD) includerotary vertical-flow reactors and continuous, in-line conveyorized reactorswith various gas distribution features. They are used primarily for depos-iting oxides and binary and ternary silicate glass coatings for solid-statedevices. Reactors for mid-temperature (600°C to 900°C) and high-tem-perature (900°C to 1300°C) operation are either hot-wall or cold-walltypes constructed of fused quartz. Hot-wall reactors, usually tubular inshape, are used for exothermic processes where the high wall temperatureavoids deposition on the reactor walls. They have been used for synthesiz-ing complex layer structures of compound semiconductors for microelec-tronic devices. Cold-wall reactors, usually bell-jar shaped, are used forendothermic processes, such as the deposition of silicon from the halides or


the hydrides. Heating is accomplished by rf induction or by high-intensityradiation lamps. Substrate susceptors of silicon carbide-coated graphiteslabs are used for rf-heated systems.

Reactors operating at low pressure (typically 0.1–10 torr) for low-pressure CVD (LPCVD) in the low-, mid-, or high-temperature ranges areresistance-heated hot-wall reactors of tubular, bell-jar, or close-spaceddesign. In the horizontal tubular design, the substrate slices (silicon devicewafers) stand up in a carrier sled and gas flow is horizontal. The reducedoperating pressure increases the mean free path of the reactant molecules,which allows a closely spaced wafer stacking. The very high packingdensity achieved (typically 100 to 200 wafers per tube) allows a greatlyincreased throughput, hence substantially lower product cost. In the verti-cal bell-jar design, the gas is distributed over the stand-up wafers, hencethere is much less gas depletion and generation of few particles, but thewafer load is smaller (50 to 100 wafers per chamber). Finally, the close-spaced design developed most recently processes each wafer in its ownseparate, closed space chamber with the gas flowing across the wafersurface to achieve maximal uniformity.

In LPCVD, no carrier gases are required, particle contamination isreduced and film uniformity and conformality are better than in conven-tional APCVD reactor systems. It is for these reasons that low-pressureCVD is widely used in the highly cost-competitive semiconductor indus-try for depositing films of insulators, amorphous and polycrystallinesilicon, refractory metals, and silicides. Epitaxial growth of silicon atreduced pressure minimizes autodoping (contamination of the substrate byits dopant), a major problem in atmospheric-pressure epitaxy.

Vapor-Phase Epitaxy. Vapor-phase epitaxy (VPE)[46][47][51]–[55] andmetal-organic chemical vapor deposition (MOCVD)[46][47][51]–[55] are usedfor growing epitaxial films of compound semiconductors in the fabrica-tion of optoelectronic devices. Composite layers of accurately controlledthickness and dopant profile are required to produce structures of optimaldesign for device fabrication.

Photo-Enhanced Chemical Vapor Deposition (PHCVD).PHCVD[56]–[58] is based on activation of the reactants in the gas or vaporphase by electromagnetic radiation, usually short-wave ultraviolet radia-tion. Selective absorption of photonic energy by the reactant molecules oratoms initiates the process by forming reactive free-radical species thatthen interact to form a desired film product. Mercury vapor is usuallyadded to the reactant gas mixture as a photosensitizer that can be activated


with the radiation from a high-intensity quartz mercury resonance lamp(253.7 nm wavelength). The excited mercury atoms transfer their energykinetically by collision with the reactants to generate free radicals. Theadvantages of this versatile and very promising CVD process is the lowtemperature (typically 150°C) needed to form films such as SiO2 andSi3N4, and the greatly minimized radiation damage (compared to PECVD).The limitations at present are the unavailability of effective productionequipment and the need (in most cases) for photoactivation with mercuryto achieve acceptable rates of film deposition.

Laser-Induced Chemical Vapor Deposition (LCVD).LCVD[59]–[61] utilizes a laser beam for highly localized heating of thesubstrate that then induces film deposition by CVD surface reactions.Another mode of utilizing laser (or electron radiation) is to activategaseous reactant atoms or molecules by their absorption of the specificwavelength of the photonic energy supplied. The resulting chemical gasphase reactions are very specific, leading to highly pure film deposits. Onthe other hand, the activation matching of the spectral properties with thereactant species limits the choice of reactions and hence the film depositsthat can be obtained. LCVD is still in its early development stages butpromises many interesting and useful applications in the future.

Ion Implantation. Recently, ion implantation[62]–[64] has been usedto form silicon-on-insulator structures by implanting large doses of atomicor molecular oxygen ions in single-crystal silicon substrates to produce aburied oxide layer with sharp interfaces after annealing.[63] Simultaneoushigh-dose implantation of low energy oxygen and nitrogen ions intosilicon yields very thin films of silicon oxynitride, whereas low-energyimplantation of nitrogen or ammonia into silicon yields a low-densitysilicon nitride layer.[65]

Thermal Oxidation. In the gas phase, thermal oxidation[27][28][66][67]

is a chemical thin-film forming process in which the substrate itselfprovides the source for the metal or semiconductor constituent of theoxide. This technique is obviously much more limited than CVD, but hasextremely important applications in silicon device technology where veryhigh purity oxide films with a high quality Si/SiO2 interface are required.Thermal oxidation of silicon surfaces produces glassy films of SiO2 forprotecting highly sensitive p-n junctions and for creating dielectric layersfor MOS devices. Temperatures for this process lie in the range of about700°C to 1200°C with either dry or moist oxygen or water vapor (steam) asthe oxidant. Steam oxidation proceeds at a much faster rate than dry


oxidation. The oxidation rate is a function of the oxidant partial pressureand is controlled essentially by the rate of oxidant diffusion through thegrowing SiO2 layer to the SiO2/Si interface, resulting in a decrease of thegrowth rate with increased oxide thickness. The process is frequentlyconducted in the presence of hydrochloric acid vapor or vapors of chlo-rine-containing organic compounds. The HCl vapor formed acts as aneffective impurity getter, improving the Si/SiO2 interface properties andstability.

Oxidation of Silicon. Silicon oxidation under high pressure[26][66][67]

is of technological interest where the temperature must be minimized,such as for VLSI devices. Since the oxidation rate of silicon is approxi-mately proportional to pressure, higher product throughput and/or de-creased temperatures can be attained. The oxidant in commercial systemsis H2O, which is generated pyrogenically from H2 and O2. Pressures up to10 atm are usually used at temperatures ranging from 750°C to 950°C.

Other Gas-Phase Oxidations. Gas-phase oxidation of other mate-rials[26] is of limited technical importance. Examples include metallictantalum films converted by thermal oxidation to tantalum pentoxide foruse as antireflection coating in photovoltaic devices and as capacitorelements in microcircuits. Other metal oxides grown thermally have alsobeen used as capacitor dielectrics in thin-film devices, to improve thebonding with glass in glass-to-metal seals and to improve corrosionresistance.

4.4 Liquid-Phase Chemical Formation

The growth of inorganic thin films from liquid phases by chemicalreactions is accomplished primarily by electrochemical processes (whichinclude anodization and electroplating), and by chemical deposition pro-cesses (which include reduction plating, electroless plating, conversioncoating, and displacement deposition). A number of extensive re-views[26][68]–[70] of these film formation processes discuss theory andpractice. Another class of film forming methods from the liquid phase isbased on chemically reacting films that have been deposited by mechani-cal techniques.[26][69] Finally, liquid phase epitaxy[51] is still being used forgrowing a number of single-crystal semiconductors.

Electrolytic Anodization. In anodization, as in thermal oxidation,an oxide film is formed from the substrate. The anode reacts with negativeions from the electrolyte in solution and becomes oxidized, forming an oxide


or a hydrated oxide coating on semiconductors and on a few specificmetals, while hydrogen gas is evolved at the cathode. Nonporous and well-adhering oxides can be formed on aluminum, tantalum, niobium, titanium,zirconium, and silicon. The most important applications are corrosion-protective films and decorative coatings with dyes on aluminum and itsalloys, and layers for electrical insulation for electrolyte capacitors onaluminum and tantalum.

Electroplating. In electroplating a metallic coating is electrodepos-ited on the cathode of an electrolytic cell consisting of a positive electrode(anode), a negative electrode (cathode), and an electrolyte solution (contain-ing the metal ions) through which electric current flows. The quantitativeaspects of the process are governed by Faraday’s laws. Important electro-plating variables include current efficiency, current density, current distribu-tion, pH, temperature, agitation, and solution composition. Numerous met-als and metal alloys have been successfully electroplated from aqueoussolutions. However, the technically most useful electroplated metals arechromium, copper, nickel, silver, gold, rhodium, zinc, and a series of binaryalloys including chromium/nickel composites. Electroplating is widely usedin industry and can produce deposits that range from very thin films to verythick coatings (electroforming).

Chemical Reduction Plating. Chemical reduction plating is basedon reduction of a metal ion in solution by a reducing agent added justbefore use. Reaction is homogeneous, meaning that deposition takes placeeverywhere in the solution, rather than on the substrate only. Silver,copper, nickel, gold, and some sulfide films are readily plated. The oldestapplication of the process is the silvering of glass and plastics for produc-ing mirrors using silver nitrate solutions and one of various reducingagents, such as hydrazine.

Electroless Plating. Autocatalytic or electroless plating is a selec-tive deposition plating process in which metal ions are reduced to ametallic coating by a reducing agent in solution. Plating takes place onlyon suitable catalytic surfaces, which include substrates of the same metalbeing plated, hence the definition autocatalysis. Electroless (orelectrodeless) plating offers a number of advantages over electroplating,such as selective (patterned) deposition, but is limited to a few metals andsome alloys. Nickel, nickel alloys, and copper are most widely usedcommercially on conductive and on sensitized insulating substrates, in-cluding plastic polymeric materials.


Electrophoretic Deposition. Electrophoretic coating is based ondeposition of a film from a dispersion of colloidal particles onto a conduc-tive substrate. The dispersion in a conductive liquid dissociates intonegatively charged colloidal particles and positive ions (cations), or thereverse. On application of an electric field between the positive substrateelectrode (anode), the colloidal particles migrate to the substrate, becomedischarged, and form a film.

Chemical or electrochemical treatments of a metal surface canproduce a thin and adherent layer on that metal. Examples of such conver-sion coatings are black oxides on steel, copper, and aluminum. Widelyused chromate conversion coatings on zinc, cadmium, silver, copper,brass, aluminum, and magnesium are formed by reaction of hexavalentchromium ions with the metal, forming protective and decorative filmsthat consist of oxides, chromates, and the substrate metal. Phosphateconversion coatings result from treatments, especially of iron and steel,with phosphoric acid-containing salts of iron, zinc, or manganese.

Immersion Plating. Deposition of a metal film from a dissolvedsalt of the coating metal on a substrate by chemical displacement withoutexternal electrodes is known as displacement deposition or immersionplating. Generally, a less noble (more electronegative) metal displacesfrom solution any metal that is more noble, according to the electromotiveforce series. Actually, different localized regions on the metal surfacebecome anodic and cathodic, resulting in thicker films in the cathodicareas. The industrial uses of this process are limited to a few applications,mainly thin coatings on copper and its alloys.

Mechanical Methods. Mechanical techniques[71] for depositingcoatings from liquid media that are subsequently reacted chemically toform the inorganic thin film product are spraying, spinning, dipping anddraining, flow coating, roller coating, pressure-curtain coating, brushing,and offset printing of reagent solutions. Chemical reaction of the coatingresidue, often by thermal oxidation, hydrolysis, or pyrolysis (in the case ofmetalorganics) produces the desired solid film. Spin-on deposition offilm-forming solutions is widely used in solid-state technology.

Liquid spray coating is probably the most versatile mechanicalcoating technique of the deposition techniques noted, and it is particularlywell-suited for high-speed automated mass production. Deposition of verythin films is possible by judicious selection and optimization of spraymachine parameters for forming “atomized” droplets and the reagent andsolvent systems used to formulate the spray liquid. An example of the


capability of this refined method is the mass production spray-on deposi-tion of organometallic alkoxy compounds, such as titanium-(IV)-isopropoxide, in an optimally formulated spray solution. Controlled py-rolysis of the deposit can form TiO2 films of 70 nm thickness which servesas a highly effective and low-cost antireflection coating for silicon solarcells.[72]

It should be noted that spray deposition encompasses several othertypes of spraying processes that are based on either liquid sources, such asharmonic electrical spraying, or on dry source reactants that includeflame spraying, arc plasma spraying, electric arc spraying, and detonationcoating.[71]

Liquid-Phase Epitaxy. LPE[51] is used for the thermally-controlledovergrowth of thin single-crystalline films of compound semiconductorsand magnetic garnets from the melt on a single-crystal substrate. Thisrelatively old and simple technique has been successfully applied in thesemiconductor industry for fabricating optoelectronic devices. How-ever, compared to MBE, LPE is limited by poor uniformity and surfacemorphology.

Various additional film formation techniques[71] that are used indus-trially have not been discussed here, since they are essentially thick-filmprocesses. These methods include powder or glass frit sedimentation andcentrifugation, dipping, screen-printing, tape transfer, fluidized bed coat-ing, and electrostatic spraying, all followed by thermal treatments fordrying and fusion, or for chemical reaction of the deposit to form acoherent coating.

5.0 CRITERIA FOR THE SELECTION OF A DEPOSITIONTECHNOLOGY FOR SPECIFIC APPLICATIONS

The selection of a specific technology for the deposition of thinfilms can be based on a variety of considerations. A multitude of thinfilms of different materials can be deposited for a large variety of applica-tions; hence, no general guidelines can be given of what the most suitabledeposition technology should be. In selecting an appropriate deposi-tion technology for a specific application, several criteria have to beconsidered.


5.1 Thin-Film Applications

In considering the different applications of deposited thin films,[73][74]

the following generic categories can be identified.Electronic Components. The fabrication of electronic components,

especially solid-state devices and microelectronic integrated circuits, haveundoubtedly found the widest and most demanding applications for thin-film depositions. These films typically consist of semiconductor materi-als, dielectric and insulating materials, and metal or refractory metalsilicide conductors.

Electronic Displays. Electronic displays are used for interfacingelectronic equipment with human operators. Different components anddevice structures are required, such as:

Liquid-crystal displays

Light-emitting diodes (LEDs)

Electroluminescent displays

Plasma and fluorescent displays

Electrochromic displays

The fabrication of these displays requires conductive films, transparentand conductive films, luminescent or fluorescent films as well as dielectricand insulating layers.

Optical Coatings. Optical coatings are applied for antireflectionpurposes, as interference filters on solar panels, as plate glass infraredsolar reflectors, and for laser optics. In the fabrication of filter optics, thinfilms with refractive index gradients are deposited on preforms fromwhich the optical fibers are drawn. These coatings require dielectricmaterials with precisely defined indices of refraction and absorptioncoefficients. Laser optics require metal reflective coatings which canwithstand high radiation intensities without degradation. Infrared reflect-ing coatings are applied to filament lamps to increase the luminous fluxintensity.

Magnetic Films for Data Storage. Thin films of magnetic materi-als have found wide commercial applications for data storage in comput-ers and control systems. The substrates can be metal, glass or plasticpolymeric materials. Thin film deposition processes for magnetic materi-als and for materials with a high degree of hardness are required.


Optical Data Storage Devices. Thin films are finding increasingcommercial use for optical data storage devices in compact disks andcomputer memory applications. Processes for the deposition of organicpolymer materials as storage media and as protective overcoats are re-quired for this technology.

Antistatic Coatings. Thin films of conductive or semiconductivematerials are deposited to provide protection from electrostatic discharges.

Hard Surface Coatings. Thin film coatings of carbides, silicides,nitrides, and borides are finding increased uses to improve the wearcharacteristics of metal surfaces for tools, bearings, and machine parts. Ofparticularly great current interest are films of diamond-like carbon be-cause of this material’s heat dissipation properties, electrical insulation,hardness, and resistance to high-temperature and high-energy radiation.

5.2 Material Characteristics

The desired material characteristics of the deposited films[73][74] willbe, in most cases, the decisive factor for the selection of a preferreddeposition technology. In many, if not most, instances the characteristicsof a thin film can be quite different from the bulk material properties, sincethin films have a large surface area to bulk volume ratio. In addition, themorphology, structure, physical and chemical characteristics of the thinfilm can also be quite different from those of the bulk materials. Thesurface and/or interface properties of the substrate can drastically influ-ence thin film characteristics due to surface contamination, nucleationeffects, surface mobility, chemical surface reactions, adsorbed gases,catalytic or inhibitory effects on film growth, surface topography, andcrystallographic orientation, and stress effects due to thermal expansionmismatch.

The major physical and chemical parameters of the thin film to beconsidered can be listed as follows:

Electrical: Conductivity for conductive films

Resistivity for resistive films

Dielectric constant

Dielectric strength

Dielectric loss

Stability under bias


Polarization

Permittivity

Electromigration

Radiation hardness

Thermal: Coefficient of expansion

Thermal conductivity

Temperature variation of all properties

Stability or drift of characteristics

Thermal fusion temperature

Volatility and vapor pressure

Mechanical: Intrinsic, residual, and composite stress

Anisotropy

Adhesion

Hardness

Density

Fracture

Ductility

Hardness

Elasticity

Morphology: Crystalline or amorphous

Structural defect density

Conformality/step coverage

Planarity

Microstructure

Surface topography

Crystallite orientation

Optical: Refractive index

Absorption

Birefringence

Spectral characteristics

Dispersion


Magnetic: Saturation flux density

Coercive force

Permeability

Chemical: Composition

Impurities

Reactivity with substrate and ambient

Thermodynamic stability

Etch rate

Corrosion and erosion resistance

Toxicity

Hygroscopicity

Impurity barrier or gettering effectiveness

Carcinogenicity

Stability

5.3 Process Technology

As discussed before, a wide variety of process technologies areavailable for the deposition of thin films. The technologies differ to a largedegree in their physical and chemical principles of operation and in thecommercially available types of equipment. Each process technology hasbeen pursued or developed because it has unique advantages over others.However, each process technology has its limitations. In order to optimizethe desired film characteristics, a good understanding of the advantagesand restrictions applicable to each technology is necessary.

The desired film thickness is closely related to the deposition orformation rates, since economical considerations determine, to a largedegree, the selection of the most appropriate deposition technology. Thinfilms cover a thickness range from about 1 nm to several micrometers, or fromfilm monolayers to thicknesses approaching bulk material characteristics.

Of increasing importance is the particle density associated with thedeposited film. Particles originating from the equipment, the substrate, theenvironment, or from the reactant materials supplied to the depositionequipment can impose serious limitations to the utility of a depositionprocess or the equipment used. This is especially true for the fabrication ofhigh-density microelectronic devices where the particle size can be equal


to or exceed the minimum device dimensions. Deposition processes forvery-large-scale integrated (VLSI) circuits require, or will require in thenear future, particle densities of less than 0.1 per cm2 for particles down to0.2 µm in diameter.

All thin film deposition equipment is quite susceptible to the integ-rity of the processing environment. The deposition processes described inthe following chapters operate over a wide range of pressures in thereaction chamber. For proper pressure or residual gas control inside thereaction chamber, the leakage of external gases has to be minimized. Formolecular beam epitaxy of thin films, for example, a maximum leak rate of10-12 torr-liter/cm2-sec is required, whereas some other process technolo-gies can easily tolerate much higher leak rates.

Considerable attention has to be given to the source materials andtheir delivery into the deposition reactor. They can not only be a hard-to-detect source of impurity contamination, but can also influence the unifor-mity of the deposited films. The source materials used for thin filmdeposition can be either solid, liquid or gaseous. Special techniques forsource material delivery have been developed for each type of materialand rate of delivery to the deposition reactor.

The purity of the deposited film not only depends on the purity ofthe source materials delivered to the reactor and the leak-tightness of thesystem, but also to a large degree on the substrate cleaning procedure.Deposition techniques have been developed which permit film depositionwith purity levels down to 1012 impurity atoms per cm3, or roughly onepart in 1010.

The stability and repeatability of the processes are of considerableimportance, especially in the large-scale manufacturing of semiconductordevices. Many different factors can influence the deposition process, andit is extremely important to understand and control these parameters. Tomake a film deposition process acceptable for device manufacturing, anextensive and careful characterization of the processes and equipment isoften required. Any process instabilities or uncontrolled deposition pa-rameters should be discovered and rectified during this procedure.

The uniformity of the deposited films, both in thickness and com-position, is of great concern for most deposition processes. In themanufacturing of integrated circuits, small variations in film uniformitycan have a large influence on the manufacturing yield. For VLSI circuits,film uniformity deviations of less than 5% are required at present. It isexpected that the uniformity requirements will become even more


stringent, decreasing to a deviation limit of 1 to 2% in the near future.These requirements impose severe restrictions on the design of the deposi-tion reactor, the delivery of the reactant materials, and the control of theprocess parameters.

Thin-film deposition processes for solid-state device fabrication areneeded in many steps in the fabrication process sequence. It is importantthat compatible deposition processes are selected that do not interfere withthe structures already built into the device. The process integration, whichhas to consider thermal effects, chemical and metallurgical compatibilityas well as functional requirements and limitations, is a major consider-ation in successful process selection.

Frequently, the deposition processes have to offer a high degree offlexibility in meeting the demands for specific device requirements. Theprocess selection has to be based on adjusting deposition parameters suchas film thickness, uniformity and composition. During the process charac-terization described above, a good understanding of the sensitivity andcontrol of the film characteristics can be obtained.

In a device fabrication process sequence, one frequently has todeposit films on a nonplanar surface. The deposited film should beuniform across all structural details of the substrate topography. Forexample, in VLSI structures, contact holes with micron or submicrondimensions should be uniformly coated with metal films not only insidethe small contact cavities, but also on their vertical walls. This is referredto as step coverage or conformality. The different deposition processesdescribed in the following chapters can result in quite different degrees ofstep coverage.

An important requirement for high-density VLSI devices is planar-ization of the substrate topography after film deposition. This is necessaryin multilevel device fabrication processes where subsequent photolitho-graphic pattern definition of very small geometries is required, or wheredeposited material step coverage is essential. The focal depth of thephotolithographic equipment is on the order of one micron. To image thepattern across the entire field of view demands a highly planar surfacetopography.

The large number of process parameters that can affect theuniformity and composition of the deposited films make in situ monitor-ing of the deposition parameters highly desirable. Many process param-eters, such as reactor pressure, substrate temperature, reactant gas compo-sition and deposition rates can be monitored in real time. However,


significant improvements in process monitoring devices, real-time ana-lytical instruments and process simulation can be expected in the nextcouple of years that promise to enhance the overall fabrication yield fordevices manufactured by thin-film deposition processes.

5.4 Thin-Film Manufacturing Equipment

The equipment for the deposition of thin films can be classified intothree basic categories:

• Thin-film deposition equipment for device research anddevelopment.

• Prototype equipment for the study of new or establisheddeposition processes.

• Thin-film production equipment for device manufacturing.

The prototype equipment for the development of new depositionprocesses can encompass a wide variety of designs and constructionaldetails. Only the future outlook for the requirements and applications ofsuch equipment is discussed in the following chapters in this book.

The deposition equipment for the research and development of newdevice structures has to meet, in general, quite different requirements thanthe equipment used in the manufacturing of devices on a large scale.Research and development equipment requires a high degree of flexibilityin deposition parameters, in accommodation of a variety of substrates, andin process monitoring equipment. High product throughput and a highdegree of equipment automation are usually not required.

Thin-film deposition equipment used in high volume manufacturingis designed, in most cases, for a very limited range of applications. Themajor consideration is the cost-effectiveness of the equipment, which canbe characterized as the ratio of cost per device divided by the value addedto the device. The equipment cost, consisting of acquisition cost, amorti-zation and maintenance cost is a major consideration for the selection ofproduction-worthy deposition equipment. System throughput, expressedin the number of substrates processed per hour for a given film thickness,is a major selection criterion. Equipment reliability, characterized byequipment uptime, mean time between failures (MTBF) and mean time torepair (MTTR) is becoming increasingly a part of equipment specifica-tions and is subject to standards for fabrication equipment. Expectationsfor equipment uptime, as currently required in the semiconductor industry,


is in excess of 90%. The high cost of manufacturing equipment for filmdepositions mandates the need for ease of maintenance and repair. Unde-sirable deposition on reactor walls and fixtures should be minimized. Self-cleaning features using reactive gas plasma discharges are rapidly gainingin popularity.

Until recently, most deposition equipment used in thin film manu-facturing has been of the batch processing type. A limited number ofsubstrates to be coated is loaded into the deposition chamber and pro-cessed as a unit. Batch processing, although offering good process control,suffers in general from limited throughput. The time required for substrateloading, pump-down, purging, thermal equilibration, recovery, and cool-down accounts for a considerable percentage of the total batch processingtime. With the availability of load-lock systems, permitting the insertionof substrates into the reactor chamber without major disturbance of theprocess chamber pressure and environment, a considerable improvementin product throughput and film quality can be obtained. Therefore, con-tinuous process reactors, including advanced single-substrate reactors, arefinding increasing acceptance for film deposition in device manufactur-ing. The continuous process reactors offer the additional advantages ofincorporating process steps for pre-deposition cleaning of the substrate aswell as post-deposition treatments, such as thermal annealing.

The automation of deposition equipment is making rapid progress.Automated deposition systems provide automatic loading and unloading,process sequencing, and control of variables, such as reactor pressure, gasflows, and substrate temperature. In addition, diagnostic capabilities fordetecting and analyzing equipment failures, maintenance requirements,and process integrity are being incorporated. Equipment communicationof process parameters, failure modes and product status with upstreamhost computers as well as remote process recipe generation is becomingincreasingly available for modern deposition equipment.

6.0 SUMMARY AND PERSPECTIVE FOR THE FUTURE

The importance of thin-film deposition technology in modern fabri-cation processes has been discussed with examples from the production ofsemiconductor devices. Following this overview, thin-film depositiontechnologies have been outlined and classified into four major genericcategories: (i) evaporative methods, (ii) glow-discharge processes, (iii) gas-


phase chemical processes, and (iv) liquid-phase chemical film formationtechniques. Important technologies from each of these categories havebeen discussed with respect to the underlying principles, salient features,and typical applications. Criteria for selecting a particular thin-film depo-sition technology have then been described in terms of specific applica-tions, material characteristics, and processing. Finally, thin-film manufac-turing equipment has been discussed and categorized.

A variety of different thin-film deposition technologies andequipment is available from which a selection can be made. These tech-nologies are described in the following chapters in some detail. It ispossible to a large degree to tailor the deposition process to the specificneeds, based on:

• Physical and chemical material characteristics

• Specific applications

• Advantages and limitations in process technology

• Manufacturing technology and equipment

The fabrication processes established for semiconductor devices duringthe last two decades have provided an important stimulus for the develop-ment of new thin-film materials, processes and equipment. It can beexpected that this trend will continue for the decade.

The current trends[52][53][75][76] in deposition technology for the fab-rication of semiconductor devices are characterized by:

• A shift to larger substrate sizes

• Automation in substrate handling and process controls

• Reduction in particle and metal contamination

• Improvements in equipment reliability and ease of serviceand maintenance

• Lower process temperatures

• Improvements in film uniformity

• Reduced in-process damage (due to high voltage, radiation,particle bombardment, electrostatics, etc.)

The number of deposition steps in the fabrication sequence of integratedcircuits is expected to increase with the advent of more complex circuits,as shown in Table 2.[75] Less complex devices, such as those introduced adecade ago, typically NMOS and CMOS integrated circuits, have required


only three deposition steps for inorganic film deposition, whereasmore advanced devices such as high-performance VLSI silicon integratedcircuits, now require 8 to 11 deposition steps. With increasing demandsfor cost reductions in the manufacturing of integrated circuits, cost-effective, high-volume manufacturing equipment for all deposition pro-cesses will be required.

Table 2. Film Deposition for Silicon Integrated Circuit Fabrication*

New semiconductor device structures based on III-V semiconductorcompounds for microwave, high-speed and optoelectronic applicationswill require improved deposition systems and higher throughput capabili-ties for economic device fabrication, especially molecular beam epitaxy(MBE) and metal-organic chemical vapor deposition (MOCVD) equip-ment. Superlattice structures with alternating films of a few atomic layerswith different compositions will demand a high degree of process control.

Number of Steps Required for IC Fabrication

Deposition H-CMOS HMOS CMOS/ Schottky ECLNMOS TTL

Polysilicon 2 1–3 1 — 1

Epitaxy 1 — — 1 1

PSG/Si3N4 2–3 1–2 1 2 —

Aluminum** 1 1–2 1 2 2–3

Other Metals 1–2 1 — 1 —

Silicides 1–2 0–2 — — —

Total Deposition 8–11 4–10 3 6 4–5 Steps

*Data from Ref. 75, courtesy Semiconductor International, Cahners Publishing Company.

**Not usually deposited by CVD.


Three-dimensional integrated structures consisting of 3 to 5 layerswith active components are under development in various laboratories.These structures are likely to require highly sophisticated depositiontechnologies and equipment.

Considerable interest exists to enhance the survivability of inte-grated circuits in hostile environments, such as high-energy radiation,high operating temperatures, and polluted atmospheres. The developmentof protective layers and more resistant device structures will require newthin-film materials and deposition processes.

Complex high-density integrated circuits face increased limitationsin interconnecting the numerous components on a chip. Optical intercon-nection schemes are under development which can reduce this problemconsiderably. This trend will lead to new technologies combining opto-electronic device technology with the existing semiconductor processtechnologies. Thin-film deposition techniques will most likely play animportant role for the fabrication of these interconnections.

This overview of the important processes and techniques usedindustrially for forming thin films indicates the extremely powerful andversatile arsenal of methods that is now available to the technologist.Coatings can be prepared that can meet a very wide range of requirementsfor specific industrial or scientific applications. While remarkable ad-vances in thin-film technology have been made, there are still areas inwhich the technology is leading science. This is particularly true forphoto-induced, ion-assisted, and plasma-enhanced processes; these areasshould provide fertile ground for future research.

ACKNOWLEDGMENTS

The authors wish to thank Norman Goldsmith and George L.Schnable, from RCA Laboratories, for critically reviewing the manu-script, and for their many helpful comments and suggestions.


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70. Cuffy, J. I., (ed.), Electrodeposition Processes, Equipment & Compositions,(Chemical Tech. Rev. No. 206), Noyes Publishing Company, Park Ridge,NJ (1982). See also; Metal Finishing ’86, 54th Guidebook Directory Issue1986, Vol. 84, No. 1A, Metals and Plastics Publications, Inc., Hackensack,NJ (1986); Durney, L. J., Electroplating Engineering Handbook, FourthEd., Van Nostrand Reinhold Co., New York (1984)

71. Vossen, J. L., Ch. I-l, pp. 3–5 in Ref. 2

72. Kern, W. and Tracy, E., RCA Review, 41(2):133–180 (June 1980)

73. Ghate, P. B., Ch. 13, pp. 514–547 in Ref. 3

74. Ghandhi, S. K., Ch. 11, pp. 567–637 in Ref. 4

75. Hutcheson, G. D., Semiconductor International, 9(1):46–49 (Jan. 1986)

76. Semiconductor Processing and Equipment Symposium, Technical Proc.,SEMICON/EUROPA, Zurich, Switzerland, March 4–6, 1986,Semiconductor Equipment & Materials Institute, Mountain View, California(1986)

Documents

Handbook of Thin-Film Deposition Processes and Techniques - Principles, Methods, Equipment and App