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IR-422
IR-432
IR-422
IR-432
Multi gas monitoring Analog / Digitalcommunication
Multi-displayHigh sensitivity Gas cell heatingonly IR-422 Series*
Specification
Model
AO: 0-5VDC, AI: 0-10VDCDO: 4ch, DI: 1ch (Zero)
208V, 84VA, T/C K-type, Thermostat (Manual reset)
115V, 132VAT/C K-type, Thermostat (Manual reset)
AO: 4-20mADC, AI: 0-10VDCDO: 4ch, DI: 1ch (Zero)
IR-422
SiF4: 100mTorr, CF4: 100mTorr
200mm
20-35℃
SUS316L, BaF2, FFKM
W433×H117.5×D83
3.2kg
IR-432
SiF4: 3800mTorr
30mm
20-50℃
SUS316L (Clean S AF type), BaF2, FFKM
W259×H130×D86
2.8kg
*1:The specifications are guaranteed under HORIBA STEC’s inspection conditions using calibration gas.
180℃
±0.5%F.S.
±1%F.S.
±0.5%F.S.(3σ)
±1%F.S./day
NW25 f lange
1x10-6 Pa・m3/s (He)
300kPa (A)
RS485 (F-Net)
24VDC, 1.5A
CE, FCC
Meas. gas & full scale
Cell length
Cell set temperature
Heater jacket
Repeatability *1
Linearity *1
Zero noise *1
Zero drift *1
Ambient temperature
Warm-up time
Wetted material
Fitting
Leak rate
Proof pressure
I/O interface
Digital communication
Power supply
Dimensions (mm)
Weight
Certification
MFC for sample line
Valve
Pump
Pressuresensor
Equipment
Dry pump
Settingswitch
MFCfor diluting
Plasma
Process chamber
Vacuum pump
Exhaust valve
CapacitanceManometer
Piezo actuator valve
Integrated IR-400 Series and a pump
The infrared absorptiometry method employed by IR-400 Series uses the principle of infrared light absorbance.The target gas species in the effluents absorbance is compared to a reference signal to calculate the concentrationof the target species. This double beam method enables long term, stable measurement results.
PreamplifierLight source
Gas cellPyroelectric infrared detector
Reference
Sample
Optical filter
Sensor element
When sample gas isflowing, outputchanges on samplesensor only
Wavelength
When the sample gasis not flowing,output is the same
Sampledetector
Referencedetector
Abs
orba
nce
Application Example
The optical system is made up of a light source, gas cell and double beam detectors.The stability of the double beam detector has been proven over a period of more than 40 years.
〔 〕
〔 〕●
IR-400 Series : Chamber cleaning end point monitoring for deposition process
PV Series : Chamber pressure control by N2 ballast control
VG-200 Series : Pressure monitoring of exhaust line
●
●
Gas/Vacuum Monitoring
● Contribute process optimizationof various manufacturing process
● Integrated vacuum pump enable to workunder limited differential pressure condition
● Extra MFC is optional on dilution gas linefor concentration optimization
● Trans portable design
Pressure control
External dimensions
Related product
IR-300 Series
[Unit: mm]
IR-422 Series IR-432 Series
(433)
140±0.5210 3030 9271
45
5283
87 117.5
83
46
81
Light sourceunit
Detectorunit
200mm gas cellwith heater jacket
119±1 140±1(259)
DTU connectorExternal connector
LSU connector
Power supply connector
86±183
RS485 connector
83
65
(24.5)
(22.5)
Thermostat(inside)
130±0.5
●
●
●
Continuous concentration monitoring of precursor
Check precursor concentration while adjustingsupply conditions
Monitor residual quantities of liquid and solidprecursors for better utilization
N2
Measurement example
Printed in Japan 1606IG23IR4-BE
● The contents of this catalog are subject to change without prior notice, and without any subsequent liability to this company. ● It is strictly forbidden to copy the content of this catalog in part or in full.● All brand names, product names and service names in this catalog are trademarks or registered trademarks of their respective companies.
http://www.horiba.com/horiba-stec.Please read the operation manual before using this productto ensure safe and proper handling of the product.
The HORIBA Group adopts IMS (Integrated Management System) which integrates Quality Management System ISO9001, Environmental Management System ISO14001, and Occupational Health and Safety Management System OHSAS18001. We have now integrated Business Continuity Management System ISO22301 in order to provide our products and services in a stable manner, even in emergencies.
Beijing officePHONE: (86)10 85679966 FAX: (86)10 85679066
Shanghai office PHONE: (86)21 62896060 FAX: (86)21 62895553
Shanghai service centerPHONE: (86)21 51317150 FAX: (86)21 51317660
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Shenzhen officePHONE: (86) 13602530661