Fire Safety Compliance - SESHA Fire Safety... · 4 Flame Detectors FM Approved for Use on Wet Benches Sierra DCR1 (UV/IR) Det-Tronics PM-5MPX ... Flame Detector Issues Compliance

Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010

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Fire Safety ComplianceWhy Are My CO2 Systems Not S2 Compliant?

For2010 SESHA Hill Country

By Matt Wyman, Managing Director

KFPI Inc.September 28, 2010


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Overview

1. SEMI S22. Fire Safety Requirements

1. SEMI S2 Chapter 14

3. Non Compliance Findings4. Cause 5. Solution


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KFPI Services Equipment Fire Protection Systems

Carbon Dioxide (CO2) Fine Water Spray (FWS) Aspirating Smoke Detection (ASD) Flame Detection (Multi IR)

Consulting Risk Engineering Analysis & Consulting Equipment Safety Compliance Compliance Audits & Testing Training

IR Thermography Thermal Scans Reports

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KFPI Leadership SEMI© Standards Fire Protection Task Force

Chairman (Past & Present) NFPA 318 Clean Room Fire Protection Committee

Chairman (Past) Factory Mutual (FM Global) Semiconductor Specialist

(Past) Factory Mutual Research Board (FMRC)

Advisory Board Member (Past) Expert Witness on International Fire Loss Litigations Published Numerous Papers in Industry Magazines Presented Numerous Papers in Industry Venues Global Training Seminars

Fabricators, Insurance, & 3rd Party Consultants


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SEMI S2 Compliance Environmental, Health, & Safety Guideline for

Semiconductor Manufacturing Equipment Required by Fabricators Worldwide Categories Include:

Hazard Warning Labels Safety Interlock Systems Emergency Shutdown Electrical Design Fire Protection Heated Chemical Baths Ergonomics and Human Factors Hazardous Energy Isolation Mechanical Design

Seismic Protection Automated Material Handlers Environmental Considerations Exhaust Ventilation Chemicals Ionizing Radiation Non-Ionizing Radiation and Fields Lasers Sound Pressure Level

Fire Protection


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Safety Labels

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Electrical Safety


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Chemical Safety

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Hazardous Energy

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Ergonomics


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Radiation

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Laser

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Environmental Safety


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Emergency Shutdown

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Fire Protection


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Fire Codes International Fire Code (IFC)

Combustibles or Flammables >4ft. Wide Sprinkler Head Inside or Gaseous Fire Suppression

FM DS 7-7 “Semiconductor Fabrication Facilities” Equipment Protection Design Criteria CO2 & FWS 13kW Fire Detection

NFPA 12 “Carbon Dioxide” (FM4-11N) NFPA 750 “Fine Water Spray” NFPA 318 “Protection of Semiconductor Fabrication Facilities” SEMI S14 “Safety Guidelines for Fire Risk Assessment &

Mitigation for Semiconductor Manufacturing Equipment” SEMI S2 “Environmental, Health, & Safety Guideline for

Semiconductor Manufacturing Equipment” Chapter 14 “Fire Protection”


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S2 Compliance Section 14.4.4 Fire Detection, Alarm , & Controls 14.4.4.1&2 All detectors, alarms, and controls be accepted and listed by an

accredited laboratory (example UL or FM) and installed in accordance with the terms of that acceptance and appropriate national or international standards (example NFPA 72).

14.4.4.3 Capable of interfacing with facility’s alarm system 14.4.4.4 Activate alarms audibly and visually at equipment

Note 58 Should be identifiable & distinguishable from other alarms 14.4.4.5 Manual activation should be considered 14.4.4.6 A supervisory/trouble condition should notify operator, allow

completion of existing processing, but prevent additional processing until condition is cleared.

14.4.4.7&8 Capable of operation at all times with 24hr backup batteries 14.4.4.11 Shut down the equipment upon alarm condition (EMO) 14.4.4.12 Capable of being certified by licensed parties


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S2 Compliance Section 14.4.5 Fire Suppression 14.4.5.1 The fire suppression system, which includes nozzles, actuators, and their

associated controls, should be certified by an accredited testing laboratory (e.g., UL or FM) and suitable for the application and for the environment in which it to be used.

14.4.5.2&3 The fire suppression agent and delivery system should be designed and installed in accordance with the appropriate international or national standard (e.g., NFPA 12).

14.4.5.5 Activate alarms audibly and visually at equipment Note 64 Should be identifiable & distinguishable from other alarms

14.4.5.10 Allowance can be made to disable system when in maintenance mode if supervised.

14.4.5.11 Capable of operation at all times with 24hr backup batteries 14.4.5.12 Capable of interfacing with facility’s alarm system 14.4.5.13 Shut down the equipment upon alarm condition (EMO) 14.4.5.14 Manual activation should be provided 14.4.5.15 Should be discharge tested on represented sample of equipment 14.4.5.16 Control access to the suppression agent source. 14.4.5.17 Capable of being certified by licensed parties 15.4.5.19 Piping should be designed, installed, and tested to ensure it is capable of

withstanding discharge pressures.


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CO2 Hazard Design Total Flood (TF) Design

Fully Enclosed Compartments Criteria = 50% CO2 Concentration Time Limit = 60 Seconds Compensate for

Exhaust Ventilation Uncloseable Openings

Local Application (LA) Design Open Compartments

Example = Working Surface Criteria = Minimum Flow Rate Time Limit = Minimum 30 Second Compensate for

Missing Walls Not for Exhaust

Combination Design Both TF & LA

0

10

20

30

40

50

60

0 15 30 45 60

MinimumNot ProtectedProtected

CO2 Concentration Levels


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Non-Compliance Findings

All found on existing CO2 Systems 3rd Party Reviews Site Audits Design Reviews Incident Investigations


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Inadequate Designs

Total Flood (TF) Hazard Exhaust Compensation

Not Included (or Damper) Exhaust Not Distributed

Uncloseable Opening Leakage Wrong Flooding Factors

Local Application (LA) Hazard Assumed Volume Calculations % Perimeter Closed 60-sec Discharge Duration


Assumed Volume (LA)

LocalApplication

Headcase Headcase

Working Surface

Plenum

Front View

Pumps/Heaters

ProcessTank

Side View

TotalFlood

TotalFlood

None

ActualVolume

AssumedVolume

4.0ft.Minimum

Height

Add2.0ft.OpenSides


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Assumed Volume (LA)

4.0ft.Minimum

Height

AssumedVolume

ActualVolume

Example:IPA DRYERLA Design

Add 2.0ft.To Each Side


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CO2 Nozzles LA Nozzles

All have “cone” to absorb discharge pressure

Reflected discharge from orifice Less exit velocity (same flow rate) Nozzle absorbs most 600psi

discharge pressure

TF Nozzles “V” Nozzle is “Vent” nozzle (TF) Straight discharge from orifice Full effects of ~600psi discharge

pressure on tool (especially baths) Much higher velocity


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TF Nozzles Used in LA Hazards Ansul & Hatsuta

FM Approved LA Nozzles for Wet Bench

Stainless Steel (SS) & Halar Coated Kidde & Others (Fenwal, Fike)

No FM Approval for Wet Bench No SS or Halar Coated Models Painted Steel/Brass/Chrome Not

Compatible with Wet Processing

LA Nozzles Installed Heights Above Coverage Chart All LA Nozzles Have Coverage Chart

Nozzle Issues


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Hydraulic Calculations UL/FM Approved Calc Software

Based Upon Liquid Discharge Time Increase Capacity ≠ Increase Concentration

More Agent ≠ Adequate Design Extends Discharge Duration

Inadequate Hydraulic Calculations Supply ≠ Demand Discharge Duration > Demand Manufacturer Specific CO2 Distribution ≠ Installation

See Example 0

10

20

30

40

50

60

0 15 30 45 60

MinimumNot ProtectedProtected


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Hydraulic Calcs

Sample Hydraulic Calc Report (Pipe & Tubing)


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Hydraulic CalculationsWET

BENCHHazard 1

LAHazard 2

TFHazard 3

TFCO2

Supply

CO2 Demand 64.8 lbs 84.2 lbs 13.2 lbs. 200 lbs.

# Nozzles 4 2 1 2 cylinders

H1 = 20.5lbs/42.6sec x 30sec = 14.44 x 4 nozzles= 57.8 lbs

H2 = 51.0lbs/42.7sec x 30sec= 35.8 x 2 nozzles= 71.6 lbs

H3 = 16lbs/42.6sec x 30sec = 11.2 lbs x 1 nozzle= 11.2 lbs

This hydraulic calc is inadequate End of Report is Nozzle Summary

Must Verify Supply = Demand


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CO2 Distribution High Pressure CO2 Cylinders

Stored Pressure = 750psi Nozzle Pressure = ~350psi – 650psi

Must have internal pressure rating of 3,000 psi Must have internal burst pressure rating of 5,000 psi SS Piping is Allowed by Fire Code (NFPA 12 – Section 4.7)

Pipe ≤ ¾ in. = Schedule 40 Pipe ≥ 1 in. = Schedule 80 with Extra Heavy Fittings

Recommend SS Tubing (316) with SS Compression Fittings Minimum Wall Thickness Cleanliness & Contamination

Questions? How Do You Verify Integrity? CO2 Discharge?


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CO2 Distribution Issues Compression Fittings Not

Installed Correctly Compression Fittings

Installed on Pipe vs. Tube ¾” Fitting on ½” Pipe

Calculated with Pipe installed with Tubing ½” Pipe ID > ½” Tube ID ½” Pipe ID ≠ 5/8” Tube ID Friction Coefficient Not Equal

1.0”+ Pipe Installed with Schedule 40 Fittings

Improper Tubing Thickness


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Exhaust Dampers

Exhaust Damper Not Allowed NFPA 318 Section 5.3.5 SEMI S2 Exhaust/Chemical Safety

Solvent Fumes (LEL) Corrosive Fumes

FM DS 7-7 Section 2.5.15.1.2

Exhaust Ventilation Reduces Smoke Damage Exhaust Volume >> Compartment Volume


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Flame (Optical) Detectors

Semiconductor Industry 4 Flame Detectors FM Approved for Use on Wet

Benches Sierra DCR1 (UV/IR) Det-Tronics PM-5MPX (IR) Fire Sentry FS7 (IR) Hatsuta SX-7000 (IR)

Field Of View (FOV) Coverage Affected by Physical Obstructions Coverage Affected by Detector Range

120º FOV


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Flame Detector Issues

Compliance Issues: FOV Obstructed Spacing > 13kW

8” PP Fire 4” IPA Fire

Chemical Compatibility UV ≠ HF Quartz Window

Match Detector with Fuel

ObstructedView

DetectionArea

Detector


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Lockout Valves Lockout Valves (NFPA 12 2005)

Required except where personnel can’t enter space (4.3.3.6) Where CO2 can migrate to expose personnel (4.3.3.6.1) System should “Lockout” during maintenance or testing

(4.3.3.6.3) “Lockout” Valve must be supervised

Lockout Valve Typically Not Required If a Lockout Valve is Installed then….

Pressure Switch installed between Supply and Lockout Valves (4.5.4.11)

A Pressure Relief Valve is Required (4.7.2.4) Operate 2400-3000psi


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Disable/By-Pass Switch (Required but Not Installed) Electrically operated systems should have service disconnect switch

(NFPA 12 – Section 4.3.3.7) Switch must be supervised (by panel)

Electrical Lockout of Discharge Tool Maintenance or System Testing/Inspection

Key Switch – “Lockout”Key Switch – “Normal”

Disable Switch


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Personnel Device Issues Horn/Strobe

Not ADA/NFPA Mounting Heights 80-96” AFF

Adequate Notification for Personnel? All 4 Sides of Tool? Bay/Chase or Fab/Subfab

Manual Release Not ADA/NFPA Mounting Heights

48-52” AFF Mounted Above Fire Hazard

Adequate Travel Distance? Bay/Chase or Fab/Subfab


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Wiring Installation Issues

All Fire Alarm Inputs & Outputs are Supervised EOL Resistors @ Panel (Not EOL) Fault Relays Not Supervised

Flame Detectors Aspirating Smoke Detectors

Cables Not Protected NEC / NFPA

Wire Gauge Too Small NEC / NFPA

EOL Resistor

Panel Input

EOL Resistor

Alarm

Fault

Detector

Panel Input

Device


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Laser Smoke Detector


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Inadequate Battery Calcs Result is < 24hr. Standby & 5min Alarm


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Chemical Compatibility Issues CO2 Components Must Be Chemically Compatible

Nozzles & Detectors

Combustible Plastic Benches Corrosives

Single Wafer Processing Tools Solvents & Corrosives

Nozzles, Tubing, & Fittings Must be Coated & Sealed

Detectors Must be Compatible with Corrosives HF & Quartz are Not Compatible


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Safety Label Issues No CO2 Safety Labels Labels must meet ANSI Z535

Orange “Warning” Color “Warning” Triangle Symbol Aspiration Symbol

Outside Protected Space At Manual Activation SEMI S1 Compliant


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Kidde Issues Kidde “V” (Vent or Velocity) Nozzle is TF Nozzle

Kidde Only Manufactured “V” Nozzle in Brass June 2005 Kidde Released Stainless Steel “V” Nozzle

FM ApprovalGuide


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Imitation (Copy) “V” Nozzles

Result was Imitation Kidde “V” Nozzles Supplied to Industry prior to 2005.

These same Imitation Nozzles Are Still Being Used Today

No Threads

USA VERSION

No Strainer

Installed Backwards

TAIWAN VERSIONREAL KIDDE

Result is S2 Non-Compliance Nozzle CO2 System Tool


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Cause Why Has This Happened? Fire Protection has NOT Been Reviewed as Part of SEMI S2

Report. Fire Protection has NOT Been Reviewed by Site Safety

Personnel (Product Safety). Majority of Equipment CO2 Systems are NOT Reviewed by Fire

Department or Insurance. 99% EHS Professionals Come from EHS, IH, Ergonmics, etc.

Background No Fire Protection Engineering or Fire Safety Background

Fire Protection is a Professional Engineering Discipline Must have 3rd Party Approval & Certification for Compliance

CO2 & FWS Specialized Fire Suppression Application Not Used by Majority of Fire Contractors


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Solution What is the Solution? Verify SEMI S2 Reports Include Fire Protection Verify SEMI S2 Reports are Completed by Qualified Personnel Require Copies of Fire Design Package Documentation

OEM, 3rd Party, Fire Contractor Have Safety Personnel to Review Design & Reports

Property Insurance Carrier Equipment Safety Personnel for Fire Safety Compliance

Verify Insurance Agent Qualified to Review CO2/FWS Systems Provide Training Corporate Level or at Site Level


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Questions Fire Protection Is Not Needed Often…………..

But When It Is…………It Has To Work!

It Also Must Be Reliable………..To Prevent Damage & Downtime!

Matt Wyman, Managing DirectorAdvanced Technologies DivisionSemiconductor, TFT-LCD, & PV

KFPI INC.Koetter Fire Protection International Inc.

USA – TAIWAN – JAPAN - CHINA(1) 972.333.4965 – [email protected]

www.kfpiinc.com

mailto:[email protected]�

Documents

Fire Safety Compliance - SESHA Fire Safety... · 4 Flame Detectors FM Approved for Use on Wet Benches Sierra DCR1 (UV/IR) Det-Tronics PM-5MPX ... Flame Detector Issues Compliance